• 전기학회논문지
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• 제56권3호
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• pp.583-587
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• 2007

Corona discharge and ozone generation characteristics of a slit dielectric barrier discharge type wire-plate plasma reactor with a third electrode have been investigated. When a third electrode is installed on a slit of the slit barrier, where an intense corona discharge occurs, it is found that a significantly increased ozone output could be obtained. This, however, indicates that the third electrode can activate the corona discharges both of the discharge wire and the slit of the slit barrier in the plasma reactor. As a result, a thin stainless wire, used as the third electrode has a strong effect to influence the corona discharge of the slit and corona wire, especially to the negative corona discharge. Higher amounts of the output ozone and ozone yield, about 1.27 and 1.29 times for the negative corona discharge, can be obtained with the third electrode, which reveals the effectiveness of the third electrode.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제54권9호
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• pp.421-426
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• 2005

A wire-plate discharge system with a slit barrier has been proposed and investigated experimentally by focusing on the discharges on the slit barrier and ozone generation characteristics. This wire-plate discharge system with a slit barrier can generate an intensive corona discharges, and produce corona discharge twice, once from the corona wire electrode and second time from the surface and the slits of the slit dielectric barrier. As a result this propose wire-plate discharge system with the slit barrier can produce greatly increased ozone than without the slit barrier. This type of wire-plate discharge system with the slit barrier could be used for effective ozone generation as a means with retard to the removal of pollutant gas

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제55권6호
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• pp.323-327
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• 2006

In this paper a new wire-wire discharge system with a slit dielectric harrier has been proposed, and, its corona discharge and ozone generation characteristics have been investigated experimentally. When the slit mica barrier is installed between corona wires, instead of the grounded plate electrode, a significant increase in the generation of ozone, about 2.2 times higher than that of the conventional ones without the slit harrier, could be obtained. Photographs show that this type of discharge system with a slit barrier was found to produce a corona discharge twice, once from the upper and bottom corona wires, and. again from both sides of surfaces and slits of the slit barrier. As a result, the proposed discharge system has the potential to increase significantly ozone production and it may be useful as an effective means for removing pollutant gases.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2012년도 추계학술대회 논문집
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• pp.327-328
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• 2012

• 한국진공학회지
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• 제9권2호
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• pp.162-166
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• 2000

플라즈마 화학증착법(Plasma Enhanced Chemical Vapor Deposition, PECVD)을 이용하여 양질의 $Si_3N_4$ 금속-유전막-금속(Metal-Insulator-Metal, MIM) 커패시터를 구현하였다. 유전체인 $Si_3N_4$와 전극인 Al의 계면반응을 억제시키기 위해 티타늄 나이트라이드(TiN)를 확산 장벽으로 사용한 결과 MIM 커패시터의 전극과 유전체 사이의 계면에서는 어떠한 hillock이나 석출물도 관찰되지 않았다. 커패시턴스와 전류전압 특성분석으로부터 양질의 MIM 커패시터 특성을 보이는 $Si_3N_4$의 최소 두께는 500 $\AA$이며, 그 두께 미만에서는 대부분의 커패시터가 전기적으로 단락되어 웨이퍼 수율이 낮아진다는 사실을 알 수 있었다. 투과전자현미경(transmission Electron Microscope, TEM)을 이용한 단면 미세구조 관찰을 통해 $Si_3N_4$층의 두께가 500 $\AA$ 미만인 커패시터의 경우에 TiN과 $Si_3N_4$의 계면에서 형성되는 슬릿형 공동(slit-like void)01 의해 커패시터의 유전특성이 파괴된다는 사실을 알게 되었으며, 열 유기 잔류 응력(thermally-induced residual stress) 계산에 기초하여 공동의 형성 기구를 규명하였다.