Manostructural and Optical Features of Nano-crystalline Si Fims preparted by PECVD and RF Magnetron Sputter Techniques (PECVD 및 RF마그네트론 스퍼터 기법을 이용하여 제조된 나도 결정 Si 박막의 나노구조 및 광학적 특성)

• 한규호;박명범;조남희
• • Proceedings of the Materials Research Society of Korea Conference
  • /
  • 2001.05a
  • /
  • pp.102-102
  • /
  • 2001
• PDF

AC PDP용 보호막 MgO-$TiO_2$ protective layer for AC-PDP by RF Magnetron Sputtering (RF 마그네트론 스퍼터링법으로 제조된 AC PDP용 보호막 MgO-$TiO_2$의 방전전압특성)

• 이용욱;김영현;박종완
• • Proceedings of the Materials Research Society of Korea Conference
  • /
  • 2001.05a
  • /
  • pp.120-120
  • /
  • 2001
• PDF

A study on the property of PZT Thin Film by RF magnetron sputtering (RF Magnetron Sputtering 으로 형성시킨 PZT 박막 특성 연구)

• 하용해;백수현;백상훈;최진석;이주현;조현춘;마재평
• • Proceedings of the Materials Research Society of Korea Conference
  • /
  • 1992.05b
  • /
  • pp.138-139
  • /
  • 1992
• PDF

Preparation and Electrical Property of $(Ba_{1-x},Sr_{x})TiO_{3}$ Thin films by RF magnetron sputtering (RF magnetron sputtering에 의한 $(Ba_{1-x},Sr_{x})TiO_{3}$ 박막의 제조와 전기적 특성에 관한 연구)

• 박상식;윤순길
• • Proceedings of the Materials Research Society of Korea Conference
  • /
  • 1993.11a
  • /
  • pp.119-120
  • /
  • 1993
• PDF

The improvement of characteristics of SrTiO$_3$ thin films by RF magnetron sputtering (RF Sputtering에 의한 SrTiO$_3$ 박막의 특성 개선)

• 김상훈;백수현;이은성;박치선;마재평
• • Proceedings of the Materials Research Society of Korea Conference
  • /
  • 1996.11a
  • /
  • pp.54-54
  • /
  • 1996
• PDF

In sifu crystallization behavior and characteristics of $BaTiO_3$ thin films by RF magnetron sputtering (RF magnetron sputtering법에 의해 층착된 $BaTiO_3$ 박막의 in situ 결정화 양상 및 특성)

• 안재민;최덕균
• • Proceedings of the Materials Research Society of Korea Conference
  • /
  • 1993.11a
  • /
  • pp.121-122
  • /
  • 1993
• PDF

$Li^{+}$ ionic conductivity of lithium titanium Phosphate system solid electrolyte thin films fabricated by RF sputtering (RF 스퍼터링으로 제작된 Li Ti P 계 고체 전해질 박막에서의 리들 이온 전도 특성)

• 안지수;주승기
• • Proceedings of the Materials Research Society of Korea Conference
  • /
  • 1993.11a
  • /
  • pp.127-127
  • /
  • 1993
• PDF

Microstructure and Interface Reaction of RuO$_2$ thin film deposited by Rf Magnetron Sputtering (Rf Magnetron Sputtering으로 증착된 RuO$_2$ 박막의 미세구조 및 계면 반응 특성 분석)

• 배준철;박찬경
• • Proceedings of the Materials Research Society of Korea Conference
  • /
  • 1996.11a
  • /
  • pp.52-52
  • /
  • 1996
• PDF

The Effect of RF Induced Bias Voltage on DLC Thin Film (RF Induced Bias 전압이 DLC 박막의 특성에 미치는 영향)

• 손영호;박형국;정재인;박노길;황도원;김인수;배인호
• • Proceedings of the Korean Institute of Surface Engineering Conference
  • /
  • 1999.10a
  • /
  • pp.73-75
  • /
  • 1999
• PDF

Dynamic Analysis on a Microcantilever for RF-MEMS Switches (RF-MEMS 스위치용 마이크로 외팔보의 동특성 해석)

• Lee, Jin-Woo
• • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
  • /
  • 2011.04a
  • /
  • pp.325-326
  • /
  • 2011
• PDF

---