• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.236-236
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• 2013

비냉각 적외선 검출기는 산업용 군사용으로 최근 각광을 받고 있다. 이는 주야간 빛이 없는 곳에서도 사물의 열을 감지할 수 있어 인체감지 및 보안감시, 에너지 절감 등에 응용될 수 있는 핵심부품이다. 비냉각 적외선 검출기로는 재료의 저항의 변화를 감지하는 마이크로볼로미터형이 가장 많이 사용된다. 감지재료로는 비정질 실리콘(a-Si)과 산화바나듐(VOx)이 가장 많이 사용된다. VOx 박막은 일반적으로 RF sputtering 방법으로 증착이 되며, 저항이 낮고, 저항의 온도변화 계수(TCR)가 크며 신호 대 잡음 특성이 우수한 반면 산소(oxygen) phase가 다양하여 갓 증착된 상태의 박막은 재현성이 떨어지는 단점이 있다. 본 연구에서는 기존의 V 타겟을 사용한 VOx 박막을 증착하는 방법을 개선하여 ZnO 나노박막을 중간에 삽입하여 저항 특성을 조절할 뿐만 아니라 열처리에 의해 TCR 값을 향상시키고, VO2 phase 가 주로 나타나는 박막 증착 및 공정 방법을 소개한다. RF sputtering 장비를 이용하여 산소와 아르곤 가스의 혼합비를 4.5로 하였으며, VOx 증착 시 플라즈마 Power는 150 W 로 하여 상온에서 증착하였다. 갓 증착된 VOx 다층박막의 XRD 스펙트럼은 V2O5 피크가 주된 상을 이루고 있었으며, 산소열처리에 의해 VO2 상이 주로 나타남을 알 수 있었다. TCR 값은 갓 증착된 샘플에서 -0.13%/K의 값을 얻었으며, $300^{\circ}C$에서 50분간 열처리 후 -3.37%/K 으로 급격히 향상됨을 알 수 있었다. 저항은 열처리 후 약 100 kohm으로 낮아져 검출소자를 위한 조건에 적합한 특성을 얻을 수 있었다. 또한 산소열처리의 온도 및 시간에 따라 TCR 및 표면 거칠기 특성을 조사하였으며, 최적의 열처리 조건을 얻고자 하였다.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.10 no.9
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• pp.2227-2235
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• 2009

This paper describes the system configuration and measured performances of a wireless power transmission system which utilizes microwave. The technically final target of this system is to provide DC power to various mobile terminals within limited spaces such as buildings, conference rooms, and so on. The prototype system is built using in-house designed and fabricated circuits such as microwave oscillator, high power amplifier, microstrip patch antenna, low pass filter, and detector/rectifier. The fixed RF power of 29.3dBm at 2.4GHz is produced from the high power amplifier and transmitted through the transmitting antenna, while the received RF power at the receiving antenna is transformed into DC power through the detector/rectifier. The measured change of DC voltage according to the distance between transmitting and receiving antenna is described.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07b
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• pp.697-700
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• 2004

The SBT$(Sr_{0.8}Bi_{2.4}Ta_2O_9)$ thin films for semiconductor device were deposited on Pt-coated $Pt/TiO_2/SiO_2Si$ wafer by RF magnetron sputtering method at $400[^{\circ}C]$ and annealed at the temperature range from $600[^{\circ}C]$ to $850[^{\circ}C]$. The top electrodes(Pt) were deposited on SBT thin film by DC sputtering method. The crystallinity of SBT thin films were increased with increase of annealing temperature in the temperature range of $600[{\circ}C]\sim850[^{\circ}C]$. The annealing temperature properties were to be most excellent in the case of annealed SBT thin film at $750^{\circ}C]$. And, the maximum remanent polarization$(2P_r)$ and the coercive electric field$(E_c)$ at annealing temperature of $750[^{\circ}C]$ obtained about $11.60[{\mu}C/cm^2]$ and 48[kV/cm], respectively. Specially, it was seen that fatigue properties does not change in $10^{10}$ switching cycle.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2009.05a
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• pp.631-634
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• 2009

