• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.07a
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• pp.573-576
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• 2000

The physical, electrical and piezoresitive characteristics of CrN(chromium nitride) thin-films on silicon substrates have been investigated for use as strain gauges. The thin-film depositions have been carried out by DC reactive magnetron sputtering in an argon-nitrogen atmosphere(Ar-(5∼25 %)Na$_2$). The deposited CrN thin-films with thickness of 3577${\AA}$ and annealing conditions(300$^{\circ}C$, 48 hr) in Ar-10 % N$_2$deposition atmosphere have been selected as the ideal piezoresistive material for the strain gauges. Under optimum conditions, the CrN thin-films for the strain gauges is obtained a high electrical resistivity, $\rho$=1147.65 ${\mu}$$\Omega$cm, a low temperature coefficient of resistance, TCR=-186 ppm/$^{\circ}C$ and a high temporal stability with a good longitudinal gauge factor, GF=11.17.

• Tribology and Lubricants
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• v.16 no.2
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• pp.121-125
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• 2000

Silicon nitride ceramic has been verified as an excellent rolling bearing material because of its high strength and outstanding rolling fatigue life properties. However under some corrosive circumstances it showed drawbacks such as hardness reduction and severe wear caused by corrosion. In this work, the variations of the rolling wear and hardness of three kinds of ceramics were studied for the specimen aged 15 days in alkali water (90 $\pm$ 2$\^{C}$,25 wt% NaOH ). All of the specimens, ① Si$_3$N$_4$, ② 3Y-TZP and ③ 3Y-TZP alloyed with 5 wt% CeO$_2$, were sintered and post-HIPed, and then polished up to 0.02 $\mu$mRa of surface roughness. Rolling wear tests were conducted by MJ type rolling fatigue life tester under the initial theoretical maximum contact stress of 3.16 GPa and the spindle speed of 1,000 rpm. Spindle oil was used as a lubricant. The specimens were not worn before aging. For the specimen aged in alkali water, Si$_3$N$_4$ and 3Y-TZP were worn by rolling wear tests, and hardness was decreased. While aging the specimens, the phase was transformed from tetragonal to monoclinic in 3Y-TZP and the microstructure change occurred in Si$_2$N$_4$. 3Y-TZP specimens alloyed with 5 wt% CeO$_2$ were not worn after aging and no phase transformation occurred while aging.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 1999.11a
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• pp.154-159
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• 1999

Silicon nitride ceramic has been verified as an excellent rolling bearing material because of its high strength and outstanding rolling fatigue life properties. However under some corrosive circumstances it showed drawbacks such as hardness reduction and severe wear caused by corrosion. In this work, the variations of the rolling wear and hardness of three kinds of ceramics were studied for the specimen aged 15 days in alkali water (90$\pm$2$^{\circ}C$, 25 wt% NaOH). All of the specimens, \circled1Si$_3$N$_4$, \circled23Y-TZP and \circled33Y-TZP alloyed with 5 wt% CeO$_2$, were sintered and post-Hipped, and then polished up to 0.02 ${\mu}{\textrm}{m}$Ra of surface roughness. Rolling wear tests were conducted by MJ type rolling fatigue life tester under the initial theoretical maximum contact stress or 3.76 Gra and the spindle speed of 1,000 rpm. Spindle oil was used as a lubricant. The specimens were not worn before aging. For the specimen aged in alkali water, Si$_3$N$_4$and 3Y-TZP were worn by rolling wear tests, and hardness was decreased. While aging the specimens, the phase was transformed from tetragonal to monoclinic in 3Y-TZP and the microstructure change occurred in Si$_3$N$_4$. 3Y-TZP alloyed with 5 wt% CeO$_2$specimens were not worn after aging and no phase transformation occurred while aging.

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.11a
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• pp.63-63
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• 2003

The nanotopography of silicon wafers has emerged as an important factor in the STI process since it affects the post-CMP thickness deviation (OTD) of dielectric films. Ceria slurry with surfactant is widely applied to STI-CMP as it offers high oxide-to-nitride removal selectivity. Aiming to control the nanotopography impact through ceria slurry characteristics, we examhed the effect of surfactant concentration and abrasive size on the nanotopography impact. The ceria slurries for this study were produced with cerium carbonate as the starting material. Four kinds of slurry with different size of abrasives were prepared through a mechanical treatment The averaged abrasive size for each slurry varied from 70 nm to 290 nm. An anionic organic surfactant was added with the concentration from 0 to 0.8 wt %. We prepared commercial 8 inch silicon wafers. Oxide Shu were deposited using the plasma-enhanced tetra-ethyl-ortho-silicate (PETEOS) method, The films on wafers were polished on a Strasbaugh 6EC. Film thickness before and after CMP was measured with a spectroscopic ellipsometer, ES4G (SOPRA). The nanotopogrphy height of the wafer was measured with an optical interferometer, NanoMapper (ADE Phase Shift)

• The Korean Journal of Rheology
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• v.2 no.1
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• pp.67-78
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• 1990

