• Journal of the Semiconductor & Display Technology
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• v.4 no.2 s.11
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• pp.39-43
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• 2005

In the study, in order to deposit TaN thin film for diffusion barrier and bottom electrode we made the Plasma Assisted ALD equipment and confirmed the electrical characteristics of TaN thin films grown PAALD method. Plasma Assisted ALD equipment depositing TaN thin film using PEMAT(pentakis(ethylmethlyamino) tantalum) precursor and NH3 reaction gas is shown that TaN thin film deposited high density and amorphous phase with XRD measurement. The degree of diffusion and reaction taking place in Cu/TaN (deposited using 150W PAALD)/$SiO_{2}$/Si systems with increasing annealing temperature was estimated for MOS capacitor property and the $SiO_{2}$, (600${\AA}$)/Si system surface analysis by C-V measurement and secondary ion material spectrometer (SIMS) after Cu/TaN/$SiO_{2}$ (400 ${\AA}$) layer etching. TaN thin film deposited PAALD method diffusion barrier have a good diffusion barrier property up to 500$^{\circ}C$.

• Korean Chemical Engineering Research
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• v.52 no.1
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• pp.133-140
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• 2014

The experiment was designed to compare the char combustion kinetics of pulverized Indonesia coals commonly utilized in Korea power plants. The reaction rate of coal char has been formulated using the external and internal effectiveness factors to describe the diffusion effect quantitatively. The Random Pore Model (RPM) was used for applying internal specific surface area as a function of carbon conversion ratio. Reaction rate was obtained from reaction time using the Wire Heating Reactor (WHR) which can heat and measure the char particle temperature at the same time. BET and TGA were used to obtain physical properties such as internal specific surface area and structural parameter. Three kinds of Indonesia Sub-bituminous coals "BARAMULTI, ENERGYMAN, AGM" were used in order to derive the activation energy and pre-exponential factor. The results of this study showed that the effect of internal diffusion than that of external diffusion is the dominant as comparison of kinetics was reflected in external and internal effectiveness factors. For three kinds of coal char, finally, activation energy of intrinsic kinetics indicates 110~118 kJ/mol.

• Clean Technology
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• v.27 no.1
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• pp.93-103
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• 2021

As the seriousness and necessity of responding to climate change and reducing carbon emissions increases, countries around the world are continuing their efforts to reduce greenhouse gases. Among various efforts, research on CCUS, capturing and utilizing carbon dioxide generated when using carbon-based fuels, is actively being conducted. Studies on pressurized oxy-fuel combustion (POFC) that can be used with CCUS are also being conducted by many researchers. The purpose of this study is to analyze basic information related to the flame structure and pollutant emissions of pressurized oxy-fuel combustion. For this, a counter-flow diffusion flame model was used to analyze the combustion characteristics according to pressure and oxygen concentration. As the pressure increased, the flame temperature increased and the flame thickness decreased due to a reaction rate improvement caused by the activation of the chemical reaction. As oxygen concentration increased, both the flame temperature and the flame thickness increased due to an improvement to the reaction rate and diffusion because of a change in oxidizer momentum. Analyzing the related heat release reaction by dividing it into three sections as the oxygen concentration increased showed that the chemical reaction from the oxidizer side was subdivided into two regions according to the mixture fraction. In addition, the emission index of NO classified according to the NO formation mechanism was analyzed. The formation trend of NO according to each analysis condition was presented.

• Korean Journal of Materials Research
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• v.6 no.2
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• pp.210-220
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• 1996

The purpose of this study is to develop the processing techniques of Fiber Reinforced Metal by Liquid Phase Diffusion Bonding method with SiC fiber as a reinforcing material and CP Ti(Commercial Pure) as a matrix. The microstructure and the distribution of elements in reaction and CP Ti(Commercial Pure) as a matrix. The microstructure and the distribution of elements is reaction zone among CP Ti/Ti-15wt%Cu-20wt%Ni(TCN20)/SiC long fiber were investigated by Optical Microscope, SEM/EDX, EPMA, X-ray and AES. The results obtained in this study are as follows. 1) When Ti matrix composite materials are fabricated under the bonding condition of 1273Kx1200sec, the SiC long fiber was the most suitable reinforcing material for Ti matrix composite materials. 2) With SiC long fiber under same condition, a TiC layer(1.0-1.6$\mu\textrm{m}$) was observed on the surface of SiC long fiber. 3) Liquid Phase Diffusion Bonding has shown the feasibility of production of Ti matrix composite materials.

• Proceedings of the KSME Conference
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• 2000.04b
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• pp.949-955
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• 2000

Numerical study with detailed chemistry has been conducted to investigate the NOx formation and structure in $CH_4/Air-CO_2$ counterflow diffusion flames. The importance of radiation effect is identified and the role of $CO_2$ addition is addressed to thermal and chemical reaction effects, which can be precisely specified through the introduction of an imaginary species. Also NO separation technique is utilized to distinguish the contribution of thermal and prompt NO formation mechanisms. The results are as follows : The radiation effect is dominant at low strain rates and it is intensified by $CO_2$ addition. Thermal effect mainly contributes to the changes in flame structure and the amount of NO formation but the chemical reaction effect also cannot be neglected. It is noted that flame structure is changed considerably due to the addition of $CO_2$ in such a manner that the path of methane oxidation prefers to take $CH_4 {\rightarrow}CH_3{\rightarrow}C_2H_6{\rightarrow}C_2H_5$ instead of $CH_4 {\rightarrow}CH_3{\rightarrow}CH_2{\rightarrow}CH$. At low strain rate(a=10) the reduction of thermal NO is dominant with respect to reduction rate, but that of prompt NO is dominant with respect to total amount.

