• 한국세라믹학회지
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• 제52권6호
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• pp.410-416
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• 2015

Recently, a new $Y_2O_3$ coating deposited using the EB-PVD method has been developed for erosion resistant applications in fluorocarbon plasma environments. In this study, surface crack formation in the $Y_2O_3$ coating has been analyzed in terms of residual stress and elastic modulus. The coating, deposited on silicon substrate at temperatures higher than $600^{\circ}C$, showed itself to be sound, without surface cracks. When the residual stress of the coating was measured using the Stoney formula, it was found to be considerably lower than the value calculated using the elastic modulus and thermal expansion coefficient of bulk $Y_2O_3$. In addition, amorphous $SiO_2$ and crystalline $Al_2O_3$ coatings were similarly prepared and their residual stresses were compared to the calculated values. From nano-indentation measurement, the elastic modulus of the $Y_2O_3$ coating in the direction parallel to the coating surface was found to be lower than that in the normal direction. The lower modulus in the parallel direction was confirmed independently using the load-deflection curves of a micro-cantilever made of $Y_2O_3$ coating and from the average residual stress-temperature curve of the coated sample. The elastic modulus in these experiments was around 33 ~ 35 GPa, which is much lower than that of a sintered bulk sample. Thus, this low elastic modulus, which may come from the columnar feather-like structure of the coating, contributed to decreasing the average residual tensile stress. Finally, in terms of toughness and thermal cycling stability, the implications of the lowered elastic modulus are discussed.

• 한국복합재료학회:학술대회논문집
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• 한국복합재료학회 2005년도 춘계학술발표대회 논문집
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• pp.245-248
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• 2005

During manufacturing thick composite cylinders, large thermal residual stresses are developed and induce catastrophic interlaminar failures. Since the residual stresses are dependent on many process parameters, such as temperature distribution during cure, cure shrinkage, winding tension, and migration of fibers, calculation of the residual stresses is very difficult. Therefore a radial-cut method have been used to measure the residual stresses in the composite cylinders. But the conventional radial-cut method needs to know numerous material properties which are not only troublesome to obtain but also vary with change of fiber arrangement during consolidation. In this paper, a new radial-cut method with cut-cylinder-bending test was proposed and the measured residual stresses were compared with calculated thermal residual stresses. It was found that the new radial-cut method which does not need to know any of material properties gave better estimation of residual stresses regardless of radial variation of material properties. Additionally, interlaminar tensile strength could be obtained by the cut-cylinder-bending test.

• 한국기계가공학회지
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• 제7권1호
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• pp.62-66
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• 2008

Machine parts subjected to fluctuating or cyclic loads induce repeated stresses that often result in failure by fatigue. In such cases, the fatigue failures unfortunately sometimes occur. These may arise from a lack of knowledge with regard to the design, fabrication and operation of the machines or structures. The failure analysis provides valuable information regarding the prevention of similar failures. Furthermore, this information will be useful to improve or to develop new products. Failure stress analysis is classified into X-ray fractography. X-ray fractography has the limited applications because of material crystal size, difficult measurement method, electrolytic polishing precision, and long test time. Therefore, this study proposed the new method to improve the measurement precision of plastic zone depth and test time using TRIZ.

• 한국진공학회지
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• 제19권5호
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• pp.360-364
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• 2010

나노 소재의 물성을 측정하기 위하여 대부분의 연구 그룹에서는 크게 두 가지 분석 기법인 분광학을 이용한 분석과 나노트라이볼로지를 이용한 분석을 사용하고 있다. 분광학을 이용한 분석에는 NMR (Nuclear Magnetic Resonance), IR (Infrared Spectroscopy), Raman 등이 대표적이라 할 수 있고, 나노트라이볼로지를 이용한 분석에는 AFM (Atomic Force Micro-Scope), EFM (Electrostatic Force Microscope), KFM (Kelvin Force Microscope), Nanoindenter 등의 탐침을 이용한 측정 기법이 대표적이다. Nanoindenter는 물질의 탄성 및 경도를 측정 할 수 있으며 이를 통해 물질의 특성을 연구 하는 데에 사용된다. 그러나 이런 Nanoindenter의 압입 실험에서 압입 조건 등의 통제 변수가 다르면 그 결과 값도 바뀌는 것을 볼 수 있는데 본 실험에서는 이런 압입 조건 중 Load - Hold - Unload force의 속도 및 시간을 변화시켜 물질의 탄성계수와 경도가 어떠한 차이를 가지는지 연구하였다.

