• 제목/요약/키워드: SiOC(-H)

검색결과 123건 처리시간 0.027초

원자층증착법에 의한 $TiO_2$ 나노파우더 표면의 실리콘 산화물 박막 증착 (Atomic Layer Deposition of Silicon Oxide Thin Film on $TiO_2$ nanopowders)

  • 김희규;김혁종;강인구;김도형;최병호;정상진;김민완
    • 한국신재생에너지학회:학술대회논문집
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    • 한국신재생에너지학회 2009년도 추계학술대회 논문집
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    • pp.381-381
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    • 2009
  • 염료감응형 태양전지의 효율 향상을 위한 다양한 방법들 중 $TiO_2$ 나노 파우더의 표면 개질 및 페이스트의 분산성 향상을 위한 연구가 활발하게 진행되고 있다. 기존 나노 파우더의 표면 개질법으로는 액상 공정인 졸겔법이 있으나 표면 처리 공정에서의 응집현상은 아직 해결해야 할 과제 중 하나이다. 이에 본 연구에서는 진공증착방법인 ALD법을 이용하여 염료감응형 태양전지용 $TiO_2$ 나노 파우더의 $SiO_2$ 산화물 표면처리를 통한 분산특성을 파악하였다. 기존 ALD법의 경우 reactor의 온도가 $300{\sim}500^{\circ}C$ 정도의 고온에서 공정이 이루어졌지만 본 실험에서는 2차 아민계촉매(pyridine)을 사용하여 reactor의 온도를 $30^{\circ}C$정도의 저온공정에서 $SiO_2$ 산화물을 코팅을 하였다. MO source로는 액체상태의 TEOS$(Si(OC_2H_5)_4)$를, 반응가스로는 $H_2O$를 사용하였고, 불활성 기체인 Ar 가스는 purge 가스로 각각 사용 하였다. ALD 공정에 의해 표면처리 된 $TiO_2$ 나노 파우더의 분산특성은 각 공정 cycle에 따라 FESEM을 통하여 입자의 형상 및 분산성을 확인하였으며 입도 분석기를 통하여 부피의 변화 및 분산 특성을 확인하였다. 공정 cycle 이 증가함에 따라 입자간의 응집현상이 개선되는 것을 확인 할 수 있었으며, 100cycles에서 응집현상이 가장 많이 감소하는 것을 확인할 수 있었다. 또한 표면 처리된 $SiO_2$ 산화막은 XRD를 통한 결정 분석 및 EDX를 통한 정성 분석을 통하여 확인하였다.

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Silica-Pillared H-kenyaites: Interlamellar Base Catalyzed-Reaction of Tetraethlorthosilicate in Water Suspension

  • 권오윤;최상원
    • Bulletin of the Korean Chemical Society
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    • 제20권1호
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    • pp.69-75
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    • 1999
  • The silica-pillared H-kenyaites were prepared by interlarmellar base-catalyzed reaction of tetraethylorthosilicate [TEOS, Si(OC2H5)4] intercalated into the interlayer of H-kenyaite. The intercalation of TEOS was conducted by the octylamine preswelling process, resulting in a dramatic increase in gallery height to 24.7 Å. The interlamellar hydrolysis of octylamine-TEOS/H-kenyaite paste were conducted between 10 min and 40 min in 0.00%, 0.05% and 0.10% NH3-water solution respectively, and resulting in siloxane-pillared H-kenyajte with gallery height of 28.2-31.8 Å. The calcination of samples at 538 ℃ resulted in silica-pillared H-kenyaites with a large surface areas between 411 m2/g and 885 m2/g, depending on the aging time and NH3 concentration. Samples with optimum specific surface areas and well ordered-basal spacing were obtained by reaction between 10 min and 40 min in pure water and 0.05% NH3-water solution. Mesoporous samples with narrow pore size distribution were also prepared by reaction for 10-40 min in 0.05% NH3 solution. Rapid interlamellar reaction of TEOS in pure water showed that intercalated octylamine itself could act as a base catalyst during interlamellar polycondensation of TEOS.

