• Korean Journal of Materials Research
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• v.6 no.11
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• pp.1127-1135
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• 1996

반도체 소자가 고집적화 됨에 따라 단위공정의 수가 증가하게 되었고 동시에 실리콘 기판의 오염에 대한 문제가 증가하였다. 실리콘 기판의 주 오염물로는 유기물, 파티클, 금속분순물 등이 있으며 특히, Cu와 Fe과 같은 금속불순물은 이온주입 공정, reactive ion etching, photoresist ashing과 같은 실 공정 중에 1011-1013atoms/㎤정도로 오염이 되고 있다. 그러나 금속불순물 중 Cu와 같은 전기음성도가 실리콘 보다 큰 오염물질은 일반적인 습석세정방법으로는 제거하기 힘들다. 따라서 본 연구에서는 Cu와 Fe과 같은 금속불순물을 제거할 목적을 건식과 습식 세정방법을 혼합한 UV/ozone과 HF세정을 제안하여 실시하였다. CuCI2와 FeCI2 표준용액으로 실리콘 기판을 인위적 오염한 후 split 1(HF-only), split 2 (UV/ozone+HF), split 3 (UV/ozone + HF 2번 반복), split 4(UV/ozone-HF 3번 반복)를 실시하였고 TXRF(Total Reflection X-Ray Fluorescence)와 AFM(Atomic Force Microscope)으로 금속불순물 제거량과 표면거칠기를 각각 측정하였다. 또한 contact angle 측정으로 세정에 따른 표면상태도 측정하였다. TXRF 측정결과 split 4가 가장 적은 양의 금속불순물 잔류량을 보였으며 AFM 분석을 통한 표면거칠기도 가장 작은 RMS 값을 나타내었다. Contact angle 측정 결과 UV/ozone 처리는 친수성 표면을 형성하였고 HF처리는 소수성 표면을 형성하였다.

• Current Optics and Photonics
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• v.6 no.1
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• pp.44-50
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• 2022

An off-axis zone plate is able to focus on a single order while neglecting the zeroth order in a visible imaging system. This allows one to enhance the contrast quality in diffractive images, which is the major advantage of this type of zone plate. However, most previous reflection zone plates are used in focusing X-rays with a small grazing incident angle and are intricately designed with the use of a local grating period. In this study, we suggest the design of an off-axis elliptical zone plate (EZP) that is used to focus a monochromatic light beam with separation between the first and unfocused orders under a large grazing incident angle of 45°. An assumption using the total grating period, which depends on the average and constant grating period, is proposed to calculate the desired distance between the first and zeroth order and to simplify the construction of a novel model off-center EZP. Four diffractive optical elements (DOEs) with different parameters were subsequently fabricated by direct laser lithography and then verified using a performance evaluation system to compare the results from the assumption with the experimental results.

• The Journal of the Acoustical Society of Korea
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• v.25 no.1
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• pp.1-6
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• 2006

The Possibility of using acoustic impedance as an input Parameter for computation of underwater acoustic field in shallow waters was investigated. Analysis of the acoustic reflection from the ocean bottom with shear wave effect showed that acoustic impedances below the critical grazing angle have nearly angle-independent property and could be approximated with a single value of near-grazing impedance $Z_0$. Computations of the Propagation loss based on the concept of 'effective depth' indicate that near-grazing bottom acoustic impedances could be used as an input parameter for simulation of the acoustic fields in shallow waters.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.19 no.8
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• pp.55-63
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• 2018

In this paper, we measured the propagation path loss by a ground to air flight communication test at UHF band and analyzed the results. The ground receiving terminal was located at 1,100m above sea level in Cheju Island and the airborne transmit terminal flew at an altitude of 3.5km from 150 to 220km from the ground terminal. In this case, the ground terminal and the airborne terminal are on the Line of Sight. Therefore loss in this communications environment can be predicted based on Free Space Loss. However, in this test, the sea level exists between two terminals, and due to the very small angle of incidence on the reflecting surface due to the long-range communication environment, it is not possible to accurately predict the loss of free space only. Therefore, considering that there are no surrounding obstacles and that a line of sight is secured between the end of two terminals, we applied a plane earth reflection model and a spherical earth reflection model to estimate the propagation path loss and compared with the actual test results. As a result of the comparison, the predicted propagation path loss by a spherical earth reflection model were quite similar to the actual test values.

• Geophysics and Geophysical Exploration
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• v.16 no.1
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• pp.6-17
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• 2013

Multicomponent seismic data including both P- and PS-waves have advantages in discriminating the type of pore fluid, characterizing the lithologic attributes and producing the high resolution image. However, multicomponent seismic data recorded at the vertical and horizontal component receivers contain both P- and PS-waves which have different features, simultaneously. Therefore, the wavefield separation of P- and PS-waves as a preprocessing is inevitable in order to use the multicomponent seismic data successfully. In this study, we analyzed the previous study of the wavefield separation method suggested by Jeong and Byun in 2011, where the approximated reflection angle calculated only from one refernce depth is used in rotation transform, and showed its limitation for seismic data containing various reflected events from the multi-layered structure. In order to overcome its limitation, we suggested a new effective wavefield separation method of P- and PS-waves. In new method, we calculate the reflection angles with various reference depths and apply rotation transforms to the data with those reflection angles. Then we stack all results to obtain the final separated data. To verify our new method, we applied it to the synthetic data sets from a multi-layered model, a fault model, and the Marmousi-2 model. The results showed that the proposed method separated successfully P- and PS-reflection events from the multicomponent data from mild dipping layered model as long as the dip is not too steep.

