• Journal of the Semiconductor & Display Technology
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• v.18 no.1
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• pp.5-9
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• 2019

Optical emission spectroscopy is used to identify chemical species and monitor the changes of process results during the plasma process. However, plasma process monitoring or fault detection by using emission signal variation monitoring is vulnerable to background signal fluctuations. IR heaters are used in semiconductor manufacturing chambers where high temperature uniformity and fast response are required. During the process, the IR lamp output fluctuates to maintain a stable process temperature. This IR signal fluctuation reacts as a background signal fluctuation to the spectrometer. In this research, we evaluate the effect of infrared background signal fluctuation on plasma process monitoring and improve the plasma process monitoring accuracy by using simple infrared background signal subtraction method. The effect of infrared background signal fluctuation on plasma process monitoring was evaluated on $SiO_2$ PECVD process. Comparing the $SiO_2$ film thickness and the measured emission line intensity from the by-product molecules, the effect of infrared background signal on plasma process monitoring and the necessity of background signal subtraction method were confirmed.

• Journal of Applied Reliability
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• v.18 no.2
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• pp.153-160
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• 2018

Purpose: A traffic signal controller needs to control and coordinate to ensure that traffic and pedestrians move as smoothly as possible. Since a traffic signal controller has a significant impact on the safety of vehicles and pedestrians, it is important to monitor the failure and deterioration of the traffic signal controller. The purpose of this paper is to propose an IoT (Internet of Things)-based monitoring system for a traffic signal controller. Methods: Every traffic signal controller has a nominal system trajectory specified when it is deployed. The proposed IoT-based monitoring system collects the system trajectory information through real-time monitoring. By comparing the nominal system trajectory and the monitored system trajectory, we are able to detect the failure and deterioration of the traffic signal controller. Conclusion: The proposed IoT-based monitoring system can contribute to the safety of vehicles and pedestrians by maximizing the availability of a traffic signal controller.

• Transactions of Materials Processing
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• v.18 no.2
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• pp.144-149
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• 2009

Recently, the monitoring technology of machining process is very important to improve productivity and quality in manufacturing filed. Such monitoring technology has been performed to measurement using vibration signal, acoustic emission signal and tool dynamometer. However, micro machining is limited small-scale parts machining because micro tool is very small and weakness to generate signal in micro machining process. Therefore, this study has efficient sensing technology for real monitoring system in micro machine that is proposed to supplement a disadvantage of single-sensor by multi sensor. From experimental result, it was evaluated tool wear and cutting situation according to repetitive slot cutting condition and changing cutting condition, and it was performed monitoring spindle rpm and condition according to compare acceleration signal with current signal.

• Journal of the Korean Institute of Plant Engineering
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• v.23 no.4
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• pp.21-27
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• 2018

This paper proposed the real-time monitoring methodology of a traffic signal controller. The proposed methodology is based on the simulation technology, and it is necessary to construct a simulation model imitating the behavior of a traffic signal controller. By executing the simulation model, we can obtain the 'nominal system trajectory' of the traffic signal controller. On the other hand, an IoT(Internet of Things)-based monitoring device is implemented in a traffic signal controller. Through the monitoring device, it is possible to obtain the 'actual system trajectory'. By comparing the nominal system trajectory and the actual system trajectory, we can estimate the degree of deterioration of a traffic signal controller.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 1998.03a
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• pp.30-34
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• 1998

In-process monitoring of cutting conditions and tool wear is important for improving productivity. This paper is concerned with on-line monitoring of tool wear and cutting force in end milling operation. The experimental study deals with the relations between flank wear and cutting force signal. Tool wear is detected by monitoring of cutting signal. A monitoring procedure is shown in this paper. The influence of flank wear on cutting signal activity was examined. The results are presented in the form of graphs. The analysis of the cutting signal and flank wear curves provides useful indicators of unacceptable wear development in the tool.

• Tunnel and Underground Space
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• v.30 no.1
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• pp.1-14
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• 2020

Microseismic monitoring is utilized for the performance verification and safety management of the structure by detecting fine levels of damage. In order to construct a highly reliable microseismic monitoring system, the role of signal conditioner is critical. The signal conditioner helps with accurate data collection and precision control of the device, and performs additional functions such as signal conversion, linearization, and amplification. In this technical report, noise reduction signal conditioner suitable for mining sites was developed and reviewed for the purpose of implementing more precise monitoring by supplementing the previously developed microseismic monitoring system.

• ETRI Journal
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• v.30 no.3
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• pp.461-468
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• 2008

This paper presents a chromatic dispersion monitoring technique using a clock-frequency component for carrier-suppressed return-to-zero (CSRZ) signal. The clock-frequency component is extracted by a clock-extraction (CE) process. To discover which CE methods are most efficient for dispersion monitoring, we evaluate the monitoring performance of each extracted clock signal. We also evaluate the monitoring ability to detect the optimum amount of dispersion compensation when optical nonlinearity exists, since it is more important in nonlinear transmission systems. We demonstrate efficient CE methods of CSRZ signal to monitor chromatic dispersion for optimum compensation in high-speed optical communication systems.

• Journal of the Institute of Convergence Signal Processing
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• v.11 no.3
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• pp.197-202
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• 2010

In this paper, multi-channel vital signal monitoring system was implemented for home healthcare. The system able to measure vital signal for example ECG, PPG and temperature simultaneously at patients’ home. The vital signal is an essential parameter for healthcare application and can be easily extracted from patients. The implemented system consist of sensor parts for signal extraction, signal amplifier and filter for analog circuit, analog signal to digital conversion for controlling devices and lastly the monitoring program. The system able to transmit vital signals using Bluetooth wireless communications to personal computer or home server. And the tele-monitoring system able to display real-time signals using web monitoring program. In medical application, the vital signal parameter able to stored and saved in the web server for further medical analysis. This system opens up the possibilities of ubiquitous healthcare where further implementation can be easily done.

• Journal of Biomedical Engineering Research
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• v.16 no.3
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• pp.317-324
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• 1995

A need exists for the accurate identification of time series models having time varying parameters, as is important in the case of real time identification of nonstationary EMG signal. Thls paper describes real time identification and muscle fatigue monitoring method of nonstationary EMG signal. The method is composed of the efficient identifier which estimates the autoregressive parameters of nonstationary EMG signal model, and its real time implementation by using T805 parallel processing computer. The method is verified through experiment with real EMG signals which are obtained from surface electrode. As a result, the proposed method provides a new approach for real time Implementation of muscle fatigue monitoring and the execution time is 0.894ms/sample for 1024Hz EMG signal.

• International Journal of Internet, Broadcasting and Communication
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• v.11 no.2
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• pp.27-30
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• 2019

Factory monitoring systems are gaining importance in wide areas of industry. Especially, there have been many efforts in implementation of vibration measurement and analysis for monitoring the status of rotating machines. In this paper, a digital signal processor (DSP) based monitoring system dedicated to the vibration monitoring and analysis on rotating machines is discussed. Vibration signals are acquired and processed for the continuous monitoring of the machine status. Time domain signals and fast Fourier transform (FFT) are used for vibration analysis. All of the signal processing procedures are done in the DSP to reduce the production and maintenance cost. The developed system could also provide remote and mobile monitoring capabilities to operator via internet connection. This paper describes the overview of the functional blocks of the implemented system. Test results based on signals from small-size single phase motors are discussed for monitoring and defect diagnosis of the machine status.