• 대한기계학회논문집B
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• 제27권8호
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• pp.1061-1070
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• 2003

A triple flame in a mixing layer was studied experimentally with concentration gradient and mean velocity by using a multi-slot burner, which can stabilize the lift-off flame. Flame stabilization condition, lift-off heights, and some other characteristics were examined for methane and propane flame within a range of very low concentration gradient. Pitot-tube and LDV(Laser Doppler Velocimetry) were used for velocity. Mass spectroscopy and Rayleigh scattering signal were used for concentration gradients. Thermo-couples and SiC TFP(Thin Filament Pyrometer) were used for temperature. It was found that minimum values of the lift-off heights exist at a certain concentration gradient for constant mean velocity and this means that the propagation velocity has a maximum value. The scales of flame to the burner nozzle and intensity variation of the diffusion flame were suspected as the cause.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1991년도 추계학술대회 논문집 학회본부
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• pp.299-303
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• 1991

A lamp heated LPCVD equipment has been made. Wafer is heated by an array of fifteen tungsten halogen lamps above the front side of a wafer and pyrometer views the back side of the wafer through $CaF_2$ window. Reactor which consisits of a quartz window and a water cooled-stainless steel plate can be evacuated to $5{\times}10^{-3}$ torr with a rotary vane pump. By pyrolysis of $SiH_4$ at about $600^{\circ}C$, polysilicon has been formed on the silicon dioxide film. The measured results show that thickness nonuniformity is 15% and temperature nonuniformity is 1.1%. Because activation energy of pyrolysis of $SiH_4$ is very high, about 1.8eV, small temperature variation will induce large thickness nonuniformity. The main cause of temperature nonuniformity is unsymmetry of lamp power and an unbalanced cooling structure. Charls & Evans' SIMS result shows that the oxygen content in the deposited polysilicon is comparable to that of silicon substrate but carbon content is ten times higher.

• Journal of Advanced Marine Engineering and Technology
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• 제33권2호
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• pp.322-329
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• 2009

Machinability of LAM(Laser Assisted Machining) has been studied for ceramics such as $Al_2O_3$, $Si_3_N4$ and $ZrO_2$ by $CO_2$ laser. It was possible to remove ceramics by PCBN tool because material became softening and deterioration by local laser beam irradiation. The advantage of LAM is the ability to produce larger material removal rates and tool life. But, for cutting of $Al_2O_3$ and $ZrO_2$, stage of laser power control was needed owing to thermal shock with high temperature of workpiece by laser power. And when $Si_3N_4$ was machined by LAM, $N_2$ gas spouted from surface of one cause of high temperature. Characteristics of LAM were analyzed using pyrometer, dynamometer, SEM and EDS to measure temperature of workpiece surface, cutting force, variation of machining surface and structure of lattice respectively. As the result of this study, it was found that machinability of LAM for ceramics in $CO_2$ laser and mechanism of LAM was different according to the kind of ceramics because of properties of materials.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회A
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• pp.1542-1547
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• 2007

Laser surface treatment technologies have been used to improve characteristics of wear and to enhance the fatigue resistance for mold parts. The optical lens with the elliptical profile is designed to obtain a wide surface hardening area with a uniform hardness. The objective of this research work is to investigate the influence of the process parameters, such as power of laser and defocused spot position, on the characteristics of laser surface treatment for the case of SKD61 steel and SCM4 steel. From the results of the experiments, it has been shown that the maximum average hardness is approximatly 700${\sim}$780 Hv when the power, focal position and the travel of laser are 1,095 W, 0mm and 0.3 m/min, respectively. In samples treated with lower scanning speeds, some small carbide particles appear in the interdendritic regions. This region contains fine martensite and carbide in proportions which depend on the local thermal cycle.

• 한국진공학회지
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• 제12권1호
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• pp.64-69
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• 2003

원자력산업용 소재로 사용되는 가돌로니엄 (Gd, 원자번호 64) 금속을 20 kW 내외의 고출력 전자빔을 이용하여 용융시키고, 그 용융면의 온도 분포를 측정하였다 광학 필터들과 렌즈구경 크기를 조절하여 용융면에서 발생하는 방사강도를 ccd 카메라로 받아들이고 실시간으로 컴퓨터에 저장하였다. 이 방법을 이용하여 전자빔의 출력에 따른 용융면의 크기를 실시간으로 모니터 할 수 있어 안정적인 전자빔의 동작이 가능하였다 그리고 가돌로니엄 금속 용융면을 흑체복사로 가정하고 Planck's law를 적용한 결과는 적외선 온도계로 측정한 결과보다 동일한 전자빔 출력에서 100~$200^{\circ}C$ 높은 값을 보였다.

