• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 1994.10a
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• pp.58-61
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• 1994

본 연구에서는 내부 외부 진동원(8-30Hz)에 따른 격자보 구조의 동적 응답을 효과적으로 제어하기 위해 격자보 구조의 동적 거동에 지배적인 영향을 미치는 철근비, 질량, 탄성계수 등 여러 인자들의 비교, 분석을 통해 동적 거동에 영향을 미치는 인자를 분석함으로써 격자보 구조의 설계시 인자의 변화에 따른 동적 거동 특성을 예측하여 이에 적절히 대응할 수 있도록 도모하였다. 이를 위해 국내에 건설된 반도체 공장의 격자보 구조 중에서 기본 해석 모델을 결정하고 이에 대해 실험적 모드 해석과 유한 요소 해석을 사용해서 기본 해석 모델의 모드 매개변수를 구하고, 기본 해석 모델에 사용되는 각 인자가 고유 진동수에 미치는 영향을 비교.분석하였다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1993.11a
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• pp.97-102
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• 1993

According as the high integrity of the semi conductor devices is definited required, the concern on the multi-layered wiring, and three-dimensional devices is growing these days. Therefore, plasma-enhanced chemical vapored deposition(PECVD) enables low-teperature process and is widely used, but it causes the instability of the devices due to a lot of impurities within the film. The PECVD oxynitride was formed by changing the gas ratio of (N$_2$O) to (N$_2$+NH$_3$). It's contained a small portion of hydrogen, had higher refrctive index and capacitance than oxide, and showed the capacitance increasement and the chemical stabi1ity. This is caused by nitrogen distribution increase of the interface lather than within the film.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.09a
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• pp.34-37
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• 2001

This research suggested the new algorithm controlled by micro processor which is already stored by various PWM form of output voltage by using fundamental data of the carrier and signal. The determined PWM pattern is not concerned with the signal wave form and the new algorithm can obtain the desired pulse width by synchronous of carrier. The PWM wave can be controlled with real time by using extra hardware and digital software and to speed up program processing, the control signals to switch the power semi-conductor of three phase PWM inverter, simultaneously use the output signal by microprocessor and extra hardware, and control signal by software. In the end, this method was proved by applying to Three phase voltage source inverter.

• Journal of the Korean institute of surface engineering
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• v.29 no.1
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• pp.60-72
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• 1996

A photoetching process is widely used for small and high precision parts in machinery, electronic and semi-conductor industries. One of the high precision parts, grid is very important part of digitron which use electron display, and it is fabricated by only photoetching process because of high precision. In this study, to develop high precision digitron grid, characteristics of etching solution were investigated with electrochemical test, that was potentiodynamic test and immersion test in the ferric chloride solution and added some additives. Based on the electrochemical etching test, grid was fabricated by continuous photoetching process at various etching condition. From the result of measured line width and etching depth under-cut and etching factor were calculated. For the fabrication of 25$\mu\textrm{m}$ line width, optimal etching condition was etching temperature 40~$45^{\circ}C$, spray pressure 1.5kg/$\textrm{cm}^2$ and etching time 3~4min.

• Transactions of Materials Processing
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• v.13 no.4
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• pp.307-318
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• 2004

Rectangular drawn case with extreme aspect ratio is widely used for electrical parts such as a lithium-ion battery container, semi-conductor case and so on. Additionally, from the recent trend towards miniaturization of the multi-functional mobile device, demands for rectangular case with the narrow width are increased. In this study, numerical and experimental approaches for the multi-stage deep drawing process have been carried out. Based on the research results of the width of 5.95mm model, finite element analysis for storage case of rectangular cup type was verified to the width of 4.95mm. Also, a series of manufacturing experiments for rectangular case is conducted and the deformed configuration of the rectangular drawn case are investigated by comparing with the results of the numerical analysis. And the modification of the initial blank is performed to minimize the trimmed material amount. By the application of the modified blank, the sound shape of the deformed parts is improved.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2006.05a
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• pp.314-317
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• 2006

Electroformed part is widely used in modem manufacturing industries, especially semi-conductor division. It is basically a specialized form of electroplating. So, it has very similar parameters with electroplating. The object of this study is development of the fine metal mask by electroforming process. In this paper considered two parameters. The first is relationship of UV exposure and soft baking time. The other one is thickness uniformity of electroformed parts by distance of between electrodes. This paper presents the fabrication method of fine metal mask by electroforming process.

• Journal of information and communication convergence engineering
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• v.5 no.4
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• pp.351-357
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• 2007

SRM (Switched Reluctance Motor) has not been put into practical use since it has been developed in mid 19th centuries, but the switching element using semi-conductor was developed in 1950's which made possible to produce small size staffing motors. The research activities have been lively conducted regarding SRM since 1960's, nowadays, more research activities are being carried out focusing on developing small home appliances such as vacuum cleaners and washing machines. This thesis explains the study of controller design applied to SRM concept. This controller executes controller algorithms via $\mu$ - processor to increase stability and precise measurement, and VHDL (Very high speed integrated circuit Hardware Description Language) is designed to generate SRM driving signal.

• Proceedings of the KIEE Conference
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• 1989.07a
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• pp.522-526
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• 1989

Recently developments of high-speed Semi-conductor Switches as Power MOSFETS, Power IGBT, power SIT have enwidened the performance of classical inverter configuration, and also allowed the practical applications of new inverter configuration, with improved performance and wider operating zones. Static power converters are now used in a great variety of applications including induction heating, high-frequency generation, DC/DC power converter, etc.

• 제어로봇시스템학회:학술대회논문집
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• 2001.10a
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• pp.111.2-111
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• 2001

The research focuses on controlling a gap to measure the surface defect in semi-conductor fabrication device. The measurement is available accompanying a near field image gap control. In this article, a pneumatic servo system is adopted for the near field gap control. The advantage of the pneumatic servo system is on the preventing the possibility of contacting the device to the wapper surface, fence arising fatal damage. Furthermore, the air from the pneumatic system blows the some particle on the wapper during controlling. The target gap is less than 20 $\mu$m and the gap should keep same amount while the device moves around the surface. The experiment by the pneumatic servo control system is done by employing a simple PID control, and the tracking performance is remarkably verified. The target gap is set from 10 $\mu$m to 100 $\mu$m ...

• 제어로봇시스템학회:학술대회논문집
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• 2001.10a
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• pp.149.2-149
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• 2001

In this paper, we present an agent-based transportation routing method in a semi-conductor production line. The main characteristic of the proposed method is that each AGV agent individually searches candidates of its route with reference of the pheromone information based on the use of an analogy of Ant System. The proposed method is applied to several routing problems. The performances of the proposed method are compared with those of a Genetic Algorithm. The effectiveness of the proposed method is conrmed by many numerical examples. In order to demonstrate the effectiveness of the proposed method for an actual problem, the proposed method is applied to a dynamic motion planning. The proposed method ...