• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.07a
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• pp.350-353
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• 2002

High voltage SiC Schottky barrier diodes with field plate structure have been fabricated and characterized. N-type 4H-SiC wafer with an epilayer of ∼10$\^$15/㎤ doping level was used as a starting material. Various Schottky metals such as Ni, Pt, Ta, Ti were sputtered and thermally-evaporated on the low-doped epilayer. Ohmic contact was formed at the backside of the SiC wafer by annealing at 950$^{\circ}C$ for 90 sec in argon using rapid thermal annealer. Field oxide of 550${\AA}$ in thickness was formed by a wet oxidation process at l150$^{\circ}C$ for 3h and subsequently heat-treated at l150$^{\circ}C$ for 30 min in argon for improving oxide quality. The turn-on voltages of the Ni/4H-SiC Schottky diode was 1.6V which was much higher than those of Pt(1.0V), Ta(0.7V) and Ti(0.7). The voltage drop was measured at the current density of 100A/$\textrm{cm}^2$ showing 2.1V for Ni Schottky diode, 1.45V for Pt 1.35V, for Ta, and 1.25V for Ti, respectively. The maximum reverse breakdown voltage was measured 1100V in the file plated Schottky diodes with 101an thick epilayer.

• Journal of IKEEE
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• v.27 no.1
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• pp.19-24
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• 2023

Since silicon having a band gap energy of about 1.12 eV are limited to a maximum operating temperature of less than 250 ℃, the sample with MIS structure based on the SiC substrate of wide-band gap energy was manufactured and the hydrogen response characteristics at high temperatures were investigated. The dielectric layer applied here is a tantalum oxide layer that is highly permeable to hydrogen gas and shows stability at high temperatures. It was formed by RTO at a temperature of 900 ℃ with tantalum. The thickness, depth profiles, and leakage current of the tantalum oxide layer were analyzed through TEM, SIMS, and leakage current characteristics. For the hydrogen gas response characteristics, the capacitance change characteristics were investigated in the temperature range from room temperature to 400 ℃ for hydrogen gas concentrations from 0 to 2,000 ppm. As a result, it was confirmed that the sample exhibited excellent sensitivity and a response time of about 60 seconds.

• Journal of the Korean Society of Food Science and Nutrition
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• v.32 no.5
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• pp.661-666
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• 2003

This research was aimed at evaluating the effects of natural antioxidants on lipid oxidation and sensory quality in cooked, chill- stored and reheated Wanjajun prepared with pork meat (short shank). Sage (SA) and combinations of herbs; basil/mints (BM), rosemary/parsley/thyme (RPT) were used as sources of antioxidants. The products were pan-fried in a medium layer of soybean oil and then stored in a refrigerator at 3$^{\circ}C$ for 8 days after rapid chilling. The process of heat treatment of Wanjajun caused changes in the chemical composition of products and simultaneously, thermal oxidative reaction was initiated. During storage of products in a refrigerator, further hydrolytic and oxidative processes in the lipid extraction were progressed. Acid value was increased, peroxides and malonaldehyde formation gradually were increased during cool storage. Addition of garlic, sage and combinations of herbs retarded the process of oxidation. Wanjajun made with addition of SA and RPT showed good quality in antioxidative potential after 8 days of storage. The sensory effect of herbs on undesirable warmed-over flavor was in order of : SA>RPT>BM.

• Fire Science and Engineering
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• v.26 no.6
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• pp.99-108
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• 2012

These days, spontaneous ignition phenomena by oxidizing heat frequently occur in the circumstances of processing and storing waste tires. Therefore, to examine the phenomena, in this work, this researcher conducted the tests of fires of fragmented waste tires (shredded tire), closely investigated components of the fire residual materials collected in the processing and storing place, and analyzed the temperature of the starting of the ignition, weight loss, and heat of reaction. For the study, this researcher conducted fire tests with fragmented waste tires in the range of 2.5 mm to 15 mm, whose heat could be easily accumulated, and performed heat analysis through DSC and TGA, DTA, DTG, and GC/MS to give scientific probability to the possibility of spontaneous ignition. According to the tests, at the 48-hour storage, rapid increase in temperature ($178^{\circ}C$), Graphite phenomenon, smoking were observed. And the result from the DTA and DTG analysis showed that at $166.15^{\circ}C$, the minimum weight loss occurred. And, the result from the test on the waste tire analysis material 1 (Unburnt) through DSC and TGA analysis revealed that at $180^{\circ}C$ or so, thermal decomposition started. As a result, the starting temperature of ignition was considered to be $160^{\circ}C$ to $180^{\circ}C$. And, at $305^{\circ}C$, 10 % of the initial weight of the material reduced, and at $416.12^{\circ}C$, 50 % of the intial weight of the material decreased. The result from the test on oxidation and self-reaction through GC/MS and DSC analysis presented that oxidized components like 1,3 cyclopentnadiene were detected a lot. But according to the result from the heat analysis test on standard materials and fragmented waste tires, their heat value was lower than the basis value so that self-reaction was not found. Therefore, to prevent spontaneous ignition by oxidizing heat of waste tires, it is necessary to convert the conventional process into Cryogenic Process that has no or few heat accumulation at the time of fragmentation. And the current storing method in which broken and fragmented materials are stored into large burlap bags (500 kg) should be changed to the method in which they are stored into small burlap bags in order to prevent heat accumulation.

