• Journal of the Institute of Electronics Engineers of Korea SD
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• v.43 no.8 s.350
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• pp.1-5
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• 2006

At-wavelength inspection system of extreme Ultra-violet lithography was developed and the inspection results were compared with the optical mask inspection system by cross correlation experiments. In at-wavelength EUV mask inspection system, a raster scan of focused euv light is used to illuminate euv light to mask blank and specularly and non-specularly reflected euv light are detected by photo diode and microchannel plate. The cross correlation results between at-wavelength inspection tool and optical inspection tool shows strong correlation. Far-field scattering fringe pattern from programmed phase and opqque defect, which were detected by phosphor plate and CCD camera shows that distinct diffraction fringes were observed with fringe spacing dependent on the defect size.

• Journal of the Korean Institute of Telematics and Electronics A
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• v.33A no.10
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• pp.90-97
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• 1996

A numerical method for scattering of electromagnetic waves from a periodic strip grating over a grounded dielectric slab is considered for TE and TM polarization cases from the viewpoints of both reflection grating problem and leaky wave antenna problem. The analysis is based on a mode expansion method, floquet's theorem, and the method of moments. Numerical results involving some combinations of geometric parameters are presented in terms of complex propagation constant (kd-$\beta$d diagram), radiation pattern, and relative scattered powers of spectral modes. In particular, the relationship between complex propagatio constnat form the viewpoint of leaky wqve antenna problem and Off-bragg and bragg blazing phenomena from the viewpoint of reflecton graing problem is investigated.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.7 no.2
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• pp.197-206
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• 1997

A SiC epilayer on the 6H-SiC crystal substrate was grown by chemical vapor deposition (CVD). The crystal structure of the SiC epilayer was investigated by using the X-ray diffraction patterns and the Roman scattering spectroscopy. The SiC epilayer on the 6H-SiC substrate was grown to be homoepilayer by CVD. In order to distinguish a certain SiC polytype mixed in the SiC crystal grown by the modified Lely method, we have calculated the X-ray diffraction intensities and Brags angles of the typical SiC crystal powders. By comparing the measured X-ray diffraction pattern with the calculated ones, it was identified that the SiC crystal grown by the modified Lely method was the 6H-SiC crystal mixed some 15R-SiC.

• Journal of the Korean Society of Propulsion Engineers
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• v.7 no.1
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• pp.40-48
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• 2003

Large eddy simulation is used to investigate the compressible flow over a open cavity, The sub-grid scale stresses are modeled using the dynamic model. The compressible Navier-Stokes equations are solved with the sixth order accurate compact finite difference scheme in the space and the 4th order Runge-Kutta scheme in the time. The results show a typical flow pattern of the shear layer mode of oscillation over the cavity. The votical disturbances, the roll-up of vorticity, and impingement and scattering of vorticity at the downstream cavity edge can be seen in the shear layer. Predicted acoustic resonant frequency is in good agreement with that of the empirical formula. The mean flow streamlines are nearly horizontal along the mouth of the cavity. The pressure has its minimum value in the vortex core inside the cavity.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.226-230
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• 2001

Electronic Speckle Pattern Interferometry (ESPI) has been recently developed and widely used because it has advantage to be able to measure surface deformations of engineering components and materials in industrial areas with non-contact. The spekle patterns to be formed with interference phenomena of scattering phenomena measure the out-of-plane deformations, together with the use of digital image equipment to process the informations included in the speckle patterns and the display consequent interferogram on a computer monitor. In this study, the experimental results of a canti-levered plate using ESPI were compared with those obtained from the simple beam theory. The ESPI results of the canti-levered plate analyzed by 4-step phase shifting method are close to the theoretical expectation. Also, out-0of-plane displacements of a spot welded canti-levered plate were measured by ESPI with 4-step phase shifting technique. The phase map of the spot welded canti-levered plate is quite different from that of the canti-levered plate without spot welding.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.136-136
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• 1999

박막의 탄성특성을 평가하는 방법으로 nano-indentation, Brillouin light scattering measurement, ultrasonic surface wave measurement, bulge test, vibration membrane method 등 여러 가지가 제시되어 왔다. 최근에는 탄성특성을 평가할 수 있는 간단한 방법으로 기판 식각 기법을 이용한 freehang, bridge 방법이 제시되었다. 이중에서 bridge 방법은 간단한 식각 기법을 이용하여 얇은 박막에서도 탄성 특성을 평가할 수 있는 방법으로 제시되었다. 그러나 식각 과정에서 발생하는 patch 부분의 under-cut으로 인해 정확한 bridge의 길이를 측정할 수 없게 되어 오차가 발생하고 있다. 본 연구에서는 bridge 방법에서 발생하는 오차를 줄이기 위한 방법으로, patch 부분에 etch-stop을 제작해 줌으로서 식각 과정에서 발생하는 under-cut을 효과적으로 제거시켰다. Etch-stop은 2장의 mask를 align key를 이용하여 제작하였다. 먼저 산화막이 형성되어 있는 Si 기판위에 mask 1을 이용하여 patch 부분을 lithography 작업하고, 습식 식각 공정을 한 뒤 DLC 필름을 증착시킨다. 다음으로 mask 2를 이용하여 bridge pattern을 제작하고, DLC 필름을 증착시킨 후 lift-off 기술과 산화막 등방식각 공정을 통해 bridge를 제작하였다. 이렇게 제작된 bridge를 통해 필름이 기판에 부착되기 위해 필요한 변형률을 측정하고, 독립적으로 측정된 필름의 잔류응력과 함께 박막의 응력-변형률 관계식에 적용시켜 biaxial elastic modulus, E/(1-v)를 구할 수 있었다. Sidl 첨가된 DLC 필름은 rf-PACVD 장비를 이용하여 증착하였다. 이때 전극과 플라즈마 사이의 바이어스 음전압은 -400V로 합성압력은 10mTorr로 고정하였다. 사용한 반응가스는 벤젠(C6H6)과 희석된 실렌(SiH4:2H=10:90)이며, 희석된 실렌의 첨가량을 조절하여 필름 내에 함유된 Si의 양을 조절하였다. 각각의 조건에서 증착시간을 조절하여 필름의 두께를 조절하였다. 필름의 잔류응력은 압축잔류 응력에 의해 발생한 필름/기판 복합체의 곡률을 laser 반사법을 이용하여 측정하고, 이 결과를 Brenner 등에 의해 유도된 식을 대입하여 계산하였다.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.23 no.6
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• pp.795-801
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• 1999

