• Transactions of the Korean Society of Mechanical Engineers B
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• v.26 no.10
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• pp.1394-1405
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• 2002

The performance of micro-actuators utilizing radiometric forces are studied numerically. The Knudsen number based on gas density and characteristic dimension is varied from near-continuum to highly rarefied conditions. Direct simulation Monte Carlo(DSMC) calculations have been performed to estimate the performance of the micro-actuators. In the present DSMC method, the variable hard sphere molecular model and no time counter technique are used to simulate the molecular collision kinetics. For simulation of diatomic gas flows, the Borgnakke-Larsen phenomenological model is adopted to redistribute the translational and internal energies.

• 한국전산유체공학회:학술대회논문집
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• 1998.05a
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• pp.138-144
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• 1998

The BGK equation, which is the kinetic model equation of Boltzmann equation, is solved using FDDO(finite difference with the discrete-ordinate method) to compute the rarefied flow of monatomic gas. Using reduced velocity distribution and discrete ordinate method, the scalar equation is transformed into a system of hyperbolic equations. High resolution ENO(Essentially Non-Oscillatory) scheme based on Harten-Yee's MFA(Modified Flux Approach) method with Strang-type explicit time integration is applied to solve the system equations. The calculated results are well compared with the experimental density field of NACA0012 airfoil, validating the developed computer code. Next. the computed results of circular cylinder flow for various Knudsen numbers are compared with the DSMC(Direct Simulation Monte Carlo) results by Vogenitz et al. The present scheme is found to be useful and efficient far the analysis of two-dimensional rarefied gas flows, especially in the transitional flow regime, when compared with the DSMC method.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.26 no.10
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• pp.1406-1418
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• 2002

The direct simulation Monte Carlo(DSMC) method is employed to calculate the etch rate on Al wafer. The etchant is assumed to be Cl$_2$. The etching process of an Al wafer in a helicon plasma etcher is examined by simulating molecular collisions of reactant and product. The flow field inside a plasma etch reactor is also simulated by the DSMC method fur a chlorine feed gas flow. The surface reaction on the Al wafer is simply modelled by one-step reaction: 3C1$_2$+2Allongrightarrow1 2AIC1$_3$. The gas flow inside the reactor is compared for six different nozzle locations. It is found that the flow field inside the reactor is affected by the nozzle locations. The Cl$_2$ number density on the wafer decreases as the nozzle location moves toward the side of the reactor. Also, the present numerical results show that the nozzle location 1, which is at the top of the reactor chamber, produces a higher etch rate.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.21 no.4
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• pp.509-517
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• 1997

Results of flat plate compressible boundary layer calculation, based on discrete formulation of DSMC method, are presented in low Mach number and low Knudsen number range. The free stream is a uniform flow of pure nitrogen at various Mach numbers in low pressures (i.e. rarefied gas). Complete thermal accommodation and diffuse molecular reflections are used as the wall boundary condition, replacing unreal no-slip condition used in continuum calculations. In the discrete formulation of DSMC method, there is no need to use ad hoc assumptions on transport properties like viscosity and thermal conductivity, instead viscosity is calculated from values of other field variables (velocity and shear stress). Also the results are compared with existing self-similar continuum solutions. In all Mach number cases computed, velocity slip is most pronounced in regions near the leading edge where continuum formulation renders the solution singular. As the boundary layer develops further downstream, velocity slips asymptote to values that are between 10 to 20% of the magnitude of free stream velocity. When the free stream number density is reduced, so the gas more rarefied, the velocity slip increases as expected.

• Journal of Mechanical Science and Technology
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• v.19 no.2
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• pp.664-673
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• 2005

The heat transfer characteristics of rarefied flows in a micro-actuator are studied numerically. The effect of Knudsen number (Kn) on the heat transfer of the micro-actuator flows is also examined. The Kn based on gas density and characteristic dimension is varied from near-continuum to highly rarefied conditions. Direct simulation Monte Carlo calculations have been performed to estimate the performance of the micro-actuator. The results show that the magnitude of the temperature jump at the wall increases with Kn. Also, the heat transfer to the isothermal wall is found to increase significantly with Kn.

• 유체기계공업학회:학술대회논문집
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• 2000.12a
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• pp.82-87
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• 2000

The direct simulation Monte Carlo (DSMC) method is applied to investigate the flow field of a disk-type drag pump. The pumping channels are cut on both sides of a rotating disk. The rotor has 10 Archimedes' spiral blades. In the present DSMC method, the variable hard sphere model is used as a molecular model, and the no time counter method is employed as a collision sampling technique. For simulation of diatomic gas flows, the Larsen-Borgnakke phenomenological model is adopted to redistribute the translational and internal energies.