대기 중 PM2.5의 오염기여도 추정 및 PAHs 농도비를 이용한 연소 오염원 확인 (Sources Apportionment Estimation of Ambient PM2.5 and Identification of Combustion Sources by Using Concentration Ratios of PAHs)

  • 김도균;이태정;김성천;김동술
    • 한국대기환경학회지
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    • 제28권5호
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    • pp.538-555
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    • 2012
  • The purpose of this study was to understand $PM_{2.5}$ chemical characteristics on the Suwon/Yongin area and further to quantitatively estimate $PM_{2.5}$ source contributions. The $PM_{2.5}$ sampling was carried out by a high-volume air sampler at the Kyung Hee University-Global Campus from November, 2010 to October, 2011. The 40 chemical species were then analyzed by using ICP-AES(Ag, Ba, Cr, Cu, Fe, Mn, Ni, Pb, Si, Ti, V and Zn), IC ($Na^+$, $K^+$, $NH_4{^+}$, $Mg^{2+}$, $Ca^{2+}$, $NO_3{^-}$, ${SO_4}^{2-}$ and $Cl^-$), DRI/OGC (OC1, OC2, OC3, OC4, OP, EC1, EC2 and EC3) and GC-FID (acenaphthene, fluorene, phenanthrene, anthracene, fluoranthene, pyrene, benzo[a]anthracene, benzo[b]fluoranthene, benzo[a] pyrene, indeno[1,2,3-cd] pyrene, benzo[g,h,i]perylene and dibenzo[a,h,]anthracene). When applying PMF model after performing proper data treatment, a total of 10 sources was identified and their contributions were quantitatively estimated. The average contribution to $PM_{2.5}$ emitted from each source was determined as follows; 26.3% from secondary aerosol source, 15.5% from soil and road dust emission, 15.3% from vehicle emission, 15.3% from illegal biomass burning, 12.2% from incineration, 7.2% from oil combustion source, 4.9% from industrial related source, and finally 3.2% from coal combustion source. In this study we used the ratios of PAHs concentration as markers to double check whether the sources were reasonably classified or not. Finally we provided basic information on the major $PM_{2.5}$ sources in order to improve the air quality in the study area.

Aminopropyl-Terminated Polydimethylsiloxane과 Trichlorogermyl 곁가지 그룹을 갖는 Polyamide 블록공중합체의 합성, 구조분석 및 열적거동 (Synthesis, Structural Characterization and Thermal Behaviour of Block Copolymers of Aminopropyl-Terminated Polydimethylsiloxane and Polyamide Having Trichlorogermyl Pendant Group)

  • Gill, Rohama;Mazhar, M.;Mahboob, Sumera;Siddiq, Muhammad
    • 폴리머
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    • 제32권3호
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    • pp.239-245
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    • 2008
  • Block copolymers of the general formula $[(-CO-R'-CO-HN-Ar-NH-CO-R'-CO)_xNH(CH_2)_3-(Me_2SiO)_y(CH_2)_3NH_2]_n$, [n=18.00 to 1175.0] where $R'=CH_2CH(CH_2GeCl_3)$;$CH_2CHGeCl_3CH_2$; and $Ar=-C_6H_4$;$-(o.CH_3C_6H_4)_2$;$-o.CH_3OC_6H_4)_2$;$-(o.CH_3C_6H_4)$ were prepared by a polycondensation reaction of polyamide containing a pendant trichlorogermyl group and terminal acid chloride $Cl(-CO-R'-CO-NH-Ar-NH-CO-R'-CO-)_xCl$ with aminopropyl-terminated polydimethylsiloxane $H_2N(CH_2)_3(Me_2SiO)_y-(CH_2)_3NH_2]$, (PDMS). These polymers were characterized by elemental analysis, $T_g$, FT-IR, $^1H$-NMR, solid state $^{13}C$-NMR, and molecular weight determination. The thermal stability of these copolymers was examined using thermal analysis techniques, such as TGA and DSC. Their molecular weights as determined by laser light scattering technique ranged $5.13{\times}10^5$ to $331{\times}10^5\;g/mol$. These polymers display their $T_g$ in the range of 337 to $393^{\circ}C$ with an average decomposition temperature at $582^{\circ}C$.

