• 대한전기학회:학술대회논문집
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• 대한전기학회 1999년도 추계학술대회 논문집 학회본부 C
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• pp.879-881
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• 1999

Radical and ion densities in a CF4 plasma have been calculated as a function of input power density. 9as pressure and feed gas flow rate using simple 0 dimensional global model. Fluorine atom is found to be the most abundant neutral particle. Highly fragmented species such as CF and CF+ become dominant neutral and ionic radical at the high power condition. As the pressure increases. ion density increases but ionization rate decreases due to the decrease in electron temperature. The fractional dissociation of CF4 feed gas decreases with pressure after increasing at the low pressure range. Electron density and temperature are almost independent of flow rate within calculation conditions studied. The fractional dissociation of CF4 monotonically decreases with flow rate. which results in increase in CF3 and decrease in CF density. The calculation results show that the SiO2 etch selectivity improvement correlates to the increase in the relative density of fluorocarbon ion and neutral radicals which has high C/F ratio.

• Geomechanics and Engineering
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• 제14권2호
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• pp.131-139
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• 2018

The preparation of repeatable and uniformly reconstituted soil specimens up to the specified conditions is an essential requirement for the laboratory tests. In this study for large samples replication, the simultaneous usage of the traveling pluviation and curtain raining technique is used to develop a new method, called the curtain travelling pluviator (CTP). This simple and cost effective system is based on the air pluviation approach, whilst reducing the sample production time, can reproduce uniform samples with relative densities ranging from 25% to 96%. In order to investigate the resulting suitability and uniformity from the proposed method, a series of tests is performed. The effect of curtain traveling velocity, curtain width, drop height, and flow rate on the parameters of the sample is thoroughly investigated. Increase in the curtain velocity and drop height leads to the increase in relative density for the sand specimen. Increase in curtain width typically resulted in the reduction of relative density. Test results reveal that the terminal drop height for the sand specimen in this study is more than 500 mm. Relative density contour lines are presented that can be utilized in optimizing the drop height and curtain width parameters. Sample uniformity in the vertical and horizontal orientation is investigated through the sampling containers. Increasing relative density tends to result in the higher sample repeatability and uniformity.

• 대한설비공학회:학술대회논문집
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• 대한설비공학회 2009년도 하계학술발표대회 논문집
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• pp.1191-1196
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• 2009

The T-s chart of air displays graphically the thermophysical properties, so it is very conveniently used in various thermal systems. In previous study, the software analyzing 31 kinds of values in water system and 32 kinds of values in air-conditioning system were developed. In this study, the software drawing 13 kinds of quantity of state on air properties as ideal gas and analyzing 25 kinds of values in any air system was developed. The 13 kinds of quantity of state on air properties are temperature, pressure, specific volume, specific internal energy, specific enthalpy, specific entropy, specific exergy, exergy ratio, density, isobaric specific heat, isochoric specific heat, ratio of specific heat, and velocity of sound, and the 25 kinds of values including 13 kinds are mass flow rate, volume flow rate, internal energy flow rate, enthalpy flow rate, entropy flow rate, exergy flow rate, heat flow rate, power output, power efficiency, reversible work, lost work, and relative humidity. The developed software can draw any range of chart and analysis any state or process on air system. Also, this supports various document-editing functions such as power point. We wish to this chart is a help to design, analysis, and education in air system field.

• 한국진공학회지
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• 제7권4호
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• pp.374-380
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• 1998

글로벌 모델을 사용하여 $CF_4$ 플라즈마 내부에서의 각 중성 및 이온 라디칼 밀도를 계산하였다. 중성 입자로서는 플루오린 원자가 가장 많고, 높은 입력 전력 조건의 경우 CF 나 $CF^+$와 같은 저 분자 해리종이 주종을 이룬다. 압력이 증가 할수록 하전 입자의 밀도는 증가하나 전자 온도의 감소로 이온화율은 감소한다. 공급 가스인 $CF_4$의 해리율은 압력에 따 라 증가한후 다시 감소하는 양상을 보인다. 전자 온도 및 밀도는 입력유량에 대해서 거의 변화가 없다. $CF_4$의 해리율은 유량 증가에 따라 선형적으로 감소하며 이는 $CF_3$의 증가와 CF의 감소로 이어진다. 식각 실험 결과와의 비교를 통해 플루오로 카본 이온종 및 높은 C/F비를 갖는 중성 라디칼의 상대적 밀도 증가가 $SiO_2$/Si식각 선택도 향상에 주요함을 알 수 있다.

• Current Applied Physics
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• 제18권11호
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• pp.1375-1380
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• 2018

Atmospheric-pressure plasma has a great potential in many applications due to its simplicity rather than low pressure plasmas. In material processing, biomedical applications, and many other applications, the input power, gas flow rate, and the geometry of electrode have been mainly considered and studied as important external parameters of atmospheric-pressure plasma control. Besides, since the atmospheric-pressure plasmas are typically generated in an open air, the relative humidity is difficult to control and can change day by day. Therefore, the relative humidity cannot be ignored for plasmas. Thus, in this work, the atmospheric-pressure plasma jet was characterized by changing relative humidity, and it was found that the increase in electron density and OH radicals are due to Penning ionization between helium metastable and water vapors at higher humidity condition.