세라믹 분말의 사출성형성을 평가하기 위하여 다양한 혼합체 시스템에 대한 혼합도 와 유변학적 성질을 질화규소 미세분말의 부피비를 변화시키면서 조사하였다. 열가소성 결 합체 시스템은 폴리에틸린 폴리에틸렌 왁스 그리고 미소량의 첨가제를 혼합하여 사용하였 다. 혼합성능을 평가하기 위하여 비분산혼합에서는 총접촉면적비를 그리고 분산혼합에서는 총파괴표면적비를 혼합척도로서 사용하여 정성적으로 모형화하였다. 사용된 혼합기내의 유 동장을 해석하기 위하여 뉴우톤유체를 가정하여 유동해석을 수행하였다. 혼합물의 혼합도는 각각 5분 30분 동안 혼합된 시편을 주사전자현미경 사진에 의해 관찰하여 평가하였다. 또한 혼합물의 사출성형성 그리고 혼합질 점도 토우크 곡선 사이의 관계를 규명하기 위하여 전단 변형를 속도를 따른 점도를 모세관 점도계를 사용하여 측정하였으며 질화규소의 부피비가 60%일 때까지는 만족할 만한 성형성과 혼합질을 가짐을 알 수 있었다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1992.11a
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• pp.97-101
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• 1992

Cordierite glass ceramic has become an electronic substrate material for electronic circuits and the use of whiskers for improving strength and toughness is evident. Green sheets of mixtures containing 15% silicon nitride were sintered to greater than 99 % density. The microstructure was analysed using optical microscopy, scanning electron microscopy (SEM), and X-ray diffraction (XRD). The toughness and hardness were improved with increasing the whisker vol. % and sintering temperature. Especially, it is assumed that toughening increasing at the more high sintering temperature relevants to the glass phase increasing, as showned in the roughness of the fracture surfaces. It was directionally dependent of whisker direction during processing.

• Journal of Advanced Marine Engineering and Technology
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• v.22 no.6
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• pp.800-808
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• 1998

In this study the thermal stress distribution and deformantion characteristics resulting from the nonuniform temperature fields of the cylinder block of a light 3-cylinder 4-stroke gasoline engine were analyzed using the 3-dimensional finite element method. The temperature distributions req-uisite for the thermoelastic behavior alalysis were obtained from the steady-state heat conduction analysis performed on the basis of experimental data. in order to examine the effect of a ceramic material the cylinder liner was replaced by the silicon nitride($Si_{3}N_{4}$) and its thermal behaviors were compared with those of the original block.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.2 no.4
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• pp.25-32
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• 2003

In this study, the grinding characteristics of CBN wheels, such as grinding force and surface roughness, have been compared and analyzed from various working conditions of spindle speed and depth of cut. To actualize high efficient grinding at ceramic and silicon nitride material, electrolytic in-process dressing (ELID) method has been applied at metal bonded diamond and CBN wheels. Super precision grinding using ductile mode at difficult-ta-cut materials could be performed.

• Journal of the Korean Ceramic Society
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• v.24 no.5
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• pp.453-460
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• 1987

β'-sialon(Z=2.7) specimens with <30%wt. graphite as a reducing agent were decomposed at 1350°up to 1,450℃ under the atmosphere of 90% N2-10%H2. The decomposition of β'-sialon was calculated from the change in Z-value, and the formation of new minerals was identified from X-ray diffraction patterns. The decomposition reactions of sialon were considered to yield a stable sialon close to β-silicon nitride and some aluminum compounds according to the following equations; β'-sialon(s)＋C(s)＋N2(g)→β2-sialon(metastable)＋β3-sialon(stalbe phase) β2-sialon(s)＋C(s)＋N2(g)→β3-sialon(s)＋AlN(s)＋α-Al2O3(s)＋15R(s)＋SiO(g)＋Al2O(g)＋CO(g) Z-value; β2( 3.5)>β'( 2.7)>β3( 0.5) The decomposition rate of sialon was controlled by two mechanisms ; One was characterized by the interface area of contact, corresponding to an apparent activation energy of 50.5Kcal/mol in the initial stage, and the other by the diffusion, corresponding to that of 104.3Kcal/mol in the final stage of the decomposition.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.20 no.2
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• pp.520-528
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• 1996

Four point bending tests of the brazed joint composed of sintered silicon nitride and 0.2% carbon steel with Cusil ABA filler which were fabricated at 86$0^{\circ}C$ were performed at temperatures, 25, 100, 200, 300, 400, 50$0^{\circ}C$ From the experiments, the maximum bending strength was measured at 30$0^{\circ}C$ From the 3D FE analysis of the residual stress of the brazed joint, it was revealed that the thermally induced residual stresses were minimized when the environmental temperature was 35$0^{\circ}C$ Considering the degradation of the filler material at high temperatures, it was calculated that the maximum bending strength of the brazed joint occured just below the temperature of the minimum thermal residual stress and the thermal residual stress was the dominative parameter of the brazed joint.