차세대용 저유전막 PECVD 장비 개발과 박막 특성 평가 (Development of low-k dielectric PECVD system for next generation and characterization of its films)

  • 김대희;김대현;박소연;이도형;서화일;김영철
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2009년도 하계학술대회 논문집
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    • pp.148-148
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    • 2009
  • 반도체 소자의 크기가 45 nm 이하로 감소함에 따라 최소 선폭에 따른 다층 배선 연결 구조가 요구되고 있다. 그러나 고집적화 구조는 기생 저항과 정전 용량에 의한 신호지연증가 및 혼선 전력 소모의 문제가 발생한다. 이런 문제를 해결하기 위한 방법 중의 하나는 저저항 배선연결물질과 층간 절연막으로 저유전 상수를 갖는 물질을 사용하는 것이다. 본 연구는 DEMS $(H-Si(CH_3)(OC_2H_5)_2)$ 전구체를 이용하여 저유전막을 증착할 때 사용되는 PECVD (plasma enhanced chemical vapor deposition) 장비를 국내 기술로 개발하고 개발된 장비로 저유전박막을 평가한 것에 관한 것이다. 본 연구에서 평가 및 박막 종확 시 사용한 장비는 MAHA hp 1 type ((주)아토)로서 양산용 PECVD 장비이다. 변수는 C-He의 유랑, 300 mm Si 웨이퍼와 shower head 사이의 거리, 증착 압력, 구동 전력이고, 증착된 저유전막의 두께, 두께의 균일성, 굴절률, 굴절률의 균일성를 평가하였다. 구동 전력이 500W 일 때, C-He의 유량과 진공의 크기를 감소시키면 박막의 두께가 감소하고 박막의 균일성은 증가하였다. C-He의 유량을 증가시키고 shower head 와 Si 웨이퍼 사이의 거리 및 구동 압력을 감소시키면 굴절률과 굴절률의 균일성이 모두 저하되었다. 구동 전력이 700W 일 때, 박막 두께의 경우, 구동 전력이 500W 일 때의 결과와 유사하지만, 박막의 균일성, 굴절률, 굴절률의 균일성은 모든 조건에서 저하되었다.

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Improved Carrier Tunneling and Recombination in Tandem Solar Cell with p-type Nanocrystalline Si Intermediate Layer

  • Park, Jinjoo;Kim, Sangho;Phong, Pham duy;Lee, Sunwha;Yi, Junsin
    • Current Photovoltaic Research
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    • 제8권1호
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    • pp.6-11
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    • 2020
  • The power conversion efficiency (PCE) of a two-terminal tandem solar cell depends upon the tunnel-recombination junction (TRJ) between the top and bottom sub-cells. An optimized TRJ in a tandem cell helps improve its open-circuit voltage (Voc), short-circuit current density (Jsc), fill factor (FF), and efficiency (PCE). One of the parameters that affect the TRJ is the buffer layer thickness. Therefore, we investigated various TRJs by varying the thickness of the buffer or intermediate layer (TRJ-buffer) in between the highly doped p-type and n-type layers of the TRJ. The TRJ-buffer layer was p-type nc-Si:H, with a doping of 0.06%, an activation energy (Ea) of 43 meV, an optical gap (Eg) of 2.04 eV, and its thickness was varied from 0 nm to 125 nm. The tandem solar cells we investigated were a combination of a heterojunction with intrinsic thin layer (HIT) bottom sub-cell and an a-Si:H (amorphous silicon) top sub-cell. The initial cell efficiency without the TRJ buffer was 7.65% while with an optimized buffer layer, its efficiency improved to 11.74%, i.e., an improvement in efficiency by a factor of 1.53.

Luteolin inhibits H2O2-induced cellular senescence via modulation of SIRT1 and p53

