• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07a
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• pp.44-47
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• 2004

단일 나노선 연구에 있어서 나노선에 원하는 패턴을 선택적으로 구현하는 새로운 방법을 소개한다. 기존에 많이 쓰였던 SEM(Scanning Electron Microscope) 사진을 통한 나노선의 위치를 찾는 방법은 전자빔에 의해 유도되는 비결정성 탄소입자 등으로 인해 측정하고자하는 나노선의 전기적 특성을 왜곡시킬 수 있다. 이러한 점을 예방하고 작업의 편리성을 위하여 ER(E-beam Resist)이 코팅된 상태에서 바로 SEM을 이용해 패터닝하는 방법을 고안하였다. 또 다른 방법으로 기존의 AFM(Atomic Force Microscope) 사진으로 위치를 찾는 방식의 단점인 긴 작업시간을 개선하기 위해 광학현미경 사진을 이용해 패터닝하는 방법을 고안하였다. 이러한 방법들은 작업의 편리성이나 패턴의 정확도면에서 서로 보완적인 성격을 가지고 있어 필요에 따라 방법을 선택할 수 있다.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.18 no.5
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• pp.455-461
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• 2009

In a scanning electron microscopy, image distortion is a critical issue and it is needed to be eliminated by some kinds of schemes. In this work, scanning frequency and scanning wave form are adjusted to have an improved image. The relationship between scan coil and its driver is investigated and appropriate frequency and wave form are suggested. It is proved that the selected frequency and wave form showed an enhanced image with less distortion, which were done by experiments. In addition, a noise elimination is addressed, providing improved image with a GROUND signal integration with the amplifier and the scan driver.

• Asian-Australasian Journal of Animal Sciences
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• v.15 no.7
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• pp.1018-1021
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• 2002

The objective of this study was to investigate the villus distribution in the caeca of domestic geese based on the fine structure. The caeca of White Roman geese, 14-week old, were sampled and specimens were detected under photomicroscope and scanning electron microscope (SEM). The results indicated that the villi existed at the proximal caecum. The morphologies of these villi showed finger-like, peak-like or tongue-like shapes. The heights of the villi decreased far from the proximal caecum. No villi were found in the middle and distal caecum. It was obvious that the proximal segment was the main portion for absorbing food nutrients in the caeca. The caecal content particles were small and possessed a viscid character. The large particles filtered out at the proximal caecum just like a mesh. The surface of the middle caecum exhibited parallel ridges with no villi. There were band plicae circular shapes found in the middle caecum under scanning electron microsopy.

• Journal of the Korea institute for structural maintenance and inspection
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• v.26 no.3
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• pp.72-83
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• 2022

This paper studied the effect on the microstructure, electrical properties, and compressive strength of cement mortar containing carbon fiber (CF) and steel fiber (SF), which are conductive materials. The resistivity of conductive fiber-reinforced cement mortar (FRCM) was measured using the 4-probe method, and the compressive strength was measured based on the compression test. Their performance was compared and reviewed with plain mortar (PM). Furthermore, the surface shape and composition of the fracture surface of the conductive FRCM were analyzed using a scanning electron microscope (SEM) and an energy disperse X-ray spectrometer (EDS). The results showed that the resistivity gradually increased as the curing time increased in all specimens, whereas the resistivity decreased significantly as the fiber volume fraction increased. Adding steel fibers up to 1.25% did not affect the resistivity of cement mortar considerably. On the contrast, the resistivity of carbon fiber was somewhat decreased even at low contents (ie, 0.1 to 0.3%), and thereafter, it was significantly decreased. The percolation threshold of the conductive CFRCM containing CF used in this experiment was 0.4%, and it is judged to be the optimum carbon fiber dosage to maximize the conductive effect while maintaining the compressive strength performance as much as possible. For the surface shape and composition analysis of conductive FRCM, the fracture surface was observed through SEM-EDS. These results are considered to be very useful in establishing the microstructure mechanism of reinforcing fibers in cement mortars.

• Journal of the Korean GEO-environmental Society
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• v.13 no.5
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• pp.51-57
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• 2012

The purpose of study is to understand the possibility of biogrout of soil induced by bacteria. Microbial Calcium Carbonate Precipitation(MCP) has been analysed using the microorganism Bacillus Pasteurii. In order to understand the biogrout of soft ground treated with microbial calcium carbonate precipitation, four types of specimens(sterilization soil, non-sterilization soil, reaction solution and microorganism solution with pre-treatment mix and reaction solution and microorganism solution with post-treatment mix) were made. Scanning Electron Microscope(SEM), EDX and X-ray diffraction(XRD) analyses were performed on the soft ground specimens. On the basis of the preliminary results, it appears that microbial treatment methods using calcium carbonate precipitation may be possible to improve property of biogrout.

