• Journal of the Korean Society for Precision Engineering
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• v.22 no.8 s.173
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• pp.50-56
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• 2005

This paper is described a development of an optical fiber displacement sensor. The optical fiber sensor using an intensity modulated measures the displacement between target and sensor. A prototype sensor is composed of a transmitting part, a receiving part and a signal processing circuit. The experiment was conducted not only the sensor performance but also factors that affect intensity. The main performance of this sensor is resolution of 0.37um and the non-linearity $0.7\%$ FS and the dynamic bandwidth of about 6.3kHz. As a result of rotation test, the prototype sensor showed an equivalent performance to a commercial eddy current sensor.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.10
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• pp.83-90
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• 2007

The vehicle dynamic control system needs to detect the yaw rate of vehicle and a yaw rate sensor is required as a central component. Therefore, A sensor on the basic of the "tuning fork method" for automotive controls is being developed. The sensor was fabricated by the surface micro machining process to miniaturize its size. The sensor output offset is ${\pm}0.37^{\circ}/sec$ in the room temperature. The resonance frequency of the fabricated yaw rate sensor is measured to 5.29kHz for the drive mode. Tests of the sensor demonstrate that its performance is equivalent to that required for implementation of a yaw control system. Vehicle handling and safety are substantially improved using the sensor to implement yaw control.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1996.11a
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• pp.291-295
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• 1996

This paper discusses several design factors of a capacitance displacement sensor with a numerical method and several experiments and describes guide lines of the design of this type sensor. We introduce the charge density method for the analysis of this type sensor, which has feasible accuracy and efficiency. The analysis of this type sensor with the charge density method agrees with displacement sensitivity experiments of a circular plate capacitance sensor with the sensor amp based In the charge transfer principle.

• Journal of the Korean Society for Precision Engineering
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• v.13 no.10
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• pp.146-153
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• 1996

This paper presents the development of a collocated capacitance sensor and its application to the controller design for magnetic bearing supported rotor systems. The main feature of the sensor is that it is made of a compact printed circuit board(PCB) so that it can be built into the actuator coil of the magnetic bearing unit. The singnal processing unit hax been also developed. The experi- mental results of the sensor performance evaluation on sensitivity, bandwidth and resolution are presented. Then, simulation study shows the advantages of the collocated sensor for magnetic bearings over the nonco- llocated sensor. Finally, the experimental result on the performance of the collocated sensor based contrl- ler for a magnetic bearing rotor system is presented.

• Journal of IKEEE
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• v.20 no.1
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• pp.61-67
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• 2016

In this paper, a hardware design method is proposed for high speed high precision neutron radiation measurements. Our system is fabricated to use a high performance A/D Converter for digital data conversion of high precision and high speed analog signals. Using a neutron sensor, incident neutron radiation particles are detected; a precision microcurrent measurement module is also included: this module allows for more precise and rapid neutron radiation measurement design. The high speed high precision neutron measurement hardware system is composed of the neutron sensor, variable high voltage generator, microcurrent precision measurement component, embedded system, and display screen. The neutron sensor detects neutron radiation using high density polyethylene. The variable high voltage generator functions as a 0 ~ 2KV variable high voltage generator that is robust against heat and noise; this generator allows the neutron sensor to perform normally. The microcurrent precision measurement component employs a high performance A/D Converter to precisely and swiftly measure the high precision high speed microcurrent signal from the neutron sensor and to convert this analog signal into a digital one. The embedded system component performs multiple functions including neutron radiation measurement for high speed high precision neutron measurements, variable high voltage generator control, wired and wireless communications control, and data recording. Experiments using the proposed high speed high precision neutron measurement hardware shows that the hardware exhibits superior performance compared to that of conventional equipment with regard to measurement uncertainty, neutron measurement rate, accuracy, and neutron measurement range.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.1 s.190
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• pp.27-36
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• 2007

