• Journal of the Semiconductor & Display Technology
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• v.7 no.1
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• pp.29-34
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• 2008

In this paper, the DE(double erosion) cathode for the reactive magnetron sputtering system is developed for high deposition rate and high target utilization efficiency. The utilization efficiency of the developed DE cathode is 22% higher than that of normal SE(single erosion) cathode. Sputtering process for the nickel oxide thin films with the DE cathode is performed under the following conditions; power with $1kW{\sim}3kW$, pressure with 4mtorr and 8mtorr, oxygen flow ratio with $0%{\sim}80%$. As a result, the hysteresis phenomenon of discharge voltage in 4mtorr is lower than that in 8mtorr and the hysteresis phenomenon of discharge voltage is getting lower as the applied power is getting higher. The structure of cross section and surface roughness of the thin films are observed by FE-SEM and AFM. The structure of cross section of the thin films is columnar and the average surface roughness under oxygen flow ratio of 0%, 52.5% and 65.0% are $2.08{\AA}$, $2.20{\AA}$ and $0.854{\AA}$, respectively.

• Journal of the Korean institute of surface engineering
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• v.52 no.6
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• pp.342-349
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• 2019

Titanium nitride(TiN) thin films have been deposited on PEN(Polyethylene naphthalate) substrate by reactive RF(13.56 MHz) magnetron sputtering in a 25% N₂/Ar mixed gas atmosphere. The pulsed DC bias voltage of -50V on substrates was applied with a frequency of 350 kHz, and duty ratio of 40%(1.1 ㎲). The effects of pulsed DC substrate bias voltage on the crystallinity, color, electrical properties of TiN_x films have been investigated using XRD, SEM, XPS and measurement of the electrical properties such as electrical conductivity, carrier concentration, mobility. The deposition rates of TiN_x films was decreased with application of the pulsed DC substrate bias voltage. The TiN_x films deposited without and with pulsed bias of -50V to substrate exhibits gray and gold colors, respectively. XPS depth profiling revealed that the introduction of the substrate bias voltage resulted in decreasing oxygen concentration in TiN_x films, and increasing the electrical conductivities, carrier concentration, and mobility to about 10 times, 5 times, and 2 times degree, respectively.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.06a
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• pp.331-332
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• 2007

Surface micromachined SiC devices have readily been fabricated from the polycrystalline (poly) 3C-SiC thin film which has an advantage of being deposited onto $SiO_2$ or $Si_3N_4$ as a sacrificial layer. Therefore, in this work, magnetron reactive ion etching process which can stably etch poly 3C-SiC thin films grown on $SiO_2$/Si substrate at a lower energy (70 W) with $CHF_3$ based gas mixtures has been studied. We have investigated the etching properties of the poly 3C-SiC thin film using PR/Al mask, according to $O_2$ flow rate, pressure, RF power, and electrode gap. The etched RMS (root mean square), etch rate, and etch profile of the poly 3C-SiC thin films were analyzed by SEM, AFM, and $\alpha$-step.

• Journal of the Korean institute of surface engineering
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• v.47 no.6
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• pp.311-315
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• 2014

Indium tin oxide (ITO) thin films (30 nm) were deposited on PET substrate by reactive DC magnetron sputtering using In/Sn(2, 5 wt.%) metal alloy target without intentionally substrate heating during the deposition under different DC powers of 70 ~ 110 W. The electrical properties were estimated by Hall-effect measurements system. The resistivity of ITO thin film deposited using In/Sn (5 wt.%) metal alloy target at low DC power increased with increasing annealing time. However, they increased with increasing annealing time at high DC power. In the case of ITO (Sn 2 wt%), we can't find clear change in resistivity with increasing annealing time. However, carrier density and mobility showed difference behavior due to change of oxygen vacancy.

• Korean Journal of Metals and Materials
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• v.50 no.5
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• pp.383-387
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• 2012

The activation of Mg-10 wt%$Fe_2O_3$ was completed after one hydriding-dehydriding cycle. Activated Mg-10 wt%$Fe_2O_3$ absorbed 5.54 wt% H for 60 min at 593 K under 12 bar $H_2$, and desorbed 1.04 wt% H for 60 min at 593 K under 1.0 bar $H_2$. The effect of the reactive grinding on the hydriding and dehydriding rates of Mg was weak. The reactive grinding of Mg with $Fe_2O_3$ is believed to increase the $H_2$-sorption rates by facilitating nucleation (by creating defects on the surface of the Mg particles and by the additive), by making cracks on the surface of Mg particles and reducing the particle size of Mg and thus by shortening the diffusion distances of hydrogen atoms. The added $Fe_2O_3$ and the $Fe_2O_3$ pulverized during mechanical grinding are considered to help the particles of magnesium become finer. Hydriding-dehydriding cycling is also considered to increase the $H_2$-sorption rates of Mg by creating defects and cracks and by reducing the particle size of Mg.

• Journal of the Optical Society of Korea
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• v.19 no.3
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• pp.265-271
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• 2015

We propose a reactive mesogen (RM) lens array to obtain good focusing behavior along with a short focal plane, where the focusing behavior is switchable according to the polarization state of incident light. Polarization-dependent focusing behavior is obtained using a planoconvex RM microlens array on a planoconcave isotropic lens template. Even though the sagitta of our RM lens is high, to obtain the short focal length, the RM layer can be aligned well by introducing a top-down alignment effect, using a nanogrooved template. The optical noise due to the $moir{\acute{e}}$ effect generated by the nanogrooves on the surface of the planoconvex RM layer can be removed simply by overcoating a thin RM layer, which is self-aligned by the geometric surface effect, without an additional alignment process. We demonstrate a hexagonal-packed RM lens array that has a very high fill factor and symmetric phase profile, for an ideal lens.

