• 대한전자공학회논문지TC
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• 제43권1호
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• pp.33-40
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• 2006

Single phase unidirectional transducer (SPUDT), 리플렉터, 웨이퍼 본딩 패키지로 구성된 표면탄성파 (surface acoustic wave, SAW) 기반 압력센서가 개발되어 졌다. Coupling of Mode (COM) 모델링에 의한 소자의 시뮬레이션 및 최적 설계 변수가 얻어졌다. Finite Element Methods (FEM)를 통해 주어진 압력에 따른 다이어프램 벤딩, 스트레인/스트레스 변화 및 SAW 속도변위가 미리 예측되어졌다. 유출된 최적 설계 변수를 이용 440 MHz SAW 기반 압력센서가 41o YX LiNbO3 기판 위에서 제작되어졌다. 고 S/N 비, 임펄스 리프렉션 피크, 작은 에러 피크가 관찰되어졌다. 측정된 S11 결과는 COM 모델링 및 FEM 시뮬레이션 결과와 일치함을 보였다.

• 센서학회지
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• 제17권4호
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• pp.289-294
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• 2008

The purpose of this study is to materialize the viscosity sensor by using the SH-SAW sensor of which the center frequency is operated at higher than 50 MHz. In order to measure the viscosity, SAW sensor of which the center frequency is operated at 100 MHz is developed. By using the developed sensor, phase shift, delay time, insertion loss, and frequency variation are measured at different viscosity. The result shows that the phase shift difference between the viscosity variations is such that the difference between the distilled water and the 100 % glycerol solution is approximately $45^{\circ}$, the change of the insertion loss is approximately 9 dB, and the difference of frequency variation is approximately 5.9 MHz. Therefore, it is shown that viscosity of unknown solution can be measured with the surface acoustic wave sensor.

• 센서학회지
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• 제14권3호
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• pp.186-190
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• 2005

This paper describes the development of a surface acoustic wave gas sensor that is designed to detect volatile gas by monitering phase change of output signal as a function of time. The sensor consists of SAW oscillators with a center frequency of 100 MHz fabricated on $128^{\circ}$ Y-Z $LiNbO_{3}$ substrates. Experimental results, which show the phase change of output signal under the absorption of volatile gas onto sensors, are presented. The proposed sensor has the properties of high sensitivity compare to the conventional SAW gas sensor and chemical selectivity. Thus, it is thought these results are applicable for use in sensor array of an high performance electronic nose system.

• 마이크로전자및패키징학회지
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• 제12권3호
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• pp.267-274
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• 2005

This paper presents the fabrication of surface acoustic wave (SAW)-based pressure sensor for long-term stable mechanical compression force measurement. SAW pressure sensor has many attractive features for practical pressure measurement: no battery requirement, wireless pressure detection especially at hazardous environments, and easy other functionality integrations such as temperature, humidity, and RFID. A $41^{\circ}$ YX $LiNbO_3$ piezoelectric substrate was used because of its high SAW propagation velocity and large values of electromechanical coupling factors $K^2$. A silicon substrate with $\~200{\mu}m$ deep cavity was bonded to the diaphragm with epoxy, in which gold was covered all over the inner cavity in order to confine electromagnetic energy inside the sensor, and provide good isolation of the device from its environment. The reflection coefficient $S_{11}$ was measured using network analyzer. High S/N ratio, sharp reflected peaks, and clear separation between the peaks were observed. As a mechanical compression force was applied to the diaphragm from top with extremely sharp object, the diaphragm was bended, resulting in the phase shifts of the reflected peaks. The phase shifts were modulated depending on the amount of applied mechanical compression force. The measured $S_{11}$ results showed a good agreement with simulated results obtained from equivalent admittance circuit modeling.

• 한국통신학회논문지
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• 제38C권9호
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• pp.813-821
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• 2013

본 논문에서는 공진기의 임피던스 변화에 근거한 생체 신호 센서를 제안한다. 제안된 생체 신호 센서는 호흡과 심장 박동 같은 생체 신호를 감지할 수 있고, 시스템은 공진기, 발진기, SAW 필터, 그리고 파워 감지기로 구성되어있다. 인체와 같은 유전체의 주기적인 움직임은 근거리 장 영역 안에서 공진기의 임피던스 변화를 야기하며, 따라서 공진기의 공진 주파수의 변화는 발진기의 발진 주파수 변화에 영향을 끼친다. 여기서 SAW 필터 저지대역의 가파른 주파수 응답특성은 작은 양의 주파수 편차를 큰 변화로 바꿀 수 있다. 기존의 센서의 감지 거리를 확장시키는 것을 목적으로 ISM 대역 870 MHz 대역에서 동작 시켰으며, 최대 거리 120 mm에서 호흡과 심장 박동신호의 검출을 확인하였다.