• Journal of Hydrogen and New Energy
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• v.13 no.3
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• pp.214-223
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• 2002

Kinetic and effectiveness factors for methanol steam reforming using commercial copper-containing catalysts in a plug flow reactor were investigated over the temperature ranges of $180-250^{\circ}C$ at atmospheric pressure. The selectivity of $CO_2$/$H_2$ was almost 100%, and CO products were not observed under reaction conditions employed in this work. It was indicated that $CO_2$ was directly produced and CO was formed via the reverse water gas shift reaction after methanol steam reforming. The intrinsic kinetics for such reactions were well described by the Langmuir-Hinshelwood model based on the dual-site mechanism. The six parameters in this model, including the activation energy of 103kJ/mol, were estimated from diffusion-free data. The significant effect of internal diffusion was observed for temperature higher than $230^{\circ}C$ or particle sizes larger than 0.36mm. In the diflusion-limited case, this model combined with internal effectiveness factors was also found to be good agreement with experimental data.

• Journal of the Korean Chemical Society
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• v.6 no.1
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• pp.14-18
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• 1962

Solution to the diffusion layer for the first order reaction at a droping mercury electrode (D.M.E.) is presented. Equations are derived for polarographic currents for the reactions at the D.M.E. A factor which is applicable to the D.M.E. is derived, when we use the equations of the polarographic currents for the reactions at a plane electrode(P.E.), and the rate constants of the backward reactions are negligibly small. Polarographic currents from a combination of diffusions and reactions are obtained at the D.M.E. with special approximation. Rate constant for the reaction of ferrous ion with hydrogen-peroxide is determined at the D.M.E.,using the data of Kolthoff and Perry. The agreement of the equation with the data of Kolthoff and Perry for the kinetic current of ferric ion in the presence of hydrogen-peroxide is good. Ratios of diffusion layer at the D.M.E. to the diffusion layer at the P.E. are discussed and show that, when the rate constants of the backward reactions for the first order reactions are larger than 1/0.05 sec-1. and drop-time about 3 sec., these ratioes are about one.

• Journal of the Korea Safety Management & Science
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• v.20 no.4
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• pp.7-13
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• 2018

This study investigates the enhancement of the oxygen diffusion rate in the cathode channel of a proton exchange membrane fuel cell (PEMFC) by pure oscillating flow, which is the same as the mechanism of human breathe. Three-dimensional numerical simulation, which has the full model of the fuel cell including electrochemical reaction, ion and electronic conduction, mass transfer and thermal variation and so on, is performed to show the phenomena in the channel at the case of a steady state. This model could analysis the oscillating flow as a moving mesh calculation coupled with electrochemical reaction on the catalyst layer, however, it needs a lot of calculation time for each case. The two dimensional numerical simulation has carried on for the study of oscillating flow effect in the cathode channel of PEMFC in order to reduce the calculation time. This study shows the diffusion rate of the oxygen increased and the emission rate of the water vapor increased in the channel by oscillating flow without any forced flow.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.27 no.8
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• pp.1089-1096
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• 2003

An experiment was performed to investigate lift-off, blow-off and combustion characteristics of a lifted coaxial diffusion flame according to fuel jet and air velocity. A jet diffusion flame which is attached on the nozzle rim begins to be lifted with increase of air velocity, and finally becomes blow-off at higher air velocity. In experiment, blow-off limit increased with increase of fuel jet velocity, however lift-off occurred at lower air velocity. Flame structure and combustion characteristics were examined by schlieren photos, temperature distributions and emission concentration distributions. Flame temperature became higher at midstream and its RMS became larger at up and downstream with increase of air velocity. Local NO concentration decreased but $CO_2$concentration increased with increase of air velocity, which shows combustion reaction becomes close to be stoichiometric at higher air velocity in spite of lift-off.

• Journal of Welding and Joining
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• v.13 no.2
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• pp.132-138
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• 1995

Rene80 superalloy was liquid phase diffusion bonded by using boron(B) as an insert material, where B has high diffusivity and higher melting point as an insert material. Bonding procedure and bonding mechanism of Rene80/B/Rene80 joint were investigated. As results, liquid metal was produced by solid state reaction between base metal and insert material on bonding zone. The liquid metal was produced preferentially at the grain boundary. Except for production of liquid metal, other bonding procedure was nearly same as TLP(Transient Liquid Phase) bonding. Bonding time, however, was reduced compared to prior result of TLP bonding. By bonding S.4ks at l453K, Ren80/B/Rene80 joint was isothermally solidified and homogenized where thickness of insert material was 7.5.mu.m.