• Title/Summary/Keyword: Reverse Pattern

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A study of EPD for Shallow Trench Isolation CMP by HSS Application (HSS을 적용한 STI CMP 공정에서 EPD 특성)

  • Kim, Sang-Yong;Kim, Yong-Sik
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.04b
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    • pp.35-38
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    • 2000
  • In this study, the rise throughput and the stability in fabrication of device can be obtained by applying of CMP process to STI structure in 0.l8um semiconductor device. Through reverse moat pattern process, reduced moat density at high moat density, STI CMP process with low selectivity could be to fit polish uniformity between low moat density and high moat density. Because this reason, in-situ motor current end point detection method is not fit to the current EPD technology with the reverse moat pattern. But we use HSS without reverse moat pattern on STI CMP and take end point current sensing signal.[1] To analyze sensing signal and test extracted signal, we can to adjust wafer difference within $110{\AA}$.

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A study on EPD of STI CMP Process with Reverse Moat Pattern (Reverse Moat Pattern을 가진 STI CMP 공정에서 EPD 고찰)

  • Lee, Kyung-Tae;Kim, Sang-Yong;Seo, Yong-Jin;Kim, Chang-Il;Chang, Eui-Goo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.04b
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    • pp.14-17
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    • 2000
  • The rise throughput and the stability in fabrication of device can be obtained by applying of CMP process to STI structure in 0.18um semiconductor device. To employ in STI CMP, the reverse moat process has been added thus the process became complex and the defects were seriously increased. Removal rates of each thin films in STi CMP was not equal hence the devices must to be effected, that is, the damage was occured in the device dimension in the case of excessive CMP process and the nitride film was remained on the device dimension in the case of insufficient CMP process than these defects affect the device characteristics. We studied the current sensing method in STI-CMP with the reverse moat pattern.

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The Study on Static Alignment Classification based on the Full Spine AP X-ray of Adults aged 30-39 (30대 성인의 골반, 척추 및 견갑대 정렬의 패턴 분석 - Full Spine AP X-ray 분석에 따른 -)

  • Park, Ji-Hyun;Hong, Seo-Young
    • Journal of Korean Medicine Rehabilitation
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    • v.20 no.2
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    • pp.89-99
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    • 2010
  • Objectives : This study was designed to analyze the pattern of asymmetrical alignment. Methods : This study was carried out with the data from comprehensive medical testing. 91 subjects aged 30-39 were evaluated by full spine AP X-ray. For pelvis, innominate measurement(IM), off centering measurement(OCM), ilium shadow measurement(ISM), major axis of obturator foramen(MaF), minor axis of obturator foramen(MiF) were analyzed. Spinal curvature and height of shoulder girdle were analyzed. Results : 1. In pelvis, It. posterior-inferior and it. inflare combination pattern was 38 cases(42.8%). 2. In spinal curvature, "reverse S" curve was 45 cases(49.4%) and "reverse C" curve was 30 cases(33%). 3. In shoulder girdle, It. superior pattern was 42 cases(46.1 %) and It. superior pattern was 39 cases(42.9%). 4. In whole body analysis, It. posterior-inferior and It. inflare pelvis, "reverse S" spinal curvature and It. superior shoulder girdle combination patten was 11 cases(12.1 %). This pattern is similar to Kendall's right handedness pattern and Zink's common compensatory pattern. Conclusions : Results from this investigation showed asymmetrical alignment in 30-39 years-old adults. This results are expected to contribute to classifying the alignment pattern in clinic and systemic treatment.

A Study on the Computer Simulation of Ink Flow in the Reverse Offset Printing (Reverse Offset에서 잉크 전이 유동에 관한 시뮬레이션 연구)

  • Lee, Ane-Seok;Youn, Jong-Tae
    • Journal of the Korean Graphic Arts Communication Society
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    • v.30 no.2
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    • pp.23-33
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    • 2012
  • With the development of many display technologies currently applied to them in the field of printed electronics, there have been many researches that high resolution printing for thin and uniform pattern. In this paper, printing ink flow properties in the reverse offset mechanism were simulated. The aim of this research is to expect the ink flow behavior between cliches to make fine pattern by a printing technique which is a reverse offset. The simulation results show that almost the same as the experiments and the flow behavior according to the ink film thickness and printing pressure changes could be expected.

Performance Test of A Reverse-Annular Type Combustor (TS2) for APU (보조동력장치용 환형 역류형 연소기 (TS2) 성능 시험)

  • Ko, Young-Sung;Han, Yeoung-Min;Yang, Soo-Seok;Lee, Dae-Sung;Yun, Sang-Sig;Choi, Sung-Man
    • Proceedings of the KSME Conference
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    • 2001.06d
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    • pp.840-845
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    • 2001
  • Development of a small gas-turbine combustor for 100kW class APU(Auxiliary Power Unit) has been performed. This combustor is a reverse-annular type and has a tangential swirler in the liner head to improve the fuel/air mixing and flame stability. Three main and three pilot fuel injectors of the simplex pressure-swirl type are used. The performance target at the design condition includes a turbine inlet temperature of 1170K, a combustion efficiency of 99%, a pattern factor of 30%, and an engine durability of 3000 hours. Under developing the combustor, we conducted performance test of our first prototype(TS1) with some variants. As a result of the test, the performance targets of the combustor are satisfied except that the pattern factor is about 4% higher than target value. So, we redesigned the second prototype(TS2) and conduct performance test with the critical focus on pattern factor and exit mean temperature. We adopted TS2 four variant to check the improvement of pattern factor. As the result, the pattern factors of several variants were satisfied with the performance target. Finally, We chose the TS2A variant as a final combustor for our APU model.

