• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 춘계학술대회
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• pp.376-380
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• 2003

The microstructure and the mechanical properties of RS-SiC and RS-$SiC_f/SiC$ materials have been investigated in conjunction with the content of residual silicon and porosity. The mechanical properties of RS-SiC materials suffered from the thermal exposure were also examined. RS-SiC based materials bave been fabricated using the complex matrix slurry with different composition ratios of SiC and C panicles. The characterization of RS-SiC based materials was investigated by means of SEM, EDS ~d three point bending test. Based on the mechanical property-microstructure correlation, the high temperature applicability of RS-SiC based materials was discussed.

• 대한기계학회논문집A
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• 제29권3호
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• pp.425-431
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• 2005

The efficiency of complex slurry preparation route for developing the high performance SiC matrix of $RS-SiC_{f}/SiC$ composites has been investigated. The green bodies for RS-SiC materials prior to the infiltration of molten silicon were prepared with various C/SiC complex slurries, which associated with both the sizes of starting SiC particles and the blending conditions of starting SiC and C particles. The characterization of Rs-SiC materials was examined by means of SEM, EDS and three point bending test. Based on the mechanical property-microstructure correlation, the process optimization is also discussed. The flexural strength of Rs-SiC materials greatly depended on the content of residual Si. The decrease of starting SiC particle size in the C/SiC complex slurry was effective for improving the flexural strength of RS-SiC materials.

• 한국해양공학회:학술대회논문집
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• 한국해양공학회 2003년도 춘계학술대회 논문집
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• pp.294-299
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• 2003

The efficiency of complex slurry preparation route for the development of high performance RS-SiCf/SiC composites has been investigated. The green bodies for RS-SiC and RS-SiCf/SiC composite materials prior to the infiltration of molten silicon were prepared with various C/SiC complex matrix slurries, which associated with both different sizes of starting SiC particles and blending ratios of starting SiC and carbon particles. The reinforcing materials in the composite system were uncoated and C coated Tyranno SA SiC fiber. The characterization of RS-SiC and RS-SiCf/SiC composite materials was examined by means of SEM, EDS and three point bending test. Based on the mechanical property-microstructure correlation, process optimization methodology is discussed.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회A
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• pp.166-171
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• 2007

The characterization of monolithic SiC and SiCf/SiC composite materials fabricated by NITE and RS processes was investigated in conjunction with the detailed analysis of their microstructure and density. The NITE-SiC based materials were fabricated, using a SiC powder with average size of 30 nm. RS- SiCf/SiC composites were fabricated with a complex slurry of C and SiC powder. In the RS process, the average size of starting SiC particle and the blending ratio of C/SiC powder were $0.4\;{\mu}m$ and 0.4, respectively. The reinforcing materials for /SiC composites were BN-SiC coated Hi-Nicalon SiC fiber, unidirectional or plain woven Tyranno SA SiC fiber. The characterization of all materials was examined by the means of SEM, EDS and three point bending test. The density of NITE-SiCf/SiC composite increased with increasing the pressure holding time. RS-SiCf/SiC composites represented a great decrease of flexural strength at the temperature of $1000\;^{\circ}C.$

• 대한기계학회논문집A
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• 제34권8호
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• pp.1015-1021
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• 2010

본 연구에서는 반응소결 탄화규소(RS-SiC)의 제조공정 중에서 C/SiC 복합 비율(0.1, 0.3, 0.4, 0.5, 0.6, 0.7, 1.0)이 외부입자충격 손상 거동에 미치는 영향을 평가하였다. 충격시험은 공기총(air-gun)을 사용하였으며, 직경 2 mm 강구를 113 m/s, 122 m/s, 180 m/s의 충격속도로 RS-SiC 판재($20\times20\times3$ mm)에 충격시켜 발생된 링크랙의 직경 변화 및 콘크랙의 발생 거동을 SEM 영상으로 평가하였다. 결과적으로 RS-SiC에 발생한 링크랙의 최대직경이 충격속도가 증가함에 따라 대체로 증가하였지만, C/SiC 복합 비율에 따라서는 급격한 변화를 보였다. 이는 C/SiC 복합 비율에 따라 잔류 Si 함량 및 굽힘강도 변화의 영향으로 볼 수 있다. 특히 C/SiC 복합 비율이 0.4~0.5 범위에서 콘크랙이 발생됨에 따라 링크랙에서 콘크랙의 발생으로 변화되는 충격손상 메커니즘의 임계영역으로 판단할 수 있다. 아울러 콘크랙의 발생 임계영역을 고려할 때, RS-SiC 최적 제조 공정으로서 C/SiC 혼합 비율을 최대 0.3으로 하는 것이 효과적이다.

