• KSII Transactions on Internet and Information Systems (TIIS)
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• 제13권5호
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• pp.2529-2543
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• 2019

Scanning electron microscopy (SEM) image can link with the microscopic world through reflecting interaction between electrons and materials. The SEM images are easily subject to blurring distortions during the imaging process. Inspired by the fact that dark channel prior captures the changes to blurred SEM images caused by the blur process, we propose a method to evaluate the SEM images sharpness based on the dark channel prior. A SEM image database is first established with mean opinion score collected as ground truth. For the quality assessment of the SEM image, the dark channel map is generated. Since blurring is typically characterized by the spread of edge, edge of dark channel map is extracted. Then noise is removed by an edge-preserving filter. Finally, the maximum gradient and the average gradient of image are combined to generate the final sharpness score. The experimental results on the SEM blurred image database show that the proposed algorithm outperforms both the existing state-of-the-art image sharpness metrics and the general-purpose no-reference quality metrics.

• 반도체디스플레이기술학회지
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• 제7권1호
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• pp.11-16
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• 2008

Confocal scanning microscopy is a widely used technique for three dimensional measurements because it is characterized by high resolution, high SNR and depth discrimination. Generally an image is generated by moving one optical probe that satisfies the confocal condition on the specimen. Measurement speed is limited by movement speed of the optical probe; scanning speed. To improve measurement speed we increase the number of optical probes. Specimen region to scan is divided by optical probes. Multi-point information each optical probe points to can be obtained simultaneously. Therefore image acquisition speed is increased in proportion to the number of optical probes. And multiple optical probes from red, green and blue laser sources can be used for color imaging and image quality, i.e., contrast, is improved by adding color information by this way. To conclude, this technique contributes to the improvement of measurement speed and image quality.

• 한국광학회:학술대회논문집
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• 한국광학회 2006년도 하계학술발표회 논문집
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• pp.39-40
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• 2006

Digital image-projection and several modifications are the classical applications of Digital Micromirror Devices (DMD), however further applications in the field of optical metrology are also available. Operated with certain patterns, a DMD can function, for instance, as an array of pinholes that may substitute the Galvanic mirror or the stage scanning system presently used for 2 dimensional scanning in confocal microscopes. The various process parameters that influence the result of measurement (e.g. pinhole size, lateral scanning pitch and the number of pinholes used simultaneously, etc.) should be configured precisely for individual measurements by appropriately operating the DMD. This paper presents suitable conditions for the diffraction limited analysis between DMD-optics-CCD to achieve the best performance. Also sampling theorem that is necessary for the image acquisition by scanning system is simulated with OPTISCAN which is the simulator based on the diffraction theory.

• 한국정보통신학회:학술대회논문집
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• 한국정보통신학회 2022년도 추계학술대회
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• pp.553-555
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• 2022

본 논문은 원샷 파노라믹 스캐닝을 기반으로 하는 실시간 자동 얼굴 인식 시스템에 대한 것이다. 한 번의 파노라믹 스캐닝 프로세스를 통하여 실시간으로 다수의 얼굴을 검출하고 사전에 등록된 얼굴을 인식하는 것이다. 한 장의 파노라마 영상 내에서 다수 얼굴 인식을 하는 것이 아닌, 스캐닝 과정에서 얻어진 다수의 영상을 이용하여 얼굴을 인식하도록 한다. 이는 파노라마 영상 생성 시간과 스티칭(Stitching) 오류를 줄임과 동시에 다수 영상의 누적 정보를 활용하여 얼굴 인식 성능을 향상할 수 있다. 이는 간단한 영상 획득 장치만으로 다수 인원의 스마트 출결 시스템과 같은 다양한 응용 프로그램에 사용될 수 있을 것으로 예상한다.

• 한국정밀공학회지
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• 제25권4호
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• pp.53-60
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• 2008

Electron detectors used in scanning electron microscope accept electrons emitted from the specimen and convert them to an electrical signal that, after amplification, is used to modulate the gray-level intensities on a cathode ray tube, producing an image of the specimen. Electron detector is one of the key components dominating the performance of scanning electron microscope so that the development of electron detectors having high performance is indispensable to acquire high quality images using scanning electron microscope. In this paper, we designed and manufactured an electron detector and conducted a couple of image capture experiments using it. In particular, scintillator which generates light photons when it is struck by high-energy electrons was manufactured and experimental studies on the optimization of manufacturing condition was carried out. From experiments to evaluate the performance of our detector, it was verified that the performance of our detector is equivalent to or better than that of the conventional one.

• 대한방사선기술학회지:방사선기술과학
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• 제20권1호
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• pp.15-20
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• 1997

Unlike conventional CT scan, the helical CT scan uses continuous rotating CT equipment with a slip ring to move the patient's coach at a constant speed while continuously scanning. Slice sensitivity profiles in the Z-position(SSPz) using the conventional X-ray CT have a shape similiar to a rectangular wave, which slightly spreads out into plains below the mountain. However, in the helical CT, with an expansion of the base, the rectangular shape collapses and a mouatain-like shape can be seen. We need to investigate the fellowing factors in helical CT scanning;the ability to scan along the axis of the body, effective slice width, slice shape and the precision of coach velocity, Helical scanning with sprial X-ray track is different from the conventional scanning in terms of the principle of image reconstruction performed. We believe that the problems in helical scanning can be solved by understanding new the special parameters such as the bed moving speed and the interval of image reconstruction.

