• 제목/요약/키워드: SEM(Scanning Electron Microscopy)

검색결과 2,620건 처리시간 0.03초

Fabrication of Single Crystal Poly (3,4-ethylenedioxythiophene) Nanowire Arrays by Vapor Phase Polymerization with Liquid-bridge-mediated Nanotransfer Molding

  • 이기석;조보람;성명모
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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    • pp.372-372
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    • 2012
  • We have studied a fabrication of Poly (3,4-ethylenedioxythiophene) (PEDOT) wire arrays and structures with various feature sizes from hundreds micrometers to tens nanometers. PEDOT is well-known as a conducting material, can be grown by a vapor pressure polymerization (VPP) method. The VPP technique is a bottom-up processing method that utilizes the organic arrangement of macromolecules to easily produce ordered aggregates. Also, liquid-bridge-mediated nanotransfer molding (LB-nTM), which was reported as a new direct patterning method recently, is based on the direct transfer of various materials from a mould to a substrate through a liquid bridge between them. The PEDOT nanowires grown by VPP method and transferred on a substrate to use LB-nTM method have been investigated by Scanning Electron Microscopy (SEM), Transmission Electron Microscopy (TEM), Selected Area Electron Diffraction (SAED), X-Ray Diffraction (XRD), X-ray Photoelectron Spectroscopy (XPS), and electrical properties.

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산화막과 금속박막 계면에서의 adhesion 개선을 위한 열처리 (Annealing for Improving adhesion between Metal layer and Oxide layer)

  • 김응수
    • 대한전자공학회:학술대회논문집
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    • 대한전자공학회 2002년도 하계종합학술대회 논문집(2)
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    • pp.225-228
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    • 2002
  • The adhesion effect between the oxide layer and the metal layer has been studied by RTP anneal. Two types of oxides, BPSG and P-TEOS, were used as a bottom layer under multi-layered metal film. We observe the interface between oxide and metal layer using SEM (scanning electron microscopy), TEM (transmission electron microscopy), AES (auger electron spectroscopy). Adhesion failure was occurred by interfacial reaction between the BPSG oxide and the multi-layered metal film at 650"C RTP anneal. The phosphorus rich layer was observed at interface between BPSG oxide and metal layer by AES and TEM measurements. On the other hand adhesion was a)ways good in the sample used P-TEOS oxide as a bottom layer. We have known that adhesion between BPSG and multi-layered metal film was improved when the sample was annealed below $650^{\circ}C$.TEX>.

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Co-sputter로 증착된 core rod 대체물질의 고온 확산 현상 (Diffusion of co-sputtered refractory metal films at high temperature)

  • 최준명;송이화;김희영;박승빈
    • 한국신재생에너지학회:학술대회논문집
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    • 한국신재생에너지학회 2007년도 추계학술대회 논문집
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    • pp.301-304
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    • 2007
  • 다결정 태양전지의 원료인 폴리실리콘을 생산하는 방법 중 하나인 지멘스 방법에서 사용되는 실리콘 코어로드를 금속 계열의 코어로드로 대체하기 위한 연구를 진행하였다. 본 연구에서는 실리콘 코어로드의 대체물질 후보로서 고융점 금속인 텅스텐, 탄탈륨, 몰리브덴을 선택하였고, co-sputtering system을 이용하여 다성분계의 박막을 실리콘 기판에 증착시켜 $800^{cdot}C$에서 $1000^{cdot}C$의 고온에서 열처리 후 박막의 형상변화 및 확산정도를 관찰하였다. 열처리 온도에 따른 박막의 형상 및 확산 정도를 관찰하기 위하여 Scanning electron microscopy (SEM), X-ray diffractometer(XRD), transmission electron microscopy(TEM), auger electron spectroscopy(AES)가 사용되었다.

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Fabrication of Single Crystal Poly(3,4-ethylenedioxythiophene) Nanowire Arrays

  • Cho, Bo-Ram;Sung, Myung-M.
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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    • pp.537-537
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    • 2012
  • We have studied a fabrication of vapor phase polymerized Poly(3,4-ethylenedioxythiophene) (PEDOT) nanowire arrays for the first time. The vapor-phase polymerization (VPP) technique is a bottom-up processing method that utilizes the organic arrangement of macromolecules to easily produce ordered aggregates, including on the nanoscale, or prepare thin films of self-assembled molecules, micropatterns, or modified microstructures of pure conducting polymers. Also, liquid-bridge-mediated nanotransfer molding (LB-nTM), which was reported as a new direct patterning method recently, is for the arrayed formation of two- or three-dimensional structures with feature sizes as small as tens of nanometers over large areas up to 4 inches across and is based on the direct transfer of various materials from a mould to a substrate through a liquid bridge between them. The PEDOT nanowires grown by VPP method and transferred on a substrate to use LB-nTM method have been fabricated to single crystal PEDOT nanowires investigated Scanning Electron Microscopy (SEM), Transmission Electron Microscopy (TEM), Selected Area Electron Diffraction (SAED), X-Ray Diffraction (XRD), X-ray Photoelectron Spectroscopy (XPS), and electrical properties.