An experimental investigation has been conducted with the objective of studying the mixing mechanism near the nozzle exit in a tone-excited jet diffusion flame. The fuel jet was pulsed by means of a loudspeaker-driven cavity. The excitation frequencies were chosen for the two cases of the non-resonant and resonant frequency identified as a fuel tube resonance due to acoustic excitation. The effect of tone-excitations on mixing pattern near the nozzle exit and flame was visualized using various techniques, including schlieren photograph and laser light scattering photograph from $TiO_2$ seed particles. In order to clarify the details of the flame feature observed by visualization methods, hotwire measurements have been made. Excitation at the resonant frequency makes strong mixing near the nozzle. In this case, the fuel jet flow in the vicinity of nozzle exit breaks up into disturbed fuel parcels. This phenomena affects greatly the combustion characteristics of the tone excited jet and presumably occurs by flow separation from the wall inside the fuel nozzle. As a result, in the resonant frequency the flame length reduces greatly.

• Journal of the Korean Society of Costume
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• v.58 no.2
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• pp.120-133
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• 2008

The purpose of this study is to analysis types of light and to find the characteristics of light in contemporary fashion design. In a scientific context, light is electromagnetic radiation of a wavelength that has the characteristics of straightness, reflection, refraction, scattering and diffraction. But in philosophical speculations, light has been used as a metaphor of 'being', 'to-be' or 'enlightenment.' And through the ages, people have tried to represent and apply the light into plastic art like painting and architecture. The types of light in fashion design was categorized as those; reflective light from the surface of clothing which is the result of interaction between illumination and material, representative light as the pattern of light or light effect such as sun or its rays and optical or psychedelic patterns, luminescent light from light emitting material like phosphorescence or LED which combines into fashion design, projective light from a medium to reveal virtual patterns on the surface or a fashion design itself using holography. These lights in fashion design can be considered as reflection of emphasis of sexuality, longing for fantasy and mystique, visualization of interaction and communication and groping for the play.

• Korean Journal of Fisheries and Aquatic Sciences
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• v.47 no.6
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• pp.1055-1062
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• 2014

Hydroacoustic surveys were conducted for spatio-temporal distribution and size estimation of fish in the Yongdam reservoir, Korea, from April to July 2014. Acoustic data were collected along acoustic transects using a 120 kHz scientific echosounder. The received acoustic data were the in situ acoustic target strength (dB) and nautical area scattering coefficient ($m^2/mile^2$). Data on fish behavioral patterns and size were collected using a DIDSON acoustic camera at stationary stations. Fish were mainly distributed in the center channel and close to the outer Yongdam reservoir. Acoustic density of fish in the summer season were higher than in the spring season. The seasonal vertical distribution pattern of fish aggregations may be strongly related to the vertical temperature structure. The size distribution of fish obtained from an acoustic camera correlated well with the acoustic size of fish from an echosounder.

• Journal of Welding and Joining
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• v.20 no.5
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• pp.93-98
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• 2002

The effect of bonding misfit on single crystallization of transient liquid phase (TLP) bonded joints of single crystal superalloy CMSX-2 was investigated using MBF-80 insert metal. The bonding misfit was defined by (100) twist angle (rotating angle) at bonded interface. TLP bonding of specimens was carried out at 1523K for 1.8ks in vacuum. The post-bond heat treatment consisted of the solution and sequential two step aging treatment was conducted in the Ar atmosphere. The crystallographic orientation analysis across the TLP bonded joints was conducted three dimensionally using the electron back scattering pattern (EBSP) method. EBSP analyses f3r the bonded and post bonded heat treated specimens were conducted. All bonded joints had misorientation centering around the bonded interface for as-bonded and post-bond heat treated specimens with rotating angle. The average misorientation angle between both solid phases in bonded interlayer was almost identical to the rotating angle at bonded interface. HRTEM observation revealed that the atom arrangement of both solid phases in bonded interlayer was quite different across the bonded interface. It followed that grain boundary was formed in bonded interface. It was confirmed that epitaxial growth of the solid phase occurred from the base metal substrates during TLP bonding and single crystallization could not be achieved in joints with rotating angle.