• 한국진공학회지
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• 제8권4A호
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• pp.456-460
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• 1999

Experimental studies of laser micromachining on Mo diaphragm using piezo Q-switched Nd:YAZ laser have been performed. Application of miniaturized micorcolumn electron gun arrays as a potential electron beam lithography or portable mini-scanning electron microscope (SEM) application have recently extensively examined. The conventional microcolumn fabrication technique would give a limitation on the minimization of aberration, In this paper, we obtained 20~30 $\mu \textrm m$aperture of laser micromachining on Mo diaphragm using piezo Q-swithed Nd:YAG laser. The geometrical figures, such as the diameter and the preciseness of the drilled aperture are dependent upon the total energy of the laser pulse train, laser pulse width, and the diameter of laser spot in addition to the materials-dependent parameters.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1179-1180
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• 2005

3D micro scaled shapes are fabricated with the method of direct writing and superposing grooving in ambient air using femto-second laser pulses and copper, aiming at establishing an industrially useful femto-second laser processing machine to be able to fabricate three dimensional micro-scale structures, especially micro scaled molds, and processing techniques. For the several advantages, there is no thermally influenced region around the area irradiated by the laser beam and surfaces irradiated laser beam are smooth and substances ablated to form are no attached on the surface of works and so on, the femto-second laser technology is anticipated for advanced micro/nano precision technology.

• Journal of Periodontal and Implant Science
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• 제27권4호
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• pp.829-844
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• 1997

Dentin hypersensitivity must be one of the most frequent postoperative complaints in periodontal patients. Obliterating the open dentinal tubules or decreasing the diameter of their orifices would, therefore, be an objective of treatment for hypersensitive teeth. The purpose of this study was to evaluate the effect of a pulsed Nd:YAG laser irradiation on obliteration of dentinal tubules and to determine any difference according to irradiation methods. The 45 posterior teeth that had been extracted due to periodontal disease were initially treated with tetracycline HCI(100 mg/ml, 4 min.) to remove the smear layer after root planing. The root surfaces were then irradiated by a pulsed Nd:YAG laser(EL.EN.EN060, Italy) by different laser beam spot size and different exposure condition: ${\cdot}$ group 1: irradiated group by small spot(beam diameter=1mm, lW, 2 sec) ${\cdot}$ group 2: irradiated group by large spot(beam diameter=10mm, 1W, 200 sec) ${\cdot}$ group 3: irradiated group by gradual increase of watt (from 0.3W to 1.0W), beam diameter=4mm ${\cdot}$ group 4: irradiated group by fixed watt(1.0 W), beam diameter=4mm ${\cdot}$ control group: no irradiation but root planing and tetracycline HCI conditioning only. Additionally, the specimens were retreated with tetracycline HCI(100mg/ml, 4min.) to evaluate the stability of obliteration effect by Nd:YAG laser. Specimens were examined under the scanning electron microscope(JEOL, JSM-840A, Japan). Photomicrographs were taken at ${\times}4,000$ magnification and were analyzed statistically. The results were as follows: l. Scanning electron micrographs of root surface treated by tetracycline HCI alone(control group) showed widened, funnel-shaped dentinal tubules, while those of the root surface irradiated by various methods showed partially or completely obliterated dentinal tubules and various surface alterations, eg, flat, multiple pitted, melted and resolidified surface at the same energy density. 2. There was no significant difference in the obliteration effect of dentinal tubules between group 1 and group 2, and between group 3 and group 4(p>0.05). 3. The obliteration effect of dentinal tubules by a Nd:YAG laser irradiation was relatively stable to tetracycline HCI. The results demonstrate that a pulsed Nd:YAG laser irradiation within 1.0W, regardless of irradiation methods, can obliterate dentinal tubules effectively.

• 융합신호처리학회논문지
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• 제5권1호
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• pp.13-17
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• 2004

망막 촬영 및 다채널 고속 영상 획득 시스템을 개발하였다. 망막 두께 측정은 망막을 3차원으로 촬영하고 고속으로 신호처리를 할 수 있는 시스템을 요구한다. 망막에 레이저를 투사한 후에 반사되어 돌아오는 레이저의 양을 array photo diode를 이용하여 감지하며 이를 3차원 영상화하여 망막의 두께를 측정할 수 있다. 망막에 레이저를 투사하는 장치, APD 광센서를 이용한 망막 영상화 장치, 다채널 고속 A/D 변환장치 및 PCI 인터페이스를 개발하였다. polygon mirror와 galvano mirror를 이용하여 HeNe 레이저 빔을 각각 수평방향과 수직방향으로 주사하여 이미지 평면을 만들어 망막에 투사하였다. APD 어레이 광센서를 이용하여 각 층별로 나타나는 망막영상을 획득하였으며, 이를 실시간으로 A/D 변환하여 PCI 버스를 통해 컴퓨터로 전송하였다.

