• Title/Summary/Keyword: Research laboratory

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In-line Automatic defect inspection and repair method for TFT-LCD production

  • Honoki, Hideyuki;Arai, T.;Edamura, T.;Yoshimura, K.;Nakasu, N.
    • 한국정보디스플레이학회:학술대회논문집
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    • 2007.08a
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    • pp.286-289
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    • 2007
  • We have developed an automated circuit defect inspection and repair method that can be used to improve the yield ratio of TFT-LCD. The method focuses on correcting resist patterns after the development process to ensure shape regularity. We built a prototype system and confirmed that the method is valid.

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