This paper describes the development of 6-axis ankle force/moment sensor for the intelligent feet of a humanoid robot. When the robot walks on uneven terrain, the feet should perceive the applied forces Fx, Fy, Fz and moments Mx, My, Mz from the attached 6-axis force/moment sensor on their ankles. Papers have already been published have some disadvantages in the size of the sensor, the rated output and so on. The rated output of each component sensor (6-axis ankle force/moment sensor) is very important to design the 6-axis force/moment sensor for precision measurement. Therefore, each sensor should be designed to get the similar rated output under each rated load. Also, the size of the sensor is very important for mounting to robot's feet. Therefore, the diameter should be below 100 mm and the height should be below 40mm. In this paper, first, the structure of a 6-axis ankle force/moment sensor was modeled for a humanoid robot's feet newly, Second, the equations to predict the strains on the sensing elements was derived, third, the size of the sensing elements was designed by using the equations, then, the sensor was fabricated by attaching straingages on the sensing elements, finally, the characteristic test of the developed sensor was carried out. The rated outputs from the derived equations agree well with the results from the experiments. The interference error of the sensor is less than 2.94%.

• Journal of the Korean Society for Precision Engineering
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• v.33 no.4
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• pp.309-316
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• 2016

In this study, we described the design of a three-axis force/torque sensor for measuring the force and torque in a lower-limb rehabilitation robot. The three-axis force/torque sensor is composed of Fx force sensor, Fz force sensor and Tz torque sensor. The sensing element for Fx force sensor and Tz torque sensor is used in a two-step parallel plate beam, and that of Fz force sensor is used in a parallel plate beam. The rated loads of Fx force sensor, Tz torque sensor and Fz force sensor are 300 N, 15 N m and 100 N, respectively. The three-axis force/torque sensor was designed using the finite element method, and manufactured using strain-gauges. The three-axis force sensor was further characterized. As a result, the interference error of the three-axis force/torque sensor was < 1.24%, the repeatability error of each sensor was < 0.03%, and the non-linearity was < 0.02%.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.3 s.192
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• pp.47-54
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• 2007

This paper describes the development of the intelligent gripper with two 3-axis force sensor that can measure forces Fx, Fy, Fz simultaneously, for stably grasping an unknown object. In order to grasp an unknown object using an intelligent gripper softly, it should measure the force in the gripping direction and the force in the gravity direction, and perform the force control using the measured farces. Thus, the intelligent gripper should be composed of 3-axis force sensor that can measure forces Fx, Fy, Fz at the same time. In this paper, the intelligent gripper with two 3-axis force sensor was manufactured and its characteristic test was carried out. The fabricated gripper could grasp an unknown object stably. Also, the sensing element of 3-axis force sensor was modeled and designed with five parallel-plate beams, and 3-axis force sensor for the intelligent gripper was fabricated. The characteristic test of the made sensor was carried out.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.04a
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• pp.453-458
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• 2004

A capacitate sensor is a proper device for measuring high small displacement. General design parameters and procedure are discussed and a test sensor was built to have a measuring range of 100$\mu\textrm{m}$ and a sensitivity about 30nm. This sensor has too opposing electrode of comparably large area and has nominal gap distance about 150$\mu\textrm{m}$. So as to achieve a nano order displacement sensitivity, both sensor and target system have to be considered. This is important for the sensitivity can be achieved by minimizing a system total noise level in electronic type sensor application. Typical performance of the developed sensor is demonstrated in precision moving stage having 0.1$\mu\textrm{m}$ moving resolution.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1788-1792
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• 2005

Eddy current sensor is representative instrument measuring gap to base metal and sensing trouble in base metal. The existing eddy current sensor works as measuring variance of sensor coil's inductance. But, sensor coil have phenomenon that not only inductance but also real resistance varies in real action. Conductivity and Permeability are main variable in sensor coil's varying impedance(inductance, real resistance). By searching relationship between conductivity-permeability and sensor coil's impedance, eddy current sensor gain advantage of elevation of accuracy, removal of alignment to each base metal, and continuous sensing to varying base metal.