• The Transactions of the Korean Institute of Electrical Engineers C
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• v.52 no.8
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• pp.319-324
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• 2003

AIN thin films are deposited on Si (100) and $SiO_2$/Si substrates by using an RF magnetron sputtering method and by changing the conditions of deposition variables, such as RF power, $N_2$/Ar flow ratio, and substrate temperature ($T_sub$). For all the deposited AIN films, XRD Peak patterns are monitored to examine the effect of deposition condition on the crystal orientation. Highly (002)-oriented AIN films are obtained at following nominal deposition conditions; RF Power : 350W, $N_2$/Ar ratio = 10/20, T$_{sub}$ : $250^{\circ}C$, and working pressure = 5mTorr, respectively. AIN-based SAW devices are fabricated using a lift-off method by varying the thickness of AIN layer. Insertion losses and side-lobe rejection levels of fabricated SAW devices are extracted from their frequency response characteristics, which are also compared in terms of AIN thickness and substrate. Relationships between the film properties of AIN films and the frequency responses of SAW devices are discussed. It is concluded from the experimental results that the (002)-preferred orientation as well as the surface roughness of AIN film may play a crucial role of determining the device performances of AIN-SAW devices.s.

• Korean Journal of Plant Resources
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• v.34 no.5
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• pp.420-432
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• 2021

This study was conducted to evaluate antioxidant, antibacterial, anti-inflammatory, and digestive enzyme activity in water extract (SAW) and 60% ethanol extract (SAE) from Stachys sieboldii. As the treatment concentration of each extract S. sieboldii extract increased, antibacterial and antioxidant activity increased. The total polyphenol and total flavonoid contents of SAW were 106.25 ± 0.94 mgGAE/g, 24.4 ± 0.24 mgQE/g and SAE were 124.61 ± 1.11 mgGAE/g, 45.2 ± 3.52 mgQE/g, respectively. The 400 ㎍/mL of SAW and SAE performed more than 53% protective effects against oxidative stress in HepG2 cell lines. All extracts were not showed cytotoxicity to RAW 264.7 cell line at 100 ㎍/mL. NO production was reduced to 44.3 ± 1.4% for SAW and 45.1 ± 1.0% for SAE at a concentration of 100 ㎍/mL. The production of inflammatory cytokines each TNF-α, IL-1β, and IL-6 was inhibited in a concentration-dependent. S. sieboldii extract did not showed Caco-2 cells cytotoxicity and inhibited NO production in concentration-dependent. As the concentration of the S. sieboldii extract increased of α-amylase and protease enzymes activity, which are digestive enzyme. As a result of the experiment, it is judged that it can be used as basic data for the development of health food using S. sieboldii.

• Proceedings of the IEEK Conference
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• 2000.06b
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• pp.5-8
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• 2000

This paper proposes GaN film as a piezoelectric material for SAW(surface acoustic wave) filters. The fabricated GaN SAW filter exhibited a very high velocity of 5800 ㎧and relatively low insertion loss of -9.9 dB without matching circuit. From Smith's equivalent circuit model, the calculated electromechanical coupling factor (K$^2$) was about 4.$\pm$03％. which is larger than those obtained from other thin film piezoelectric materials and allows the realization of wider filter fractional bandwidths.

• 전기의세계
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• v.31 no.2
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• pp.141-146
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• 1982

In this paper, surface acoustic wave (SAW) bandpass filter is designed using the Fourier series approach and the I$_{0}$-shin window function. And also we studied a method to realize SAW filter using the apodized ID transducer which was fabricated with aluminum metallization of about 1500 A over .deg. thickness on Y-cut Z-propagating LiNbO$_{3}$, crystal by photolithographic technique (lift-off method). Experimental results on SAW bandpass filter responses show good agreements with the theoretical characteristics.s.

