• 천문학회보
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• 제37권2호
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• pp.210.1-210.1
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• 2012

We report technique used for improved measurement uncertainties for Photon detection efficiency(PDE) of $1mm^2$ single pixel SiPM. It consists of 470nm LED light source, two 2-inch integrating sphere and two NIST calibrated silicon photodiodes that have ${\pm}2.4%$ calibration error. With raytracing simulation of our experimental setup, we predict number of photon into SiPM and measurement uncertainty. For MPPC, Hamamatsu suggested PDE(1600 micro pixel) including crosstalk and afterpulse is 23.5% at 470 nm. By using new low calibration error photodiode and raytracing simulation, our simulation result has ${\pm}3%$ measurement uncertainty. The technical detail of measurement, simulation are presented with the results and implication.

• Tribology and Lubricants
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• 제33권3호
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• pp.92-97
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• 2017

The understanding of the friction characteristics of micro-textured surface is of great importance to enhance the tribological properties of nano- and micro-devices. We fabricate rectangular patterns with submicron-scale structures on a Si wafer surface with various pitches and heights by using a focused ion beam (FIB). In addition, we fabricate tilted rectangular patterns to identify the influence of the tilt angle ($45^{\circ}$ and $135^{\circ}$) on friction behaviour. We perform the friction test using lateral force microscopy (LFM) employing a colloidal probe. We fabricate the colloidal probe by attaching a $10{\pm}1-{\mu}m$-diameter borosilicate glass sphere to a tipless silicon cantilever by using a ultraviolet cure adhesive. The applied normal loads range between 200 nN and 1100 nN and the sliding speed was set to $12{\mu}m/s$. The test results show that the friction behavior varied depending on the pitch, height, and tilt angle of the microstructure. The friction forces were relatively lower for narrower and deeper pitches. The comparison of friction force between the sub-micro-structured surfaces and the original Si surface indicate an improvement of the friction property at a low load range. The current study provides a better understanding of the influence of pitch, height, and tilt angle of the microstructure on their tribological properties, enabling the design of sub-micro- and micro-structured Si surfaces to improve their mechanical durability.

• 한국세라믹학회지
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• 제31권9호
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• pp.989-994
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• 1994

This study aims at finding the closest packings of regular shape particles such as sphere, circle rod and hexagonal rod type. As the ratio of particle size to container lowered to less than 1/10, the wall effect decreased gradually. The tap density of spherical particles with almost orthorhombic arrangement was 59.5%, while those of circle rod and hexagonal rod type particles were 63.5% and 63.0% respectively. And it was decreased with increasing the aspect ratio of regular particles. The tap density of binary mixtures was larger than that corresponding to the monosized particles packing by about 15%. The tap density of ternary mixtures was larger than that of corresponding to the packing of binary mixtures by about 9%. This work employed the binary mixture of 60% coarse particles and 40% fine particles with size ratio of 1.0 to 1/10 and the ternary mixture of 60% coarse particles, 20% medium and 20% fine particles with size ratio of 1:1/10:1/400 respectively.

• 공업화학
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• 제24권3호
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• pp.231-238
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• 2013

본 연구에서 제조한 나노구형체 $TiO_2$는 자외선 차단 효과가 우수하면서도 노폐물 흡착을 하는 기능을 부여하기 위해 Sol-gel 방법으로 합성하였다. 다공성의 특성으로 높은 표면적에 의한 우수한 자외선 차단효과 및 흡착능력을 얻기 위해 pH를 조절하였다. 염기 처리한 $TiO_2$의 경우 가장 우수한 특성을 나타내었다. TGA로 글리세린을 흡착한 결과 1.16 mg의 높은 흡착 결과를 얻을 수 있었다. 또한 UV-A 영역에서 높은 반사율을 가지는 것을 확인하였다. 무기분체의 최적의 분산제를 찾기 위해 ester oil과 silicon oil를 사용하여 입도크기를 측정하였으며 180 nm정도의 입자로 약 6개월간 유지되었다. 이 결과를 통해, UV-A영역에서 우수한 능력을 가진 자외선 차단제로서 노폐물 흡착능력을 가진 $TiO_2$를 제조했으며 이로 인한 다양한 응용이 가능할 것으로 기대된다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.487-487
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• 2013

