• Title/Summary/Keyword: Silica-on-silicon

Search Result 127, Processing Time 0.02 seconds

Growth of Vertically Aligned Carbon Nanotubes on Co-Ni Alloy Metal (Co-Ni 합금위에서 수직방향으로 정렬된 탄소나노튜브의 성장)

  • Ryu, Jae-Eun;Lee, Cheol-Jin;Lee, Tae-Jae;Son, Gyeong-Hui;Sin, Dong-Hyeok
    • The Transactions of the Korean Institute of Electrical Engineers C
    • /
    • v.49 no.8
    • /
    • pp.451-454
    • /
    • 2000
  • We have grown vertically aligned carbon nanotubes in a large area of Co-Ni codeposited Si substrates by the thermal CVD usign $C_2H_2$ gas. Since the discovery of carbon nanotubes, growth of carbon nanotubes has been achieved by several methods such as laser vaporization, arc discharge, and pyrolysis. In particular, growth of vertically aligned nanotubes is important to flat panel display applications. Recently, vertically aligned carbon nanotubes have been grown on glass by PECVD. Aligned carbon nanotubes can be also grown on mesoporous silica and Fe patterned porous silicon using CVD. In this paper, we demonstrate that carbon nanotubes can be vertically aligned on catalyzed Si substrate when the domain density of catalytic particles reaches a certain value. We suggest that steric hindrance between nanotubes at an initial stage of the growth forces nanotubes to align vertically and each nonotubes are grown in bundle.

  • PDF

Variation of the Si-induced Gap State by the N defect at the Si/SiO2 Interface

  • Kim, Gyu-Hyeong;Jeong, Seok-Min
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2016.02a
    • /
    • pp.128.1-128.1
    • /
    • 2016
  • Nitrided-metal gates on the high-${\kappa}$ dielectric material are widely studied because of their use for sub-20nm semiconductor devices and the academic interest for the evanescent states at the Si/insulator interface. Issues in these systems with the Si substrate are the electron mobility degradation and the reliability problems caused from N defects that permeates between the Si and the $SiO_2$ buffer layer interface from the nitrided-gate during the gate deposition process. Previous studies proposed the N defect structures with the gap states at the Si band gap region. However, recent experimental data shows the possibility of the most stable structure without any N defect state between the bulk Si valence band maximum (VBM) and conduction band minimum (CBM). In this talk, we present a new type of the N defect structure and the electronic structure of the proposed structure by using the first-principles calculation. We find that the pair structure of N atoms at the $Si/SiO_2$ interface has the lowest energy among the structures considered. In the electronic structure, the N pair changes the eigenvalue of the silicon-induced gap state (SIGS) that is spatially localized at the interface and energetically located just above the bulk VBM. With increase of the number of N defects, the SIGS gradually disappears in the bulk Si gap region, as a result, the system gap is increased by the N defect. We find that the SIGS shift with the N defect mainly originates from the change of the kinetic energy part of the eigenstate by the reduction of the SIGS modulation for the incorporated N defect.

  • PDF

Preparation of Ultrafine Silica Particle by Pyrolysis in the Gas Phase (기상열분해법에 의한 초미립 실리카분말 제조)

  • Jang, Hee Dong;Yoon, Ho Sung
    • Applied Chemistry for Engineering
    • /
    • v.8 no.6
    • /
    • pp.901-906
    • /
    • 1997
  • Ultrafine silicon dioxide($SiO_2$) powder was prepared from tetraethylorthosilicate(TEOS) by the gas-phase reaction. The effects of reaction temperature, flow rate of gas, TEOS concentration, and preheating temperature of reactants on the particle size were investigated. As the reaction temperature increased, average particle size of the silicone dioxide powder became smaller. Smaller particles were also obtained with decreasing the residence time of reactants in the reaction zone. Larger particles having narrow size distribution were produced with the high concentrations of the reactants. The effect of the preheating temperature was not considerable on the average particle size. The range of average particle size was from 30 nm to 58 nm depending on experimental conditions.