Recent advances in wireless communication, electronics, MEMS device, sensor and battery technology have made it possible to manufacture low-cost, low-power, multi-function tiny sensor nodes. A large number of tiny sensor nodes form sensor network through wireless communication. Sensor networks represent a significant improvement over traditional sensors, research on Zigbee wireless image transmission has been a topic in industrial and scientific fields. In this paper, we design a Zigbee wireless image sensor node and multimedia monitoring server system. It consists of embedded processor, memory, CMOS image sensor, image acquisition and processing unit, Zigbee RF module, power supply unit and remote monitoring server system. In the future, we will further improve our Zigbee wireless image sensor node and monitoring server system. Besides, energy-efficient Zigbee wireless image transmission protocol and interworking with mobile network will be our work focus.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.18 no.6
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• pp.127-132
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• 2018

In this paper, a high conversion gain cascode mixer was designed in W-band and verified by the fabrication and measurements. In the high frequency band such as a W-band, the conversion loss of a mixer is increased because of the poor performance of transistors. This high conversion loss of the mixer requires additional circuits which can give an extra gain such as an RF buffer amplifier, and this can affects the linearity and stability of the overall systems. Therefore, it is necessary to maximize the conversion gain of the mixer. To maximize the conversion gain of the mixer, biases of the transistor were optimized, and output load impedance was optimized by the load-pull simulations. The designed mixer was fabricated in $0.1-{\mu}m$ GaAs pHEMT technology and verified by the measurements. The measurement results shows a maximum conversion gain of -4.7 dB at W-band and an input 1-dB compression point of 2.5 dBm.

• Journal of the Semiconductor & Display Technology
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• v.21 no.2
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• pp.85-89
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• 2022

We reported on annealing effect on Ga₂O₃/Al₂O₃/SiC devices grown by radio frequency sputtering method. Post-deposition annealing at 900 ℃ was performed, which results in crystallization in the Ga₂O₃ films. The major peaks (-401) and (403) of Ga₂O₃ which was thermally treated at 900 ℃ appears in the x-ray diffraction (XRD) results. Auger electron spectroscopy (AES) shows that Ga and Al atoms seems to be diffused into the opposite direction Al₂O₃ and Ga₂O₃ after annealing. Transfer and output characteristics of back-gate transistor were analyzed where SiC substrate is used as gate material. On-state current and on/off ratio increased almost 10⁹ and 10⁶ times higher in the 900 ℃ annealed sample.

• The Journal of the Korea institute of electronic communication sciences
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• v.19 no.1
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• pp.47-52
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• 2024

The effects of annealing temperature on the optical and electrical properties of BZO thin films, grown on glass substrate, have been investigated. Analysis of the XRD shows that regardless of the annealing temperature, all BZO thin films indicate the c-axis orientation. The full width of half maximum (FWHM) decreases from 1.65 to 1.07° as the annealing temperature increases from 400 to 600℃. The average transmittance in the visible light region showed a high value of 85% without significantly affecting the annealing temperature. The results of Hall effect measurements indicate that the carrier concentration and mobility increased and the resistivity decreased as the annealing temperature increased. The resistivity and the carrier concentration of the BZO thin films annealed 600℃ were 9.75×10^-2 Ω·cm and 4.21×10¹⁹ cm^-3 respectively, showing the best value. The optimization of deposition and annealing conditions will certainly make the BZO thin films promising materials for the application to the next generation of optoelectronic devices.