According to shrinkage of transistor, interface traps have been recognized as a major factor which limits the process development in manufacturing industry. The traps occur through spontaneous generation process, and spread into the forbidden band. There is a large change of current though a few traps are existed at the Si-SiO2 interface. Moreover, the increased temperature largely affects to the leakage current due to the interface trap. For this reason, we made an effort to find out the relationship between temperature and interface trap. The subthreshold swing (SS) was investigated to confirm the correlation. The simulated results show that the sphere of influence of trap is enlarged according to increase in temperature. To investigate the relationship between thermal energy and surface potential, we extracted the average surface potential and thermal energy (kT) according to the temperature. Despite an error rate of 6.5%, change rates of both thermal energy and average surface potential resemble each other in many ways. This allows that SS is affected by the trap within the range of the thermal energy from the surface energy.

• 마이크로전자및패키징학회지
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• 제28권4호
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• pp.79-83
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• 2021

본 연구에서는 기존의 silicon alkoxide(tetraethyl orthosilicate, TEOS)에 비해 단가가 저렴하여 상업화에 유리한 물유리를 전구체로 사용하여 계면활성제의 농도에 따라 형성되는 다양한 크기의 실리카 중공 미세구(hollow silica microsphere, HSM)를 합성하였다. 계면활성제의 농도에 따른 실리카 중공 미세구의 형성에 대한 물성을 퓨리에 분광기(Fourier transform infrared spectrometer), 접촉각 측정기(contact angle measurement), Brunauer-Emmett-Teller 및 Barrett-Joyner-Halenda 분석기와 전계방사형 주사전자현미경(field emission scanning electron microscopy)를 이용하여 분석하였다. 계면활성제를 적정량의 농도로 투입하여 porou s한 물유리 기반 실리카 중공 미세구를 제조할 경우 비표면적은 169 m²/g, 평균 입자 크기 25.3 ㎛ 및 표준편차는 6.25로 우수한 실리카 중공 미세구가 형성됨을 확인하였다.

• 대한기계학회논문집A
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• 제31권9호
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• pp.910-914
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• 2007

We present a simple and an inexpensive method for the fabrication of a nano-fluidic filter and a nano-pore micromixer using self-assembly of nano-spheres and surface tension. Colloid-plug was formed by surface tension of liquid in a microchannel to fabricate nanofluidic filter. When colloid is evaporated, nano-spheres in a colloid are orderly stacked by a capillary force. Orderly stacked nano-spheres form 3-D nano-mesh which can be used as a mesh structure of a fluidic filter. We used silica nano-sphere whose diameter is $567{\pm}85nm$, and silicon micro-channel of $50{\mu}m$-diameter. Fabricated nano-fluidic filter in a micro-channel has median pore diameter of 158nm which was in agreement with expected diameter of the nano-pore of $128{\pm}19nm$. A nano-pore micromixer consists of $200\;{\mu}m-wide,\;100\;{\mu}m-deep$ micro-channel and self-assembled nano-spheres. In the nano-pore micromixer, two different fluids had no sooner met together than two fluids begin to mix at wide region. From the experimental study, we completely apply self-assembly of nano-spheres to nano-fluidic devices.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.454-454
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• 2014