• Membrane and Water Treatment
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• v.12 no.1
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• pp.23-35
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• 2021

A POM-membrane was fabricated by immobilizing a keggin type polyoxometalate (POM) H5PV2Mo10O40 onto the surface of microporous flat-sheet polymeric polyvinylidene fluoride (PVFD) membrane using a chemical deposition method. The POM-membrane was characterized by FT-IR, SEM and EDX to confirm existing of the POM onto the membrane surface. The POM-membrane was used to remove an anionic textile dye (Reactive Black 5 named as an RB5) from aqueous phases with a cross-flow membrane filtration and a batch adsorption system. The dye removal efficiency of the POM-membrane using the cross-flow membrane filtration system and the batch adsorption system was about 88% and 98%, respectively. The influence factors such as contact time, adsorbent dosage, pH, and initial dye concentration were investigated to understand the adsorption mechanism of the RB5 dye onto the POM-membrane. To find the best fitting isotherm model, Langmuir, Freundlich, BET and Harkins-Jura isotherm models were used to analyze the experimental data. The isotherm analysis showed that the Langmuir isotherm model was found to the best fit for the adsorption data (R2 = 0.9982, qmax = 24.87 mg/g). Also, adsorption kinetic models showed the pseudo second order kinetic model was found the best model to fit the experimental data (R2 = 0.9989, q = 8.29 mg/g, C0 = 15 ppm). Moreover, after four times regeneration with HNO3 acid, the POM-membrane showed high regenerability without losing dye adsorption capacity.

• Journal of the Korean Society of Safety
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• v.33 no.1
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• pp.41-46
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• 2018

Experiments were carried out the phenomenal observation on effect of corona treated hotmelt laminating film in process of manufacture by 2 kinds of rolling speed and electric power variatons. Surface treatment by corona which is exposure of film surface to electron of ion bombardment, rather than mere exposure to active species, like atomic oxygen or ozone, can enhance adhesion by removing contaminant, electret, roughening surface, and introducing reactive chemical group. Reactive neutrals, ions, electron and photons generated during the corona treatment interact simultaneously with polymers to alter surface chemical composition, wettability, and thus film adhesion. However, it is highly recommended that extensive chains scission is avoided because it can lead to side-effect by forming sticky matter, resulting in dropouts. This paper reviews principles of surface preparation of polypropylene substrate by corona discharging. In addition, the experimental section provides a description of parameter optimization on corona discharging treatment and its side-effect. Experimental results are discussed in terms of surface wetting as determined by contact angle and SEM measurements. When the rolling speed of the film decreased from 1.666 [m / sec] to 0.083 [m / sec], contact angle decreased from $80[^{\circ}]$ to $64[^{\circ}]$, and the wettability was greatly improved. As the supply power increased from 0.4 [kVA] to 2 [kVA] at the corona discharge surface treatment, the contact angle decreased from $77[^{\circ}]$ to $65[^{\circ}]$, and the wettability was greatly improved.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.65 no.12
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• pp.2008-2013
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• 2016

This paper proposes analysis and suppression method for reactive power vibration of the slave motor caused by back-EMF mismatch between the master and the slave motor and stator resistance during middle-low speed operation. The master and slave motors are parallel connected dual SPMSMs(Surface mounted Permanent Magnet Synchronous Motors) fed by a single inverter. To suppress vibration of reactive power, RPC(Reactive Power Compensator) proposed in this paper analyzes flux-axis current vibration of the slave motor that occurs in middle-low speed operation using a mathematical model of the fan motor. And RPC adds vibration components detected from flux-axis current of the slave motor to flux-axis current of the master motor. The results of experiment conducted verify the efficacy of the proposed method.

• Bulletin of the Korean Chemical Society
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• v.23 no.2
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• pp.205-214
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• 2002

The reaction of gas-phase atomic hydrogen with hydrogen atoms chemisorbed on a silicon surface is studied by use of the classical trajectory approach. Especially, we have focused on the mechanism changes with the hydrogen surface coverage difference. On the sparsely covered surface, the gas atom interacts with the preadsorbed hydrogen atom and adjacent bare surface sites. In this case, it is shown that the chemisorption of H(g) is of major importance. Nearly all of the chemisorption events accompany the desorption of H(ad), i.e., adisplacement reaction. Although much less important than the displacement reaction, the formation of $H_2(g)$ is the second most significant reaction pathway. At gas temperature of 1800 K and surface temperature of 300 K, the probabilities of these two reactions are 0.750 and 0.065, respectively. The adsorption of H(g) without dissociating H(ad) is found to be negligible. In the reaction pathway forming $H_2$, most of the reaction energy is carried by $H_2(g)$. Although the majority of $H_2(g)$ molecules are produced in sub-picosecond, direct-mode collisions, there is a small amount of $H_2(g)$ produced in multiple impact collisions, which is characteristic of complex-mode collisions. On the fully covered surface, it has been shown that the formation of $H_2(g)$ is of major importance. All reactive events occur on a subpicosecond scale, following the Eley-Rideal mechanism. At gas temperature of 1800 K and surface temperature of 300 K, the probability of the $H_2(g)$ formation reaction is 0.082. In this case, neither the gas atom trapping nor the displacement reaction has been found.