• 대한기계학회논문집A
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• 제26권9호
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• pp.1727-1735
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• 2002

The usage of beam scanning type laser marker is rapidly increasing in the field of semiconductor equipment. A device called ″beam adjuster″ is employed to adjust the visible diode laser, which points the marking position for various setting. The device is very sensitive to manufacturing tolerance and assembly condition. Axiomatic approach has been applied to the design of the device. An existing design is analyzed based on the Independence Axiom. The existing design is found to violate the axiom. Two new designs are proposed to satisfy the Independence Axiom. The Information Axiom is utilized to evaluate the designs. A design is selected to have the minimum information content. The significance of this research is that a full cycle of axiomatic design is applied to a real engineering product.

• 융복합기술연구소 논문집
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• 제3권2호
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• pp.39-43
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• 2013

Titanium has been used to satisfy various applications such as bio engineering, aerospace, electronics, automobile. Recently, micro fabrication technologies of metals such as titanium have been required to satisfy many conditions in various fields. To satisfy these demands, micro electrochemical process using laser marking can be an alternative method because it is one of the precision machining and efficient process. Micro electrochemical process using laser marking needs to accomplish form of the oxidized recast layer on metal surface by laser marking. The laser beam marking conditions such as average power, pulse repetition rate and marking speed should be properly selected to form oxidized recast layer. So, the characteristics of titanium surface according to laser marking conditions was investigated through SEM(scanning electron microscope), EDS(energy dispersive spectrometer) and surface roughness analysis.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.590-595
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• 2004

The shape and size variations of the nanopatterns produced on a positive photoresist using a near-field scanning optical microscope(NSOM) are investigated with respect to the process variables. A cantilever type nanoprobe having a 100nm aperture at the apex of the pyramidal tip is used with the NSOM and a He-Cd laser at a wavelength of 442nm as the illumination source. Patterning characteristics are examined for different laser beam power at the entrance side of the aperture( $P_{in}$ ), scan speed of the piezo stage(V), repeated scanning over the same pattern, and operation modes of the NSOM(DC and AC modes). The pattern size remained almost the same for equal linear energy density. Pattern size decreased for lower laser beam power and greater scan speed, leading to a minimum pattern width of around 50nm at $P_{in}$ =1.2$\mu$W and V=12$\mu$m/. Direct writing of an arbitrary pattern with a line width of about 150nm was demonstrated to verify the feasibility of this technique for nanomask fabrication. Application on high-density data storage using azopolymer is discussed at the end.

• 한국정밀공학회지
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• 제14권5호
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• pp.15-21
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• 1997

In the stereolithography process, the accuracy of cured shape depends on laser power, scanning speed, scanning pattern, resin characteristics etc. When three-dimensional objects are built, higher laser power gives higher building efficiency. Normally we could control scanning speed and scanning pattern, which affect curing thickness and generate volume of curl in & after building. Olgomer, Monomer and Initiator are major components. Kinds and volume of them decide characteristic of resin. In this paper, we deal with major facts and their characteristics for precision shape building.

• 한국재료학회지
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• 제11권9호
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• pp.792-796
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• 2001

For electron beam lithography and SEM(scanning electron microscopy) applications, miniaturized electrostatic lenses called a microcolumn have been fabricated. In this paper, we report the fabrication technique for 20~30$\mu\textrm{m}$ apertures of electron lenses based on silicon and Mo membrane using an active Q-switched Nd:YAG laser. Experimental conditions of laser micromachining for silicon and Mo membrane are improved. The geometrical structures, such as the diameter and the preciseness of the micron-size aperture are dependent upon the total energy of the laser pulse train, laser pulse width, and the diameter of laser spot.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1996년도 추계학술대회 논문집 학회본부
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• pp.251-253
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• 1996

High temperature superconducting (HTS) target has been irradiated by excimer laser beam. The surface of HTS target has been changed and showed the formation of cones. The laser ablated HTS target surface has been systematically studied using a scanning electron microscope. A KrF excimer laser with a wavelength of 248 nm was used to ablate the HTS YBCO target. The size of laser beam focused on the target showed a rectangular shape of $9.7{\times}2\;mm^2$. The image of SEM shows the difference between the shapes of cones fanned at the boundary and at the center of the ablated area after 1,000 laser pulses.