• 한국전기전자재료학회논문지
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• 제20권3호
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• pp.228-233
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• 2007

Core technologies for integrating hydrogen gas sensor were investigated. In this study, the thermally isolated micro-hot-plate with areas of $100{\times}100-260{\times}260{\mu}m^2$ was fabricated by utilizing surface micromachining technique that provides better manufacturing yield than bulk micromachining counterpart. The optimum design of the sensor was peformed by analyzing the thermal profile of the structure obtained from a ANSYS simulator. The 400-nm-thick polysilicon films doped with phosphorus, the 300-nm-thick aluminum films, and the 200-nm-thick $SnO_2$(or ZnO)films were used as the micro-heater material, the temperature sensor material, and the gas sensitive material, respectively. The experimental results show that the developed gas sensors can detect $H_2$ concentration as low as 1 ppm.

• International Journal of Precision Engineering and Manufacturing
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• 제4권3호
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• pp.12-19
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• 2003

This paper describes the design of a robot's hand with two fingers for stably grasping an unknown object, and the development of a 3-axis force sensor for which is necessary to constructing the robot's fingers. In order to safely grasp an unknown object using the robot's fingers, they should measure the forces in the gripping and in the gravity directions, and control the measured forces. The 3-axis force sensor should be used for accurately measuring the weight of an unknown object in the gravity direction. Thus, in this paper, the robot's hand with two fingers for stably grasping an unknown object is designed, and the 3-axis force sensor is newly modeled and fabricated using several parallel-plate beams.

• 한국정밀공학회지
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• 제20권7호
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• pp.105-113
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• 2003

This paper describes the development of a 6-axis robot's finger force/moment sensor, which measures forces Fx, Fy, Fz, and moments Mx, My, Mz simultaneously, for stably grasping an unknown object. In order to safely grasp an unknown object using the robot's gripper, it should measure the force in the gripping direction and the force in the gravity direction, and perform the force control using the measured forces. Thus, the robot's gripper should be composed of 6-axis robot's finger force/moment sensor that can measure forces Fx, Fy, Fz, and moments Mx, My, Mz simultaneously. In this paper, the 6-axis robot's finger force/moment sensor for measuring forces Fx, Fy, Fz, and moments Mx, My, Mz simultaneously was newly modeled using several parallel-plate beams, designed, and fabricated. The characteristic test of made sensor was performed. and the result shows that interference errors of the developed sensor are less than 3%. Also, Robot's gripper with the 6-axis robot's finger force/moment sensor for the characteristic test of force control was manufactured, and the characteristic test for grasping an unknown object was performed using it. The fabricated gripper could grasp an unknown object stably. Thus, the developed 6-axis robot's finger force/moment sensor may be used for robot's gripper.

• Composites Research
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• 제13권6호
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• pp.47-54
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• 2000

복합재 구조물의 저속충격탐지 방법 중의 하나는 고분자 압전센서를 이용하는 것이다. 본 논문에서는 저속충격을 받는 복합재 평판에 대한 충격력과 부착된 스트레인 게이지, 고분자 압전센서 신호와의 관계를 유도하였다. 압전센서의 등가회로도를 통해서 고분자 압전센서의 개회로 신호와 폐회로 신호와의 관계를 유도하여 전하증폭기를 사용하지 않은 고분자 압전센서 신호를 이용하여 복합재 평판의 충격력 복원 가능성에 대한 연구로 확장하였다. 진동실험을 통하여 얻은 복합재 평판의 고유진동수와 감쇠비를 이용하여 해석적인 모델을 수정하여 정방향 문제와 역방향 문제에 있어서 오차를 줄일 수 있었다. 복원된 충격력과 해석적인 센서 신호는 실제 저속 충격 실험을 통하여 측정한 충격력, 스트레인 게이지 신호, 그리고 고분자 압전센서 신호와 잘 일치하였다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.490-493
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• 2003

This paper describes the development of a small 6-axis force/moment sensor for robot's finger, which measures forces Fx. Fy, Fz, and moments Mx, My, Mz simultaneously. In order to safely grasp an unknown object using the robot's gripper, and accurately perceive the position of it in the gripper, it should measure the force in the gripping direction, the force in the gravity direction and the moments each direction. and perform the control using the measured forces and moments. Thus, the robot's gripper should be composed of 6-axis force/moment sensor that can measure forces Fx, Fy, Fz, and moments Mx, My. Mz simultaneously. In this paper, the small 6-axis force/moment sensor for measuring forces Fx, Fy, Fz, and moments Mx, My, Mz simultaneously was newly modeled using several parallel-plate beams, designed, and fabricated. The characteristic test of made sensor was performed, and the result shows that interference errors or the developed sensor are less than 3%. Thus, the developed small 6-axis force/moment sensor may be used for robot's gripper.