• 센서학회지
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• 제3권1호
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• pp.40-45
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• 1994

SAW 가스센서의 기판으로 $112^{\circ}$ rot. x-cut $LiTaO_{3}$ 기판을 사용하였고, 사진식각법으로 reference delay line과 sensing delay line으로 구성된 dual delay line SAW소자를 제작하였다. 각각의 IDT는 전극의 폭이 $10{\mu}m$이고, 10 개의 전극쌍을 갖는다. 각각 두개의 delay line 중에서 reference delay line은 감지막을 증착시키지 않고, sensing delay line은 유기물 반도체의 일종인 Pb-프탈로시아닌을 shadow mask로써 $10^{-5}$torr의 진공하에서 선택적으로 증착시켰다. 제작된 SAW소자로 rf amp.와 AGC(Auto Gain Control)를 사용하여 dual delay line oscillator를 만들었다. 이때 발진주파수는 $87{\sim}$89 MHz였다. 온도와 $NO_{2}$ 가스농도의 변화에 따른 발진주파수의 변화를 조사하였다.

• 한국음향학회지
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• 제16권2호
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• pp.89-94
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• 1997

아황산가스를 감지하기 위해 새로운 CdS 무기박막을 이용한 표면탄성파 센서를 구현하였다. LiTaO$_3$ 단결정 압전기판에 중심주파수 54MHz인 두 개의 SAW 소자 및 발진기를 제작하였으며 아황산가스가 흡착, 탈착할 수 있는 감지막을 지연선 상에 증착시키고 다른 변수로부터의 반응을 보상하기 위해 이중지연선 구조로 제작하였다. CdS 박막은 초음파 노즐을 이용하여 분무 열분해법을 이용하여 증착하였다. 실험결과 표면탄성파 센서는 아황산가스의 농도를 0.25 ppm 까지 검출할 수 있으며 20 ppm 이내의 안정도 및 5분 이내의 빠른 반응시간을 보였다. 또 가스감응 실험의 반복을 통해 센서의 반복성을 확인함으로써 본 연구에서 개발한 센서가 이황산가스 감지용 센서로 사용될 수 있음을 확인하였다. 향후 계획으로 CdS 박막 증착시에 적절한 원소를 첨가하여 박막의 반응성을 증가시키며 또한 표면탄성파 소자의 중심주파수를 증가시켜 센서의 가스감응성을 높이고자 하였다.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2009년도 추계학술대회 논문집
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• pp.376-380
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• 2009

Surface acoustic wave (SAW) device is widely used as a bandpass filter, a chemical or physical sensor, and an actuator. In this paper, we propose the capacitive gap measurement system with high precision through the signal processing using SAW device. The research process is mainly composed of theoretical part and experimental part. In theoretical part, equivalent circuit model was used to simulate the SAW response by the change of capacitance. In experimental part, commercialized capacitor was used to see the SAW response by the change of load capacitance. After that, gap adjustment system was made physically and the SAW response by the change of gap which caused the capacitance change was measured. And resolution and stroke was decided comparing the signal change and basic measurement noise level.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.447-449
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• 2004

The purpose of this study is measured surface acoustic wave(SAW) characteristics to confirm utilization possibility as SAW sensor using new Pb(Mg$_{1}$3/Nb$_{2}$3/) $O_3$-PbTiO$_3$ (PMN-PT) piezoelectric substrate. We have tried to see if the material can be practically available as a new surface acoustic wave (SAW) biosensor to detect protein. The experimental results clarified that the frequency filtering of the central frequency of the PMN-PT substrate is a superior result to that of the LiTaO$_3$ (LT) substrate, but the result was not completely satisfactory. We know there is a problem in the design of inter-digital transducer (IDT) pattern. The waves transferred through the input terminal forms SAW which is sure to be transferred to the direction of the output terminal and the backward direction of the input terminal. This reflected wave is reiterated with SAW, which is transferred to the output direction, and so the frequency filtering gives a not good result. The electromechanical coupling coefficient of the PMN-PT substrate is excellent, and we can use it as a SAW sensor, in the near future, provided that there will be a new IDT design to increase the frequency filtering.

• 센서학회지
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• 제17권2호
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• pp.143-146
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• 2008

Polymer-coated film SAW sensors have been fabricated and their sensing properties for toxic chemicals have been extensively investigated. Four types of the toxic chemical compounds of hydrogen cyanide(AC), carbonyl dichloride(CG), pinacolyl methylfluorophosphonate(GD), 2,2'-dichlorodiethylthio ether(HD) were used as target gases. SAW sensors using five different kinds of polymers were used to detect toxic chemicals and their gas sensing characteristics were investigated. The polymers used as the sensing materials were polyisobutylene(PIB), polyepichlorohydrin(PECH), polydimethylsiloxane(PDMS), polybutadiene(PBD) and polyisoprene(PIP). The recommendable mixing ratio of PIB, PECH, PDMS, PBD and PIP to solvents were 1:30, 1:40, 1:10, 1:30 and 1:30, respectively. The sensing characteristics of the SAW sensors were measured by using E-5061A network analyzer.