• Title/Summary/Keyword: Semiconductor equipment

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Study on the Optical Analysis Equipment Control System for Electronic Parts Inspection (전자 부품 검사용 광학분석 장비 제어시스템에 대한 연구)

  • Lee, Jun Ha
    • Journal of the Semiconductor & Display Technology
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    • v.14 no.4
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    • pp.67-71
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    • 2015
  • Product of technology developed in this study is an external interface for controlling the equipment of pendant key remote control system circuit board, and it is used in the electronic component test equipment system. Main control system module is in the role as a device for controlling the various control devices that make up the integrated system for microscopic examination at the request of the host computer engineers to control the inspection equipment. The pentane-key interface module to its role as a device for controlling the various control devices that make up the integrated system for microscopic examination at the request of the host computer for the engineer to control the inspection equipment. Development of the control system can be expected in the configuration of a system for efficient and accurate inspection of high-precision parts.

Characteristics of Electrostatic Attenuation in Semiconductor (반도체 소자의 정전기 완화특성)

  • 김두현;김상렬
    • Journal of the Korean Society of Safety
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    • v.14 no.3
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    • pp.69-77
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    • 1999
  • As the use of automatic handling equipment for sensitive semiconductor devices is rapidly increased, manufacturers of electronic components and equipment need to be more alert to the problem of electrostatic discharges(ESD). Semiconductor devices such as IC, LSI, VLSI become a high density pattern of being more fragile by ESD phenomena. One of the most common causes of electrostatic damage is the direct transfer of electrostatic charge from the human body or a charged material to the electrostatic discharge sensitive devices. Accordingly, characteristics of electrostatic attenuation in domestic semiconductor devices is investigated to evaluate the ESD phenomina in the semiconductors in this paper. The required data are obtained by Static Honestmeter. Also The results in this paper can be used for the prevention of semiconductor failure by ESD.

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Oxide Etcher

  • Sin, Tae-Ho
    • Proceedings of the Korean Society Of Semiconductor Equipment Technology
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    • 2008.05a
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    • pp.5-14
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    • 2008
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