• 제목/요약/키워드: Rocking Effect

검색결과 75건 처리시간 0.032초

Hot Wall Epitaxy (HWE)법에 의한 ZnIn2Se4 단결정 후막 성장과 열처리 효과 (Growth and effect of thermal annealing for ZnIn2Se4 single crystalline thick film by hot wall epitaxy)

  • 홍명석;홍광준
    • 센서학회지
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    • 제17권6호
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    • pp.437-446
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    • 2008
  • Single crystalline ${ZnIn_2}{Se_4}$ layers were grown on thoroughly etched semi-insulating GaAs (100) substrate at $400^{\circ}C$ with hot wall epitaxy (HWE) system by evaporating ${ZnIn_2}{Se_4}$ source at $630^{\circ}C$. The crystalline structure of the single crystalline thick films was investigated by the photoluminescence (PL) and Double crystalline X-ray rocking curve (DCRC). The carrier density and mobility of ${ZnIn_2}{Se_4}$ single crystalline thick films measured from Hall effect by van der Pauw method are $9.41{\times}10^{16}cm^{-3}$ and $292cm^2/V{\cdot}s$ at 293 K, respectively. The temperature dependence of the energy band gap of the ${ZnIn_2}{Se_4}$ obtained from the absorption spectra was well described by the Varshni's relation, $E_g(T)$=1.8622 eV-$(5.23{\times}10^{-4}eV/K)T^2$/(T+775.5 K). After the as-grown ${ZnIn_2}{Se_4}$ single crystalline thick films was annealed in Zn-, Se-, and In-atmospheres, the origin of point defects of ${ZnIn_2}{Se_4}$ single crystalline thick films has been investigated by the photoluminescence (PL) at 10 K. The native defects of $V_{Zn}$, $V_{Se}$, $Zn_{int}$, and $Se_{int}$ obtained by PL measurements were classified as a donors or acceptors type. And we concluded that the heat-treatment in the Se-atmosphere converted ${ZnIn_2}{Se_4}$ single crystalline thick films to an optical p-type. Also, we confirmed that In in ${ZnIn_2}{Se_4}$/GaAs did not form the native defects because In in ${ZnIn_2}{Se_4}$ single crystalline thick films existed in the form of stable bonds.

Growth and characterization of molecular beam epitaxy grown GaN thin films using single source precursor with ammonia

  • Chandrasekar, P.V.;Lim, Hyun-Chul;Chang, Dong-Mi;Ahn, Se-Yong;Kim, Chang-Gyoun;Kim, Do-Jin
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2009년도 제38회 동계학술대회 초록집
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    • pp.174-174
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    • 2010
  • Gallium Nitride(GaN) attracts great attention due to their wide band gap energy (3.4eV), high thermal stability to the solid state lighting devices like LED, Laser diode, UV photo detector, spintronic devices, solar cells, sensors etc. Recently, researchers are interested in synthesis of polycrystalline and amorphous GaN which has also attracted towards optoelectronic device applications significantly. One of the alternatives to deposit GaN at low temperature is to use Single Source Molecular Percursor (SSP) which provides preformed Ga-N bonding. Moreover, our group succeeds in hybridization of SSP synthesized GaN with Single wall carbon nanotube which could be applicable in field emitting devices, hybrid LEDs and sensors. In this work, the GaN thin films were deposited on c-axis oriented sapphire substrate by MBE (Molecular Beam Epitaxy) using novel single source precursor of dimethyl gallium azido-tert-butylamine($Me_2Ga(N_3)NH_2C(CH_3)_3$) with additional source of ammonia. The surface morphology, structural and optical properties of GaN thin films were analyzed for the deposition in the temperature range of $600^{\circ}C$ to $750^{\circ}C$. Electrical properties of deposited thin films were carried out by four point probe technique and home made Hall effect measurement. The effect of ammonia on the crystallinity, microstructure and optical properties of as-deposited thin films are discussed briefly. The crystalline quality of GaN thin film was improved with substrate temperature as indicated by XRD rocking curve measurement. Photoluminescence measurement shows broad emission around 350nm-650nm which could be related to impurities or defects.

