• Title/Summary/Keyword: Saw device

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A Study on Design and Fabricate of a Intermediate Frequency Band SAW Filter (IF 대역 SAW 필터 설계 및 제작)

  • 유일현;권희두;정양희
    • The Journal of the Acoustical Society of Korea
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    • v.18 no.1
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    • pp.10-15
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    • 1999
  • We have studied a method to design and fabricate the Intermediate Frequency(IF) band pass filter with low shape factor which is used for CDMA base station on the 35°Y-cut X-propagation Quartz substrate. In order to fabricate a device of the low shape factor for the IF SAW filter on this substrate, we employed apodization weighted type interdigital transducer(IDT) as an input and withdrawal weighted type IDT as an output by using impulse modelling method. Also, using the Kaiser-Bessel window function, we have adopted 2200pairs and 1000pairs of input and oueut IDT respectively to minimize the effect of ripple. Furthermore, the width and the space of IDT finger are 3.6 ㎛ and 3.5 ㎛ respectively. Thus, we can have optimal results when the IDT thickness is 6000Å in consideration of the ratio of SAW's wavelength while it's aperture is 2mm for impedance matching. The fabricated SAW filter for CDMA had the property of almost 115.2MHz of a center frequency, less then 1.27MHz of bandwidth, less than 1.3 of shape factor, - l5dB of out band attenuation insertion loss and -45dB of rejection band.

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Highly sensitive and selective detection of cyanide in aqueous solutions using a surface acoustic wave chemical sensor (표면음향파 화학센서를 이용한 수용액 중 시안화이온의 선택적인 고감도 검출)

  • Lee, Soo Suk
    • The Journal of the Acoustical Society of Korea
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    • v.35 no.6
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    • pp.473-479
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    • 2016
  • We report a highly selective and sensitive 200 MHz Surface Acoustic Wave (SAW) sensor that can detect cyanide ion in aqueous solution using surface immobilized thioester molecules in combination with gold nanoparticles (AuNPs). To construct the sensor device, a monolayer of thioester compound was immobilized on the SAW sensor surface. At the sensor surface, hydrolysis of thioester group by nucleophilic addition of cyanide occurred and the resulting free thiol unit bound to AuNP to form thiol-AuNP conjugate. For the signal enhancement, gold staining signal amplification process was introduced subsequently with gold (III) chloride trihydrate and reducing agent, hydroxylamine hydrochloride. The SAW sensor showed a detection ability of $17.7{\mu}M$ for cyanide in aqueous solution and demonstrated a saturation behavior between the frequency shift and the concentration of cyanide ion. On the other hand, our SAW sensor had no activities for other anions such as fluoride ion, acetate ion and sulfate ion, moreover, no significant interference observed by other anions. Finally, all the experiments were carried out in-house developed sensor and fluidics modules to obtain highly reproducible results.

Improving Sensitivity of SAW-based Pressure Sensor with Metal Ground Shielding over Cavity

  • Lee, Kee-Keun;Hwang, Jeang-Su;Wang, Wen;Kim, Geun-Young;Yang, Sang-Sik
    • Journal of the Microelectronics and Packaging Society
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    • v.12 no.3 s.36
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    • pp.267-274
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    • 2005
  • This paper presents the fabrication of surface acoustic wave (SAW)-based pressure sensor for long-term stable mechanical compression force measurement. SAW pressure sensor has many attractive features for practical pressure measurement: no battery requirement, wireless pressure detection especially at hazardous environments, and easy other functionality integrations such as temperature, humidity, and RFID. A $41^{\circ}$ YX $LiNbO_3$ piezoelectric substrate was used because of its high SAW propagation velocity and large values of electromechanical coupling factors $K^2$. A silicon substrate with $\~200{\mu}m$ deep cavity was bonded to the diaphragm with epoxy, in which gold was covered all over the inner cavity in order to confine electromagnetic energy inside the sensor, and provide good isolation of the device from its environment. The reflection coefficient $S_{11}$ was measured using network analyzer. High S/N ratio, sharp reflected peaks, and clear separation between the peaks were observed. As a mechanical compression force was applied to the diaphragm from top with extremely sharp object, the diaphragm was bended, resulting in the phase shifts of the reflected peaks. The phase shifts were modulated depending on the amount of applied mechanical compression force. The measured $S_{11}$ results showed a good agreement with simulated results obtained from equivalent admittance circuit modeling.