• Proceedings of the IEEK Conference
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• 1999.11a
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• pp.173-176
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• 1999

Frequency responses of the surface acoustic wave(SAW) filters are simulated by using the impulse modeling. The simulation technique of the SAW filters is to use the Fourier transformation to make a correspondence between the impulse response of the filter and the taps in the delay line. Since the Fourier series must be truncated after a finite number of terms, window functions are often used to weight the coefficients to obtain the desirable side-lobe level and bandwidth. The filter design is operated through the iterative simulation procedures. The design process is capable of yielding filters with optimized frequency response characteristics.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.05c
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• pp.247-250
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• 2002

SAW filters were fabricated on $LiNbO_3$ substrates to evaluate frequency response and properties of photolithography. In the both of etch and lift-off methods, lift off method was superior to etch method in fabrication process. Frequency response property was measured by network analyzer. From measurement of acoustic property, SAW propagation velocity was 3574.9m/sec for $LiNbO_3$ SAW filter.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1992.05a
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• pp.144-146
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• 1992

Surface acoustic wave(SAW) oscillator offers many attractive features for application to vapor sensors. The perturbation of SAW velocity by the hexafluoropropence plasma polymer thin film has been studied for relative humidity sensing. adsorption of moisture produces rapid aid changes in the properties of the film, resulting in a change in the velocity of surface acoustic waves and, hence, in the frequency of one SAW oscillator. The device used in our experiments have 55 MHZ SAW oscillator fabricated on a LiNbO substrate.

• Journal of Korean Society of Steel Construction
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• v.30 no.1
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• pp.13-23
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• 2018

The use of a built-up H-beam (BH) that can easily manufacture a section is increasing. This is a basic study on standardization of BH. It confirmed the material properties of SM490 and SM520 steel such as yield strength, tensile strength, elongation, charpy absorbed energy, and else. The six BH specimens were manufactured with single-SAW or tandem-SAW. The welding performance was confirmed by collecting the macroscopic specimen and T-bar tensile specimen form the BH. As a result of the material property test, the properties of SM490 and SM520 which are made in Korea both satisfied the KS. As a result of the welding performance experiment, it is determined that the weld zone of BH has sufficient welding performance. Therefore, they are determined that the SM490 and SM520 steel are a proper material of BH, and the single-SAW and the tandem-SAW show a sufficient welding performance.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.235-235
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• 2009

This paper describes the influence of a polycrystalline (poly) 3C-SiC buffer layer on the surface acoustic wave (SAW) properties of poly aluminum nitride (AlN) thin films by comparing the center frequency, insertion loss, the electromechanical coupling coefficient ($k^2$), andthetemperaturecoefficientoffrequency(TCF) of an IDT/AlN/3C-SiC structure with those of an IDT/AlN/Si structure, The poly-AlN thin films with an (0002)-preferred orientation were deposited on a silicon (Si) substrate using a pulsed reactive magnetron sputtering system. Results show that the insertion loss (21.92 dB) and TCF (-18 ppm/$^{\circ}C$) of the IDT/AlN/3C-SiC structure were improved by a closely matched coefficient of thermal expansion (CTE) and small lattice mismatch (1 %) between the AlN and 3C-SiC. However, a drawback is that the $k^2(0.79%)$ and SAW velocity(5020m/s) of the AlN/3C-SiC SAW device were reduced by appearing in some non-(0002)AlN planes such as the (10 $\bar{1}$ 2) and (10 $\bar{1}$ 3) AlN planes in the AlN/SiC film. Although disadvantages were shown to exist, the use of the AlN/3C-SiC structure for SAW applications at high temperatures is possible. The characteristics of the AlN thin films were also evaluated using FT-IR spectra, XRD, and AFM images.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.43 no.11 s.353
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• pp.8-13
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• 2006

Recent RF SAW filters are made using a HTCC package with a CSP(chip scale Package) technology. This paper describes a development of a new $1.4{\times}1.1\;and\;2.0{\times}1.4mm$ RF SAW liters made by PCB substrate instead of HTCC package, and this technology can reduce the cost of materials down to 40%. We have investigated the multi-layered PCB substrate structures and raw materials to find out the optimal flip-bonding condition between the $LiTaO_3$ wafer and PCB substrates. Also the optimal materials and processing conditions of epoxy laminating film were found out through the experiments which can reduce the bending moment caused by the difference of the thermal expansion between the PCB substrate and laminating film. The new PCB SAW filter shows good electrical and reliability performances with respect to the present SAW filters.