• Journal of the Korean Vacuum Society
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• v.20 no.5
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• pp.339-344
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• 2011

The Ohmic contact of Ti/Au metals on n-type ZnO thin film deposited on c-plane sapphire substrates by pulsed laser deposition was investigated by TLM (transfer length method) patterns. The Ti/Au metal films with thickness of 35 nm and 90 nm were deposited by electron-beam evaporator and thermal evaporator, respectively. By using the photo-lithography method, the $100{\times}100{\mu}m^2$ TLM patterns with $6{\sim}61{\mu}m$ gaps were formed. To improve the electrical properties as well as to decrease an interface states and stress between metal and semiconductor, the post-annelaing process was done in oxygen ambient by rapid thermal annealing system at temperature of $100{\sim}500^{\circ}C$ for 1 min. In this study, it appeared that the minimum specific contact resistivity shows about $1.1{\times}10^{-4}{\Omega}{\cdot}cm^2$ in $300^{\circ}C$ annealed sample, which may be originated from formation of oxygen vacancies of ZnO during an oxidation of Ti metal at the interface of Ohmic contacts.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.399-399
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• 2013

Metal silicides는 Si 기반의microelectronic devices의 interconnect와 contact 물질 등에 사용하기 위하여 그 형성 mechanism과 전기적 특성에 대한 연구가 많이 이루어지고 있다. 이 중 Rare-earth(RE) silicides는 저온에서 silicides를 형성하고, n-type Si과 낮은 Schottky Barrier contact (~0.3 eV)을 이룬다. 또한 낮은 resistivity와 Si과의 작은 lattice mismatch, 그리고 epitaxial growth의 가능성, 높은 thermal stability 등의 장점을 갖고 있다. RE silicides 중 ytterbium silicide는 가장 낮은 electric work function을 갖고 있어 n-channel schottky barrier MOSFETs의 source/drain으로 주목받고 있다. 또한 Silicon 기반의 CMOSFETs의 성능 향상 한계로 인하여 germanium 기반의 소자에 대한 연구가 이루어져 왔다. Ge 기반 FETs 제작을 위해서는 낮은 source/drain series/contact resistances의 contact을 형성해야 한다. 본 연구에서는 저접촉 저항 contact material로서 ytterbium germanide의 가능성에 대해 고찰하고자 하였다. HRTEM과 EDS를 이용하여 ytterbium germanide의 미세구조 분석과 면저항 및 Schottky Barrier Heights 등의 전기적 특성 분석을 진행하였다. Low doped n-type Ge (100) wafer를 1%의 hydrofluoric (HF) acid solution에 세정하여 native oxide layer를 제거하고, 고진공에서 RF sputtering 법을 이용하여 ytterbium 30 nm를 먼저 증착하고, 그 위에 ytterbium의 oxidation을 방지하기 위한 capping layer로 100 nm 두께의 TiN을 증착하였다. 증착 후, rapid thermal anneal (RTA)을 이용하여 N2 분위기에서 $300{\sim}700^{\circ}C$에서 각각 1분간 열처리하여 ytterbium germanides를 형성하였다. Ytterbium germanide의 미세구조 분석은 transmission electron microscopy (JEM-2100F)을 이용하였다. 면 저항 측정을 위해 sulfuric acid와 hydrogen peroxide solution (H2SO4:H2O2=6:1)에서 strip을 진행하여 TiN과 unreacted Yb을 제거하였고, 4-point probe를 통하여 측정하였다. Yb germanides의 면저항은 열처리 온도 증가에 따라 감소하다 증가하는 경향을 보이고, $400{\sim}500^{\circ}C$에서 가장 작은 면저항을 나타내었다. HRTEM 분석 결과, deposition 과정에서 Yb과 Si의 intermixing이 일어나 amorphous layer가 존재하였고, 열처리 온도가 증가하면서 diffusion이 더 활발히 일어나 amorphous layer의 두께가 증가하였다. $350^{\circ}C$ 열처리 샘플에서 germanide/Ge interface에서 epitaxial 구조의 crystalline Yb germanide가 형성되었고, EDS 측정 및 diffraction pattern을 통하여 안정상인 YbGe2-X phase임을 확인하였다. 이러한 epitaxial growth는 면저항의 감소를 가져왔으며, 열처리 온도가 증가하면서 epitaxial layer가 증가하다가 고온에서 polycrystalline 구조의 Yb germanide가 형성되어 면저항의 증가를 가져왔다. Schottky Barrier Heights 측정 결과 또한 면저항 경향과 동일하게 열처리 증가에 따라 감소하다가 고온에서 다시 증가하였다.

