• Title/Summary/Keyword: Scanning stage

검색결과 450건 처리시간 0.031초

이중 스테이지를 이용한 대면적 3차원 광/유체 마이크로 디바이스 제작에 관한 연구 (Fabrication of Three-Dimensional Micro Optical and Fluidic System Using Dual Stage Nanostereolithography Process)

  • 임태우;양동열
    • 설비공학논문집
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    • 제27권10호
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    • pp.552-557
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    • 2015
  • The nanostereolithography process using a femtosecond laser has been shown to have strong merits for the direct fabrication of 2D/3D micro structures. In addition, a femtosecond laser provides efficient tools for precise micromachining owing to the advantages of a small and feeble heat effect zone. In this paper, we report an effective fabrication process of 3D micro optical and fluidic devices using nanostereolithography process composed of a dual stage system. Process conditions for additive and subtractive fabrication are examined. The Piezo stage scanning system is used for 3D micro-fabrication in unit area of sub-mm scale, and the motor stage is employed in fabrication on the scale of several mm. The misalignment between the pizeo- and motor- stages is revised through rotational transformation of CAD data in the unit domain. Here, the effectiveness of the proposed process is demonstrated through examples using 3D optical and microfluidic structures.

2차원절삭에서 공구이탈시 발생하는 버(Burr)와 파단에 관한 연구 (Study on the Burr Formation and Fracture at the Exit Stage in Orthogonal Cutting)

  • 고성림
    • 대한기계학회논문집
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    • 제17권5호
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    • pp.1172-1182
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    • 1993
  • 본 연구에서는 버형성중의 파단을 파단전의 소성변형의 과정이 파단에 영향을 미치는 연성파단(ductile fracture)으로 간주하여 McClintock의 연성파단에 관한 모델 을 이용하여 버형성중의 파단변형도를 얻었다. 이 파단변형도가 인장시험으로부터 얻 은 파단변형도와 커다란 오차가 없음을 확인하여 편의상 인장시험에서의 파단변형도를 버형성중의 파단발생 판정기준으로 사용하였다. 버형성이 시작된 이후에 공구인선부 에서의 피삭재의 변위의 발달에 관한 모델이 제시되었고 파단변형도와 최대변형량과의 비교로부터 파단위치와 각도가 결정된다.

공정조성 SnPb 솔더에 대한 실시간 Electromigration 거동 관찰 (In-situ Observation of Electromigration Behaviors of Eutectic SnPb Line)

  • 김오한;윤민승;주영창;박영배
    • 마이크로전자및패키징학회지
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    • 제12권4호통권37호
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    • pp.281-287
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    • 2005
  • 공정조성의 SnPb 솔더 선형시편에서 electromigration 현상을 실시간 주사전자현미경을 이용하여 관찰하였다. 공정조성 SnPb 솔더시편에 대한 electronigration 실험은 ${\times}10^4A/cm^2,\;90^{\circ}C$에서 실시하였다. 주사전자현미경 챔버 내에서 진행되는 electromigration 실험 동안 음극의 보이드 형성과 양극의 힐록 성장을 실시간으로 관찰하였다. 음극에서 일어나는 보이드 크기를 실시간 관찰한 결과, 공정조성 SnPb 솔더의 electromigration 거동은 보이드 형성 전에 가지는 잠복기의 존재를 명확히 알 수 있었고, 본 결과는 electromigration 거동으로 인한 플립칩 솔더 범프의 보이드 생성에 대한 잠복기와 관련이 있었다.

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관교의치용 Au-Ag-Cu-Pt-Zn 합금의 시효경화성과 관련된 상변태와 입계석출 (Phase transformation and grain boundary precipitation related to the age-hardening of an Au-Ag-Cu-Pt-Zn alloy for crown and bridge fabrication)