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Application of GC-SAW(Surface Acoustic Wave) Electronic Nose to Classification of Origins and Blended Commercial Brands in Roasted Ground Coffee Beans (GC-SAW(Surface Acoustic Wave) 전자코를 활용한 볶은 커피의 원산지 및 배합 커피의 상품별 분류)

  • Seo, Han-Seok;Kang, Hee-Jin;Jung, Eun-Hee;Hwang, In-Kyeong
    • Korean journal of food and cookery science
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    • v.22 no.3 s.93
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    • pp.299-306
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    • 2006
  • The numerous varieties of coffee beans contain a wide range prices and qualities. While the varieties of green coffee beans can generally be distinguished by their appearance, this visual criterion is impossible after the roasting process. Therefore, we need to develop a classification method or device. In this study, the potential of a new type of electronic nose, fast gas chromatography based on a surface acoustic wave sensor(SAW), was evaluated for the classification of origins and blended commercial brands in roasted coffee beans. Eight blended commercial brands and the origins of four similarly roasted ground coffee beans(with no significant difference of color) were rapidly(90 sec/sample) classified. The reproductive results were easily understandable over the aroma image pattern by $VaporPrint^{TM}$. In conclusion, GC-SAW electronic nose can be applied to the classification of origins and commercial brands in roasted ground coffee beans and to e evaluation of the similarities and differences of volatile pattern between samples.

Development of Battery-free SAW Integrated Microsensor for Real Time Simultaneous Measurement of Humidity and $CO_2$ component (습도와 $CO_2$ 농도의 실시간 동시감지를 위한 무전원 SAW 기반 집적 센서 개발)

  • Lim, Chun-Bae;Lee, Kee-Keun;Wang, Wen;Yang, Sang-Sik
    • Journal of the Microelectronics and Packaging Society
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    • v.16 no.1
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    • pp.13-19
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    • 2009
  • A 440MHz wireless and passive surface acoustic wave (SAW) based chemical sensor was developed on a $41^{\circ}YX\;LiNbO_3$ piezoelectric substrate for simultaneous measurement of $CO_2$ gas and relative humidity (RH) using a reflective delay line pattern as the sensor element. The reflective delay line is composed of an interdigital transducer (IDT) and several shorted grating reflectors. A Teflon AF 2400 and a hydrophilic $SiO_2$ layer were used as $CO_2$ and water vapor sensitive films. The coupling of mode (COM) modeling was conducted to determine optimal device parameters prior to fabrication. According to simulation results, the device was fabricated and then wirelessly measured using the network analyzer. The measured reflective coefficient $S_{11}$ in the time domain showed high signal/noise (S/N) ratio, small signal attenuation, and few spurious peaks. In the $CO_2$ and humidity testing, high sensitivity ($2^{\circ}/ppm$ for $CO_2$ detection and $7.45^{\circ}/%$RH for humidity sensing), good linearity and repeatability were observed in the $CO_2$ concentration ranges of $75{\sim}375ppm$ and humidity levels of $20{\sim}80%$RH. Temperature and humidity compensations were also investigated during the sensitivity evaluation process.

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A Study on the single crystal growth of the optic-grade $LiTaO_3$ as a electro-optic materials

  • Kim, B.k.;J.K. Yoon
    • Proceedings of the Korea Association of Crystal Growth Conference
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    • 1996.06a
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    • pp.526-526
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    • 1996
  • The single crystal of LiTaO3 is well known eletro-optic material as well as the piezoelectric one applied to SAW filter. LiTaO3 has large electro-optic effects, so applied to optical switch, acosto-optic deflector, and optical memory device using photorefractive effects. The crystal growth of SAW-grade LiTaO3 has been studied many aspects, but there is no detail research about optic-grade crystal growth. The conditions of optic-grade LiTaO3 single crystal are as below. The optical transmittance must be over 75%, and axial and radial concentratiom uniformity below 1%. The variation of Curie temperature depending on Li/Ta ratio must be also below 2$^{\circ}C$ and no internal no internal cracks and defects. Because of the limitation of crystal quality, the growing of optic-grade LiTaO3 single crystal is very difficult compared with the growing of SAW-grade. In this research, upper conditions of optic-grade single crystal was investigated after growing of 1 inch diameter and 1.5 inch length LiTaO3 single crystal having no internal cracks and defects using Czochralski method. Curie temperature was determined with DSC and measuring capacitance and lattice parameter was calculated about the grown crystal and ceramic powder samples of various Li/Ta ratio. The result of Tc variation was below 1.2$^{\circ}C$ all over the grown crystal, so it is confirmed that LiTaO3 was grown under congruent melting composition having optical homogeniety. Also, the optical transmittance was about 78%, which was sufficient for optical device.

