• Transactions of the Society of Information Storage Systems
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• v.8 no.1
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• pp.16-21
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• 2012

SAW device is widely used as filters, sensors, actuators in various technologies. And capacitive sensor is tremendously used to measure pressure, gap, etc. The application of SAW device as signal conditioner of capacitive sensor reduces noise level and enables high precision measurement. The response increase of SAW based capacitive sensor is produced just before the two capacitive electrode contacts by the existence of parasitic resistance of capacitive electrode. In this paper, we analyze the effects of parasitic resistance and propose the calibrating method using lumped component and execute the high precision gap measurement using calibrated system. And xx nm resolution and yy ${\mu}m$ stroke was attained.

• Journal of Sensor Science and Technology
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• v.19 no.5
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• pp.337-341
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• 2010

In this work, the nanocrystalline ZnO/polycrystalline(poly) aluminum nitride(AlN)/ Si-layered structure was fabricated for humidity sensor applications based on surface acoustic wave(SAW). The ZnO film was used as a sensitive material layer. The ZnO and AlN(0002) were deposited by a sol-gel process and a pulse reactive magnetron sputtering, respectively. The ZnO sensitive films coated on AlN have a hexagonal wurtzite structure after the thin films annealed at $400^{\circ}C$, $500^{\circ}C$ and $600^{\circ}C$. The surface of the film exhibits sponginess and a nanometer particle size(below 50 nm). The largest shift in the frequency response was at approximately 200 kHz(the relative humidity: 10 %~90 %) for the structure annealed at $400^{\circ}C$. The effect of the change in the environmental temperature on the frequency response of the SAW humidity sensor was also investigated.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.05a
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• pp.557-558
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• 2010

• International Journal of Korean Welding Society
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• v.1 no.1
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• pp.1-6
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• 2001

This paper describes several advances in sensor and process control techniques for applications in Submerged Arc Welding (SAW), which combine to give a fully automatic system capable of controlling and adapting the overall welding process. This technology has been applied in longitudinal and spiral pipe mills and in pressure vessel production.

• The Journal of the Acoustical Society of Korea
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• v.35 no.6
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• pp.473-479
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• 2016

We report a highly selective and sensitive 200 MHz Surface Acoustic Wave (SAW) sensor that can detect cyanide ion in aqueous solution using surface immobilized thioester molecules in combination with gold nanoparticles (AuNPs). To construct the sensor device, a monolayer of thioester compound was immobilized on the SAW sensor surface. At the sensor surface, hydrolysis of thioester group by nucleophilic addition of cyanide occurred and the resulting free thiol unit bound to AuNP to form thiol-AuNP conjugate. For the signal enhancement, gold staining signal amplification process was introduced subsequently with gold (III) chloride trihydrate and reducing agent, hydroxylamine hydrochloride. The SAW sensor showed a detection ability of $17.7{\mu}M$ for cyanide in aqueous solution and demonstrated a saturation behavior between the frequency shift and the concentration of cyanide ion. On the other hand, our SAW sensor had no activities for other anions such as fluoride ion, acetate ion and sulfate ion, moreover, no significant interference observed by other anions. Finally, all the experiments were carried out in-house developed sensor and fluidics modules to obtain highly reproducible results.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.63 no.4
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• pp.495-501
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• 2014

Piezoresistive-type, capacitive-type, and optical-type sensors have mainly been used for measuring a strain. However, in building a sensor network for remote monitoring using these conventional sensors there are disadvantages such as the complexity of a measuring system including wireless communication circuitry and high cost. In this paper, we demonstrates a highly-sensitive surface acoustic wave (SAW) strain sensor which is advantageous to harsh environments and wireless network. We designed and fabricated the SAW strain sensor. The SAW strain sensor attached on a specimen was tested with a tensile tester. The strain on the sensor surface was measured with a commercial strain gauge and compared with that obtained from strain analysis. The central frequency shift of the SAW sensor was measured with a network analyzer. The sensitivity of the SAW strain sensor is 134 $Hz/{\mu}{\varepsilon}$ which is high compared to previous results.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.4 s.181
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• pp.139-145
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• 2006

This paper presents the design and manufacturing of a sensor using SAW and delay line in order to measure temperature. SAW sensors having single and double electrodes are manufactured on the $128^{\circ}YX-LiNbO_3$ substrate, and its process is addressed. Before manufacturing, the device is simulated using a commercial finite element program. The frequency responses of the saw sensor on the temperature change is measured. Since the center frequency on the temperature change from $-30^{\circ}C$ to $80^{\circ}C$ is linearly changed, the saw sensor is applicable to measure the temperature change or strain variation.

• Journal of Advanced Navigation Technology
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• v.27 no.4
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• pp.469-472
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• 2023

If temperature management is required in factory or environmental monitoring, temperature can be measured by connecting various sensors wired or wirelessly. Surface acoustic wave sensors measure temperature using changes in acoustic waves on the sensor surface according to temperature, and are useful for wireless networks. In this paper, in order to build a wireless temperature measurement system in the 900 MHz frequency band, the temperature characteristics of the passive SAW sensor were measured, and the analysis and removal of multipath reflection wave effect inside the high temperature chamber were conducted. The resonant frequency of the SAW sensor was measured, and radio transmission/reception and multipath reflected wave removal techniques were proposed in the shielded chamber.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2010.10a
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• pp.537-537
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• 2010

High precision sensing is very important in various technologies. Especially, it is more important when it were applied to nano/micro meter level's sensing like AFM, storage, etc. And capacitive sensing is widely used method. To improve the measurement efficiency, many signal conditioners were studied and one of them was surface acoustic wave (SAW) device. SAW device is very widely used as a high frequency bandwidth filter. Due to the reflective characteristic of high frequency, the response of SAW device contains both propagative and reflective signal at the external impedance. In this paper, we used SAW device as signal conditioner of capacitive sensor. And high precision gap measurement was executed using capacitive load. Reference signal was reflective SAW response and the magnitude at the center frequency of SAW device by the change of impedance was checked. Finally, the attainable gap resolution was determined.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.11a
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• pp.251-252
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• 2006

A development of surface acoustic wave gas sensor to detecting volatile gas has been observed by monitoring output signal as function of time onto the network analyzer. The SAW sensor with a center frequency of 200MHz was fabricated on $42^{\circ}$ S-T Quartz substrates. Using the gas chromatography column has been selectivity. Experimental results, which show the phase change of output signal under the absorption of volatile gas onto sensors, were presented. The proposed sensor has the properties of high sensitivity compare to the conventional SAW gas sensor and chemical selectivity. Thus, it is thought these results are applicable for use in sensor array of an high performance electronic nose system.