  • PDF

Simulation of the Growth of Non-Spherical Particles in a Counterflow Diffusion Flame (대향류 확산 화염 중에서 비구형 입자 성장에 관한 해석)

  • Jeong, Jae In;Hwang, Jun Young;Lee, Bang Weon;Choi, Mansoo;Chung, Suk Ho
    • Transactions of the Korean Society of Mechanical Engineers B
    • /
    • v.23 no.8
    • /
    • pp.997-1009
    • /
    • 1999
  • Silica particle formation and growth process including chemical reaction, coagulation and sintering was studied in a counterflow diffusion flame burner. The counterflow geometry provides a one dimensional flow field, along the stagnation point streamline, which greatly simplifies interpretation of the particle growth characteristics. $SiCl_4$ has been used as the source of silicon in hydrogen/oxygen/argon flames. The temperature profiles obtained by calculation showed a good agreement with experiment data. Using one and two dimensional sectional method, aerosol dynamics equation in a flame was solved, and these two results were compared. The two dimensional section method can consider sintering effect and growth of primary particle during synthesis, thus it showed evolution of morphology of non-spherical particles (aggregates) using surface fractal dimension. The effects of flame temperature and chemical loading on particle dynamics were studied. Geometric mean diameter based on surface area and total number concentration followed the trend of experiment results, especially, the change of diameters showed the sintering effect in high temperature environment.

Retrieval of Dust Backscatter Coefficient using Quartz Raman Channel in Lidar Measurements (석영 라만 채널을 이용한 황사 후방 산란 계수 산출)

  • Noh, Young-Min;Mueller, Detlef;Lee, Han-Lim
    • Journal of Korean Society for Atmospheric Environment
    • /
    • v.28 no.1
    • /
    • pp.86-93
    • /
    • 2012
  • We present a retrieval method to obtain dust backscatter coefficient from the mixed Asian dust and pollutant layer. In the present study, vertically resolved quartz (silicon dioxide, silica) concentration was calculated using Raman scattering signals from quartz at 546 nm. Dust concentration was obtained based on typical mass percentage of quartz in Asian dust. The highest value of dust concentration at 3.7 km in March 21, 2010 was 22.3 and 10.9 ${\mu}gm^{-3}$ according to the quartz percentage in Asian dust as 65 and 30% based on literature survey, respectively. OPAC (Optical Properties of Aerosol and Clouds) simulations were conducted to calculate dust backscatter coefficient. The retrieved dust concentration was used as an input parameter for the OPAC calculations. Utilization of quartz Raman channel in Lidar measurements is considered useful for distinguishing optical properties of dust and nondust aerosol in the mixing state of Asian dust.

A Study on the Mechanical Properties of Al-8.6% Si-3.6% Cu Alloy Cast in Plaster Mold (석고주조(石膏鑄造)한 Al-8.6% Si-3.6% Cu 합금(合金)의 기계적(機械的) 성질(性質)에 관(關)한 연구(硏究))

  • Yeo, In-Dong;Kim, Dong-Ok;Kang, In-Chan
    • Journal of Korea Foundry Society
    • /
    • v.4 no.4
    • /
    • pp.5-13
    • /
    • 1984
  • This paper is presented for showing the effect of cooling rate on dendrite arm spacing, correlated with the chilling power of molding materials (conventional plaster, foamed plaster, silica sand) and section thickness, and also showing relationship between dendrite arm spacing and mechanical properties for an aluminum - 8.6 percent silicon - 3.6 percent copper alloy. Local solidification time $(t_f)$ and secondary dendrite arm spacing (d) could be varied widely in accordance with the molding materials and casting thickness, and the following relationship is obtained: $d=9.4t_f\;^{0.31}$ A good correlation between dendrite arm spacing and mechanical properties such as ultimate tensile strength, yield strength, hardness was found, that is, mechanical properties decreased in a linear manner with increase in log of secondary dendrite arm spacing. Ultimate tensile strength in conventional plaster mold casting decreased by 15 percent comparing with the sand casting, where as in foamed plaster mold casting, it decreased by 30 percent comparing with the sand casting. From those results, it has been verified that DAS might be the most representative parameter for predicting mechanical properties varing with the different cooling condition.

  • PDF

NITROGEN DOPED DIAMOND LIKE CARBON FILM SYNTHESIZED BY MICROWAVE PLASMA CVD

  • Urao, Ryoichi;Hayatsu, Osamu;Satoh, Toshihiro;Yokota, Hitoshi
    • Journal of the Korean institute of surface engineering
    • /
    • v.29 no.5
    • /
    • pp.549-555
    • /
    • 1996
  • Diamond Like Carbon film is amorphous film which is considered to consist of three coordinate graphite structure and tetrahedron coordinate diamond structure. Its hardness, thermal conductivity and chemical stability are nearly to one of diamond. It is well known to become semi-conductor by doping of inpurity. In this study Diamond Like Carbon film was synthesized by Microwave Plasma CVD in the gas mixture of hydrogen-methan-nitrogen and doped of nitrogen on the single-crystal silicon or silica glass. The temperature of substrate and nitrogen concentration in the gas mixture had an effect on the bonding state, structural properties and conduction mechanism. The surface morphology was observed by Scanning Electron Microscope. The strucure was analyzed by laser Raman spectrometry. The bonding state was evaluated by electron spectroscopy. Diamond Like Carbon film synthesized was amorphous carbon containing the $sp^2$ and $sp^3$ carbon cluster. The number of $sp^2$ bonding increased as nitrogen concentration increased from 0 to 40 vol% in the feed gas at 1233K substrate temperature and at $7.4\times10^3$ Pa. Increase of nitrogen concentration made Diamond Like Carbon to be amorphous and the doze of nitragen could be controlled by nitrogen concentration of feed gas.