  • 조미향
    • 대한치과기공학회지
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    • 제34권4호
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    • pp.345-352
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    • 2012
  • Purpose: The age-hardening mechanism of an Au-Ag-Cu-Pt-Zn alloy for crown and bridge fabrication was investigated by means of hardness test, X-ray diffraction study and field emission scanning electron microscopic observation. Methods: Before hardness testing, the specimens were solution treated and then were rapidly quenched into ice brine, and were subsequently aged isothermally at $400-450^{\circ}C$ for various periods of time in a molten salt bath and then quenched into ice brain. Hardness measurements were made using a Vickers microhardness tester. The specimens were examined at 15 kV using a field emission scanning electron microscope. Results: By the isothermal aging of the solution-treated specimen at $450^{\circ}C$, the hardness increased rapidly in the early stage of aging process and reached a maximum hardness value. After that, the hardness decreased slowly with prolonged aging. However, the relatively high hardness value was obtained even with 20,000 min aging. By aging the solution-treated specimen, the f.c.c. Au-Ag-rich ${\alpha}_0$ phase was transformed into the Au-Ag-rich ${\alpha}_1$ phase and the AuCu I ordered phase. Conclusion: The hardness increase in the early stage of aging process was attributed to the formation of lattice strains by the precipitation of the Cu-rich phase and then subsequent ordering into the AuCu I-type phase. The decrease in hardness in the later stage of aging process was due to the release of coherency strains by the coarsening of tweed structure in the grain interior and by the growth and coarsening of the lamellar structure in the grain boundary. The increase of inter-lamellar space contributed slightly to the softening compared to the growth of lamellar structure toward the grain interior.

지상 레이저 스케닝 자료를 활용한 댐체의 변형해석 (Deformation Analysis of Dam Structure using Terrestrial Laser Scanning System)

  • 김영경;손호웅;임은상;임정열;김기영
    • 지구물리
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    • 제9권4호
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    • pp.333-341
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    • 2006
  • 준공 후 상당한 시간이 경과한 댐에 대해서 안정성을 판단하거나 관리하는 방법은 극히 제한적이다. 댐체의 변형 특성을 확인하기 위해서는 침하계와 같이 1 point에 대한 거동만 분석을 실시하였으나, 댐체의 전체적인 변형특성을 파악 할 수 없었다. 따라서 본 연구에서는 지상 레이저 스캐닝을 이용하여 댐체의 전체적인 변형 특성을 분석하였으며, 댐체에 설치된 표면 침하계 결과와 비교하였다. 레이저 스캐닝 자료와 표면 침하계 결과를 분석한 결과 연구대상댐은 댐체의 자중에 의한 변형거동을 보이고 있다고 판단 할 수 있었고, 현시점에서의 댐체는 안정화 단계에 접어들고 있다는 것을 확인할 수 있었다.

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다양한 유사체액과 인공타액에서 치과용 임플란트의 전기화학적 특성 (Electrochemical Characteristics of Dental Implant in the Various Simulated Body Fluid and Artificial Saliva)

  • 김태한;박근형;손미경;김원기;장승현;최한철
    • 한국표면공학회지
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    • 제41권5호
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    • pp.226-231
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    • 2008
  • Titanium and its alloy have been widely used in dental implant and orthopedic prostheses. Electrochemical characteristics of dental implant in the various simulated body fluids have been researched by using electrochemical methods. Ti-6Al-4V alloy implant was used for corrosion test in 0.9% NaCl, artificial saliva and simulated body fluids. The surface morphology was observed using scanning electron microscopy (SEM) and energy dispersive x-ray spectroscopy (EDX). The electrochemical stability was investigated using potentiosat (EG&G Co, 263A). The corrosion surface was observed using scanning electron microscopy (SEM). From the results of potentiodynamic test in various solution, the current density of implant tested in SBF and AS solution was lower than that of implant tested in 0.9% NaCl solution. From the results of passive film stability test, the variation of current density at constant 250 mV showed the consistent with time in the case of implant tested in SBF and AS solution, whereas, the current density at constant 250mV in the case of implant tested in 0.9% NaCl solution showed higher compared to SBF and AS solution as time increased. From the results of cyclic potentiodynamic test, the pitting potential and |$E_{pit}\;-\;E_{corr}$| of implant tested in SBF and AS solution were higher than those of implant tested in 0.9% NaCl solution.

반복변형된 동 및 동알루미늄 단결정 표면형상의 나노-스케일 관찰 (Nano-Scale Surface Observation of Cyclically Deformed Copper and Cu-Al Single Crystals)

  • 최성종;이권용
    • 한국윤활학회:학술대회논문집
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    • 한국윤활학회 1999년도 제29회 춘계학술대회
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    • pp.67-72
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    • 1999
  • Scanning probe Microscope(SPM) such as Scanning Tunneling Microscope(STM) and Atomic Force Microscope(AFM) was shown to be the powerful tool for nano-scale characterization of material surfaces Using this technique, surface morphology of the cyclically deformed Cu or Cu-Al single crystal was observed. The surface became proportionately rough as the number of cycles increased, but after some number of cycles no further change was observed. Slip steps with the heights of 100 to 200 nm and the widths of 1000 to 2000 nm were prevailing at the stage. The slipped distance of one slip system at the surface was not uniform. and formation of the extrusions or intrusions was assumed to occur such place. By comparing the morphological change caused by crystallographic orientation, strain amplitude, number of cycles or stacking fault energy, some interesting results which help to clarify the basic mechanism of fatigue damage were obtained. Furthermore, applicability of the scanning tunneling microscopy to fatigue damage is discussed.