• Transactions on Semiconductor Engineering
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• v.2 no.3
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• pp.1-5
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• 2024

This paper presents a crystal-less reference clock recovery (CR) frequency synthesizer with compensation designed for Bluetooth Low Energy (BLE) Smart-tag applications, operating at frequencies of 32, 72, and 80MHz. In contrast to conventional frequency synthesizers, the proposed design eliminates the need for external components. Using a single-ended antenna to receive a minimal input power of -36dBm at a 2.4GHz signal, the CR synthesizes frequencies by processing the RF signal received through a Low Noise Amplifier ( L N A ) . This approach allows the system to generate a reference clock without relying on a crystal. The received signal is amplified by the LNA and then input to a 16-bit ACC (Automatic Clock Compensation) circuit. The ACC compares the frequency of the received signal with the oscillator output signal, using the synthesis of a 32MHz reference clock through a frequency compensation method. The oscillator is constructed using a Ring Oscillator (RO) with a Frequency Divider, offering three different frequencies (32/72/80MHz) for various system components. The proposed frequency synthesizer is implemented using a 55-nm CMOS process.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.339-339
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• 2012

지난 몇 년 동안, 투명 비정질 산화물 반도체는 유기 발광 다이오드, 플렉서블 전자 소자, 솔라 셀, 바이오 센서 등 많은 응용분야에 연구되고 있다. 투명 비정질 산화물 반도체 그룹들 중, 특히 비정질 IGZO 박막 트랜지스터는 비정질 상태임에도 불구하고 높은 이동도와 낮은 동작 전압으로 훌륭한 소자 특성을 보인다. 이러한 고성능의 IGZO 박막 트랜지스터는 RF 마그네트론 스퍼터링이나 pulsed laser deposition과 같은 고진공 장비를 이용하여 이미 여러 그룹에서 제작되고 발표되었다. 하지만 진공 증착 시스템은 제조 비용의 절감이나 디스플레이 패널의 대면적화에 큰 걸림돌이 되고 있고, 이러한 문제점을 극복하기 위해서 용액 공정은 하나의 해결책이 될 수 있다. 용액 공정의 가장 큰 장점으로는 저온 공정이 가능하기 때문에 글라스나 플라스틱 기판에서 대면적으로 제작할 수 있고 진공 장비가 필요없기 때문에 제조 비용을 획기적으로 절감시킬 수 있다. 본 연구에서는 high-k 게이트 절연막과 IGZO 채널 층을 용액 공정을 이용하여 박막 트랜지스터를 제작하고 그에 따른 전기적 특성을 분석하였다. IGZO의 몰 비율은 In, Ga, Zn 순으로 각각 0.2 mol, 0.1 mol, 0.1 mol로 제작하였고, high-k 게이트 절연막으로는 Al2O3, HfO2, ZrO2을 제작하였다. 또한, 용액 공정 IGZO TFT를 제작하기 전, 용액 공정 high-k 게이트 절연막 캐패시터를 제작하여 그 특성을 분석하였다. 다양한 용액 공정 high-k 게이트 절연막 중, 용액공정 HfO2를 이용한 IGZO TFT는 228.3 [mV/dec]의 subthreshold swing, 18.5 [$cm^2/V{\cdot}s$]의 유효 전계 이동도, $4.73{\times}106$의 온/오프 비율을 보여 매우 뛰어난 전기적 특성을 확인하였다.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.21 no.8
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• pp.900-904
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• 2010

In this paper, a frequency tunable zeroth-order resonant(ZOR) antenna has been implemented. The ZOR characteristics of the proposed antenna is realized by using a composite right-and left-handed(CRLH) transmission line which consists of a rectangular slot on the ground plane of a mushroom structured antenna in order to minimize the antenna size. In addition, the tunable devices are introduced on the slotted ground plane for frequency tuning capability. Depending on the on and off states of the tunable device on the slotted ground plane, a shunt inductance value of the CRLH transmission line is changed and its resonant frequency becomes tunable. From the experimental results, the resonant frequency of the proposed antenna is changed from 4.92 GHz to 2.96 GHz. Additionally, the proposed antenna's size is reduced by 94.24 % compared with the half-wavelength patch antenna.