• 마이크로전자및패키징학회지
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• 제4권2호
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• pp.55-62
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• 1997

P2O3-PbO-SiO2-Al2O3계 조성을 이용하여 저온에서 소결이 가증하며 열팽창계수와 유전율이 낮은 회로기판용 glass ceramics를 제조하고자 하였다. 155$0^{\circ}C$에서 2시간 동안 용 융하여 제조한 모유리의열팽창 거동을 확인하기 위하여 TMA로 열분석을 실시하였으며 이 유리를 분말화하여 80$0^{\circ}C$에서 열처리 하였다. 이때 cristobalite 형성억제제로 Ga2O3를 사용 하였으며 Ga2O3 첨가량에 따른 억제 영향을 XRD를 통행 확인하였다. Ga2O3를 첨가한 유리 분말로 pellet을 제조하여 열처리를 하였고 소결시편의 표면을 SEM을 통해 관찰하였다. 열 처리한 pellet에 silver paste를 screen printing하여 유전율을 측정하였으며 조성에 따른 유 전율의 변화를 확인하였다.

• 한국결정성장학회:학술대회논문집
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• 한국결정성장학회 2000년도 Proceedings of 2000 International Nano Crystals/Ceramics Forum and International Symposium on Intermaterials
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• pp.1-33
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• 2000

Silicon carbide ceramics with sintering additives from the system AlN-Y$_2$O$_3$ can be gas-pressure sintered to theoretical density. While commonly a combination of sesquioxides is used such as Al$_2$O$_3$-Y$_2$O$_3$, the oxynitrid additives offer the advantage that only a nitrogen atmosphere is require instead of a powder. By starting form a mixture of ${\beta}$-SiC and ${\alpha}$-SiC, and by performing dedicated heat treatments after densification, anisotropic grain growth is obtained which leads to a platelet microstructure showing enhance fracture toughness. In the present work, recent improvement of the mechanical behaviour of these materials at ambient and high temperatures is reported. By means of a surface oxidation treatment in air it is possible to obtain four-point bending strengths in excess of 1 GPa, and the strength retention at high temperatures is significantly improved.

• 한국결정성장학회지
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• 제6권2호
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• pp.238-246
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• 1996

$\beta$-SiC와 AIN의 혼합분말로부터 열간가압소결에 의하여 고밀도의 SiC-AIN 고용체가 $1870^{\circ}C$에서 $2030^{\circ}C$ 사이의 온도범위에서 제조되어졌다. 온도와 SiC/AIN의 비 및 seed의 존재에 따라 AIN과 $\beta$-SiC(3C) 분말의 반응은 2 H (wurzite) 구조로의 전이를 나타내었다. 결정상들은 SiC-rich 및 AIN-rich 고용체로 구성되었다. $2030^{\circ}C$, 1시간에서 5 wt%의 $\alpha$-SiC seed를 첨가한 50 % AIN/50% SiC의 조성에 대하여 완전한 고용체가 얻어졌으며, 미세구조가 비교적 균일한 2 H상의 결정립 크기를 가지고균일한 성장경향을 나타내었다. SiC-AIN 고용체에 있어서 $\alpha$-SiC seed의 변수가 전이기구 및 결정립의 크기와 모양을 비롯한 결정립 크기의 분포, 조성의 불균일성과 구조적 결함 등에 영향을 미칠 수 있었다.

• 한국세라믹학회지
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• 제42권8호
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• pp.525-531
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• 2005

Tailoring the microstructure and the composition of silicon nitride ceramics can have profound effects on their properties. Here it is shown that the grain growth behavior, in particular its anisotropy, is a function of the specific additives, which allow one to tune the microstructure from one consisting of more equiaxed grains to one with very elongated grains. Recent studies are discussed that provide an understanding of the atomic level processes by which these additives influence grain shapes. Next the microstructural (and compositional) parameters are discussed that can be used to modify the thermal conductivity, as well as fracture toughness of silicon nitride ceramics. As a result of the open <0001> channels in $\beta-Si_3N_4$, the c-axis conductivity can be exceptionally high. Thus, the formation of elongated c-axis grains, particularly when aligned can result in conductivity values approaching those of AlN ceramics. In addition, the controlled formation of elongated grains can also be used to significantly enhance the fracture toughness. At the same time, both properties are shown to be affected by the composition of the densification additives. Utilizing such understanding, one will be able to tailor the ceramics to achieve the properties desired for specific applications.

• 한국세라믹학회지
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• 제38권5호
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• pp.405-411
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• 2001

Compacts of a mixture of fine $\alpha$-Si$_3$N$_4$powders, 6% $Y_2$O$_3$and 1% $Al_2$O$_3$were attrition milled time on phase and microstructural development in silicon nitride ceramics. The sintered surface and the interior showed different behaviors in phase and microstructral developments. Increased oxygen content with increased milling time of powder mixture leads to the formation of Si$_2$$N_2$O phase at temperatures as low as 155$0^{\circ}C$. Si$_2$$N_2$O is stable in the interior of the samples but unstable in the surface region of the specimen sintered at higher temperature. This results in a duplex structure where the interior consists of Si$_2$$N_2$O grains dispersed in $\beta$-Si$_3$N$_4$matrix and a surface which contains only $\beta$-Si$_3$N$_4$. The alpha to beta phase transformation and the microstructural development are shown to be influenced by the formation and decomposition of the Si$_2$$N_2$O.