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탄화규소 단결정의 폴리타입 안정화를 위한 종자정 표면특성 연구 (Seed Crystal Surface Properties for Polytype Stability of SiC Crystals Growth)

  • 이상일;박미선;이도형;이희태;배병중;서원선;이원재
    • 한국전기전자재료학회논문지
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    • 제26권12호
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    • pp.863-866
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    • 2013
  • SiC crystal ingots were grown on 6H-SiC dual-seed crystals with different surface roughness and different seed orientation by a PVT (Physical Vapor Transport) method. 4H and 15R-SiC were grown on seed crystal with high root-mean-square (rms) value. The polytype of grown crystal on the seed crystal with lower rms value was confirmed to be 6H-SiC. On the other hand, all SiC crystals grown on seed crystals with different seed orientation were proven to be 6H-SiC. The surface roughness of seed crystals had no effect on the crystal structure of the grown crystals. However, the crystal quality of 6H-SiC single crystals grown on the on-axis seed were revealed to be slightly better than that of 6H-SiC crystal grown on the off-axis seed.

Fluid-structure-soil interaction analysis of cylindrical liquid storage tanks subjected to horizontal earthquake loading

  • Kim, Jae-Min;Chang, Soo-Hyuk;Yun, Chung-Bang
    • Structural Engineering and Mechanics
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    • 제13권6호
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    • pp.615-638
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    • 2002
  • This paper presents a method of seismic analysis for a cylindrical liquid storage structure considering the effects of the interior fluid and exterior soil medium in the frequency domain. The horizontal and rocking motions of the structure are included in this study. The fluid motion is expressed in terms of analytical velocity potential functions, which can be obtained by solving the boundary value problem including the deformed configuration of the structure as well as the sloshing behavior of the fluid. The effect of the fluid is included in the equation of motion as the impulsive added mass and the frequency-dependent convective added mass along the nodes on the wetted boundary of the structure. The structure and the near-field soil medium are represented using the axisymmetric finite elements, while the far-field soil is modeled using dynamic infinite elements. The present method can be applied to the structure embedded in ground as well as on ground, since it models both the soil medium and the structure directly. For the purpose of verification, earthquake response analyses are performed on several cases of liquid tanks on a rigid ground and on a homogeneous elastic half-space. Comparison of the present results with those by other methods shows good agreement. Finally, an application example of a reinforced concrete tank on a horizontally layered soil with a rigid bedrock is presented to demonstrate the importance of the soil-structure interaction effects in the seismic analysis for large liquid storage tanks.

Hot Wall Epitaxy(HWE) 방법에 의한 $CuInTe_2$ 단결정 박막 성장과 특성에 관한 연구 (Growth and Characterization of $CuInTe_2$ Single Crystal thin Films by Hot Wall Epitaxy)

  • 홍광준;이관교;이상열;유상하;정준우;정경아;백형원;방진주;신영진
    • 한국결정학회지
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    • 제11권4호
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    • pp.212-223
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    • 2000
  • A stochiometric mix of CuInTe₂ polycrystal was prepared in a honizonatal furnace. To obtain the single crystal thin films, CuInTe₂ mixed crystal was deposited on throughly etched GaAs(100) by the HWE system. The source and substrate temperatures were 610℃ and 450℃ respectively, and the thickness of the deposited single crystal thin film was 2.4㎛. CuInTe₂ single crystal thin film was proved to be the optimal growth condition when the excition emission spectrum was the strongest at 1085.3 nm(1.1424 eV) of photoluminescence spectrum at 10 K, and also FWHM of Double Crystal X-ray Rocking Curve (DCRC) was the smallest, 129 arcsec. The Hall effect on this sample was measured by the method of Van der Pauw, and the carrier density and mobility dependent on temperature were 9.57x10/sup 22/ electron/㎥, 1.31x10/sup -2/㎡/V·s at 293 K, respectively. The ΔCr(Crystal field splitting) and the ΔSo (spin orbit coupling splitting( measured at f10K from the photocurrent peaks in the short wavelength of the CuInTe₂ single crystal thin film were about 0.1200 eV, 0.2833 eV respectively. From the PL spectra of CuInTe₂ single crystal thin film at 10 K, the free exciton (E/sub x/) was determined to be 1064.5 nm(1.1647 eV) and the donor-bound exciton(D/sup 0/, X) and acceptor-bound exciton (A/sup 0/, X) were determined to be 1085.3 nm(1.1424 eV) and 1096.8 nm(1.1304 eV0 respectively. And also, the donor-acciptor pair (DAP)P/sub 0/, DAP-replica P₁, DAP-replica P₂ and self-activated (SA) were determined to be 1131 nm (1.0962 eV), 1164 nm(1.0651 eV), 1191.1 nm(1.0340 eV) and 1618.1 nm (0.7662 eV), respectively.

