• 제목/요약/키워드: Resistance Temperature Coefficient

검색결과 538건 처리시간 0.026초

IC용 초정밀 박막저항소자의 제조와 특성연구 (Preparation of Precision Thin Film Resistor Sputtered by Magnetron Sputtering)

  • 하흥주;장두진;문상용;박차수;조정수;박정후
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1994년도 하계학술대회 논문집 C
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    • pp.1236-1238
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    • 1994
  • TiAlN thin films were prepared by a multi target r.f magnetron sputtering system under different conditions. We have investigated the resistivity and T.C.R. (Temperature Coefficient of Resistance) characteristics of TiAlN films deposited on $Al_2O_3$ and glass substrates by sputtering in an $Ar:N_2$ gas mixture. We used Al and Ti metal as Target Material and $Ar:N_2$ gas as working gas. We varied the partial pressure ratio of $N_2/Ar$ from 0.2/7 to 1.0/6.2 (SCCM). And the R.F power of Ti and Al Target also were varied as 160/240, 200/200 and 240/160(W). In this experiment, we can get the precision thin film resistor with a very low T.C.R. (Temperature Coefficient of Resistance) below 25 ppm ${\Omega}/^{\circ}C$.

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고정밀급 박막저항을 위한 NiCr/NiCrSi박막의 제조 및 전기적 특성 (Electrical Characteristics and Fabrication of NiCr/NiCrSi Alloy Film for High Precision Thin Film Resistors)

  • 이붕주
    • 한국전기전자재료학회논문지
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    • 제20권6호
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    • pp.520-526
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    • 2007
  • In order to acquire fundamental informations to fabricate high precision thin film resistors, NiCr/NiCrSi alloy films were prepared using Ni and Cr targets. Effect of composition on the electrical properties of the NiCr/NiCrSi alloy film were then investigated. Considering the effect of Si doping on the electrical and material characteristics, the lower TCR (temperature coefficient of resistance) values could be achieved for samples with Ni/Cr ratio of $0.8{\sim}1.5$ (in a range of relative higher specific resistivity and Cr composition of $40\;wt%{\sim}55\;wt%$) and with Si doping. Consequently, the sample prepared using a DC power showed a good TCR of $-25\;ppm/^{\circ}C$, which implies that increase of specific resistivity and decrease of TCR would be achieved more efficiently not for Ni-Cr binary material but for Si doped Ni-Cr ternary material, and not using RF power but using DC power in the sputtering process.

나선코일 튜브 내에서의 압력손실에 관한 연구 (A Study on the Pressure Loss in Helically Coiled Tubes)

  • 한규일;박종운
    • 한국자동차공학회논문집
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    • 제6권6호
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    • pp.155-165
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    • 1998
  • The resistance coefficient and heat transfer performance are studied for the turbulent water flow in a smooth coiled tube having variable curvature ratios and a corrugated-coiled tube having a ratio of coil to tube diameter of 22. Experiments are carried out for the fully developed turbulent flow of water in tube coils on the uniform wall temperature condition. This work is limited to tube coils of R/a between 22 and 60 and Reynolds numbers from 13000 to 53000. The tube having a ratio of coil to tube diameter of 27 among the 3 smooth tube coils shows the best heat transfer performance. A corrugated-coiled tube(R/a=60) shows more excellent performance than a smooth coiled tub (R/a=60) at a similar curvature ratio. The friction factor f is sensitive to changes in the velocity profile caused by a temperature gradient. Allowance was made for the pressure loss in the short inlet and outlet lengths and due to the presence of the thermocouple inlet and outlet as a result of separate experimental on a straight tube. It is to be expected that the allowance at the exit will be somewhat too low because of secondary flow effects carried over from the coil.