• Journal of the Korean Geophysical Society
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• v.2 no.1
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• pp.45-56
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• 1999

Seismic refracrion and reflection surveys were conducted along an E-W trending track of 482 m long in Ilwall-dong, Pohang. End-on spread was employed as source-receiver configuration with 2 m for both geophone interval and offset. Seismic data were acquired using 24 channels at every shot fired every 2 m along the track. Refraction data were interpreted using equations for multi-horizontal layers. Reflection data were processed in the sequence of trace edit, gain control, CMP sorting, NMO correction, mute, common offset gathering, and filtering to produce a single fold seismic section. There are two layers in shallow subsurface of the study area. Upper layer has the P-wave velocities ranging from 267 to 566 m/s and is interpreted as a layer of unconsolidated sediments. Lower layer has P-wave velocities of 1096-3108 m/s and is interpreted as weathered rock to hard rock. Most of the lower layer classified as soft rock. Upper layer has lateral variations in both P-wave velocity and thickness. The upper layer in the eastern part of the seismic line is 3-5 m thick and has P-wave velocity of 400 m/s in average. The upper layer in the western part is 8-10 m thick and has P-wave velocity of 340 m/s in average. The eastern part is interpreted as unconsolidated beach sand, while the western part is interpreted as infilled soil to develop a construction site. Three fault systems of high angle are imaged in seismic reflection section. It is interpreted that the area between these fault systems are relatively safe. Large buildings should be located in the safe ground condition of no fault and footings should be designed to be in the basement rock of 3-10 m deep below the surface.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.27 no.6
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• pp.328-336
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• 2015

Currently, 22% of the total energy consumption of buildings in Korea is used for lighting. Light-shelves have garnered attention as a way to reduce consumption, but there are few studies on the types of curve and curvature, which limits the improvement of light-shelf performance and its design. This study constructed a test bed of actual residential types to evaluate the performance. Outcomes of light usage, according to variables of light-shelves, were used as indicators of performance evaluation. The results are as follows:1) Performance evaluation was conducted on flat-type light-shelves to verify performance of curvature-shelves, which are movable with a width of 200 mm, and the most ideal angle and specification per solar term are calculated. 2) The (-) shaped curvature contributed to a reduction in energy consumption and an improvement of evenness. 3) In case of light-shelves with (-) shaped curvature, an increased angle not exceeding $80^{\circ}$ of the arc contributed to an improvement of light penetration. 4) Appropriate specifications of curved light-shelves include movable types with widths of 200 mm, and angle ranges of $20^{\circ}{\sim}60^{\circ}$. 5) Light energy consumption of a movable light-shelf with curvature and width of 200 mm were reduced by 17% and 7.8% compared to a $0^{\circ}$ fixed and a movable light-shelf, respectively.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.12 no.9
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• pp.4095-4100
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• 2011

In this paper, a log periodic bow-tie dipole array (LPBDA) antenna for UWB communications is investigated. Bow-tie shaped dipole elements are used instead of general dipole elements for LPDA antennas and the input reflection coefficient and realized gain characteristics of the LPBDA as a function of a flare angle are analyzed. It turns out that as the flare angle of the bow-tie dipole elements is increased, the lowest operating frequency is shifted toward lower frequency and the operating frequency band is increased, but the average gain is decreased. However, the gain variation of the LPBDA is much decreased and the front-back ratio is improved compared to the LPDA. Standard LPDA and LPBDA with a flare angle of 13 degrees are fabricated on an FR4 substrate with a dielectric constant of 4.4 and a thickness of 1.6 mm. Measured gain for the LPDA ranges from 4 to 6.5 dBi at 3.1 to 10.6 GHz band, while that for the LPBDA is in the range of 4.2 to 5 dBi.

• Journal of Mechanical Science and Technology
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• v.15 no.4
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• pp.492-499
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• 2001

The characteristics of Prand시-Meyer expansion of supersonic flow with condensation along a wavy wall in a channel are investigated by means of experiments and numerical analyses. Experiments are carried out for the case of moist air flow in an intermittent indraft supersonic wind tunnel. The flow fields are visualized by a Schlieren system and the distributions of static pressure along the upper wavy wall are measured by a scanning valve system with pressure transducers. In numerical analyses, the distributions of streamlines, Mach lines, iso-pressure lines, and iso-mass fractions of liquid are obtained by the two-dimensional direct marching method of characteristics. The effects of stagnation temperature, absolute humidity, and attack angle of the upper wavy wall on the generation and the locations of generation and reflection of an oblique shock wave are clarified. Futhermore, it is confirmed that the wavy wall plays an important role in the generation of an oblique shock wave and that the effect of condensation on the flow fields is apparent.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.2
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• pp.160-170
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• 2002

Retroreflective article is different from other reflecting objects as it returns the incidence ray to the near of its source. This characteristic makes the retroreflectors have many applications in reflective highway signs, reflective vests, and other safety-relaxed items. These articles may have various shapes. However, the quantitative evaluation of performance for the best shape of retroreflector needs much time and cost for manufacturing prototypes and for performance experiments. In this work, we have developed a program for simulating the trace of ray entered into a retroreflective element, in order to determine the optimal shape of retro-reflection. We have also proposed new performance criterion of retroreflective articles, which can confide the range of incidence angle, instead of the criterion with the merely retroreflective strength.