• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.07a
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• pp.50-53
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• 2003

CMP (chemical mechanical polishing) process remained to solve several problems in deep sub-micron integrated circuit manufacturing process. especially consumables (polishing pad, backing film, slurry, pad conditioner), one of the most important components in the CMP system is the slurry. Among the composition of slurries (buffer solution, bulk solution, abrasive particle, oxidizer, inhibitor, suspension, antifoaming agent, dispersion agent), the abrasive particles are important in determining polish rate and planarization ability of a CMP process. However, the cost of abrasives is still very high. So, in order to reduce the high COO (cost of ownership) and COC (cost of consumables) in this paper, we have collected the silica abrasive powders by filtering after subsequent CMP process for the purpose of abrasive particle recycling. And then, we have studied the possibility of recycle of reused silica abrasive through the analysis of particle size and hardness. Also, we annealed the collected abrasive powders to promote the mechanical strength of reduced abrasion force. Finally, we compared the CMP characteristics between self-developed KOH-based silica abrasive slurry and original slurry. As our experimental results, we obtained the comparable removal rate and good planarity with commercial products. Consequently, we can expect the saving of high cost slurry.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.5 no.6
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• pp.558-561
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• 2004

The morphology of silica supported $MoO_{3}$ catalysts, which was prepared by impregnation of ammonium heptamolybdate(AHM) with various surface loadings up to 4 atoms $Mo/nm^{2}$, was studied using x-ray diffraction(XRD). All morphologies of silica supported $MoO_{3}$ appear to be thermodynamically driven. For high loaded catalysts there appeared three states: a sintered and well-dispersed hexagonal state at moderate temperature calcination($300^{\circ}C$), and a sintered orthorhombic state at high temperature calcination($500^{\circ}C$). Whereas the sintered orthorhombic phase is detected by XRD at loadings in excess of 1.1 atom $Mo/nm^{2}$, the well-dispersed hexagonal phase is not detected even until 4.0 $atomsMo/nm^{2}$. The higher apparent dispersion of the hexagonal phase may arise from some role of ammonia which results in a stronger $MoO_{3}-SiO_{2}$ surface interaction.

• Elastomers and Composites
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• v.44 no.1
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• pp.22-33
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• 2009

Recently, elastomer-nanocomposites reinforced with low volume fraction of nanofillers have attracted great interest due to their fascinating properties. The incorporation of nanofillers, such as, layered silicate clays, carbon nanotubes, nanofibers, calcium carbonate, metal oxides or silica nanoparticles into elastomers improves significantly their mechanical, thermal, dynamic mechanical, barrier properties, flame retardancy, etc. The properties of nanocomposites depend greatly on the chemistry of polymer matrices, nature of nanofillers, and the method in which they are prepared. The uniform dispersion of nanofillers in elastomer matrices is a general prerequisite for achieving desired mechanical and physical characteristics. In this paper, current developments in the field of elastomer nanocomposites reinforced with layered silicates, silica, carbon nanotubes, nanofibers and various other nanoparticles have been addressed.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.05c
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• pp.145-148
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• 2003

Recently, the recycle of CMP (chemical mechanical polishing) slurries have been positively considered in order to reduce the high COO (cost of ownership) and COC (cost of consumables) in CMP process. Among the composition of slurries (buffer solution, bulk solution, abrasive particle, oxidizer, inhibitor, suspension, antifoaming agent, dispersion agent), the abrasive particles are one of the most important components. Especially, the abrasive particles of slurry are needed in order to achieve a good removal rate. However, the cost of abrasives, is still very high. In this paper, we have collected the silica abrasive powders by filtering after subsequent CMP process for the purpose of abrasive particle recycling. And then, we have studied the possibility of recycle of reused silica abrasive through the analysis of particle size and hardness. Also, we annealed the collected abrasive powders to promote the mechanical strength of reduced abrasion force. Finally, we compared the CMP characteristics between self-developed KOH-based silica abrasive slurry and original slury, As our experimental results, we obtained the comparable removal rate and good planarity with commercial products. Consequently, we can expect the saving of high cost slurry.

• Elastomers and Composites
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• v.40 no.1
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• pp.29-36
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• 2005

Mixing condition and procedure affect properties or a filled rubber compound such as filler dispersion, viscosity, and bound rubber formation. Influence of separate load of styrene-butadiene rubber (SBR) and acrylonitrile-butadiene rubber (NBR) on properties or silica-filled SBR compounds containing NBR was studied. Cure time and cure rate became faster as NBR content increased. The crosslink density increased with increase in the NBR content. The bound rubber content also increased as the NBR content increased. NBR content of the bound rubber was higher than that of the compounded rubber. The bound rubber content was higher when SBR and NBR were loaded separately than when loading simultaneously. The cure time and cure rate were slower for the separate load than for the simultaneous one. The crosslink density was also lower for the former case than for the latter one.

• Elastomers and Composites
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• v.37 no.4
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• pp.258-264
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• 2002

In this work, the influence of thermal treatment on surface properties of silicas and mechanical interfacial properties of silicas/polyurethane composites was investigated. The surface properties of thermally treated silicas were studied in the context of Fourier Transform-IR (FT-IR), solid-state 29Si NMR spectroscopy, and contact angle. And the mechanical interfacial properties of the silica/polyurethane composites were evaluated by composite tearing energy (GIIIC). As a result, it was found that the thermally treated silica surfaces became hydrophobic in nature, due to the condensation of surface hydroxyls and the formation of siloxane bonds, resulting in increasing the London dispersive component of surface free energy. From which, the increase of the London dispersive component of the silicas led to an improvement of the dispersion of silicas in a polyurethane matrix, finally resulting in improving the tearing energy (GIIIC) of the silicas/polyurethane composites.

