• Title/Summary/Keyword: RF 센서

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Substrate effects of ZnO films deposited by rf magnetron sputtering (고주파 마그네트론 스펏터링법으로 제조한 ZnO박막의 기판에 따른 효과)

  • Kim, Y.J.;Kwon, O.J.;Yu, S.D.;Kim, K.W.
    • Journal of Sensor Science and Technology
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    • v.5 no.6
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    • pp.68-73
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    • 1996
  • ZnO thin films were prepared on glass and (012) sapphire substrates by rf magnetron sputtering. Polycrysralline ZnO films with a (002) orientation were obtained on glass substrates. (110) ZnO films were epitaxially grown on the (012) sapphire substrates. Surface acoustic wave properties were also measured for propagating along the c axis of ZnO film on the glass and sapphire substrates. The phase velocities ($V_{p}$) on glass and sapphire substrate at center frequency were 2680 m/sec and 5980 m/sec and the effective coupling coefficient ($k^{2}$) on the 0th mode were 0.98 % and 1.43 %, respectively.

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Location Tracking System for Container Trailer Using Ubiquitous Sensor Networks (USN를 이용한 컨테이너 트레일러 위치추적 시스템)

  • Park, Jong-Hyun;Choo, Young-Yeol
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.11 no.3
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    • pp.627-633
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    • 2007
  • This paper describes position tracking system of a container trailer approaching to a gantry crane for loading or unloading a container into or from a ship, respectively. Proposed position tracking system informs the trailer driver of right position to stop the car under a gantry crane. To measure the location of a trailer, we used Cricket Mote modules which adopted RF and ultrasound technology. We present an elaborate method to improve position errors occurring at sensing and calculate three dimensional position by triangulation along with how to reduce location tracking interval for real-time monitoring. The location information was transmitted to a Personal Digital Assistant (PDA) periodically through Bluetooth communication for guidance of the trailer driver. In indoor and outdoor tests, position errors were less than 3 cm and location tracking interval was 0.5 second on average.

Query Technique for Quick Network Routing changing of Mobility Sensor Node in Healthcare System (헬스케어 시스템에서 이동형 센서노드의 신속한 네트워크 라우팅 변화를 위한 질의기법)

  • Lee, Seung-chul;Kwon, Tae-Ha;Chung, Wan-Young
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2009.10a
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    • pp.517-520
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    • 2009
  • Healthcare application system has been actively researched to apply WSN technology to healthcare area with a mobile sensor node of low cost, low power, and small size. Sensor node has the problem for transmission range of RF power and time delay of the wireless routing connectivity between sensor nodes. In this paper, we proposes a new method utilizing mobile sensor nodes with relay sensor nodes for quick network routing changing using query technique in healthcare system. A query processor to control and manage the routing changing of sensor nodes in a wireless sensor network was designed and implemented. The user's PC transmits the beacon message which will change the quick link routing according to activity status of patient in wireless sensor network. We describe the implementation for query protocol that is very effective of power saving between sensor nodes.

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Effect of Ultra-thin Catalyst Deposited upon $In_2O_3$ Thin Film on CO Sensitivity ($In_2O_3$ 박막위에 증착된 초박막 촉매가 CO의 검출 감도에 미치는 영향)

  • Lee, Hye-Jung;Song, Jae-Hoon;Kwon, Soon-Nam;Kim, Tae-Song;Kim, Kwang-Ju;Jung, Hyung-Jin;Choi, Won-Kook
    • Journal of Sensor Science and Technology
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    • v.9 no.6
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    • pp.430-439
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    • 2000
  • $In_2O_3$-based thin film sensor with 500-600 nm thick was fabricated for the detection of CO gas by rf magnetron sputtering. In order to improve both sensitivity to CO gas and selectivity to hydrogen gas containing -CH, ultra-thin transition metal Co catalyst was sputtered over $In_2O_3$ thin film and annealed at $500^{\circ}C$. Sensitivity to CO was maximum at the thickness of Co 2.1 nm and $300^{\circ}C$, and that to $C_3H_8$ was at the thickness of Co 1.4 nm and $350-400^{\circ}C$. From the x-ray photoelectron spectroscopy (XPS) result, ultra-thin Co was existed into CoO covered with $Co_2O_3$ on $In_2O_3$ particles, and thus p-n junction of $In_2O_3(n-type)$-CoO(p-type) was thought to be formed. In this p-n junction type sensors, sensing mechanism with reducing gases can be explained by the variation of depletion layer thickness formed in the interface.