• Corrosion Science and Technology
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• 제23권3호
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• pp.215-220
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• 2024

Recently, the demand for Zn-Ni electrogalvanized steel sheets for home appliances and automobiles is increasing. Products should have a thick plating (30 to 40 g/m²) on both side with a thin thickness (≤ 0.8 mm) and the highest surface quality. By a high current density operation, current is concentrated in the edge part of the steel sheet, resulting in large surface dent defects due to dendritic plating. This can lead to a low productivity due to low line speed operation. To solve this problem, this study aimed to identify factors influencing dendritic plating. A cylindrical electroplating device was manufactured. Effects of cut edge shape and thickness of steel plate, current density, temperature, flow rate, electrolyte concentration, and pH on dendrite generation of Zn-Ni electroplating were examined. To investigate effect of edge shape of the steel sheet, the steel sheet was manufactured using three processing methods: shearing, polishing after shearing, and laser. Relative effects thickness and cut edge processing methods of the steel plate, current density, temperature, flow rate, electrolyte concentration, and pH of plating solution on dendrite plating were investigated. To prevent dendrite plating, an edge mask was manufactured and its application effect was investigated.

• 한국결정학회지
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• 제14권2호
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• pp.56-61
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• 2003

Nanocrystalline hydrogenated silicon (nc-Si : H) thin films were deposited at room temperature by plasma enhanced chemical vapor deposition (PECVD): a mixture of SiH₄ and H₂ gas was introduced into the evacuated reaction chamber. When the H₂ gas flow rate was low, the density of Si-H₃ bonds was high in the films. On the other hand, when the H₂ gas flow rate was high, e.g., 100 sccm, a large number of Si-H bonds contributed to the passivation of the surface of the large volume of Si nanocrystallites. The relative fraction of the Si-H₃ and Si-H₂ bonds in the amorphous matrix varied sensitively with the H₂ gas flow rate. The variation was associated with the change in the intensity as well as the wavelength of the main PL peaks, indicating the change in the total volume as well as the size of the Si nanocrystallites in the films.

• 한국전기전자재료학회논문지
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• 제14권1호
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• pp.43-47
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• 2001

Plasma polymerized hexamethyldisiloxane thin film was fabricated by employing an inter-electrode capacitively coupled type apparatus under the following conditions : carrier gas flow rate of 11 sccm, reaction pressure of 0.1 torr, discharge frequency of 13.56 MHz and discharge power of 30∼90 W. Polymerization rate of thin film fabricated at the discharge power of 90W is 32.5nm/min. Relative dielectric constant and dielectric loss tangent of thin film shows 3.2∼3.8 and 2.6x10$\^$-3/∼4.51x10$\^$-3/ respectively in the frequency range of 1 kHz∼1 MHz. As the annealing temperature is increased, the relative dielectric constant gradually decreases while the dielectric loss tangent increases. The current density increase gradually with increasing annealing temperature and electric field. The electric conduction of the heaxamethyldisiloxane thin film shows Schottky effect.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2008년도 제30회 춘계학술대회논문집
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• pp.168-172
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• 2008

추진제 유량 변화와 분사기 배열에 따른 특성속도를 연구하기 위해 축소형 연소기를 이용하여 연소시험을 수행하였다. 그 결과 유사한 압력과 혼합비 조건에서 효과적인 비 단위 면적당 유량 범위가 존재함을 알 수 있었고 최외곽 분사기로부터 막 냉각이 적용된 연소실 벽면까지의 거리 증가는 연소실 내 저 혼합비 영역을 증가시키고 특성속도를 저감시키는 기능을 하는 것으로 해석결과 나타났다. 즉, 이 2가지 설계요소는 주어진 연소압력에서 액체로켓엔진 연소기의 성능을 향상시킬 수 있는 중요한 인자임을 확인하였다.

• 한국연소학회지
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• 제13권3호
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• pp.1-8
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• 2008

A flame stability diagram in a partially premixed flame is typically expressed using the axis coordinates of heat input rate and equivalence ratio. These diagrams are inadequate for identifying changes in combustion conditions and flame stability when a reference fuel is substituted with other fuels under identical operating conditions. This study proposes a new type of diagram and validates it experimentally. In this new diagram, the axis coordinates are air flow rate and Wobbe fuel flow rate, defined as the fuel flow rate multiplied by the square root of the relative density. The diagram was validated in trials using various fuels, including $CH_4$, $C_{3}H_{8}$, and LFG-$C_{3}H_{8}$ mixed fuels, in a domestic gas-range and an gas interchangeability test burner. The results of these trials show that the new diagram can provide information useful for assessing gas interchangeability of combustion conditions and flame stability when one fuel is substituted with another under identical operating conditions.