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Effects of Inspiration and Expiration Exercise Combined with Upper Extremity Proprioceptive Neuromuscular Facilitation on Forced Volume Vital and Peak Expiratory Flow

  • Lee, Sang-Yeol
    • PNF and Movement
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    • v.18 no.2
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    • pp.297-303
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    • 2020
  • Purpose: The purpose of this study was to examine the effects of inhalation and exhalation exercise combined with upper extremity proprioceptive neuromuscular facilitation pattern on two spirometry values: forced volume vital (FVC) and peak expiratory flow (PEF). Methods: Thirty-two healthy adults were divided into two groups: 1) a combined group, which performed upper extremity D2 flexion pattern (shoulder flexed/abducted/external rotated, forearm supinated, wrist radial deviated, and finger extended) during exhalation and D2 extension pattern (shoulder extended/adducted/internal rotated, forearm pronated, wrist ulnar deviated, and finger flexed) during inhalation; and 2) reverse combined group, which performed the D2 flexion pattern during inhalation and the D2 extension pattern during exhalation. The inverse application of upper extremity movements during inhalation and exhalation induced selective resistance or assistance on respiration. FVC and PEF were measured at two time points, before and after four weeks. Results: In both groups, the pre-post intervention comparison showed significant increases in FVC and PEF (p < .05). In the between-groups comparison, the reverse combined group showed a significantly higher PEF than the combined group at four weeks post intervention (p < 0.05). Conclusion: The combined respiration exercise with reverse PNF upper extremity patterns using selective resistance showed an effective increase in PEF in healthy adults. Clinicians and researchers might consider using selective resistance as a widely applicable and cost-effective option for respiratory rehabilitation planning.

Fabrication of Three-Dimensional Reflective White Pattern using Dry-Film Resist

  • Jun, Hwa Joon;Na, Dae Gil;Kwon, Young Hoon;Kwon, Jin Hyuk
    • Journal of the Optical Society of Korea
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    • v.19 no.1
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    • pp.80-83
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    • 2015
  • White reflective patterns are very difficult to fabricate, due to the scattering and reflection of light, especially when the pattern size goes down to micron size. A reflective white barrier structure of height $50{\mu}m$ and width $80{\mu}m$ was fabricated using dry-film resist as an intermediate reverse pattern. The reverse dry-film resist pattern was coated with an $SiO_2$ layer by sputtering, to protect the resist from chemical attack by the radical molecules in UV white resin. The UV white resin was applied on the dry-film resist pattern and then cured with ultraviolet light. The fine three-dimensional reflective patterns were finished by removing the dry-film resist.

Reverse Takotsubo cardiomyopathy with left bundle branch block after anesthesia induction in a patient with subarachnoid hemorrhage: a case report

  • Choi, Eun Kyung;Kim, Jong-Hoon;Kim, Minhyun
    • Journal of Yeungnam Medical Science
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    • v.39 no.2
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    • pp.172-177
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    • 2022
  • Takotsubo or reverse Takotsubo cardiomyopathy is a well-known cardiac complication of subarachnoid hemorrhage (SAH) that shows transient left ventricular wall motion abnormalities with electrocardiogram (ECG) changes. ST change followed by T inversion is a common ECG finding complicated with these disorders, left bundle branch block (LBBB) may be a potential ECG pattern which is seen. In this case, we describe the clinical profile and outcomes of a patient with LBBB and reverse Takotsubo cardiomyopathy after anesthetic induction, which was scheduled as an emergent external ventricular drainage after SAH. This is the first report of an LBBB pattern in reverse Takotsubo cardiomyopathy.

Two-Pathway Model for Enhancement of Protocol Reverse Engineering

  • Goo, Young-Hoon;Shim, Kyu-Seok;Baek, Ui-Jun;Kim, Myung-Sup
    • KSII Transactions on Internet and Information Systems (TIIS)
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    • v.14 no.11
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    • pp.4310-4330
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    • 2020
  • With the continuous emergence of new applications and cyberattacks and their frequent updates, the need for automatic protocol reverse engineering is gaining recognition. Although several methods for automatic protocol reverse engineering have been proposed, each method still faces major limitations in extracting clear specifications and in its universal application. In order to overcome such limitations, we propose an automatic protocol reverse engineering method using a two-pathway model based on a contiguous sequential pattern (CSP) algorithm. By using this model, the method can infer both command-oriented protocols and non-command-oriented protocols clearly and in detail. The proposed method infers all the key elements of the protocol, which are syntax, semantics, and finite state machine (FSM), and extracts clear syntax by defining fine-grained field types and three types of format: field format, message format, and flow format. We evaluated the efficacy of the proposed method over two non-command-oriented protocols and three command-oriented protocols: the former are HTTP and DNS, and the latter are FTP, SMTP, and POP3. The experimental results show that this method can reverse engineer with high coverage and correctness rates, more than 98.5% and 99.1% respectively, and be general for both command-oriented and non-command-oriented protocols.