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Fabrication of PLT target and thin film formation by rf-magnetron sputtering method ($PLT(Pb_{1-x}La_{x})Ti_{1-x/4}O_{3}$ 타켓의 제조 및 rf-magnetron sputtering법으로 박막 형성)

  • Jung, J.M.;Cho, S.H.;Park, S.G.;Choi, S.Y.;Kim, K.W.
    • Journal of Sensor Science and Technology
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    • v.6 no.1
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    • pp.56-62
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    • 1997
  • Using a rf-magnetron sputtering method, highly c-axis oriented La modified $PbTiO_{3}$ (PLT) ferroelectric thin films with compositions of $(Pb_{1-x}La_{x})Ti_{1-x/4}O_{3}$, where x=0.05, x=0 and x=0.15, have been obtained on (100)MgO single crystal substrate under conditions of low gas pressure. The degree of c-axis orientation of PLT films decreases with increasing gas pressure and with increasing La contant. These films were characterized by X-ray diffraction and SEM. PLT thin films of x=0.05, 0.1 and 0.15 show a low dielectric constant of 218, 246 and 361 at 1 kHz and remanent polarization(Pr) of $9{\mu}C/cm^{2}$, $8{\mu}C/cm^{2}$ and $7{\mu}C/cm^{2}$.

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Fabrication and Characteristics of TO:F Thin Film Deposited by RF Magnetron Sputtering( I ) (고주파 마그네트론 스퍼터링법에 의해 제조된 TO:F 투명도전막의 제조 및 특성( I ))

  • Park, Ki-Cheol;Kim, Jeong-Gyoo
    • Journal of Sensor Science and Technology
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    • v.3 no.2
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    • pp.65-73
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    • 1994
  • TO:F($SnO_{2}:F$) thin films were prepared by RF magnetron sputtering system. The dependence of their structural, electrical, and optical properties on deposition conditions such as substrate temperature, working pressure and power was studied. The optimum conditions of TO:F thin film are $SnF_{2}$ content of 15wt.% in target, RF power of 150W, substrate temperature of $150^{\circ}C$ and working pressure of 2mmTr. The resistivity and transmittance at 550nm in visible spectrum of the TO:F film deposited at optimum condition are $9{\times}10^{-4}{\Omega}{\cdot}cm$ and above 85%, respectively. For the films deposited from the target without $SnF_{2}$ and with 15wt.% $SnF_{2}$, the optical bandgaps calculated from the transmittance curves are 3.84 and 3.9eV, respectively. X-ray diffraction patterns showed that TO and TO:F films had tetragonal rutile structure with (101), (200) direction.

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Integrated Command System for Firefight Satety in Special Disaster Area (특수재난현장 진압대원의 안전을 위한 통합 지휘시스템에 관한 연구)

  • Roh, Tae-Ho
    • Fire Science and Engineering
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    • v.29 no.6
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    • pp.98-108
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    • 2015
  • An integrated command system is critical for the safety of firefighters and effective work in the headquarters of a special disaster areas such as natural disaster or large man-made hazard. The integrated command system requires environmental information such as temperature, humidity, and $CO_2$ levels, as well as personal physical information such as pulse and air respirator levels. An Analog to Digital Converter (ADC) chip converts sensed information into digital signals, and a Micro Controller Unit (MCU) transmits the digital signals to a transmission board using serial communication through a Serial Peripheral Interface (SPI). The digital signals are saved in a transmission board and transmitted to the integrated command system by a Radio Frequency (RF) unit. The location of fire-fighters in a building are determined using a gyro sensor and an inertial sensor. The collected information is applied to the integrated command system for firefighter safety and to ensure that they can effectively carry out their duties. Tthis study theoretically and experimentally investigated the technologies of RF transmission, indoor position, and an integrated command system that supports decision making using the transmitted information.