• Korean Journal of Materials Research
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• v.8 no.12
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• pp.1158-1164
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• 1998

Aluminium sulfate solution was prepared by sulfuric acid treatment from gibbsite. Aluminium sulfate hydrate [$Al_2(SO_4)_3$ · $nH_2O$] was precipitated from aluminium sulfate solution by adding it into ethylalcohol. From XRD analysis as-prepared $Al_2(SO_4)_3$ · $nH_2O$ was confirmed to have mixed-crystalization water(n=18, 16, 12, 6). The average water of crystalization calculated from thermogravimetry(TG) was 14.7. Aluminium sulfate hydrate [$Al_2(SO_4)_3$ · $nH_2O$] was thermally decomposed and converted to $Al_2(SO_4)_3$ at $800^{\circ}C$, $\gamma-Al_2O_3$ at $900-1000^{\circ}C$, and $\alpha-Al_2O_3$ at $1200^{\circ}C$. Ni-doped $\gamma-Al_2O_3$, was synthesized from the slurry of as-prepared $\gamma-Al_2O_3$, with the ratio of [Ni]/[Al]=0.5. The reaction conditions of synthesis were determined as initial pH 9.0 and temperature $80^{\circ}C$ The basicity(pH) of slurry was controlled by using urea and $NH_4OH$ solution. Urea was also used for deposition-precipitation. For determining termination of reaction, the data acquisition was performed by oxidation reduction potential(ORP), conductivity and pH value in the process of reaction. Termination of the reaction was decided by observing the reaction steps and rapid decrease in conductivity. On the other hand, BET(Brunauer, Emmett and Teller) and thermal diffusity of Ni- doped $\gamma-Al_2O_3$, with various content of Ni were measured and compared. Thermal stability of Ni- doped $\gamma-Al_2O_3$ at $1250^{\circ}C$ was confirmed from BET and XRD analysis. The surface state of Ni-doped $\gamma-Al_2O_3$ was investigated by X-ray photoelectron spectroscopy(XPS). The binding energy at $Ni2P_{3/2}$ increased with increasing the formation of $NiAl_2O_4$ phase.

• Journal of the Korea Organic Resources Recycling Association
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• v.8 no.4
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• pp.129-137
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• 2000

In this study, biological treatment process of MWWT(Municipal wet-waste Treatment) has been developed through a moduling of the containerized closed ATAD(Auto thermal aerobic digestion) system & closed vertical dynamic acerator, which were used for food waste and cattle manure, respectively. Though biological process has several advantages such as low concentrations of heavy metals and salts, proper and stable C/N ratio and constant reaction rate against the process treating two wastes separately, it has a obstacles of salt concentration and much usage of bulking agent such as wood chip. After rapid oxidation in the boxed tower reactor for 5 days, the content of sewage sludge would be reduced 65% on around, might be mixed with the food waste that had been treated in the static closed reactor during 6 days and put in the secondary static reactor for curing. During composting process, the odor contained in the gas generated from the reactor was removed by passing it through a biofilter as well as the leachate was treated in the wastewater treatment facility. Consequently, it seemed to be possible to compost sewage sludge at mild and stable operating condition and at low cost through the biological ATAD process resulting in the production of organic compost satisfying the specifications regulated by itself.

• Resources Recycling
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• v.32 no.6
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• pp.25-33
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• 2023

With the growth of the battery industry, a rapid increase in the production and usage of lithium-ion batteries is expected, and in line with this, much interest and effort is being paid to recycle waste batteries, including production scrap. Although much effort has been made to recycle cathode material, much attention has begun to recycle anode material to secure the supply chain of critical minerals and improve recycling rates. The proximate analysis that measures the content of coal can be used to analyze graphite in anode material, but it cannot accurately analyze due to the interaction between the components of the black mass. Therefore, in this study, thermogravimetric analysis of each component of black mass was measured as the temperature increased up to 950℃ in an oxygen atmosphere. As a result, in the case of cathode material, no change in mass was measured other than a mass reduction of about 5% due to oxidation of the binder and conductive material. In the case of anode material, except for a mass reduction of about 2% due to the binder, all mass reduction were due to the graphite(fixed carbon). In addition, metal conductors (Al, Cu) were oxidized and their mass increased as the temperature increased. Thermal analysis results of mixed samples of cathode/anode show similar results to the predictive values that can be calculated through each cathode and anode analysis results.