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CrN박막 세라믹 압력센서 (Ceramic Pressure Sensors Based on CrN Thin-films)

  • Chung, Gwiy-Sang;Seo, Jeong-Hwan;Ryu, Gl-kyu
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2000년도 하계학술대회 논문집
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    • pp.573-576
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    • 2000
  • The physical, electrical and piezoresitive characteristics of CrN(chromium nitride) thin-films on silicon substrates have been investigated for use as strain gauges. The thin-film depositions have been carried out by DC reactive magnetron sputtering in an argon-nitrogen atmosphere(Ar-(5∼25 %)Na$_2$). The deposited CrN thin-films with thickness of 3577${\AA}$ and annealing conditions(300$^{\circ}C$, 48 hr) in Ar-10 % N$_2$deposition atmosphere have been selected as the ideal piezoresistive material for the strain gauges. Under optimum conditions, the CrN thin-films for the strain gauges is obtained a high electrical resistivity, $\rho$=1147.65 ${\mu}$$\Omega$cm, a low temperature coefficient of resistance, TCR=-186 ppm/$^{\circ}C$ and a high temporal stability with a good longitudinal gauge factor, GF=11.17.

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낮은 TCR 특성을 가지는 플레이트 션트저항의 전기적 특성 (Electrical Properties of Plate Typed Shunt Resistors with Low TCR Property)

  • 임영택;김은민;이상원;안정래;이선우
    • 한국전기전자재료학회논문지
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    • 제32권3호
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    • pp.219-222
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    • 2019
  • In this study, we fabricated plate-type shunt resistors with thermal stability by parallelly connecting metal alloy plates with positive temperature coefficient of resistance (TCR) and carbon nanotube (CNT) plates with negative TCR. The metal alloy plates, which were prepared by alloying Cu and Mn with a composition of 91 wt% of Cu and 9 wt% of Mn, showed around $800ppm/^{\circ}C$ of TCR, and the CNT plates prepared from the CNT solution by using the vacuum filtration method showed around $-800ppm/^{\circ}C$ of TCR. The shunt resistor that was fabricated by stacking metal alloy plates and CNT plates in this work showed about $46.93ppm/^{\circ}C$ of TCR. Therefore, we conclude that a shunt resistor with low TCR can be realized by simply adjusting the TCR of the metal alloy only, because the TCR of the CNT plate has an identical value.

내장형 저항 기판의 신뢰성과 TCR 개선을 위한 후막 저항 페이스트에 관한 연구 (Thick Film Resistance Paste for Improving Reliability and TCR Properties of Embedded Resistor Board)

  • 이상명;유명재;박성대;강남기;남산
    • 마이크로전자및패키징학회지
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    • 제15권1호
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    • pp.27-31
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    • 2008
  • 전자 부품의 소형화 요구에 따라서 기존 기판의 상부에 실장 되는 저항 소자를 감소하기 위한 방안으로 후막 저항 페이스트를 인쇄하여 저항체를 형성 한 후에 내장하는 수동소자 내장기술이 활발히 연구되고 있다. 본 연구에서는 카본 블랙과 에폭시 수지를 혼합하여 $0.35{\sim}4k{\Omega}/sq$으로 넓은 저항 범위를 가지는 저온 열경화형 후막 저항 페이스트를 제작하였으며, Ni-Cr alloy와 $SiO_2$ 분말을 첨가하여 온도에 따른 저항 변화인 TCR(Temperature Coefficient Resistivity) 값을 $100ppm/^{\circ}C$으로 개선하였다. 최종적으로 제작된 저항 페이스트를 이용하여 내장 저항 기판을 제작하였으며 온도에 변화에 따른 안정적인 저항 특성과 신뢰성을 확보 할 수 있었다.

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물결합재비를 달리하여 제작한 메타카올린 혼입 콘크리트의 내구성능 평가 (Estimation on the Durability of Metakaolin Concrete According to the W/B Ratio)

  • 김춘호;김남욱
    • 한국구조물진단유지관리공학회 논문집
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    • 제18권4호
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    • pp.84-91
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    • 2014
  • 본 연구에서는 콘크리트 구조물의 강도 향상을 위하여 혼입하고 있는 메타카올린의 내구성능 향상 효과를 규명하기 위하여 염화물이온 확산계수 및 단열온도상승량을 측정하였다. 그 결과, 메타카올린의 혼입으로 인하여 염화물이온 확산계수가 작아짐이 확인되었으며 플라이 애쉬의 첨가를 통하여 유동성의 저하를 억제할 수 있었다. 따라서 염분침투저항성을 확보하면서 물결합재비를 크게 하는 것이 가능하므로 메타카올린의 혼입으로 발생되는 단열온도상승량을 억제할 수 있어 콘크리트의 내구성능이 향상될 수 있음을 확인하였다.