Characteristics of PLT thin films by rf magnetron sputtering (고주파 마그네트론 스펏터링법으로 제조한 PLT 박막의 특성)

  • Choi, B.J.;Park, J.H.;Kim, Y.J.;Choi, S.Y.;Kim, K.W.
    • Journal of Sensor Science and Technology
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    • v.4 no.3
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    • pp.37-42
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    • 1995
  • The PLT thin films on MgO substrate have been fabricated by RF magnetron sputtering and the dependence of properties on fabrication conditions have been studied. The PbO-rich target was used and the optimum fabrication conditions of the PLT thin films were such that substrate temperature, working pressure, $Ar/O_{2}$ ratio, and rf power was $640^{\circ}C$, 10 mTorr, 10:1, and $1.7\;W/cm^{2}$, repectively. In these conditions, the PLT thin film showed the deposition rate of $62.5\;{\AA}/min$, the Pb/Ti ratio of 1/2, and the dielectric constant of 200. The PLT thin film showed good c-axis orientation and crystalinity according to XRD and SEM analysis.

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Fabrication of surface-enhanced Raman scattering substrate using black silicon layer manufactured through reactive ion etching (RIE 공정으로 제조된 블랙 실리콘(Black Silicon) 층을 사용한 표면 증강 라만 산란 기판 제작)

  • Kim, Hyeong Ju;Kim, Bonghwan;Lee, Dongin;Lee, Bong-Hee;Cho, Chanseob
    • Journal of Sensor Science and Technology
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    • v.30 no.4
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    • pp.267-272
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    • 2021
  • In this study, Ag was deposited to investigate its applicability as a surface-enhanced Raman scattering substrate after forming a grass-type black silicon structure through maskless reactive ion etching. Grass-structured black silicon with heights of 2 - 7 ㎛ was formed at radio-frequency (RF) power of 150 - 170 W. The process pressure was 250 mTorr, the O2/SF6 gas ratio was 15/37.5, and the processing time was 10 - 20 min. When the processing time was increased by more than 20 min, the self-masking of SixOyFz did not occur, and the black silicon structure was therefore not formed. Raman response characteristics were measured based on the Ag thickness deposited on a black silicon substrate. As the Ag thickness increased, the characteristic peak intensity increased. When the Ag thickness deposited on the black silicon substrate increased from 40 to 80 nm, the Raman response intensity at a Raman wavelength of 1507 / cm increased from 8.2 × 103 to 25 × 103 cps. When the Ag thickness was 150 nm, the increase declined to 30 × 103 cps and showed a saturation tendency. When the RF power increased from 150 to 170 W, the response intensity at a 1507/cm Raman wavelength slightly increased from 30 × 103 to 33 × 103 cps. However, when the RF power was 200 W, the Raman response intensity decreased significantly to 6.2 × 103 cps.

A study of indoor localization system for ubiquitous home (유비쿼터스 홈을 위한 실내위치인지 시스템 개발에 관한 연구)

  • Yun, Jung-Mee;Chung, Jin-Wook;Kim, Dae-Hwan;Lee, Sang-Hak
    • Proceedings of the IEEK Conference
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    • 2005.11a
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    • pp.1117-1120
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    • 2005
  • 위치응용 서비스는 유비쿼터스 컴퓨팅의 구현의 기반이 되는 중요 기술요소 중 하나이다. 특히 스마트 홈, 지능형 단말기, 스마트 스페이스의 구현을 위해서는 광역범위보다는 실내환경에서의 사용자, 오브젝트의 위치인식에 대한 연구기술이 필요하다. 본 논문에서는 무선센서 플랫폼 및 통신기술을 이용한 실내 위치인식 시스템의 설계 및 구현에 관해 기술하고자 한다. 사용자 위치인식을 위한 기반기술로 RF 무선신호와 초음파신호간의 속도차를 이용한 DTOF 기반 거리측정과 삼각측량 기법을 이용하였다. $3{\sim}10cm$ 의 위치오차를 가지는 정밀 위치계측 기술로, 개발된 시스템은 무선센서 플랫폼과 임베디드 게이트웨이 시스템, 위치계측 서버 시스템으로 구성되며, 시스템의 개발 및 실제환경에서의 테스트를 통하여 실생활 응용에 대한 가능성을 확인할 수 있었다. 또한 오차보정 및 멀티 센서를 통한 위치보정기법에 대해서도 논의한다.

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