• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.14 no.7
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• pp.557-561
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• 2001

Chemical mechanical polishing (CMP) process has been widely used to planarize dielectric layers, which can be applied to the integraded circuits for sub-micron technology. Despite the increased use of CMP process, it is difficult to accomplish the global planarization of in the defect-free inter-level dielectrics (ILD). Especially, defects such as micro-scratch lead to severe circuit failure which affect yield. CMP slurries can contain particles exceeding 1㎛ in size, which could cause micro-scratch on the wafer surface. The large particles in these slurries may be caused by particles agglomeration in slurry supply line. To reduce these defects, slurry filtration method has been recommended in oxide CMP. In this work, we have studied the effects of filtration and the defect trend as a function of polished wafer count using various filters in inter-metal dielectrics(IMD)-CMP process. The filter installation in CMP polisher could reduce defects after IMD-CMP process. As a result of micro-scratch formation, it is shown that slurry filter plays an important role in determining consumable pad lifetime. The filter lifetime is dominated by the defects. We have concluded that slurry filter lifetime is fixed by the degree of generating defects.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.14 no.9
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• pp.707-713
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• 2001

As the integrated circuit device shrinks to smaller dimensions, chemical mechanical polishing (CMP) process was requirdfo the global planarization of inter-metal dielectric (IMD) layer with free-defect. However, as the IMD layer gest thinner, micro-scratches are becoming as major defects. However, as the IMD layer gets thinner, micro-scratches are becoming as major defects. Micro-scratches are generated by agglomerated slurry, solidified and attached slurry in pipe line of slurry supply system. To prevent agglomerated slurry particle from inflow, we installed 0.5${\mu}{\textrm}{m}$ point of use (POU) filter, which is depth-type filter and has 80% filtering efficiency for the 1.0${\mu}{\textrm}{m}$ size particle. In this paper, we studied the relationship between defect generation and polished wafer counts to understand the exact efficiency fo the slurry filteration, and to find out the appropriate pad usage. Our experimental results showed that it sis impossible to prevent defect-causing particles perfectly through the depth-type filter. Thus, we suggest that it is necessary to optimize the slurry flow rate, and to install the high spray bar of de-ionized water (DIW) with high pressure, to overcome the weak-point of depth type filter.

• Journal of the Korea Institute of Building Construction
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• v.2 no.3
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• pp.131-138
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• 2002

The objective of the study is to examine the characteristic correlations between reinforcing carbon fiber and interfacial adhesion agent since the interfacial adhesion strength between reinforcing carbon fiber and matrices is believed to be an essential element influencing the physical properties in carbon fiber reinforced cement composite using slurry method. The integrity of interfacial adhesion between reinforcing fiber and cement not only affects the quality of fiber reinforced cement composite but also influences to a large degree the physical properties of the cement composite when producing carbon fiber reinforced cement composite using slurry method. Having analyzed the physical properties 1.e., water content, tensile strength, flexural strength and flexural toughness of carbon fiber reinforced cement composite specimens, C-PAM(cation polyacrylamide) was determined to be an optimum interfacial adhesion agent. The study has also demonstrated that interfacial adhesion strength varies largely on the content and type of the reinforcing fiber. Judging from magnified view of the tensile shear cross-section using VMS(video microscope system), interfacial adhesion strength between reinforcing fiber and matrices is affected by the type of interfacial adhesion agent. According to the result of the experiments, C-PAM was determined to be an ideal interfacial adhesion agent when using carbon fiber in producing carbon fiber reinforced cement composite with the optimum content of carbon fiber being established.

• Journal of Korean Tunnelling and Underground Space Association
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• v.19 no.3
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• pp.463-473
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• 2017

Bentonite swells when it comes into contact with water and makes it a viscous fluid. Thus it is widely used in civil engineering works for waterproofing. Utilizing the properties of bentonite, the slurry shield TBM supports excavated face with pressurized slurry as well as transporting excavated muck. When bentonite is in contact with seawater, due to the change of double layer thickness, its expandability and viscosity are lowered. This may cause problems for excavation stability and muck discharge due to the increase of sea water inflow when Slurry TBM is used under sea water conditions. In this study, the change of slurry condition caused by the inflow of sea water during tunnel excavation with Slurry TBM was investigated and a slurry management guideline was proposed. For this purpose, a laboratory test was carried out based on the slurry management criterions applied in the field, and a method applicable to the field where sea water is affected has been proposed.

