• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 한국전기전자재료학회 2002년도 춘계학술대회 논문집 유기절연재료 전자세라믹 방전플라즈마 일렉트렛트 및 응용기술
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• pp.223-227
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• 2002

As the channel length of device shrinks below $0.13{\mu}m$, CMP(chemical mechanical polishing) process got into key process for global planarization in the chip manufacturing process. The removal rate and non-uniformity of the CMP characteristics occupy an important position to CMP process control. Especially, the post-CMP thickness variation depends on the device yield as well as the stability of subsequent process. In this paper, every wafer polished two times for the improvement of oxide CMP process characteristics. Then, we discussed the removal rate and non-uniformity characteristics of post-CMP process. As a result of CMP experiment, we have obtained within-wafer non-uniformity (WIWNU) below 4 [%], and wafer-to-wafer non-uniformity (WTWNU) within 3.5 [%]. It is very good result, because the reliable non-uniformity of CMP process is within 5 [%].

• The Transactions of the Korean Institute of Electrical Engineers D
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• 제53권4호
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• pp.221-225
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• 2004

This paper shows the application of artificial intelligence technique such as polynomial neural network in modeling and identification of sequencing batch reactor (SBR). A wastewater treatment process for nitrogen removal in the SBR is presented. Simulation results have shown that the nonlinear process can be modeled reasonably well by the Present scheme which is simple but efficient.

• Journal of Korean Society of Water and Wastewater
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• 제26권2호
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• pp.237-247
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• 2012

This study assessed the removal characteristics of taste and odor causing compounds (2-methylisoborneol and geosmin) and organic matters, using a pilot-scale ozone/granular activated carbon ($O_{3}$/GAC) process treating surface water of Pal-dang reservoir in the Han river over a 3-month period. Experiments were conducted to verify the removal efficiency of $O_{3}$/GAC process which has two different empty bed contact time (EBCT) ($O_{3}$/GAC column 1 : 10 min and 2 : 15.1 min) with 10.86 min contact time of ozonation at 1.0 mg/L $O_{3}$. Spiking test using geosmin and 2-MIB was also conducted systematically to mimic the conditions when the algae appears, specifically at the levels similar to the concentrations experienced (geosmin: 250 ng/L) in the winter of 2011. In single ozonation process, organic materials, disinfection by-products (DBPs) and their precursors were disassembled but not removed completely. Meanwhile, it was verified that organic matters, taste and odor causing compounds, and DBPs were well removed when sequentially passing through the GAC process. The pilot results also showed that GAC column with larger EBCT achieved higher removal efficiency. Specifically, in spiking tests, single $O_{3}$ process showed approximately 89% removal efficiency of geosmin and 2-MIB. $O_{3}$/GAC combined process demonstrated excellent removal of geosmin and 2-MIB, which are higher than 95%.

• Journal of Environmental Science International
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• 제30권1호
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• pp.69-76
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• 2021

The purposes of this study were to evaluate the removal characteristics of COD, Ni, and P and to derive appropriate operating conditions for the plating wastewater according to NaOCl reaction time and pH operating conditions in the BPC unit process during the plating wastewater treatment process. As a results of evaluating the removal characteristics for raw wastewater by each BPC unit process, the removal efficiencies of COD, Ni and P in BPC 1-1 unit process were 72.8%, 99.1%, and 100.0%. Therefore, the proper reaction time of NaOCl was derived as 21.1 minutes. In order to maintain the +800 mV ORP and the reaction time of 20 minutes, the temporary injection and continuous injection of NaOCl in the BPC unit process were 13.7 mL and 18.7 mL, respectively. It was found that the temporary injection method of NaOCl reduced the chemical cost by 36.5% compared to the continuous injection method. Also, Ni showed the highest removal efficiency of 97.8% at pH 10.5. On the other hand, P showed a removal efficiency of 57.4% at pH 10.0.

• Journal of Environmental Health Sciences
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• 제20권2호
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• pp.22-27
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• 1994

This study is to discuss the factors influenced on the removal efficiency of a high-strength organic wastewaters investigated using the polypropyrene media which appropriate to attach microorganism in the tube type fixed biofilter reactor. The results obtained in the experiment were as follows: 1. The kinetics of reaction rate (k') were 0.125, 0.135, 0.155 varing initial COD 720, 1280, 1630 mg/l in batch reactor. 2. In the range of pH 4.0 ~12.0 was obtained the removal efficiency of COD higher than 85%. It was proved that variation of pH (4.0 ~12.0) was nothing to do with the removal efficiency of substrate in continuous reactor. 3. Temperature to obtain removal efficiency of COD higher than 85% was 10 ~ 40$\circ$C. Removal efficiency of COD was no less than those at high temperature. 4. In the continuous reactor, the volumetric loading of COD for removal efficiency higher than 95% had to be 0.5~1.5 kg COD/m$^3$.d below. And then the HRT was 8 hrs. 5. In comparison with the activated sludge process, the tube type fixed biofilter process was excellent in removal efficiency of substrate and sludge production rate.