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Optimization of Slanted and Chirp IDT Configurations for Realizing and Propagating Surface Acoustic Wave with Wide Bandwidth (광대역 표면탄성파 구현을 위한 slanted 및 chirp IDT의 최적화)

  • Lee, Tae-Yoon;Fu, Chen;Lee, Kee-Keun
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.62 no.12
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    • pp.1730-1736
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    • 2013
  • Slanted and chirp interdigital transducer(IDT) configurations were studied for generating the surface acoustic wave(SAW) with wide bandwidths on a piezoelectric substrate. These devices can be applied to manipulate optical path of light along the waveguide, ultimately used for optical switches and holographic image implementation. Prior to fabrication, the coupling of modes(COM) modeling and simulation were performed to extract optimal design parameters. The optimally designed wideband device showed wide bandwidth of 30MHz, low insertion loss of -25dB, and abrupt side suppression ratio (SSR). Several design conditions were determined during device implementation, such as slanted angle, aperture length, number of fingers, and central frequencies of IDTs. These factors were experimentally analyzed and described in details in this paper.

New Structure of SAW Resonator Filters on 64$^{\circ}$YX LiNbO3

  • Roh, Yong-Rae;Kim, Hak-Bong;Lee, Young-Jin;Koh, Kwang-Nak;Lee, Man-Hyung;Kim, Gang-Bo;Kim, Kwang-Hee
    • The Journal of the Acoustical Society of Korea
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    • v.15 no.4E
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    • pp.14-20
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    • 1996
  • The double mode SAW resonator filters have the serious shortcoming that out-of-band rejection above the passband is quite poor. Hence a new structure of the double mode filter is designed with the COM (Coupling Of MOdes) theory with better out-of-band rejection characteristics while keeping all the beauties of the conventional type. The second goal of the design is to reduce the planar size of the structure so that mass productivity of low frequency devices can be improved. For those purposes, several IDT's and relfector gratings are added to or subtracted from the conventional structure so that the modification can lead to better overall performance as a filter. As results of the investigation, several new double mode SAW resonator filter structures are developed. A new structure shows 10dB more out-of-band rejection that the conventional type with 25% reduced device size. Good agreement is demonstrated between the analytical results and experimental results for an illustrative 325MHz four pole resonator filter on 64°YX LiNbO3.

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Growth of Optical Quality $Bi_{12}GeO_{20}$ Crystals and Preparation of SAW-Filter ($Bi_{12}GeO_{20}$단결정 육성 및 표면탄성파 소자 제조)

  • 이태근;정수진
    • Korean Journal of Crystallography
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    • v.2 no.2
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    • pp.32-40
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    • 1991
  • The effects of compositional variation, rotation speel and pulling rate on the growth of optical quality Bi120e02(1 crystals were examined. It was found to flatten the shape of crystal-melt interface for yowing a single crystals less than about 30mm in diameter at the rotation speed of 50rpm. Diameter of crystals with flat interface was increased as the pulling rate. The precipitation of Bi40e3012 phase set limits to pulling rate of BGO crystals. Precipitate-free BGO crystals were grown under pulling rate of 2mm l hr which released the stress resulted from too hi어 Pulling rate, and from 6. IBi203·GeO2 batch composition obtained by addition of 0.1 mole Bi203 into Bi-deficient melts to fill up the deficiency resulted from gradual volatilization of Bi2O). The pale-yellow colored crystals had good quality in that dislocation density was less than 103pits/cm, and it also exhibited transmittance of 70% and optical activity of 23°/mm. and SAW velosity was measured 1700m/sec on 111 cut 110 propagating BGO crystals. The SAW filter with electrode thickness of 9.8um was fabricated by using the electron beam and dry etching technique, it makes Bi12GeO20 devices intersting for color TV IF with half device size.

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Determination of the Optimal Crystal Cut and Propagation Direction of a Piezoelectric Substrate for SAW Devices (탄성표면과 소자용 압전기판의 최적 절단명과 전파방향 결정)

  • Roh, Yong-Rae;Bae, Young-Ho;Chung, Dae-Sik
    • The Journal of the Acoustical Society of Korea
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    • v.13 no.1E
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    • pp.45-54
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    • 1994
  • Characteristics of a piezoelectric material are evaluated to pick up the optimal crystal cut and propagation direction for a SAW device. For the piezoelectric single crystal $LiTaO_4$, such items are investigated as the Rayleigh wave velocity, the electromechanical coupling factor, the surface permittivity, the frequency-temperature coefficient, the air loading attenuation, the pure mode propagation, the beam steering and the misalignment sensitivity. Theoretical calculations reveal that Y-cut and Z-propagation is the optimal SAW propagation path. The results are confirmed through experiments. The method empolyed in this paper is applicable to other crystals, too, either single or poly crystals.

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