• Journal of the Institute of Electronics Engineers of Korea SD
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• v.43 no.8 s.350
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• pp.1-5
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• 2006

At-wavelength inspection system of extreme Ultra-violet lithography was developed and the inspection results were compared with the optical mask inspection system by cross correlation experiments. In at-wavelength EUV mask inspection system, a raster scan of focused euv light is used to illuminate euv light to mask blank and specularly and non-specularly reflected euv light are detected by photo diode and microchannel plate. The cross correlation results between at-wavelength inspection tool and optical inspection tool shows strong correlation. Far-field scattering fringe pattern from programmed phase and opqque defect, which were detected by phosphor plate and CCD camera shows that distinct diffraction fringes were observed with fringe spacing dependent on the defect size.

• Journal of the Semiconductor & Display Technology
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• v.17 no.1
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• pp.27-34
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• 2018

Industrially, die-casting products are formed through casting, and so the methods to inspect the defects inside them are very restrictive. External inspection methods including visual inspection, sampling judgment, etc. enables researchers to inspect possible external defects, but x-ray inspection equipment has been generally used to inspect internal ones. Recently, they have been also applying three-dimensional internal inspections using CT equipment. However, they have their own limitations in applying to the use of industrial inspection due to limited detection size and long calculation time. To overcome the above problems, this paper has suggested a method to inspect internal defects by comparing the CAD data of the product to be inspected with the 3D data of the CT image. In this paper, we proposed a method for fast and accurate inspection in three dimensions by applying x-ray inspection to find internal defects in industrial parts such as aluminum die casting products. To show the effectiveness of the proposed method, a series of experiments have been carried out.

• Proceedings of the IEEK Conference
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• 2003.07e
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• pp.2335-2338
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• 2003

This paper presents a real-time PCB (Printed Circuit Board) vision inspection system. This system can detect the OPEN and SHORT of the PCB which of the line width is 150$\mu\textrm{m}$. Our PCB inspection system is based on the referential method. Since the size of the captured PCB image is very large, the image is divided into 512${\times}$512 images to apply the accurate alignment efficiently. To correct the misalignment between the reference image and the inspection image, pattern matching is performed. In order to implement the proposed algorithm in real-time, we use the SIMD instruction and the double buffering structures. Our experiential results show the effectiveness of the developed inspection algorithm.

• Journal of Korean Society of Industrial and Systems Engineering
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• v.40 no.2
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• pp.145-149
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• 2017

One of the challenges facing precision manufacturers is the increasing feature complexity of tight tolerance parts. All engineering drawings must account for the size, form, orientation, and location of all features to ensure manufacturability, measurability, and design intent. Geometric controls per ASME Y14.5 are typically applied to specify dimensional tolerances on engineering drawings and define size, form, orientation, and location of features. Many engineering drawings lack the necessary geometric dimensioning and tolerancing to allow for timely and accurate inspection and verification. Plus-minus tolerancing is typically ambiguous and requires extra time by engineering, programming, machining, and inspection functions to debate and agree on a single conclusion. Complex geometry can result in long inspection and verification times and put even the most sophisticated measurement equipment and processes to the test. In addition, design, manufacturing and quality engineers are often frustrated by communication errors over these features. However, an approach called profile tolerancing offers optimal definition of design intent by explicitly defining uniform boundaries around the physical geometry. It is an efficient and effective method for measurement and quality control. There are several advantages for product designers who use position and profile tolerancing instead of linear dimensioning. When design intent is conveyed unambiguously, manufacturers don't have to field multiple question from suppliers as they design and build a process for manufacturing and inspection. Profile tolerancing, when it is applied correctly, provides manufacturing and inspection functions with unambiguously defined tolerancing. Those data are manufacturable and measurable. Customers can see cost and lead time reductions with parts that consistently meet the design intent. Components can function properly-eliminating costly rework, redesign, and missed market opportunities. However a supplier that is poised to embrace profile tolerancing will no doubt run into resistance from those who would prefer the way things have always been done. It is not just internal naysayers, but also suppliers that might fight the change. In addition, the investment for suppliers can be steep in terms of training, equipment, and software.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.18 no.11
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• pp.63-68
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• 2019

