• Journal of the Semiconductor & Display Technology
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• v.23 no.3
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• pp.96-101
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• 2024

In this study, we report on the joining of mullite ceramics using the reaction-bonded aluminum oxide method without applying any external pressure, in consideration of a possible multilayer ceramic substrate in semiconductor back-end process. For this purpose, Al/Al2O3/SiO2/Mullite powder mixture paste was applied to the joining surfaces between two parent mullite bodies of the same composition, and then sintered at 1,650 ℃ for 2 h in air, resulting in a dense and rigid mullite ceramic joints. Phase and microstructural analysis of the joined mullites showed that the reaction bonding by Al oxidation and thereafter mullite formation were completed during the heat treatment process. However, due to the difference in sintering behavior between the parent body and the joining layer, few pore of which size proportional to the joining layer thickness, were observed at some parts of the joining interface. The formation of the pore and its causes was discussed.

• Korean Journal of Materials Research
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• v.23 no.10
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• pp.574-579
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• 2013

The milling and particulate characteristics of Al alloy-$Al_2O_3$ powder mixtures for a reaction-bonded $Al_2O_3$ (RBAO) process were studied. A commercially available prealloyed Al powder with Zn, Mg, Cu and Cr alloying elements (7475 series) was mixed with a calcined sinter-active $Al_2O_3$ powder and then milled in centrifugal milling equipment for ~48 hrs. The Al alloy-$Al_2O_3$ powder mixtures after milling were characterized and evaluated in various ways to reveal their particulate characteristics during milling. The milling efficiency of the Al alloy increased with a longer milling time. Comminution of the Al alloy particles started with its elongation, showing a high aspect ratio. With a longer milling time, the elongated Al alloy particle changed in terms of its shape and size, becoming equiaxially fine particles. Regardless of the milling efficiency of the Al alloy particles, all of the Al alloy particles repeatedly experienced strong plastic deformation during milling, giving rise to higher density of surface defects, such as microcracks, and leading to higher residual microstress within the Al alloy particles. The chemical reactions, oxidation behavior and hydration behavior of the Al alloy particles and the hydrolysis characteristics of their reaction with the environment were also observed during the milling process and during the subsequent powder handling steps.

• Journal of the Korean Ceramic Society
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• v.34 no.6
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• pp.577-582
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• 1997

The mechanical properties of Al2O3-ZrO2 composites fabricated by RBAO(reaction bonded aluminium oxide) process were investigated. As the amount of ZrO2 increased the sinstered density of Al2O3-ZrO2 composites decreased slightly, but wear resistance was enhanced. Bending strength of Al2O3-ZrO2 composites increased in proportion to the amount of al in case of a fixed ZrO2 content. When the amount of Al was fixed bending strength reached its maximum value at 25 wt% ZrO2. The fracture toughness(K1c) increased with increasing content of ZrO2, but decreased with increasing Al amount. On the other hand, the fracture mode of Al2O3-ZrO2 composites was the mixed mode of inter-and transgranular fracture.