• 한국해양공학회:학술대회논문집
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• 한국해양공학회 2004년도 학술대회지
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• pp.380-385
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• 2004

The efficiency of complex slurry preparation route for developing the high performance SiC matrix of RS-SiCf/SiC composites has been investigated. The green bodies for RS-SiC materials prior to the infiltration of nw/ten silicon were prepared with various C/SiC complex matrix slurries, which associated with both different sizes of starting SiC particles and blending ratios of starting SiC and carbon particles. The characterization of RS-SiC materials was examined by means of SEM, TEM, EDS and three point bending test. Based on the mechanical property-microstructure correlation, process optimization methodology is also discussed. The flexural strength of RS-SiC materials greatly depended on the content of residual Si. The decrease of starting SiC particle size in the C/SiC complex slurry was effective for improving the flexural strength of RS-SiC materials.

• 대한기계학회논문집A
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• 제31권2호
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• pp.205-210
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• 2007

SiC/SiC composites and monolithic SiC materials have been fabricated by the melt infiltration process, through the creation of crystallized SiC phase by the chemical reaction of C and Si. The reinforcing material used in this system was a braided Hi-Nicalon SiC fiber with double interphases of BN and SiC. The microstructures and the mechanical properties of RS-SiC based materials were investigated through means of SEM, TEM, EDS and three point bending test. The matrix morphology of RS-SiS/SiC composites was greatly composed of the SiC phases that the chemical composition of Si and C is different. The TEM analysis showed that the crystallized SiC phases were finely distributed in the matrix region of RS-SiC/SiC composites. RS-SiC/SiC composites also represented a good flexural strength and a high density, accompanying a pseudo failure behavior.

• 한국복합재료학회:학술대회논문집
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• 한국복합재료학회 2005년도 춘계학술발표대회 논문집
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• pp.102-105
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• 2005

The mechanical properties of $SiC_f/SiC$ composites reinforced with continuous SiC fiber have been investigated in conjunction with the detailed analysis of their microstructures. Especially, the effect of test temperature on the characterization of $SiC_f/SiC$ composites was examined. In this composite system, a braiding Hi-Nicalon SiC fibric was selected as a reinforcement. $SiC_f/SiC$ composites have been fabricated by the reaction sintering process, using the complex matrix slurry with a constant composition ratio of SiC and C particles. The characterization of $RS-SiC_f/SiC$ composites was investigated by means of SEM, EDS and three point bending test. Based on the mechanical property-microstructure correlation, the high temperature applicability of $RS-SiC_f/SiC$ composites was discussed.

• 한국마이크로전자및패키징학회:학술대회논문집
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• 한국마이크로전자및패키징학회 2002년도 추계기술심포지움논문집
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• pp.73-77
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• 2002

n형 SiC를 이용한 오옴성 접합을 알아보고자 Cu/Si/Cu 형태의 접합실험을 실시하였다. 오옴성 접합의 형성을 위하여 Cu/Si/Cu를 증착 하고 열처리를 시행하였다. 열처리는 RTP를 이용한 진공상태의 2-step 방법으로 시행하였다. 접합에 계산을 위하여 TLM구조로, 면 저항(Rs), 접촉저항(Rc), 이동거리(L$_{T}$), 패드간거리(d), 저항(R$_{T}$)값을 구하면 접합비 저항(Pc) 값을 알 수 있다. 이로 인한 결과 값은 접촉저항 값은 2$\Omega$이었고, 이동간 거리는 1$\mu\textrm{m}$이었으며 접합비저항($\rho$c)=1.0x$10^{-6}$ $\Omega$$\textrm{cm}^2$ 값을 얻을 수 있었다. 물리적 변화를 AES 및 XRD를 이용하여 알아보았다. SiC 계면 상에 Cu의 변화로 인한 silicide형성이 이루어짐을 알 수 있었다.있었다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 하계학술대회 논문집
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• pp.5-6
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• 2009

In this paper, plasma ion implant is performed with $PH_3$ gas diluted by helium gas on P-type Si wafer (100). Spike Rapid Thermal Processing(RTP) annealing performed for 30~60 sec from $800\;^{\circ}C$ to $1000\;^{\circ}C$ in $N_2+O_2$ ambient. Crystalline defect is analyzed by Transmission Electron Microscope(TEM) and Double crystal X-ray Diffraction(DXRD). Contact resistivity($\rho c$), contact resistance(Rc) and sheet resistance(Rs) are analyzed by measuring Transfer Length Method(TLM) using 4155C analysis. As annealing temperature increase, Rs decrease and ${\rho}c$ and Rc increase at temperature higher than $850\;^{\circ}C$. We achieve low Rs, ${\rho}c$ and Rc with Plasma ion implant and spike RTP.