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근접장현미경을 이용한 폴리머박막 나노리쏘그라피 공정의 특성분석 (Characteristics of Nanolithography Process on Polymer Thin-film using Near-field Scanning Optical Microscope)

  • 권상진;김필규;장원석;정성호
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2004년도 추계학술대회 논문집
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    • pp.590-595
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    • 2004
  • The shape and size variations of the nanopatterns produced on a positive photoresist using a near-field scanning optical microscope(NSOM) are investigated with respect to the process variables. A cantilever type nanoprobe having a 100nm aperture at the apex of the pyramidal tip is used with the NSOM and a He-Cd laser at a wavelength of 442nm as the illumination source. Patterning characteristics are examined for different laser beam power at the entrance side of the aperture( $P_{in}$ ), scan speed of the piezo stage(V), repeated scanning over the same pattern, and operation modes of the NSOM(DC and AC modes). The pattern size remained almost the same for equal linear energy density. Pattern size decreased for lower laser beam power and greater scan speed, leading to a minimum pattern width of around 50nm at $P_{in}$ =1.2$\mu$W and V=12$\mu$m/. Direct writing of an arbitrary pattern with a line width of about 150nm was demonstrated to verify the feasibility of this technique for nanomask fabrication. Application on high-density data storage using azopolymer is discussed at the end.

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Simultaneous Detection of Biomolecular Interactions and Surface Topography Using Photonic Force Microscopy

  • 허승진;김기범;조용훈
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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    • pp.402.1-402.1
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    • 2014
  • Photonic force microscopy (PFM) is an optical tweezers-based scanning probe microscopy, which measures the forces in the range of fN to pN. The low stiffness leads proper to measure single molecular interaction. We introduce a novel photonic force microscopy to stably map various chemical properties as well as topographic information, utilizing weak molecular bond between probe and object's surface. First, we installed stable optical tweezers instrument, where an IR laser with 1064 nm wavelength was used as trapping source to reduce damage to biological sample. To manipulate trapped material, electric driven two-axis mirrors were used for x, y directional probe scanning and a piezo stage for z directional probe scanning. For resolution test, probe scans with vertical direction repeatedly at the same lateral position, where the vertical resolution is ~25 nm. To obtain the topography of surface which is etched glass, trapped bead scans 3-dimensionally and measures the contact position in each cycle. To acquire the chemical mapping, we design the DNA oligonucleotide pairs combining as a zipping structure, where one is attached at the surface of bead and other is arranged on surface. We measured the rupture force of molecular bonding to investigate chemical properties on the surface with various loading rate. We expect this system can realize a high-resolution multi-functional imaging technique able to acquire topographic map of objects and to distinguish difference of chemical properties between these objects simultaneously.

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유화제의 첨가가 팜유의 열 특성에 미치는 영향 (Effects of Emulsifier on the Thermal Behaviour in Palm Oil)

  • 장영상;이영수;강우석;신재익
    • 한국식품과학회지
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    • 제21권6호
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    • pp.857-862
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    • 1989
  • 팜유에 유화제인 sucrose fatty acid ester를 첨가하여 유화제 첨가농도의 변화에 따라 나타나는 팜유의 결정화 및 용융화 현상을 DSC를 이용하여 연구하였으며, 그 결과는 다음과 같다. 유화제가 첨가된 팜유를 냉각할 때, 무첨가군에 비하여 발열 정점 온도가 저하되었다. 이것은 SE가 300ppm까지 첨가된 팜유에서는 모결정 형성이 억제되므로 인해 결정화 온도가 저하된 것이다. 이는 SE의 첨가량이 300ppm까지 증가되는 것과는 관계없이 결정화 단계에서 저융점 결정 형성이 억제되었다. 팜유를 용융할 때 ${\alpha}$형 전이온도 및 entropy의 변화현상은 무첨가군에 비해 SE 첨가군의 경우, scanning rate의 변화에 관계없이 유화제의 분자 분산에 의한 영향으로 불규칙하게 나타났다.

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