• Journal of Advanced Marine Engineering and Technology
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• 제34권7호
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• pp.963-970
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• 2010

This study makes an estimate of the laser-assisted machining (LAM) of an economically viable process for manufacturing precision silicon nitride ceramic parts using a high-power diode laser (HPDL). The surface is locally heated by an intense laser source prior to material removal, and the resulting softening and damage of the workpiece surface simplify the machining of the ceramics. The most important advantage of LAM is its ability to produce much better workpiece surface quality compared to conventional machining. Also important are its larger material removal rates and longer tool life. The cutting force and surface temperature were measured on-line using a pyrometer and a dynamometer, respectively. Tool wear, chips and the surface of the workpiece were measured using optical microscopy, and the surface and fractured cross-section of $Si_3N_4$ were measured by SEM. During the LAM process, the cutting force and tool wear were reduced and oxidation of the machined surface was increased according to the increase in the laser power. Moreover, the more the feed rate increased, the more the cutting force and tool wear increased.

• 전자공학회논문지A
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• 제28A권10호
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• pp.840-846
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• 1991

In case of the rapid thermal process by halogen lamps, an optical pyrometer is generally used to measure the temperature. It is, however, necessary to measure the temperature by the thermocouple when the process temperature is lower than 700$^{\circ}C$ and the correction of the temperature is required. Contact by the PdAg paste is commonly used out but in this case it is impossible to see the effect of surface states of the substrate, which is critical in the rapid thermal process. In this study, real temperature ramping speed of silicon substrates coveredwith various thin films such as SiO$_2$2, Si$_{3}N_{4}$, dopants, and conductive layers (Ti or Co) was investigated by a mechanical contact of the thermocouple. And the results were compared with the case in which the contact was made by the PdAg paste. Effect of process ambient was also studied. It was found that depending on the surface state, overshoot more than 100$^{\circ}C$ could occur. It was also found that in case of the substrate covered with conductive layers, mechanical contact might render the correct temperature.

• 한국정밀공학회지
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• 제24권4호
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• pp.57-67
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• 2007

Laser surface hardening technologies have been used to improve characteristics of wear and to enhance the fatigue resistance fur mold parts. The objective of this research work is to investigate the influence of the process parameters, such as power of laser and defocused spot position, on the characteristics of laser surface hardening for the case of SKD61 steel. CW Nd:YAG laser is selected as the heat source. The optical lens with the elliptical profile is designed to obtain a wide surface hardening area with a uniform hardness. From the results of the experiments, it has been shown that the maximum average hardness is approximatly 780 Hv when the power, focal position and the travel of laser are 1,095 W, 0mm and 0.3 m/min, respectively. In samples treated with lower scanning speeds, some small carbide particles appear in the interdendritic regions. This region contains fine martensite and carbide in proportions which depend on the local thermal cycle.

• 한국레이저가공학회지
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• 제18권2호
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• pp.1-4
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• 2015

This study is related to the surface hardening treatment to spheroidal graphite cast iron for die by using high power diode laser. Laser device used in this experiment is capable of real-time laser power control. This is because the infrared temperature sensor (two color pyrometer) attached to the optical system measures the surface temperature of specimen and adjusts the laser power in real time. The surface treatment was carried out with the change of heat treatment temperature at the beam travel speed 3 mm/sec. Hardened width and depth was measured and hardened zone was analyzed by micro vickers hardness test in order to research the optimum condition of heat treatment. The changes in microstructure of the hardened zone also was examined. As a result of hardness measurement and observations on microstructure of hardened zone, hardness increased over three times as compared with base metal because the martensite was formed on the matrix structure.

• 에너지공학
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• 제12권4호
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• pp.267-273
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• 2003

Emulsion 연료는 연료절감과 오염방지특성에 의하여 많은 관심을 끌고 있다. 본 연구에서는 B-C유와 Emulsion 연료(B-C유와 폐수를 혼합하여 만든 연료)의 연소효율을 비교 분석하였다. 보일러의 양쪽에 R-Type Thermocouple과 광학온도계를 설치하였고, 연소가스배출구에 연소측정기를 설치하여 B-C유와 Emulsion 연료의 연소시 화염의 온도, 연소율 및 배기가스 농도를 측정 비교하였다. 이에 대한 실험 결과로서, 보일러 전$.$후반부의 화염온도는 B-C유의 화염온도보다 약 5$0^{\circ}C$ 낮았고, 이러한 온도차이의 원인은 Emulsion 연료의 폐수 속 수분 잠열로 인한 것으로 사료되어진다. 또한 Emulsion연료를 사용하였을 때 배출가스의 분석 결과는 오염물질의 같소 및 CO 농도 또한 매우 낮게 측정되어짐을 나타내고 있다. 3-C유와 Emulsion 연료의 연소 효율은 각각 85.5%와 84.8%이다.