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Nd:YAG 레이저에 의한 폴리테트라플루오르에틸렌 박막 증착 (Deposition of Polytetrafluoroethylene Thin Films by IR-pulsed Laser Ablation)

  • 박훈;서유석;홍진수;채희백
    • 한국산학기술학회논문지
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    • 제6권1호
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    • pp.58-63
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    • 2005
  • 레이저 용발법을 이용하여 폴리테트라플루오르에틸렌(PTFE: polytetrafluoroethylene) 박막을 증착하였다 사용한 레이저는 1064 nm Nd:YAG 레이저이고, 타겟은 그라파이트 분말이 도핑된 PTFE 펠릿(pellet) 이었다. 그라파이트는 포톤에너지를 효과적으로 흡수하여 열에너지로 전환시키고, 이 에너지를 인접한 PTFE에 전달한다. PTFE는 전달받은 열에너지에 의해서 열분해 된다. 타겟 표면에서 열분해에 의해 형성된 PTFE 단량체(monomer)들은 기판위에서 재중합반응(repolymerization)하여 필름을 형성하게 된다. 증착된 필름은 투명하고 결정화된 필름이었다. 주사전자현미경(SEM: scanning electron microscopy)과 원자현미경(AFM: atomic force microscopy)으로 분석한 결과, 필름의 표면은 박막의 두께가 증가할수록 섬유구조(fibrous structure)를 보였다. X선 광전자 분광기(XPS: X-ray photoelectron spectroscopy), 퓨리에 변화 적외선 분광기(FTIR: fouirer transform infrared spectroscopy)와 X선 회절분광기(XRD: X-ray diffraction)로 분석한 결과, 필름의 F/C 비는 1.7이고 분자축(molecular axis)은 기판과 나란했다.

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폐태양전지(廢太陽電池)용 솔라리본으로부터 구리회수(回收)에 관한 연구(硏究) (Recovery of Copper from Spent Photovoltaic Ribbon in Solar Module)

  • 이진석;장보윤;김준수;안영수;강기환;왕제필
    • 자원리싸이클링
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    • 제22권5호
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    • pp.50-55
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    • 2013
  • 폐 태양광 전지내의 구리리본전극으로부터 구리를 회수하기 위해 불활성 가스분위기하에서 $300-600^{\circ}C$로 열처리 하였다. 구리리본전극의 코팅층은 68.99 wt.%의 납과 31.21 wt.%의 주석으로 구성되어 있는데, 각각의 온도에서 코팅층을 용해한 후 반응도가니에 용해된 코팅층 회수하였다. 열처리 후 회수되어진 코팅층은 ICP-MS (Inductively coupled plasma mass spectrometry)로 성분 분석을 실시하였으며, 온도범위에 관계없이 95 wt.% 이상의 구리순도를 얻을 수 있었다. 구리리본전극 샘플의 횡단면은 SEM (scanning electron microscopy) and EDX (energy dispersive X-ray microscopy)로 관찰하였다.

Structural and Dielectric Studies of LLDPE/O-MMT Nanocomposites

  • Zazoum, Bouchaib;David, Eric;Ngo, Anh Dung
    • Transactions on Electrical and Electronic Materials
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    • 제15권5호
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    • pp.235-240
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    • 2014
  • Nanocomposites made of linear low density polyethylene (LLDPE) and organo-modified montmorillonite (O-MMT) were processed by melt compounding from a commercially available premixed LLDPE/nanoclay masterbatch, at different nanoclay loadings, by co-rotating twin-screw extruder. The morphological and dielectric properties of LLDPE/O-MMT nanocomposites were investigated to understand the structure-dielectric properties relationship in the nanocomposites. The microstructures of the materials were characterized by wide angle X-ray diffraction (WAXD), scanning electron microscopy (SEM), transmission electron microscopy (TEM) and atomic force microscopy (AFM). Initial findings by FTIR spectroscopy characterization indicated the absence of any chemical interaction between LLDPE and nanoclay during the extrusion process, while DSC showed that a 1% wt loading of nanoclay particles increased the degree of crystallinity of the nanocomposites samples. On the other hand, XRD, SEM, TEM and AFM indicated that nanoclay layers were intercalated or exfoliated in the LLDPE matrix. A correlation between the structure and dielectric properties of LLDPE/O-MMT nanocomposites was found and discussed.

