• 한국생산제조학회지
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• 제24권3호
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• pp.270-277
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• 2015

In this paper, we describe the production of a specific electrostatic-type scanning electron microscope based on miniaturization for application in other types of vacuum equipment. The initial configuration of the SEM starts with a minimal configuration that allows people to view sample images. After improving the stability of the SEM operation and resolution, we conducted experiments on identifying the characteristics and development of an einzel-type condenser lens with reference to the demagnification lens system of an SEM. The experiments were conducted at an acceleration voltage of 5 kV and we found the shape of the lens to be more reliable than a conventional lens. The lens was then added to improve the resolution in the nanometer region. The current measured on the sample was approximately 40 pA and its magnification was 4,000 times.

• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2011년도 추계학술대회 초록집
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• pp.84.2-84.2
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• 2011

In this research, two thin film deposition techniques, Atomic Layer Deposition and Sputtering are carried out for the fabrication of Yittria Stabilized Zirconia electrolyte for thin film Solid Oxide Fuel Cell. Zirconium to Yittrium ratio for both cases is about 1/8. Scanning Electron Microscope(SEM) image shows that the growth rate per hour for Atomic Layer Deposition is faster than for sputtering. X-ray Photo-electron Spectroscopy(XPS) shows that the peaks of both Zirconia and Yittria shift towards higher bending energy for the case of Atomic Layer deposition and thus are more strongly attached to the substrate. Later, Nyquist plot was used to compare the conductivity of Yittria Stabilized Electrolyte for both cases. The conductivity at $300^{\circ}C$ for Atomic Layer Deposited Yittria Stabilized Zirconia is found to be $5{\times}10^{-4}S/cm$ while that for sputtered Yittria Stabilized Zirconia is $2{\times}10^{-5}S/cm$ at the same temperature. The reason for better performance for Atomic Layered YSZ is believed to be the Nano-structured layer fabrication that aids in along the plane conduction as compared to the columnarly structured Sputtered YSZ.

• 한국식품영양학회지
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• 제1권2호
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• pp.1-8
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• 1988

The morphological changes of fresh beef treated with ficin(0.1% : 35$^{\circ}C$ 2hrs, 6hr,) were examined with scanning electron microscope(SEM), the results obtained were as follows ; Connective tissue protein in fresh beef treated with ficin was occurred solubilization with time and gradually trasformed from a definite form into amorphous form, followed by showing an opening-up phenomenon again and subdivision. Myofibrillar protein was cracked and breaked slightly, followed subdivision with time.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.564-567
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• 2004

In the manufacture of integrated circuits, photolithography is the lowest yield step in present production lines. Electron beams form a powerful set of tools with which to attack this problem. Electron beams can be used to make patterns that are smaller than can a photolithography. We design a high voltage generator of electron beam manufacturing system. For this purpose, first, the configuration of electron beam manufacturing system was analyzed. Second, the basic configuration of a high voltage generator and test results were presented.

• 전자공학회논문지D
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• 제35D권9호
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• pp.26-34
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• 1998

본 논문은 주사전자현미경(SEM)의 전자총을 이용하여 MCM 또는 PCB 회로기판의 신호연결선에서 전압차를 유도시켜 개방/단락 등의 결함을 측정 검사하는 방법을 제시한다. 본 실험에서는 주사전자현미경의 구조를 변형시키지 알고 회로기판의 개방/단락 검사를 실시할 수 있는 이중전위전자빔(Dual Potential) 검사방법을 사용한다. 이중전위전자빔(Dual Potential) 측정검사 방법은 이차전자수율 값 δ의 차이를 유기시키는 δ < 1 인 충전 전자빔과 δ > 1 인 읽기 전자빔을 사용하여 한 개의 전자총이 각각 다른 가속전압에 의해 생성된 두 개의 전자빔으로 측정하는 방법으로 특정 회로네트에 대한 개방/단락 등의 측정 검사가 가능하다. 또한 읽기 전자빔을 이용할 경우 검사한 회로 네트를 방전시킬 수 있어 기판 도체에 유기된 전압차를 없앨 수 있는 방전시험도 실시할 수 있어, 많은 수의 회로네트를 지닌 회로 기판에 대해 측정 검사할 때 충전되어 있는 회로네트에 대한 측정오류를 줄일 수 있다. 측정검사를 실시한 결과 glass-epoxy 회로기판 위에 실장된 구리(Cu) 신호연결선은 7KeV의 충전 전자빔으로 충전시키고 10초 이내에 주사전자현미경을 읽기 모드로 바꾸어 2KeV의 읽기 전자빔으로 구리표면에서의 명암 밝기 차이를 읽어 개방/단락 상태를 검사할 수 있었다. 또한 IC 칩의 Au 패드와 BGA의 Au 도금된 Cu 회로패드를 검사한 결과도 7KeV 충전 전자빔과 2KeV 읽기 전자빔으로 IC칩 내부회로에서의 개방 단락 상태를 쉽게 검사할 수 있었다. 이 검사방법은 주사전자현미경에 있는 한 개의 전자총으로 비파괴적으로 회로 기판의 신호 연결선의 개방/단락 상태를 측정 검사할 수 있음을 보여 주었다.