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HWE 방법에 의한 AgGaS$_2$/GaAs 단결정 박막 성장과 광학적 특성 (Growth and optic characteristics of AgGaS$_2$/GaAs single crystal thin film by hot wall epitaxy)

  • 이상열;홍광준;정준우
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 하계학술대회 논문집
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    • pp.281-287
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    • 2002
  • The stochiometric composition of AgGaS$_2$ polycrystal source materials for the AgGaS$_2$/GaAs epilayer was prepared from horizontal furnace. From the extrapolation method of X-ray diffraction patterns it was found that the polycrystal AgGaS$_2$ has tetragonal structure of which lattice constant a$\sub$0/ and c$\sub$0/ were 5.756 ${\AA}$ and 10.305 ${\AA}$, respectively. AgGaS$_2$/GaAs epilayer was deposited on throughly etched GaAs(100) substrate from mixed crystal AgGaS$_2$ by the Hot Wall Epitaxy (100) system. The source and substrate temperature were 590$^{\circ}C$ and 440$^{\circ}C$ respectively. The crystallinity of the grown AgGaS$_2$/GaAs epilayer was investigated by the DCRC (double crystal X-ray diffraction rocking curve). The optical energy gaps were found to be 2.61 eV for AgGaS$_2$/GaAs epilayer at room temperature. The temperature dependence of the photocurrent peak energy is well explained by the Varshni equation, then the constants in the Varshni equation are given by ${\alpha}$ : 8.695${\times}$10$\^$-4/ eV/K, and ${\beta}$ = 332 K. From the photocurrent spectra by illumination of polarized light of the AgGaS$_2$/GaAs epilayer, we have found that crystal field splitting ΔCr was 0.28 eV at 20 K. From the PL spectra at 20 K, the peaks corresponding to free and bound excitons and a broad emission band due to D-A pain are identified. The binding energy of the free excitons are determined to be 0.2676 eV and 0.2430 eV and the dissociation energy of the bound excitons to be 0.4695 eV.

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4H-SiC 기판 위에 성장된 ZnO 박막의 온도에 따른 구조적 특성 분석 (Effect of Deposition Temperature on Structural Properties of ZnO Thin Films on 4H-SiC Substrate)

  • 김지홍;조대형;문병무;방욱;김상철;김남균;구상모
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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    • pp.120-120
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    • 2008
  • We demonstrate epitaxial growth of ZnO thin films on 4H-SiC(0001) substrates using pulsed laser deposition (PLD). ZnO and SiC have attracted attention for their special material properties as wide band gap semiconductors. Especially, ZnO could be applied to optoelectronic applications such as light emitting devices and photo detectors due to its direct wide bandgap (Eg) of ~3.37eV and large exciton binding energy of ~60meV. SiC shows a good lattice matching to ZnO compared with other commonly used substrates and in this regard SiC is a good candidate as a substrate for ZnO. In this work, ZnO thin films were grown on 4H-SiC(0001) substrates by PLD using an Nd:YAG laser with a 355nm wavelength. The crystalline properties of the films were evaluated by x-ray diffraction (XRD) $\theta-2\theta$, rocking curve and pole figure measurements using a high-resolution diffractometer. The surface morphology of the films was studied by atomic force microscopy (AFM).