Silicon microwire array is one of the promising platforms as a means for developing highly efficient solar cells thanks to the enhanced light trapping efficiency. Among the various fabrication methods of microstructures, deep reactive ion etching (DRIE) process has been extensively used in fabrication of high aspect ratio microwire arrays. In this presentation, we show precisely controlled Si microwire arrays by tuning the DRIE process conditions. A periodic microdisk arrays were patterned on 4-inch Si wafer (p-type, $1{\sim}10{\Omega}cm$) using photolithography. After developing the pattern, 150-nm-thick Al was deposited and lifted-off to leave Al microdisk arrays on the starting Si wafer. Periodic Al microdisk arrays (diameter of $2{\mu}m$ and periodic distance of $2{\mu}m$) were used as an etch mask. A DRIE process (Tegal 200) is used for anisotropic deep silicon etching at room temperature. During the process, $SF_6$ and $C_4F_8$ gases were used for the etching and surface passivation, respectively. The length and shape of microwire arrays were controlled by etching time and $SF_6/C_4F_8$ ratio. By adjusting $SF_6/C_4F_8$ gas ratio, the shape of Si microwire can be controlled, resulting in the formation of tapered or vertical microwires. After DRIE process, the residual polymer and etching damage on the surface of the microwires were removed using piranha solution ($H_2SO_4:H_2O_2=4:1$) followed by thermal oxidation ($900^{\circ}C$, 40 min). The oxide layer formed through the thermal oxidation was etched by diluted hydrofluoric acid (1 wt% HF). The surface morphology of a Si microwire arrays was characterized by field-emission scanning electron microscopy (FE-SEM, Hitachi S-4800). Optical reflection measurements were performed over 300~1100 nm wavelengths using a UV-Vis/NIR spectrophotometer (Cary 5000, Agilent) in which a 60 mm integrating sphere (Labsphere) is equipped to account for total light (diffuse and specular) reflected from the samples. The total reflection by the microwire arrays sample was reduced from 20 % to 10 % of the incident light over the visible region when the length of the microwire was increased from $10{\mu}m$ to $30{\mu}m$.

• 한국자기학회지
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• 제15권3호
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• pp.202-206
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• 2005

무전해 도금법에 의해 제조된 은 피복 Ni-Zn 페라이트 분말의 전파흡수특성을 조사하였다. 분무건조법 및 소결 고정에 의해 평균입경이 $50{\mu}m$ 정도인 페라이트 구형 분말을 제조하고, 이 분말 위에 은 피막을 무전해 도금법에 의해 코팅하였다. 페라이트 표면에 형성되는 은 피막의 미세조직은 도금욕의 $AgNO_3$의 농도에 따라 민감히 변화하였다. 균일한 은 피막을 얻기 위해 페라이트 분말 20g당 10g/L $AgNO_3$가 필요하였다. 페라이트 분말 표면에 은 피막이 형성됨에 따라 전기저항은 $10^{-2}\~10^{-3}\;\Omega$ 정도까지 감소하였다. 도금 처리되지 않은 순수 페라이트 분말은 400 MHz에서 자기공명을 나타내는 전형적인 자성재료의 특성을 나타내었고, 복소유전율은 실수 항이 35, 허수 항은 거의 0에 가까운 값을 나타내었다. 반면 균일한 은 도금이 이루어진 페라이트 분말은 투자율의 큰 변화 없이 복소유전율 실수항이 35, 허수항이 8 이상으로 매우 크게 증가하였다. 이에 따라 전파흡수체의 두께를 현저히 줄일 수 있었다. 임피던스 정합두께는 C-band대역에서 도금되지 않은 페라이트 분말의 경우 5mm로부터 도금 후 2mm 수준으로 감소하였다.

• 한국광학회지
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• 제35권2호
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• pp.61-70
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• 2024

400 nm부터 1,600 nm까지의 파장 영역에서 단일모드 광섬유에 결합된 12개의 다이오드 레이저 광원를 기반으로 하는 레이저 복사출력계 교정시스템을 소개한다. 본 시스템은 복사출력 측정위치에서 레이저 출력요동을 최소화하였고 모든 광원에 대해 비슷한 빔 크기를 갖는다. 또한 감응도의 비균일도 및 비선형성을 최소화하기 위해 적분구 기준기를 사용하였다. 이 교정시스템의 최소 측정불확도는 대부분의 레이저 파장에서 1.1% (k=2)로 추정된다.