The dimensional quality of flexible foams is often difficult to be evaluated through general machine vision inspection methods due to the free deformation of the outer shape. For the evaluation of the dimensions of flexible foams, methods of estimating the size of the product through the expansion rate of the product surface are evaluated. Specimens with various dimensions and surface gratings are prepared, and the degree of surface expansion is measured through machine vision. The correlation, between the measured surface grid size and the actual size of test specimens, is analyzed. We further analyze the correlation between the size of test specimens and the position of the surface grid. This study provides a basis for estimating the actual dimensions of specimens by measuring the surface expansion of flexible foams.

• Journal of international Conference on Electrical Machines and Systems
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• v.2 no.4
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• pp.486-490
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• 2013

A defect which is axially oriented with small size is hard to detect in conventional system. CMFL(Cricumferential Magnetic Flus Leakage) type PIG(Pipelines Inspection Gauge) in the NDT(Nondestructive Testing), is operated to detect this defect called axially oriented cracks in the pipe. It is necessary to decompose the size and shapes of cracks for the manintenance of underground pipelines. This article is focused on the decomposing method of the size and shape of the axially oriented cracks by using inspection signal data for defect.

• Journal of Electrical Engineering and Technology
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• v.9 no.6
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• pp.2218-2223
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• 2014

A crack which is axially oriented with small size is hard to detect in conventional system. CMFL(Circumferential Magnetic Flux Leakage) type PIG(Pipelines Inspection Gauge) in the NDT(Nondestructive Testing), is operated to detect this defect called axially oriented cracks in the pipe. It is necessary to decompose the size and shapes of cracks for the maintenance of underground pipelines. This article is mainly focused on the decomposing method of the size and shape of the axially oriented cracks by using inspection signal data for defect.

• Journal of the Semiconductor & Display Technology
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• v.13 no.1
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• pp.51-55
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• 2014

In this paper, an hybrid automatic focusing method has been proposed for speedy and reliable measurement and inspection in industry. It can improve reliability of focusing position by using not a focusing measure but the hybrid one that is incorporated with sobel operator and auto-correlation. Also, it can not only reduce control time of focusing position using adaptive step size, but also improve accuracy of focusing position by gaussian interpolation. Its performance is verified by experiments. It is expected that it can apply to optical system for measurement and inspection in industry fields.

• Journal of Korea Multimedia Society
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• v.22 no.2
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• pp.117-127
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• 2019

Simultaneous pattern measurement system is new research subject for OLED panel inspection. It is defect inspection of OLED panel after deposition. This research suggests the system that calculates the size and center point of each patterns after obtaining standard and deposition pattern as one image. This system could be applied to OLED manufacturing process. The research result shows that the size and center point of each patterns could be obtained by displaying the standard pattern and deposition pattern in one image.

• Journal of Korean Society for Quality Management
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• v.6 no.1
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• pp.3-13
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• 1978

It is worthwhile to know how the quality inspection is practised to assure the product quality for the export articles, and what problem is resulted from the current quality inspection system for the export articles. The aim of this paper is to survey the status of quality inspection system for the export articles and to design the quality inspection system for the export articles so as to not only solve the problems arising from the current system but also improve the product quality for the export articles. To find out the facts the survey is conducted by sending a prepared questionnaire both to the export industries and to the export quality inspection agencies authorized by the Ministry of Commerce and Industry. The export industries surveyed are selected to provide broad representation with respect to the type of industry as well as to the size of company. The survey shows that about 50 percent of the responding industries desire to discontinue the current quality inspection system for the export articles, and other 50 percent of them desire to continue it until all the export industries can make the best use of quality control techniques.