• 한국정밀공학회지
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• 제29권5호
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• pp.554-562
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• 2012

Processing of Scanning electron microscope imaging has been analyzed in both secondary electron (SE) imaging and backscattered electron (BSE) image. Because of unique characteristics of both secondary electron and backscattered electron image, mechanism of imaging process and image quality are quite different each other. For the sake of characterize imaging process, Monte Carlo simulation code have been developed. It simulates electron penetration and depth profile in certain material. In addition, secondary electron and backscattered electron generation process as well as their spatial distribution and energy characteristics can be simulated. Geometries that has fundamental feature have been imaged using the developed Monte Carlo code. Two, SE and BSE images generation process will be discussed. BSE imaging process can be readily used to discriminate in both material and geometry by simply changing position and direction of BSE detector. The developed MC code could be useful to design BSE detector and their position. Furthermore, surface reconstruction technique is possibly developed at the further research efforts. Basics of Monte Carlo simulation method will be discussed as well as characteristics of SE and BSE images.

• 한국생산제조학회지
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• 제24권3호
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• pp.314-319
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• 2015

Invar is a compound metal of Fe-Ni system contained 36.5% Ni. The characteristic of invar is that the coefficient of thermal expansion is $1.0{\times}10^{-6}cm/^{\circ}C$. It is approximately 10 times smaller than series of steel. Because of this low thermal expansion characteristic of Invar, it is used to shadow mask of display device such as UHDTV or OLED TV. In this study, pulse current from pulse generator instead of DC current is used to overcome the disadvantages of the conventional electrochemical machining. Pulsed current with different duty factor in PECM affect the precise geometry. Pulse electrochemical machining is conducted to machine the micro hole to the invar sheet with different duty factor. The machined shape and overcut of invar sheet with different duty factor is observed by optical microscope and scanning electron microscope (SEM).

• 대한한의학회지
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• 제23권4호
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• pp.27-31
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• 2002

Background and Purpose: There has been little study about the quality of acupuncture needle tips. In order to ensure safe acupuncture treatment, high quality of needle tips is essential. Therefore, we investigated the current condition of the tips of the acupuncture needles on the market. Methods: We selected needles made by 6 companies in Korea, one company each in Japan, the USA and China, and observed the tip of each needle using a scanning electron microscope. Results and Discussion: We found that needles had several defects such as scratch marks on the surface, metallic scuff, lumps and irregularities of the needle tips, stubbed or malformed tips, tips of point off-center, and peeled off coated tips. There were more faulty ones than good ones. Further, better-designed study with a bigger sample size is warranted.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2007년도 추계학술대회 논문집
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• pp.154-157
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• 2007

The austenite phase observed in low carbon HSLA steels is well known to be decomposed to various bainitic microstructures, such as granular bainite, acicular ferrite and bainitic ferrite during continuous cooling process. These bainitic microstructures have been usually identified by using either scanning electron microscope (SEM) or transmission electron microscope (TEM). However, SEM and TEM images do no exactly coincide, because of the quite different sample preparation method in SEM and TEM observations. These conventional analysis method is, thus, not suitable for characterization of the complex bainitic microstructure. In this study, focused ion beam (FIB) technique was applied to make site-specific TEM specimens and to identify the 3-dimensional grain morphologies of the bainitic microstructure. The morphological feature and grain boundary characteristics of each bainitic microstructure were exactly identified.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2015년도 춘계학술대회 논문집
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• pp.112-112
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• 2015

The purposed of this work was to determine nanotube shape variation on the Ti-xNb alloys with alloying elements and applied potentials. Samples were prepared by arc melting, followed by followed by homogenization for 12 hr at $1000^{\circ}C$ in argon atmosphere. This study was evaluated the phase and microstructure of Ti-xNb alloys using an X-ray diffraction (XRD) and optical microscopy (OM). The morphology of the samples was investigated with a field-emission scanning electron microscope (FE-SEM) and energy dispersive X-ray spectroscopy (EDS). The nanotube on the alloy surface was formed in 1 M $H_3PO_4$ with small additions of NaF 0.8 wt.%. All anodization treatments were carried out using a scanning potentiostat (Model 362, EG&G, USA) at constant voltage 30 V for 120 min, respectively. The morphology of the samples was investigated with a field-emission scanning electron microscope (FE-SEM) and energy dispersive X-ray spectroscopy (EDS). Surface characteristics of nanotbue formed on Ti-xNb alloys was investigated by potentiodynamic test and potentiostatic in 0.9% NaCl solution at $36.5{\pm}1^{\circ}C$. It was observed that the changed ${\alpha}$ phase to ${\beta}$ phase with Nb content.