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성장 전 GaAs 기판의 열에칭 온도 변화에 따른 ZnS 에피층의 구조적, 광학적 특성 (Influences of thermal preheating of GaAs substrates on structural and optical properties of ZnS epilayers)

  • 남성운;유영문;이종광;오병성;이기선;최용대;이종원
    • 한국결정성장학회지
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    • 제10권3호
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    • pp.252-257
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    • 2000
  • 성장 전 GaAs기판의 열에칭 온도 변화에 따른 ZnS 에피층의 특성을 최초로 조사하기 위하여 450~$660^{\circ}C$로 열에칭한 기판 위에 hot wall epitaxy법으로 ZnS 에피층을 성장하였다. ZnS 에피층의 이중결정요동곡선의 반치폭은 기판의 열에칭 온도가 50$0^{\circ}C$$600^{\circ}C$일 때 가장 작았다. 그러나 ZnS 에피층의 photoluminescence(PL)특성은 기판의 열에칭 온도가 $500^{\circ}C$ 보다는 $600^{\circ}C$에서 더 양호하였다. 그러므로 고품질의 ZnS 에피층을 성장하기 위한 GaAs기판의 최적 열에칭 온도는 $600^{\circ}C$임을 알았다. 이러한 결과로부터 GaAs 기판의 열에칭은 $600^{\circ}C$에서 ZnS 에피층의 결정성과 PL특성에 좋은 영향을 주는 것으로 확인되었다.

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Insertion of Carbon Interlayer Into GaN Epitaxial Layer

  • Yu, H.S.;Park, S.H.;Kim, M.H.;Moon, D.Y.;Nanishi, Y.;Yoon, E.
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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    • pp.148-149
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    • 2012
  • This paper reports doping of carbon atoms in GaN layer, which based on dimethylhydrazine (DMHy) and growth temperature. It is well known that dislocations can act as non-radiative recombination center in light emitting diode (LED). Recently, many researchers have tried to reduce the dislocation density by using various techniques such as lateral epitaxial overgrowth (LEO) [1] and patterned sapphire substrate (PSS) [2], and etc. However, LEO and PSS techniques require additional complicated steps to make masks or patterns on the substrate. Some reports also showed insertion of carbon doped layer may have good effect on crystal quality of GaN layer [3]. Here we report the growth of GaN epitaxial layer by inserting carbon doped GaN layer into GaN epitaxial layer. GaN:C layer growth was performed in metal-organic chemical vapor deposition (MOCVD) reactor, and DMHy was used as a carbon doping source. We elucidated the role of DMHy in various GaN:C growth temperature. When growth temperature of GaN decreases, the concentration of carbon increases. Hence, we also checked the carbon concentration with DMHy depending on growth temperature. Carbon concentration of conventional GaN is $1.15{\times}1016$. Carbon concentration can be achieved up to $4.68{\times}1,018$. GaN epilayer quality measured by XRD rocking curve get better with GaN:C layer insertion. FWHM of (002) was decreased from 245 arcsec to 234 arcsec and FWHM of (102) decreased from 338 arcsec to 302 arcsec. By comparing the quality of GaN:C layer inserted GaN with conventional GaN, we confirmed that GaN:C interlayer can block dislocations.

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비선형 응답이력해석의 영향인자에 대한 사례연구 - 1989 Loma Prieta 지진 계측기록을 중심으로 - (Case Study on Influential Factors of Nonlinear Response History Analysis - Focused on 1989 Loma Prieta Earthquake -)

  • 유계항;이진선
    • 한국지반공학회논문집
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    • 제33권12호
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    • pp.45-58
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    • 2017
  • 최근 들어 시설물별 내진설계기준이 성능기반 내진설계로 전환됨에 따라, 신뢰성있는 비선형 응답이력해석(Response-history analysis, RHA)에 대한 요구가 높아지고 있다. 그러나, 부지응답해석 분야에 있어서는 1970년대 이후 등가선형 해석이 표준절차로 자리잡고 있음에 따라, 이를 대체하기 위해서는 비선형 응답이력해석의 신뢰성이 확보되어야 한다. 본 논문에서는 1989년 미국 Loma Prieta 지진기록을 바탕으로 다층지반에 대해서 비선형 RHA를 이용한 부지응답해석 결과의 신뢰성을 검증하였다. 이를 위하여, 비선형 RHA를 위한 비선형 지반모델의 선정방법과 3차원 해석시 요구되는 기반암 경계조건의 영향을 평가 하였다. 평가 결과, 제한된 조건하에서 가장 정확한 비선형 지반모델과 경계조건을 적용 시 비선형 RHA의 결과는 등가선형 해석결과와 유의미한 차이는 발생하지 않음을 알 수 있었다. 또한, 3차원 해석을 시행하는 경우, 전체 모델의 회전운동을 제어하기 위하여 최 하단부 흡수 경계조건을 적용해야 함을 알 수 있었다.