• 전자공학회논문지B
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• 제31B권7호
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• pp.9-15
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• 1994

This paper proposes a image compression algorithm which stores and transmites image data efficiently. The proposed compression algorithm modify enhances compression rate by modified ZIG-ZAG Scanning in JPEG standard algorithm which is based on 2D-DCT. And the up-compatible method of proposed algorithm can solve compatible problem with JPEG that is cased by modified ZIG-ZAG Scanning. And this paper presentes a block diagram of hardware for real-time processing.

• Applied Microscopy
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• 제2권1호
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• pp.39-46
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• 1972

There are many kinds of microscopes suitable for general studies; optical microscopes(OM), conventional transmission electron microscopes (TEM), and scanning electron microscopes(SEM). The optical microscopes and the conventional transmission electron microscopes are very familiar. The images of these microscopes are directly formed on an image plane with one or more image forming lenses. On the other hand, the image of the scanning electron microscope is formed on a fluorescent screen of a cathode ray tube using a scanning system similar to television technique. In this paper, the features and some applications of the scanning electron microscope will be discussed briefly. The recently available scanning electron microscope, combining a resolution of about $200{\AA}$ with great depth of field, is favorable when compared to the replica technique. It avoids the problem of specimen damage and the introduction of artifacts. In addition, it permits the examination of many samples that can not be replicated, and provides a broader range of information. The scanning electron microscope has found application in diverse fields of study including biology, chemistry, materials science, semiconductor technology, and many others. In scanning electron microscopy, the secondary electron method. the backscattererd electron method, and the electromotive force method are most widely used, and the transmitted electron method will become more useful. Change-over of magnification can be easily done by controlling the scanning width of the electron probe. It is possible. to continuously vary the magnification over the range from 100 times to 1.00,000 times without readjustment of focusing. Conclusion: With the development of a scanning. electron microscope, it is now possible to observe almost all-information produced through interactions between substances and electrons in the form of image. When the probe is properly focused on the specimen, changing magnification of specimen orientation does not require any change in focus. This is quite different from the conventional transmission electron microscope. It is worthwhile to note that the typical probe currents of $10^{-10}$ to $10^{-12}\;{\AA}$ are for below the $10^{-5}$ to $10^{-7}\;{\AA}$ of a conventional. transmission microscope. This reduces specimen contamination and specimen damage due to heatings. Outstanding features of the scanning electron microscope include the 'stereoscopic observation of a bulky or fiber specimen in high resolution' and 'observation of potential distribution and electromotive force in semiconductor devices'.

• 한국산학기술학회논문지
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• 제10권8호
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• pp.1869-1876
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• 2009

기존 종이 문서를 영상 파일로 변환하기 위해서 스캐너와 같은 광학기를 사용하게 된다. 스캐닝 과정에서 문서가 제대로 문서 영상으로 생성되었는지를 판단하기 위해서 이미지 품질 검사 과정을 거치게 된다. 이미지 품질검사 과정에서는 스캐너 기기의 특성상 스캐닝 과정에서 발생할 수 있는 문서 영상의 기울기, 노이즈 여부, 문서가 접힌 상태로 스캔되었는지의 여부 등을 체크하게 된다. 이에 본 논문에서는 스캐너를 이용하여 문서 영상을 생성 과정에서 발생하는 기하학적 변형을 평가하기 위한 방법론을 제시한다. 본 연구에서는 품질 검사의 검사 항목에 대해서 영상 처리를 이용하여 각각의 변형 정도를 측정하고 각각의 변형 정도가 실제 문서의 가독성에 얼마나 영향을 미치는지를 OCR 결과 값과 비교한다. OCR 인식 성공 비율과 각 항목별 변형 정도를 나타내는 측정 값 간에 상관관계를 분석하기 위해서 피어슨 상관 계수(Pearson Correlation Coefficient)를 이용하고 이를 기반으로 실제 문서 영상의 변형정도를 평가하기 위한 가중치 값을 산정한다. 제시한 방법으로 평가에서 높은 평가 값으로 계산된 영상 문서는 OCR 인식률에서도 높은 인식 결과를 나타내고 있다.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회A
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• pp.768-772
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• 2008

Various scanning systems have been studied in many industrial areas to acquire a range data or to reconstruct an explicit 3D model. Currently optical technology has been used widely by virtue of noncontactness and high-accuracy. In this paper, we describe a 3D laser scanning system developped to reconstruct the 3D surface of a large-scale object such as a curved-plate of ship-hull. Our scanning system comprises of 4ch-parallel laser vision modules using a triangulation technique. For multi laser vision, calibration method based on least square technique is applied. In global scanning, an effective method without solving difficulty of matching problem among the scanning results of each camera is presented. Also minimal image processing algorithm and robot-based calibration technique are applied. A prototype had been implemented for testing.