• Journal of the Korea Institute of Building Construction
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• v.24 no.1
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• pp.23-34
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• 2024

This research aims to assess the flexural bonding efficacy of polymer-cement composites(PCCs) in mending cracks within reinforced concrete(RC) structures. The study involved infilling PCCs into cement mortar cracks of varying dimensions, followed by evaluations of enhancements in flexural adhesion and strength. The findings indicate that the flexural bond performance of PCCs in crack repair is influenced by the cement type, polymer dispersion, and the polymer-to-binder ratio. Specifically, the use of ultra-high early strength cement combined with silica fume resulted in an up to 19.0% improvement in flexural bond strength compared to the application of ordinary Portland cement with silica fume. It was observed that the augmentation in flexural strength of cement mortar filled with PCCs was significantly more dependent on the depth of the crack rather than the width. Furthermore, PCCs not only acted as repair agents but also as reinforcement materials, enhancing the flexural strength to a certain extent. Consequently, this study concludes that PCCs formulated with ultra-high early strength cement, various polymer dispersions, silica fume, and a high polymer-to-binder ratio ranging from 60% to 80% are highly effective as maintenance materials for crack filling in practical settings.

• Polymer(Korea)
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• v.30 no.6
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• pp.498-504
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• 2006

A suspension polymerization of styrene In aqueous phase was employed to study if polystyrene particles ranging from 1 to $20{\mu}m$ can be produced. Hydrophobic silica was selected as a stabilizer and azo-bisisobutyronitrile (AIBN) as an initiator. Polymerization reaction was carried out at a selected temperature in the range of $65{\sim}95^{\circ}C$. Stabilizer concentration was varied from 0.17 to 3.33 wt% compared to the water while the concentration of the initiator was raised from 0.13 to 6.0 wt% compared to the monomer. Dispersion of hydrophobic silica into the water phase was achieved by precise control of pH. Optimum dispersion of silica was obtained at pH 10. Average particle diameter decreased with increasing amounts of stabilizer concentration initially, exhibiting the minimum average diameter at 1.67 wt% of stabilizer concentration, after which it started to Increase. It is speculated that an excessive presence of stabilizer encouraged a secondary reaction in the reaction medium, which led to particle agglomeration, and as a result an increase in average particle diameter. Molecular weight was found to be independent of stabilizer concentration between 0.13 and 1.00 wt% whereas, it increased when stabilizer concentration exceeded 1.67 wt%. Variation of molecular weight was probably caused by the reduced activity and efficiency of initiator due to the high concentration of silica, and the secondary reaction in the reaction medium, as well. An increase in the Initiator concentration and/or reaction temperature resulted in an increase in both reaction rate and particle diameter. Consequently, we have confirmed that spherical polystyrene particles with $1{\sim}20{\mu}m$ in diameter can be prepared by careful selection of the concentration of stabilizer, initiator, pH and reaction temperature.

• Journal of the Korean Geotechnical Society
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• v.20 no.3
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• pp.5-11
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• 2004

Characteristics of advective-diffusive transport of inorganic chemicals in clayey soils as well as in two hardened barrier materials of silica and lime are analyzed from the laboratory column test and compared with those of pure diffusive column test. The results show that the average dispersion coefficients of three materials are $4.39\times l0^{-10}\textrm{m}^2 /s,\; 1.98\times l0^{-10}\textrm{m}^2 /s,\; 1.99\times l0^{-10}\textrm{m}^2 /s$, respectively, and the value of clay is higher than that of hardened barrier materials. There was no significant difference between the dispersion coefficients of advective-diffusive column tests and the effective diffusion coefficients from the pure diffusive column tests, if advective velocity was lower than l0$^{-7}$$m^2$/s. The range of dispersion coefficients of advective-diffusive column tests was narrower than that of diffusion coefficients of pure diffusion tests.

• Korean Journal of Veterinary Research
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• v.37 no.1
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• pp.195-202
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• 1997

A method for the isolation by matrix solid phase dispersion method and liquid chromatographic determination of enrofloxacin and ciprofloxacin in pork muscle tissue is presented. Blank or enrofloxacin and ciprofloxacin spiked samples(0.5g) containing 0.05g oxalic acid were blended with $C_{18}$(octadecylsilyl derivatized silica) packing material. After homogenization, $C_{18}$/muscle tissue matrix was transferred to glass column made from 10ml glass syringe and filter paper, and compressed to 4~4.5ml volume. A column was washed with 8ml of hexane and dried under vacuum. Interfering materials were removed by ethylacetate 8ml and dried, following which enrofloxacin and ciprofloxacin were eluted with 8ml of methanal under gravity. The eluate containing enrofloxacin and ciprofloxacin wase free from interfering compound when analysed by HPLC with UV detection at 278nm. Enrofloxacin and ciprofloxacin showed linear response with UV detector at the range of $0.05{\sim}1.0{\mu}g/ml$ and eluted within 5ml elution volume of methanol from the matrix. Fortified sample containing 0.05g oxalic acid represented more good recoveries than that of control sample. Average percentages of enrofloxacin and ciprofloxacin were $93.30{\pm}4.56%$ and $91.84{\pm}4.17%$, respectively, for the concentration range(0.05, 0.1, 0.25, 0.5 and $0.75{\mu}g/g$). The interassay variability of enrofloxacin was $6.02{\pm}5.33%$ with an intra-assay variability of 4.89% and $6.75{\pm}2.68%$ with 4.54% for ciprofloxacin. Detection limit of enrofloxacin and ciprofloxacin was $0.030{\mu}g/g$ in the spiked sample.