  • PDF

A Retrieval of Vertically-Resolved Asian Dust Concentration from Quartz Channel Measurements of Raman Lidar (라만 라이다의 석영 채널을 이용한 고도별 황사 농도 산출)

  • Noh, Young-Min;Lee, Kwon-Ho;Lee, Han-Lim
    • Journal of Korean Society for Atmospheric Environment
    • /
    • v.27 no.3
    • /
    • pp.326-336
    • /
    • 2011
  • The Light Detection and Ranging (Lidar) observation provides a specific knowledge of the temporal and vertical distribution and the optical properties of the aerosols. Unlike typical Mie scattering Lidars, which can measure backscattering and depolarization, the Raman Lidar can measure the quartz signal at the ultra violet (360 nm) and the visible (546 nm) wavelengths. In this work, we developed a method for estimating mineral quartz concentration immersed in Asian dust using Raman scattering of quartz (silicon dioxide, silica). During the Asian dust period of March 15, 16, and 21 in 2010, Raman lidar measurements detected the presence of quartz, and successfully showed the vertical profile of the dust concentrations. The satellite observations such as the Moderate Resolution Imaging Spectroradiometer (MODIS) and the Cloud-Aerosol Lidar and Infrared Pathfinder Satellite Observations (CALIPSO) confirmed spatial distribution of Asian dust. This approach will be useful for characterizing the quartz dominated in the atmospheric aerosols and the investigations of mineral dust. It will be especially applicable for distinguishing the dust and non-dust aerosols in studies on the mixing state of Asian aerosols. Additionally, the presented method combined with satellite observations is enable qualitative and quantitative monitoring for Asian dust.

Effect of inlet structure of filtration system on the removal characteristics of iron particles by ceramic candle filters (집진장치의 유입구조에 따른 세라믹필터의 철입자 제거특성에 미치는 영향)

  • Park, Young-Ok;Jeong, Ju-Yeong;Seo, Yong-Chil
    • Particle and aerosol research
    • /
    • v.5 no.4
    • /
    • pp.189-197
    • /
    • 2009
  • Wet-type particulate removal system is employed in most of ironmaking processes. These de-dusting systems require additional downstream aggregates for treatment of water and for drying of the collected slurry. Thus dried slurry can be pressed in shape of briquettes and recycled in the steelmaking process. Different from the wet-type, the dry-type particulate removal systems generate no slurry. A high-temperature, high-pressure de-dusting system with inertial inlet was developed. The target application of this system was to remove particulate matter generated from the novel ironmaking process and other steelmaking processes. In this study we conducted tests with this newly developed system to evaluate the performance of the silica-carbide (SiC) ceramic filters. In addition, for purpose of comparison, we also conducted tests with a unit which has conventional direct inlet. Fe-Particles collected from the novel ironmaking process were used in our tests as test dusts. The temperature and the pressure were kept constant at their respective values $800^{\circ}C$ and $3kg_f/cm^2$.

  • PDF

Effect of Si on the High Temperature Oxidation of TiAl Alloys (Si 첨가가 TiAl 합금의 내산화성에 미치는 영향)

  • 김성훈;김승언;최송천;이동복
    • Journal of the Korean institute of surface engineering
    • /
    • v.33 no.1
    • /
    • pp.3-9
    • /
    • 2000
  • Arc-melted alloys of TiAl-(o.25, 0.5, 1.0at%) Si were isothermally oxidized at 800, 900 and $1000^{\circ}C$ in air for 60hr. It was found that the oxidation resistance of the prepared TiAl-Si alloys was much better than that of pure TiAl, being progressively increasing with an increase in the Si content. This was attributed to the formation of $SiO_2$in addition to ($TiO_2$+$Al_2$$O_3$) oxides which formed in TiAl alloys with and without silicon additions. However, the silica formation within the oxide layer unfortunately accelerated the oxide scale spallations. During oxidation, all the elements in the base alloy diffused outward, whereas oxygen from the atmosphere diffused inward. The oxides were primarily composed of an outer thick $TiO_2$layer, an intermediate diffuse $Al_2$$O_3$layer and an inner $TiO_2$layer. A small amount of $SiO_2$was present all over the oxide scale and some voids were found around the intermediate layer.

  • PDF