  • Zhu, Ri Zhe;Li, Bing Si;Gao, Shang Shang;Seo, Jae Ho;Choi, Byung-Min
    • The Korean Journal of Physiology and Pharmacology
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    • 제25권4호
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    • pp.297-305
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    • 2021
  • Luteolin, a sort of flavonoid, has been reported to be involved in neuroprotective function via suppression of neuroinflammation. In this study, we investigated the protective effect of luteolin against oxidative stress-induced cellular senescence and its molecular mechanism using hydrogen peroxide (H2O2)-induced cellular senescence model in House Ear Institute-Organ of Corti 1 cells (HEI-OC1). Our results showed that luteolin attenuated senescent phenotypes including alterations of morphology, cell proliferation, senescence-associated 𝛽-galactosidase expression, DNA damage, as well as related molecules expression such as p53 and p21 in the oxidant challenged model. Interestingly, we found that luteolin induces expression of sirtuin 1 in dose- and time-dependent manners and it has protective role against H2O2-induced cellular senescence by upregulation of sirtuin 1 (SIRT1). In contrast, the inhibitory effect of luteolin on cellular senescence under oxidative stress was abolished by silencing of SIRT1. This study indicates that luteolin effectively protects against oxidative stress-induced cellular senescence through p53 and SIRT1. These results suggest that luteolin possesses therapeutic potentials against age-related hearing loss that are induced by oxidative stress.

Characterization of Metakaolinite with Multiple Quantum MAS NMR

  • Han, Oc-Hee;Stefan Steuernagel
    • 한국자기공명학회논문지
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    • 제4권1호
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    • pp.12-18
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    • 2000
  • Metakaolinite produced by thermal transformation from kaolinite was studied by 27Al multiple quantum magic angel spinning (MQMAS) NMR technique in addition to 1-dimensional 27Al and 29Si MAS NMR. Our results confirm that 4-, 5-, 6- coordinated aluminum sites co-exit with some distribution of isotropic chemical shifts. This is consistent with amorphous character of metakaolinite observed with X-ray diffraction. In addition, characterization with MQMAS is briefly discussed in comparison with other NMR techniques to identify different aluminum sites especially when peaks are severely overlapped in 1-dimensional 27Al MAS NMR spectra.

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솔-젤법에 의한 CuCl 미세결정이 분산된 비선형 광학유리의 제조 및 광특성 (Preparation and Opticaa Properties of CuCl Nanocrystallites Dispersed Nonlinear Optical Glass by Sol-Gel Process)

  • 송석표;한원택;김병호
    • 한국세라믹학회지
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    • 제34권9호
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    • pp.941-948
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    • 1997
  • CuCl nanocrystallites dispersed nonlinear optical silica and borosilicate glasses were fabricated by sol-gel process. CuCl powder was dissolved in TEOS(Si(OC2H5)4) and TMB((CH3O)3B), precursors of silica and borosilicate glasses, with ethanol, water and HCl, and precipitated through the heat treatment in the matrix glass. The optical properties of CuCl doped glasses were measured using the spectrophotometer at room temperature and low temperature(77K); Z1, 2 and Z3 exciton peaks from the absorption spectra, were observed at about 370 nm and 380 nm, respectively. The average radius of nanocrystallites, calculated from the blue shift of Z3 excitons, was measured according to annealing temperature and time. The precipitation temperature of CuCl nanocrystallites was decreased when boron was added to silica glass. Increase of annealing temperature and time made average radius of nanocrystallites saturated about 2 nm.

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졸-겔법에 의한 $Nb_2O_5$ 유전박막의 형성 및 박막의 결정상과 유전특성의 분석 (Formation of $Nb_2O_5$ Thin Films by Sol-Gel Technique and Analysis of Their Crystalline Phases and Dielectric Characteristics)

  • 조남희;강희복;이전국;김윤호
    • 한국세라믹학회지
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    • 제30권1호
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    • pp.17-24
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    • 1993
  • Sol-gel spin-coating technique was used to produce Nb2O5 thin films on silicon substrates from Nb(OC2H5)5 precursor. The films were heat-treated at temperatures between $600^{\circ}C$ and 100$0^{\circ}C$ in oxygen atmosphere and their crystalline phases, chemical states, and dielectric characteristics were investigated by X-ray diffractometry (XRD), Auger electron spectroscopy (AES), and C-V measurements, respectively. After 1 hour heat-treatment at 80$0^{\circ}C$, T-type Nb2O5 was formed, and its chemical composition was homogeneous with no appreciable SiO2 oxide at interfaces between the films and substrates. The films heat-treated at temperatures between $600^{\circ}C$ and 80$0^{\circ}C$ exhibit dielectric constant of less than 20 while the films heat treated at 100$0^{\circ}C$ show dielectric constant of 28.

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