• Journal of Advanced Marine Engineering and Technology
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• v.28 no.4
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• pp.618-623
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• 2004

This paper has dealt with the heat storage characteristics of gel type micro size latent heat storage material slurry. The heat release operation to the gel type micro size latent heat storage material slurry was carried out using hot air bubbles by direct contact heat exchange. This experiment was carried out using phase change material of n-paraffin so the heat release amount is higher than cold water system. The parameters of this experiment were concentration of latent heat phase change material, height of heat release bath and inlet velocity of hot air. The main results obtained are as follows : (1) The effect of concentration of latent heat phase change material dispersed with water is very affective to the direct contact heat exchange between hot air and gel type micro size latent heat storage material slurry. (2) It is clarified that the most effective concentration of latent heat phase change material dispersed with water exists around 20mass% at this type of direct heat exchange model experiment.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.14 no.2
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• pp.578-584
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• 2013

Ice slurry that is a mixture of fine ice crystals and liquid water is a widely used working fluid in the ice thermal energy storage system due to its flowability and large latent heat of fusion. Generally ice slurry is made from supercooled water. But the excessive supercooling causes the water to freeze even worse to block the pipe. Additionally large degree of supercooling of water degrades the efficiency of the ice thermal energy storage system. Therefore the effective method to control the phase change from supercooled water to ice slurry is needed. In this paper we experimentally studied a novel method to generate the ice slurry from the supercooled water using the ultrasonic vibration. It was found that the cavitation impact of supercooled water by ultrasonic vibration can help the generation of ice slurry.

• Journal of Korean Society for Atmospheric Environment
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• v.14 no.4
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• pp.273-280
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• 1998

The investigation on the removal of 502 gas fro.In flue gas which causes serious air pollution was made by using a semi dry flue gas desulfurization method. Experiments were carried out as a function of process variables which would affect SO2 removal efficiency. Process variables inclilded SO2 inlet concentration, inlet temperature of simulated flue gas, sorbent weight fraction, and volume flow rate of sorbent slurry. In this study, used sorbent was Ca(OH), and simulated flue gas was prepared by mixing pure SO2 gas with air. Experimental conditions were varied at 140~18$0^{\circ}C$ of inlet temperature of the simulated flue gas, 500~2000ppm of inlet SO2 concentration, 0.4~1.0% of sorbent concentration, and 10~25 mL/min of flow rate of sorbent slurry. Among process variables, inlet concentration of SO2 was found to be the most significant factor to affect SO2 removal efficiency. The concentration of Ca(OH2) had a lower effect on SO2 removal than SO2 inlet concentration removal amount was 0.108, 0.141, 0.153 g SO2/g Ca(OH)2 respectively- As 200 mmol of HNO3 was added into slurry to improve removal efficiency, initial pH was maintained and solubility of slurry increased, so that removal efficiency elevated. Adding over 200 mmol of HNO3 into slurry caused removal efficiency lower. Therefore it could be concluded the optimum was 200 mmol of HNO3 input.

• Journal of the Korean Ceramic Society
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• v.38 no.9
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• pp.860-865
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• 2001

After manufacturing 2mol% CdO substitute $0.05Pb(Mn_{1/3}Sb_{2/3})O_3-0.95Pb(Zr_{0.52}Ti_{0.48})O_3$ piezoelectric ceramics powder as starting material, to manufacture green sheets using Doctor Blade method. The optimum composition of slurry was studied. Moreover, the sintering properties and the dielectric and piezoelectric properties with variation a thickness of the manufactured sheets were investigated. The optimum of slurry was investigated by the rheology with addition of additives, the sintering condition was decided by TGA. And the properties of sheet were investigated through SEM. XRD. The optimum of slurry was the stablest at dispersant 3.0 wt% to solid loading 30vol%. After, at addition of binder/plasticizer(0.75/0.25) 3.0wt%, viscosity was 7.55Pa${\cdot}$s. The dielectric and piezoelectric properties of the sheet were increased a little with the increasing of sintering temperature but were not variable with variation of sheet thickness.

• Proceedings of the International Microelectronics And Packaging Society Conference
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• 2001.11a
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• pp.235-239
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• 2001

In recent years, as Chemical Mechanical Planarization(CMP) has been routinely utilized in integrated circuit(IC) fabrication, the consumption of slurry, main consumable in a CMP process, is greatly increased. Thus the reprocess of CMP slurries has been actively considered in the industry to reduce cost-of-consumable (COC). The main purpose of this study was to recycle the used oxide slurry using filters as a new method. As a result, Ultra Fine(UF) Filter could distinguish silica from the used oxide slurry and Reverse Osmosis(RO) Filter could distinguish Deionized(DI) Water and chemistry from chemistry solution. The tetraethylorthosilicate removal rate was almost the same as the number of recycle polishing was increased, when it was modified by slightly adding new SS-12 slurry. The microscratch didnt found as the number of recycle polishing was increased.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.9 no.2
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• pp.134-143
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• 1997

A theoretical and experimental study has been performed to investigate the characteristics of ice-slurry product. By diffusion-controlled model, the possibility of ice slurry has been theoretically anticipated. The water vapor evaporated from the surface of droplets is extracted continuously from the chamber by a vacuum pump. The droplet diameter was measured by silion immersed method. The ice slurry has been obtained by spraying droplets of ethylene-glycol aqueous solution in the chamber where pressure is maintained under the triple point of water. The droplet of which the diameter is $300{\mu}m$, and the initial temperature is $20^{\circ}C$, was changed into ice particle within the chamber of which the height is 1.33m.