Preparation and C-V characteristics of $Y_2O_3-StabilzedZrO_2$ Thin Films by PE MO CVD
(플라즈마 화학 증착법에 의한 $Y_2O_3-StabilzedZrO_2$ 박막의 제조와 Capacitance-Voltage특성)
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- Korean Journal of Materials Research
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- v.4 no.5
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- pp.510-515
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- 1994