• Journal of environmental and Sanitary engineering
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• 제5권2호
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• pp.45-52
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• 1990

This study is to discuss limiting factors influenced on the removal efficiency of organic materials investigated using the polypropyrene biofilter which appropriate to attach micro-organism in order to apply the contact oxidation proce,:5. The results obtained in the experiment were as follows : 1. In the range o: pH 4.0~ 12.0 was obtained the removal efficiency of COD higher than 85% It was proved that variation of pH(4.0 ~ 12.0) was nothing to do with the removal efficiency of substrate in continuous reactor. 2. Temperature to obtain removal efficiency of COD higher than 85% was $10^{\circ}$ ~$40^{\circ}$. Removal efficiency of COD was no less than those at high temperature if MLVSS concentration was maintained 8,000~ 15,000 m/1. 3. In the continuous reactor, the volumetric loading of COD for removal efficiency higher than 95% had to be 0.5~1.5 kg COD/.d below. And then the HRT was Bhrs. 4. In comparison with the conventional activate sludge process, the contact oxidation process was excellent in removal efficiency, sludge production rate and maintenance.

• Journal of Korean Society on Water Environment
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• 제22권5호
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• pp.846-850
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• 2006

The biological nutrient removal from domestic wastewater with low C/N ratio is difficult. Therefore, this study was performed to increase influent C/N ratio by ammonia stripping without required carbon source and for improving treatment efficiencies of sewerage by the combination process of ammonia stripping and BNR (StripBNR). The results of this study were summarized as follows. BOD removal efficiencies of BNR and StripBNR were 95.3% and 93.2%, respectively. T-N and T-P removal efficiencies of BNR were 53.3% and 40.8%, respectively. T-N and T-P removal efficiencies of StripBNR were 72.8% and 62.9%, respectively. Concentrations of $NH_3-N$, $NO_2-N$ and $NO_3-N$ at BNR effluent were 0.03 mg/L, 0.08 mg/L and 9.12 mg/L, respectively. On the other hands, concentrations of $NH_3-N$, $NO_2-N$ and $NO_3-N$ at StripBNR effluent were 5.79 mg/L, 0.01 mg/L and 0.14 mg/L, respectively. Consequently, influent C/N ratio of BNR process was increased by ammonia stripping. Removal efficiency of T-N and T-P was improved about 20% by the process of StripBNR.

• Journal of Environmental Health Sciences
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• 제27권2호
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• pp.60-66
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• 2001

Natural organic matters(NOMs) are found everywhere such as soil, surface and ground waters and consist of both humic and nonhumic components, and their heterogeneith makes each source unique. This study was carried to evaluate the removal characteristics of NOMs by mixing coagulants and the variation of apparent molecular weight distribution(AMWD) in coagulation process. Ratio of optimum coagulants dosage for removal of DOC and turbidity by mixing coagulants was 1.83 mM F $e^{3+}$/mM $Al^{3+}$. DOC removal increased at lower pH. The pH6 control focused on the removal of organic matters could reduce the amount of coagulant consumption by 2 to 3 times based on the pH8.5 of natural water. The dissolved organic matters in the natural water from the mid-stream of Han River were composed of the low molecular weight(LMW,<1 K) of 59.7%, and the medium and high molecular weight(M.HMW, 1~30 K) of 40.3%, respectively. At pH6, the DOC removal efficiencies of LMW(<1 K) and M.HMW(1~30 K) in coagulation process were 27~35%, 62~72%, respectively. The fraction smaller than 1 K was not eliminated to a noticeable degree, while the fraction of 1~30 K was relatively well removed. In conclustion, mixing coagulants were fairly effective in the removal of natural organic matter.r.

• Membrane and Water Treatment
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• 제11권3호
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• pp.217-222
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• 2020

An electrochemical oxidation process was applied to remove cyanide (CN^-) from real plating wastewater. CN^- removal efficiencies were investigated under various operating factors: current density and electrolyte concentration. Electrolyte concentration positively affected the removal of both CN^- and Chemical Oxygen Demand (COD). As the electrolyte concentration increased from 302 to 2,077 mg Cl^-/L, removal efficiency of CN^- and COD increased from 49.07% to 98.30% and from 23.53% to 49.50%, respectively, at 10 mA/㎠. Current density affected the removal efficiency in a different way. As current density increased at a fixed electrolyte concentration, CN^- removal efficiency increased while COD removal efficiency decreased, this is probably due to lowered current efficiency caused by water electrolysis.

• Journal of Hydrogen and New Energy
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• 제35권2호
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• pp.115-120
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• 2024

In this study, the extent of water removal in the high-moisture coal was measured. The simplified adsorption model was developed to predict the extent of water removal. The water removal was observed to increase up to 25% at saturation condition of 25℃. The modeling work shows that adsorption contributes the water removal only by 3%, whereas other factors such as CO₂ solubility and wettability would be responsible for the water removal.