Experimental Investigation of the Thermal Hydraulics in Lead Bismuth Eutectic-Helium Experimental Loop of an Accelerator-Driven System

  • Xi, Wenxuan;Wang, Yongwei;Li, Xunfeng;Huai, Xiulan;Cai, Jun
    • Nuclear Engineering and Technology
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    • 제48권5호
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    • pp.1154-1161
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    • 2016
  • The heat transfer characteristics between liquid lead bismuth eutectic (LBE) and helium are of great significance for the two-loop cooling system based on an accelerator-driven system (ADS). This paper presents an experimental study on the resistance characteristics and heat transfer performance in a LBE-helium experimental loop of ADS. Pressure drops in the LBE loop, the main heat transfer, and the coupled heat transfer characteristics between LBE and helium are investigated experimentally. The temperature of LBE has a significant effect on the LBE thermo-physical properties, and is therefore considered in the prediction of pressure drops. The results show that the overall heat transfer coefficient increases with the increasing helium flow rate and the decreasing inlet temperature of helium. Increasing the LBE Reynolds number and LBE inlet temperature promotes the heat transfer performance of main heat transfer and thus the overall heat transfer coefficient. The experimental results give an insight into the flow and heat transfer properties in a LBE-helium heat exchanger and are helpful for the optimization of an ADS system design.

Elasto-plastic thermal stress analysis of functionally graded hyperbolic discs

  • Demir, Ersin;Callioglu, Hasan;Sayer, Metin
    • Structural Engineering and Mechanics
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    • 제62권5호
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    • pp.587-593
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    • 2017
  • The objective of this analytical study is to calculate the elasto-plastic stresses of Functionally Graded (FG) hyperbolic disc subjected to uniform temperature. The material properties (elastic modulus, thermal expansion coefficient and yield strength) and the geometry (thickness) of the disc are assumed to vary radially with a power law function, but Poisson's ratio does not vary. FG disc material is assumed to be non-work hardening. Radial and tangential stresses are obtained for various thickness profile, temperature and material properties. The results indicate that thickness profile and volume fractions of constituent materials play very important role on the thermal stresses of the FG hyperbolic discs. It is seen that thermal stresses in a disc with variable thickness are lower than those with constant thickness at the same temperature. As a result of this, variations in the thickness profile increase the operation temperature. Moreover, thickness variation in the discs provides a significant weight reduction. A disc with lower rigidity at the inner surface according to the outer surface should be selected to obtain almost homogenous stress distribution and to increase resistance to temperature. So, discs, which have more rigid region at the outer surface, are more useful in terms of resistance to temperature.

온도센서를 사용하지 않는 MEMS 마이크로히터 온도제어시스템 (A Sensorless and Versatile Temperature-Control System for MEMS Microheaters)

  • Bae, Byung-Hoon;Yeon, Jung-Hoon;Flachsbart Bruce R.;Shannon Mark A.
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제55권11호
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    • pp.544-547
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    • 2006
  • In this paper, we present a temperature-controlled system for MEMS electrical resistance heaters without a temperature sensor. To rapidly control the heater temperature, the microheater system developed consists of a power supply, power amplifier, digital ${\underline{P}}roportional-{\underline{I}}ntegral-{\underline{D}}ifferential$ (PID) controller, and a quarter bridge circuit with the microheater and three resistors are nominally balanced. The microheaters are calibrated inside a convection oven to obtain the temperature coefficient with a linear or quadratic fit. A voltage amplifier applies the supply voltage proportional to the control signal from the PID controller. Small changes in heater resistance generate a finite voltage across the quarter bridge circuit, which is fed back to the PID controller to compare with the set-point and to generate the control signal. Two MEMS microheaters are used for evaluating the developed control system - a NiCr serpentine microheater for a preconcentrator and a Nickel microheater for ${\underline{P}}olymerase\;{\underline{C}}hain\;{\underline{R}}eaction$ (PCR) chip.