• Clean Technology
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• v.11 no.2
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• pp.105-116
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• 2005

Carboxymethylcellulose(CMC) which is water soluble at room temperature was manufactured from the cellulose material in this study. Experimental parameters were reaction temperature, time and concentration of NaOH and monochloroacetic acid. CMC was tested for solubility, degree of substitution(D.S.) and tensile strength. The surface structure of CMC fiber was tested using scanning electron microscope(SEM). CMC manufactured from viscose rayon was affected by the chemical concentration rather then the reaction time and temperature. Also, degree of substitution is closely related to the solubility of the CMC.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.70.2-70.2
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• 2015

현재 반도체 및 디스플레이이 공정 분야는 1 um 이상의 입자에서부터 10 nm이하 크기의 오염입자를 제어해야 한다. 현재 오염원인을 파악하기 위해서 사용하는 방법은 공정 완료 후 대상물(웨이퍼 및 글래스)을 CD-SEM (Critical Dimension Scanning Electron Microscope)와 같은 첨단 분석장비를 사용하여 사후 (Ex-situ) 진행하고 있다. 이러한 방법은 오염원이 이미 공정 대상물을 오염시키고 난 후 그 원인을 분석하는 방법으로 그 원인을 찾기가 어려울 뿐만 아니라, 최근 공정관리가 공정 진행 중(In-situ) 행해져야 하는 추세로 봤을 때 합당한 방법이라 할 수 없다. 이를 해결하기 위해 진공공정 중 레이저를 이용하여 측정하고자 하는 여러 시도들이 있었지만, 여전히 긍정적인 답변을 보여주지 못하고 있다. 본 발표에서 소개하는 PCDS (Particle Characteristic Diagonosis System)은 PBMS (Particle Beam Mass Spectrometer)와 SEM (Scanning Electron Microscope), 그리고 EDS (Energy Dispersive X-ray Spectroscopy)를 통합하여 만든 시스템으로 진공공정 중 (In-situ) 챔버 내부에서 발생하고 있는 입자의 크기 분포, 입자의 형상, 그리고 입자의 성분을 실시간으로 분석할 수 있는 방법을 제공한다. 이러한 방법 (PCDS)에 대한 개념과 원리, 그리고 현재까지 개발된 단계에서 얻어진 결과에 대해 소개할 것이다.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.3 s.180
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• pp.163-170
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• 2006

Thin films play an important role in many technological applications including microelectronic devices, magnetic storage media, MEMS and surface coatings. It is well known that a thin film's material properties can be very different front the corresponding bulk properties and thus there has been a strong need for the development of a miniature tester to measure the mechanical properties of a thin film. Two testers are designed and set up in small size of 62 mm width, 20 mm depth and 90-120 mm height to fit in a chamber of scanning electron microscope (SEM). One tester has a homemade 0.2 N load cell and a low-priced electromagnetic actuator. The other has a commercial 5 N load cell, a $52{\mu}m$ piezoelectric actuator and some novel grips. Two types of 3.5 microns thick polysilicon specimen are tested to prove the testers' applicability. The strain is measured by the two ways. Firstly, it is measured by an ISDG system in the atmosphere far the reference. Secondly, the same test is repeated in a SEM chamber to monitor the strain as an in-situ experiment. The strain is evaluated by observing the gap change between two markers.

• Journal of the Korean Applied Science and Technology
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• v.28 no.3
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• pp.290-298
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• 2011

Natural Omija belongs to magnoliaceae was known to possess natural odor, taste, color, and various pharmaceutical & chemical characteristics. Omija extraction was extracted using ethanol as a solvent. Omija extract showed a light red-violet color of viscous liquid state. Some conclusions from the result of characteristic experiment were obtained as follows. From the result of antimicrobial experiment, occurrence of staphylococuss aureus and aspergillus niger as microbes was decreased according to the passage of time. This phenomenon could know that Omija component is affected to antimicrobial effect. From the result of dye experiment, fiber dyeing showed with some ivory color after dyed to cotton and silk. This phenomenon could know that Omija component is affected to dyeing effect from observation of scanning electron microscope(SEM). From the result of instrument analysis, inorganic components of K(107.30ppm), Na(2.110ppm), Ca(0.935ppm), Mg(0.891ppm), Li(0.270ppm) etcs from Omija were detected with ICP/OES, and aromatic components of benzene(10.808), a-pinene(13.996), phenol(14.183), ${\beta}$-terpene(15.840), a-terpinolene(17.616) etcs from Omija were also detected with GC/MSD.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.369.2-369.2
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• 2014

Diamond-like Carbon(DLC) films doping Si were deposited by linear ion source(LIS)-physical vapor deposition method on Si wafer. We have studied the effects of Si content on friction and wear properties of DLC films and the characteristics of the films were investigated using Nano-indentation, Micro raman spectroscopy, Field Emission-Scanning Electron Microscope (FM-SEM) and X-ray Photoelectron Spectroscopy (XPS). The films has been various low-friction and low-stress by varying the flow rates of silane gas. Under the about 2% of Si doping is very suitable for improving the adhesion of films and reducing internal stress while maintaining the surfaces hardness of DLC films. Linear ion source (LIS)를 사용하여 Si wafer위에 Si 이온이 첨가된 DLC 박막을 증착하였다. 참가된Si 이온의 양에 따라 DLC 박막에 미치는 영향을 분석하기 위하여 마찰 계수 및 경도를 비교하였고, Micro raman spectroscopy, Field Emission-Scanning Electron Microscope (FM-SEM) and X-ray Photoelectron Spectroscopy (XPS)를 통하여 표면 상태를 분석하였다. 천체 주입된 가스량의 약 2%까지 Si 이온 주입이 늘어날수록 DLC 박막의 마찰계수는 낮아졌고, 경도는 Si 이온이 주입되지 않았을 경우와 비슷한 값(약 20~23 GPa)을 가졌다. 2% 이상의 주입량에서는 마찰계수는 주입량이 늘어날수록 높아졌으며 경도는 떨어지는 경향을 보였다. 이는 Si이온이 2%이하로 첨가되었을 경우, DLC 박막의 생성시 탄소 이온들의 결합 Stress를 줄여 마찰계수가 줄어든다고 볼 수 있으며, 그 양이 2%이상이 되면 오히려 불순물로 작용하여 DLC 박막의 Stress는 급격히 증가하고 마찰계수도 높아짐을 알 수 있다.