• 한국기계가공학회지
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• 제13권5호
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• pp.76-81
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• 2014

The Engineering ceramics have some excellent properties as materials for modern mechanical and electrical components. It is, however, not easy to polish them efficiently because they are strong and hard. This study is carried out to obtain a mirror surface on engineering ceramics by surperfinishing with high efficiency. To achieve this, we conducted a series of polishing experiments using representative engineering ceramics, such as $Al_2O_3$, SiC, $Si_3N_4$ and $ZrO_2$, using diamond abrasive film from the perspective of oscillations peed, the rotational speed of the workpiece, contact roller hardness, contact pressure and feed rate. Furthermore, the polishing efficiency and characteristics for engineering ceramics are discussed on the basis of optimal polishing time and surface roughness. Our results confirmed that efficient superfinishing conditions and polishing characteristics of engineering ceramics can be determined.

• Journal of Welding and Joining
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• 제28권6호
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• pp.40-44
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• 2010

Laser assisted machining (LAM) has been researched in order to machine the silicon nitride ceramics economically and effectively. LAM is an effective machining method by local heating of the cutting part to the softening temperature of the silicon nitride using laser beam. When silicon nitride ceramics is heated using a laser beam, the surface of silicon nitride ceramic is softened, oxidized and decomposed. And then surface hardness is decreased. Through machining in low viscosity and hardness conditions, silicon nitride was machined effectively and the life span of tool was increased. The plastic deformation was occurred due to softening of amorphous YSiAlON above $ 1,000^{\circ}C$. Transgranular fracture of ${\beta}-Si_3N_4$ was occurred when YSiAlON was not softened, but mostly intergranular fracture was occurred by the plastic deformation of softened YSiAlON.

• 한국세라믹학회지
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• 제49권4호
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• pp.318-324
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• 2012

Reaction-bonded silicon nitrides containing rare-earth oxide sintering additives were densified by gas pressure sintering. The sintering behavior, microstructure and mechanical properties of the resultant specimens were analyzed. For that purpose, $Lu_2O_3-SiO_2$ (US), $La_2O_3$-MgO (AM) and $Y_2O_3-Al_2O_3$ (YA) additive systems were selected. Among the tested compositions, densification of silicon nitride occurred at the lowest temperature when using the $La_2O_3$-MgO system. Since the $Lu_2O_3-SiO_2$ system has the highest melting temperature, full densification could not be achieved after sintering at $1950^{\circ}C$. However, the system had a reasonably high bending strength of 527 MPa at $1200^{\circ}C$ in air and a high fracture toughness of 9.2 $MPa{\cdot}m^{1/2}$. The $Y_2O_3-Al_2O_3$ system had the highest room temperature bending strength of 1.2 GPa.

• 한국분말야금학회:학술대회논문집
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• 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part 1
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• pp.325-326
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• 2006

Using $6wt%Y_2O_3-2wt%Al_2O_3$ as sintering additives and Si as a raw powder, the continuously porous in-situ $Si_2N_2O-Si_3N_4$ bodies were fabricated by multi-pass extrusion process and their microstructures were investigated depending on the addition of carbon (0-9wt%) in the mixture powder. The introduction of $Si_2N_2O$ fibers observed in the unidirectional continuous pores as well as in the pore-frame regions of the nitrided bodies can be an effective method in increasing the filtration efficiency. In the case of no carbon addition, the network type $Si_2N_2O$ fibers with high aspect ratio appeared in the continuous pores with diameters of 150-200 nm. However, in the case of 9wt% C addition, the fibers were found without any network type and had diameters of 200-250 nm.

• 한국세라믹학회지
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• 제25권2호
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• pp.143-153
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• 1988

김천규석으로부터 합성한 질화규소와 시약급의 AIN과 $Y_2O_3$를 출발원료로 하여 $Si_3N_4-0.1Y_2O_3-0.9AIN$의 tie line에서 X=0.6, 0.4(금속고용량)인 조성으로부터 AIN 의 양을 감소시킨 조성과 $Y_2O_3$를 증가시키는 조성으로 1750~1800도에서 소결시켜 부분 안정화 $\alpha$-Sialon을 제조하였다. $\alpha$-Sialon 생성에는 $Y_2O_3$ 첨가량보다 AIN 첨가량에 밀접하게 관련되며 AIN은 $\beta$단위격자 보다 $\alpha$ 단위격자로 우선적으로 고용되었으며 $Y_2O_3$가 과잉으로 첨가된 조성에서는 melillite 형성과 입자 조대화 및 $\alpha$-Sialon의 분배로 인하여 yttrium silicide 와 금속 Si를 형성하였으며 기계적 물성은 저하하였다. 본 실험에서 얻은 기계적 물성의 최고 값은 모두 1780도에서 얻어졌으며 그 값은 꺽임강도 723MPa, 파괴 인성 4.5MN/m^3/2, 경도 19.3GPa이었다.