• Transactions on Control, Automation and Systems Engineering
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• 제3권1호
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• pp.66-70
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• 2001

This paper describes the design of a two-axis force sensor for robots finger. In detects the x-direction force Fx and y-direction force Fy simultaneously. In order to safely grasp an unknown object using the robots fingers, they should detect the force or gripping direction and the force of gravity direction, and perform the force control using the forces detected. Therefore, the robots hand should be made by the robots finger with tow-axis force sensor that can detect the x-direction force and y-direction force si-multaneously. Thus, in this paper, the two-axis force sensor for robots finger is designed using several parallel-plate beams. The equations to calculate the strain of the beams according to the force in order to design the sensing element of the force sensor are derived and these equations are used to design the aize of two-axis force sensor sensing element. The reliability of the derive equa-tions is verified buy performing a finite element analysis of the sensing element. The strain obtained through this process is compared to that obtained through the theory analysis and a characteristics test of the fabricated sensor. It reveals that the rated strains calculated from the derive equations make a good agreement with the results from the Finite Element Method analysis and from the character-istic test.

• 한국정밀공학회지
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• 제21권3호
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• pp.51-58
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• 2004

This paper describes the development of a small 6-axis force/moment sensor for robot's finger, which measures farces Fx, Fy, Fz, and moments Mx, My, Mz simultaneously. In order to safely grasp an unknown object using the robot's gripper, and accurately perceive the position of it in the gripper, it should measure the force in the gripping direction, the force in the gravity direction and the moments each direction, and perform the force control using the measured forces and moments. Also, it should detect the moments Mx (x-direction moment), My and Mz to accurately perceive the position of the object in the grippers. Thus, the robot's gripper should be composed of 6-axis force/moment sensor that can measure forces Fx, Fy, Fz, and moments Mx, My, Mz simultaneously. In this paper, the small 6-axis force/moment sensor for measuring forces Fx, Fy, Fz, and moments Mx, My, Mz simultaneously was newly modeled using several parallel-plate beams, designed, and fabricated. The characteristic test for the developed sensor was performed, and the result shows that intereference errors of the developed sensor are less than 4.23％. Thus, the developed small 6-axis force/moment sensor may be used a robot's gripper.

• Smart Structures and Systems
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• 제8권5호
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• pp.433-447
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• 2011

The present paper addresses the nonlinear response of a FG square plate with two smart layers as a sensor and actuator under pressure. Geometric nonlinearity was considered in the strain-displacement relation based on the Von-Karman assumption. All the mechanical and electrical properties except Poisson's ratio can vary continuously along the thickness of the plate based on a power function. Electric potential was assumed as a quadratic function along the thickness direction and trigonometric function along the planar coordinate. By evaluating the mechanical and electrical energy, the total energy equation can be minimized with respect to amplitude of displacements and electrical potential. The effect of non homogenous index was investigated on the responses of the system. Obtained results indicate that with increasing the non homogenous index, the displacements and electric potential tend to an asymptotic value. Displacements and electric potential can be presented in terms of planar coordinate system. A linear analysis was employed and then the achieved results are compared with those results that are obtained using the nonlinear analysis. The effect of the geometric nonlinearity is investigated by using the comparison between the linear and nonlinear results. Displacement-load and potential-load curves verified the necessity of a nonlinear analysis rather than a linear analysis. Improvement of the previous results (by the linear analysis) through employing a nonlinear analysis can be presented as novelty of this study.

• Smart Structures and Systems
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• 제9권2호
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• pp.127-143
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• 2012

The present paper deals with the nonlinear analysis of the functionally graded piezoelectric (FGP) annular plate with two smart layers as sensor and actuator. The normal pressure is applied on the plate. The geometric nonlinearity is considered in the strain-displacement equations based on Von-Karman assumption. The problem is symmetric due to symmetric loading, boundary conditions and material properties. The radial and transverse displacements are supposed as two dominant components of displacement. The constitutive equations are derived for two sections of the plate, individually. Total energy of the system is evaluated for elastic solid and piezoelectric sections in terms of two components of displacement and electric potential. The response of the system can be obtained using minimization of the energy of system with respect to amplitude of displacements and electric potential. The distribution of all material properties is considered as power function along the thickness direction. Displacement-load and electric potential-load curves verify the nonlinearity nature of the problem. The response of the linear analysis is investigated and compared with those results obtained using the nonlinear analysis. This comparison justifies the necessity of a nonlinear analysis. The distribution of the displacements and electric potential in terms of non homogenous index indicates that these curves converge for small value of piezoelectric thickness with respect to elastic solid thickness.

• 한국음향학회지
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• 제29권8호
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• pp.483-490
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• 2010

본 논문에서는 판 형상의 구조물에 발생한 균열의 형상과 개수 등을 진단할 수 있는 Inter-Digital Transducer (IDT)형 Lamb 파 센서를 제안하고 그 타당성을 실험적으로 검증하였다. IDT형 Lamb 파 센서는 기존의 패치형 압전 센서보다 작동 주파수의 조절이 용이하고, finger의 형상에 의해 지향성을 조절할 수 있다는 등의 장점이 있다. 본 논문에서는 무지향성을 가지는 환상형 IDT형 센서와 높은 지향성을 가지는 사각형 IDT형 센서를 설계, 제작하고, 이들에 의해 알루미늄 판을 전파하는 Lamb 파의 전파시간과 진폭의 변화를 측정, 분석하여 판 내에 발생한 균열의 길이, 개수 및 각도를 평가하고, 제안한 IDT 센서의 효용성을 고찰하였다.