• 대한기계학회논문집
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• 제18권10호
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• pp.2577-2584
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• 1994

A method of digital image processing thechnique, which can multiply and sharpen isochromatic fringes in photoelasticity on both occasions, is developed. To test the method, photoelastic fringe patterns of a disk compressed by two diametrically opposite cocentrated loads are simulated and these patterns are processed to yield sharpened lines. The method is then aplied to measurement of residual stresses in glass bar. The procedure is proved to be capable of extraction sharpened lines accurately from photoelastic multiplied fringes, and yields good experimental results consistently and precisely.

• 한국결정성장학회지
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• 제25권1호
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• pp.13-19
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• 2015

Among the various possible factors affecting the Minority Carrier Life Time (MCLT) of the mc-Si crystal, dislocations formed during the cooling period after solidification were found to be a major element. It was confirmed that other defects such as grain boundary or twin boundary were not determinative defects affecting the MCLT because most of these defects seemed to be formed during the solidification period. With a measurement of total thickness variation (TTV) and bow of the silicon wafers, it was found that residual stress remaining in the mc-Si crystal might be another major factor affecting the MCLT. Thus, it is expected that better quality of mc-Si can be grown when the cooling process right after solidification is carried out as slow as possible.

• Journal of Mechanical Science and Technology
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• 제17권11호
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• pp.1659-1664
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• 2003

A cracked plate with a patch bonded on one side was treated with a crack-bridging model using weight function: assuming continuous distribution of springs acting between th crack surfaces, the stress intensity factor of the patched crack was numerically obtained. Especially in the case of a patched crack subjected to residual non-uniform stress, the stress intensity factor was easily with the corresponding approximate weight function. This paper presented the stress intensity factors for a crack partially patched within a finite plate or a patched crack initiated from a notch.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1994년도 추계학술대회 논문집 학회본부
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• pp.413-415
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• 1994

In this paper, a new technique for quantitative estimation of the stress profile along the depth of $p^+$ silicon films is presented. The $p^+$ silicon cantilevers with various beam thickness and a rotating beam supported by two cantilevers are used for estimating the stress profile of the films. The average of the residual stress distribution is estimated to be 50MPa. Most of $p^+$ silicon films are subjected to the tensile stress, except the region near the frontside.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2013년도 춘계학술대회 논문집
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• pp.454-459
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• 2013

For the purpose of rapid development and superior design quality assurance, sophisticated finite element model for SOM(Spatial Optical Modulator) piezo actuator of MOEMS device has been developed and evaluated for the accuracy of dynamics and residual stress analysis. Parametric finite element model is constructed using ANSYS APDL language to increase the design and analysis performance. Geometric dimensions, mechanical material properties for each thin film layer are input parameters of FE model and residual stresses in all thin film layers are simulated by thermal expansion method with psedu process temperature. $6^{th}$ mask design samples are manufactured and $1^{st}$ natural frequency and 10V PZT driving displacement are measured with LDV. The results of experiment are compared with those of the simulation and validate the good agreement in $1^{st}$ natural frequency within 5% error. But large error over 30% occurred in 10V PZT driving displacement because of insufficient PZT constant $d_{31}$ measurement technology.

• 한국지반환경공학회 논문집
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• 제12권11호
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• pp.71-77
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• 2011

최근 들어 자기이방성센서를 이용한 비파괴응력계측기법은 강교나 강관 등의 건설 분야에서 적용되어지고 있다. 또한 터널건설현장에서 이용되는 강지보재에 대해서도 적용한 사례가 있다. 본 연구에서는 일본에서 개발된 자기이방성센서와 스트레인 게이지를 이용하여 국산 강재인 SS400에 적합한 응력감도곡선을 도출하기 위해 강재하중재하실험을 수행하였다. 또한 자기이방성센서를 이용한 비파괴 응력계측기법의 적용성을 평가하기 위하여 추가 강재하중재하실험과 수치해석을 실시하였다. 본 연구의 결과, 계측위치에 따라 자기이방성센서에서 측정된 출력전압과 스트레인 게이지로 측정된 응력의 평균을 이용하여 국산 강재인 SS400에 적합한 응력감도곡선을 도출하였다. 그리고 추가 강재하중재하실험과 수치해석을 비교한 결과, 자기이방성센서의 오차범위가 약 20MPa 정도임을 알 수 있었다. 자기이방성센서를 강재의 응력상태를 파악할 목적으로 사용할 경우, 강재의 항복응력의 레벨(245MPa)을 고려하면 공학적으로 충분한 정확도를 가지고 있다고 판단된다. 특히 자기이방성센서는 계측 센서가 부착되어 있지 않은 강구조물에서 잔류응력을 고려한 현재상태의 응력을 용이하게 파악할 수 있으며, 강구조물의 유지관리에 편리하게 적용이 가능함을 확인하였다.