• Proceedings of the Korean Institute of Resources Recycling Conference
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• 2004.05a
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• pp.98-102
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• 2004

반도체 산업용 실리콘 잉곳의 절단공정에서 발생하는 폐슬러지 중에는 고순도의 실리콘이 함유되어 있으며, 이 슬러지로부터 분리, 회수한 Si로부터 실리콘화합물 합성하였다. 고비점의 potasium alkoxide 촉매 존재하에서 금속 실리콘과 에탄을 혹은 메탄올과 같은 알코올과의 고액반응에 의해 알콕시 실란을 합성할 수가 있었다 알콕시 실란을 합성반응속도는 반응온도에 크게 의존하였고 최적반응 온도는 $180^{\circ}C{\sim}195^{\circ}C$ 정도이었다. 촉매 첨가량에 따라 알콕시 실란의 반응율이 달라졌으며, 알콕시 실란의 반응율은 최고 90%로 높은 값을 나타내었다.

• Journal of the Korean Ceramic Society
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• v.28 no.12
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• pp.943-952
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• 1991

Lead zirconate titanate(PZT) powders and thin films were prepared from an alkoxide-based solution by sol-gel method. Gelation of synthesized complex solutions, pyrolysis and crystallization behaviors of the dried powder were studied in accordance with a water content and a catalyst. PZT thin films were formed by spin-casting method on silicon and platinum substrates, and characterized. Ester produced from the reactions was completely removed when drying of the gel was finished. Pyrolysis property of the dried PZT gels were changed in order water content, class of catalyst, and quantity of catalyst. Crystalline Pb phase was transiently formed near 250$^{\circ}C$. Basic catalyst is good additive for a formation of perovskite phase in the films, and acidic catalyst for a densified film structure. By the analysis of RBS, Pb element in the PZT films were diffused into silicon substrate, and the pores, may be produced due to local densification around some grains in the films, make an origin of fault in microstructure when holding time goes to be longer at 700$^{\circ}C$.

• Journal of the Microelectronics and Packaging Society
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• v.28 no.4
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• pp.79-83
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• 2021

In this study, hollow silica microspheres (HSM) of various sizes formed according to the concentration of surfactants using water glass as a precursor, which is advantageous for commercialization due to its lower unit cost compared to conventional silicon alkoxide (tetraethyl orthosilicate, TEOS) was synthesized. The physical properties of the silica hollow microspheres according to the concentration of surfactant were analyzed using Fourier transform infrared, contact angle measurement, Brunauer-Emmett-Teller and Barrett-Joyner-Halenda analyzers and field emission scanning electron microscopy. When porous water glass-based hollow silica spheres were prepared by adding a surfactant at an appropriate concentration, it was confirmed that excellent hollow silica spheres were formed with a specific surface area of 169 m²/g, an average particle size of 25.3 ㎛, and a standard deviation of 6.25.

• Journal of the Korean Society of Safety
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• v.14 no.1
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• pp.101-107
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• 1999

$TiO_2$ and $xTiO_2-ySiO_2$ system photocatalysts were developed by sol-gel method based on the change of production parameters, and their structure of crystallization and the specific surface area was measured. Considering the efficiency of the ethanol decomposition using the catalyst, the conclusion was made as follows: 1) By means of X-ray analysis of $TiO_2$ powder that is obtained from water and Titanium alkoxide with various molar ratios, it is shown that structure of crystallization is a dominating structure and, on the other hand, the crystallization of rutile also partly exists. The specific surface area is at its maximum value at R=6, which is the molar ratio of water vs. alkoxide, whereas its value goes down as the molar ratio increases. In the reaction of using $TiO_2$ catalyst, the ethanol is decomposed into the extent of 15 ~30% in an hour and three hours are necessitated for 70% decomposition. 2) $TiO_2/SiO_2$ powder is developed from Titanium and Silicon alkoxide by a hetero-condensation process. The increase of SiO$_2$ contents causes the decrease of the degree of crystallization of the gel, whereas the specific surface area preferentially increases. In the decomposition reaction of the ethanol, the decomposition efficiency represents 25~60% in an hour. It is, however, examined that the efficiency inactively increases corresponding to the duration of reaction time. It is shown that more than 90% of ethanol is decomposed when reaction time is about three hours and the efficiency illustrates the maximum value for 60-$TiO_2/4O-SiO_2$ catalyst.

• Journal of the Korean Applied Science and Technology
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• v.25 no.2
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• pp.130-136
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• 2008

$xTiO_2$-$ySiO_2$ system photocatalysts were developed by sol-gel method based on the change of production parameters, and their structure of crystallization and the specific surface area were measured. Considering the efficiency of the ethanol and phenol degradation using the catalyst, the conclusions were obtained as follows: By means of X-ray analysis of $xTiO_2$-$ySiO_2$ powder that is obtained from Titanium and Silicon alkoxide by sol-gel process, it is shown that crystal structure of anatase type is a dominating structure and, on the other hand, the structure of rutile also partly exists. The increase of $SiO_2$ contents causes the decrease of the degree of crystallization of the gel, whereas the specific surface area preferentially increases. It is shown that more than 90% of ethanol and phenol are degraded when reaction time is about three and an hours, and the maximum degradation rate of ethanol and phenol is shown in $60TiO_2$-$40SiO_2$ catalyst.