Observations on the structural changes of embryos of Paeonia rockii L. by low-energy ion irradiation

  • Zhang, D.M.;Cui, F.Z.;Lin, Y.B.
    • 한국진공학회지
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    • 제7권s1호
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    • pp.37-43
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    • 1998
  • The mechanism of interaction between low energy ions and biological organisms has been paid much attention recently. In order to clarify the microstructural response to low energy ion irradiation embryonic cells of Paeonia rockii L. implanted by $Fe^{1+}$ ions with the energy of 80KeV were investigated by Optical Microscopy (OM), Scanning electron Microscopy(SEM) and Transmission Electron Microscopy(TEM). At the dose of 1$\times$1015 ions/$\textrm{cm}^2$, apparent cellular damage was observed in the outer several layers of the radicle. The shape of the cells was obviously deformed from regular polygon to irregular. The cell walls became obscure. SEM micrographs showed that the surface of the radicle was etched severely. It was observed by TEM that nucleus of the implanted cell was elongated and tended to fracture. Nuclear envelope lost its integrity. The implanted $Fe^{1+}$ ions were detected by Energy Dispersive Spectroscopy (EDS). These observations showed that low energy ions could damage to the plant organisms with the thickness of about 30~50$\mu\textrm{m}$. The possible reasons for radiation damage in the biological organisms were discussed.

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Studies on the Biology and Predatory Behaviour of Eocanthecona furcellata (Wolff.) Predating on Spilarctia obliqua (Walk.) in Mulberry Plantation

  • Kumar, Vineet;Morrison, M.N.;Rajadurai, S.;Babu, A.M.;Thiagarajan, V.;Datta, R.K.
    • International Journal of Industrial Entomology and Biomaterials
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    • 제2권2호
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    • pp.173-180
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    • 2001
  • The stink bug, Eocanthecona furcellata (Wolff.) is a natural and potential biocontrol agent of Spilarctia obliqua (Walk.). The present investigation reveals the biology, predatory efficiency and reproductive parameters of the predator which feeds on S. obliqua caterpillars in mulberry plantation. In order to find out the role of prey sine on the biology of the predators the predatory insects were separately fed with small and large caterpillars of S. obliqua. The incubation period of the eggs of E. furcellata was 8.37${\pm}$0.44 days, while the nymphal duration varied as per the prey sine. The predator when supplied with small larvae of prey, consumed 61.1 larvae and completed nymphal stage in 19.9 days; while those fed with larger prey, consumed 36.1 larvae and completed their nymphal stage in 21.55 days. The prey size also influences the reproductive parameters of the predator, The adult female predator is more voracious feeder than the adult male and consumed 41.9${\pm}$0.64 small larvae and 42.2${\pm}$0.87 large larvae during their life span. The longevity of male and female was observed as 20.7 and 29.4 days respectively. Visualization of the predator as well as the movement of the prey increases the predatory efficiency. Scanning electron microscopic studies on the feeding part explain its support in effective predation. Field observations indicated a drastic fall in the incidence of the mulberry pest, S. obliqua with the increased population E. furcellata in mulberry plantation.

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리튬 이차 전지를 위한 음극 활물질 표면의 코팅으로 인한 전기화학적 특성 및 안전성 (The Effect of Electrochemical Performance and Safety by Surface Modification of Anode Materials for Lithium Secondary Battery)

  • 허윤정;고성태
    • 전기화학회지
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    • 제12권3호
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    • pp.239-244
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    • 2009
  • 리튬 이차 전지의 전기화학적 특성 및 안전성 향상을 위한 음극 활물질 표면 처리 재료로 $Al_2O_3$$nano-Li_4Ti_5O_{12}$등이 사용된다. 표면 처리된 음극 활물질의 형상과 특성을 관찰하기 위해 주사전자현미경(Scanning electron microscopy, SEM), 투과전자현미경(Transmission electron microscopy, TEM)으로 관찰하였으며, 전기화학적 특성 및 안전성 평가를 위해 충방전기 및 가속 율열량계(Accelerating Rate Calorimeter, ARC)를 사용하였다. 각각의 금속 산화물에 따른 초기 효율 및 초기 용량은 82.5%와 350mAh/g로 동일하지만, 충방전 율속에 따른 특성 및 수명, 그리고 열적 안전성은 $nano-Li_4Ti_5O_{12}$로 음극 활물질을 표면 처리 한 활물질이 더 우수하였다.