• Journal of the Mineralogical Society of Korea
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• v.20 no.3
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• pp.155-163
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• 2007

A novel route to the synthesis of tetramethoxysilane and other silicon alkoxides is described using siliceous mudstone as the raw material. The reaction of amorphous silica with triethanol-amine is enhanced by using an alkali metal hydroxide catalyst to form a range of triethanol-amnine-substituted silatrane species. These can undergo alkoxide exchange in acidic alcohols to form alkoxysilatranes, tetraalkoxysilanes, hexaalkoxydisiloxanes and higher siloxanes. Products were identified by FT-IR spectroscopy, XRD, SEM, 1H and 13C NMR spectroscopy, or gas chromatography.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.366.1-366.1
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• 2014

The rare-earth oxides M2O3 (M=La, Pr, Gd) are good insulators due to their large band gap (3.9eV for Pr2O3, 5.6eV for Gd2O3), they have high dielectric constants (Gd2O3 K=16, La2O3 K=27, Pr2O3 K=26-30) and, compared to ZrO2 and HfO2, they have higher thermodynamic stability on silicon making them very attractive materials for high-K dielectric applications. Another attractive feature of some rare-earth oxides is their relatively close lattice match to that of silicon, offering the possibility of epitaxial growth and eliminating problems related to grain boundaries in polycrystalline films. Metal-organic chemical vapor deposition (MOCVD) has been preferred to PVD methods because of the possibility of large area deposition, good composition control and excellent conformal step coverage. Herein we report on the synthesis of rare-earth oxide complexes with designed alkoxide and aminoalkoxide ligand. These novel complexes have been characterized by means of FT-IR, elemental analysis, and thermogravimetric analysis (TGA).

• Bulletin of the Korean Chemical Society
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• v.30 no.4
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• pp.869-872
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• 2009

Double-doped magnetic particles that incorporated magnetites into both the surface and inside the silica cores were fabricated via the sol-gel reaction of citrate-stabilized magnetites with silicon alkoxide. Double-doped magnetic particles were easily fabricated and exhibited an higher magnetism in comparison to the singledoped magnetic particles that were prepared by the erosion of surface-deposited magneties from double-doped magentic particles. Thin gold layer was formed over magnetic silica nanospheres via nanoseed-mediated growth of gold clusters. The plasmon-derived absorption bands of double-doped magnetic silica-gold nanoshells were more broadened and shifted down by ca. 20 nm as compared to those of single-doped magnetic silicagold nanoshells, which were attributed to not only the surface scattering of incident light due to relatively rough surafce morphology, but also heterogeneous permittivity of dielectric cores due to surface-deposited magnetites.

• Bulletin of the Korean Chemical Society
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• v.21 no.8
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• pp.817-822
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• 2000

Crack-free hard coating siIica films were prepared by sol-gel processfrom twokinds of silicon alkoxide (tetra-ethoxysilane and methyltrimethoxysilane) and two kinds of alcohol (methanol and isopropyl alcohol) with an acid catalyst,acetic acid. A silicate framework of the precursor solution was investigated by infrared spectros-copy (IR) in the process of hydrolysis and condensation. Theextent of the condensation in the intermediates was elucidated by gel permeation chromatography (GPC) and 29Si-NMR spectroscopy. The hard coating films werecharacterized by IR,scanning electron microscope (SEM), thermo gravimetric analyzer (TGA) and dif-ferential scanning calroimeter (DSC). The synthetic condition for the crack-free and transparent silica film for-mation was optimized interms of starting materials for the precursor solution as well as preparation method of the silica film.

• Journal of the Microelectronics and Packaging Society
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• v.24 no.3
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• pp.13-18
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• 2017

Water glass is much cheaper than silicon alkoxide, so it has advantage for commercialization. A condensation by acid catalyst makes considerable effect about the properties of water glass based silica aerogel among many factors in silica aerogel process. The pore structural properties of water glass based silica aerogel such as specific surface area and pore size distribution have been investigated through the changes in the amount and the kinds of acid catalyst. It has been confirmed that water glass based silica aerogel is affected by various conditions of catalyst in the condensation reaction such as the kind, concentration, and the amount of mole of acid catalyst on the properties of final products. Especially, it is checked that the effect of mole of acid is more prominent than that of concentration. In the case for conventional method with introducing 4M HCl in condensation step, the silica aerogel could be synthesized which has $394m^2/g$ of specific surface area, 2.20 cc/g of pore volume, 22.3 nm of average pore size, and 92.53% of porosity. On the other hand, when 4M sulfuric acid was used with 73 mmol at the condensation step of water glass based silica aerogel, the pore structural characteristics of water based silica aerogel showed better properties than the case of using HCl, for example, specific surface area was measured as $516m^2/g$, and pore volume, average pore diameter, and porosity were obtained as 3.10 cc/g, 24.1 nm, and 96.1%, respectively.