• Journal of the Korean institute of surface engineering
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• v.33 no.2
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• pp.69-76
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• 2000

The rf plasma chemical vapor deposition is a common method employed for diamond or amorphous carbon deposition. Diamond possesses the strongest bonding, as exemplified by a number of unique properties-extraordinary hardness, high thermal conductivity, and a high melting tempera tore. Therefore, it is very important to investigate the synthesis of semiconducting diamond and its use as semiconductor devices. An inductively coupled rf plasma CVD system for producing amorphous carbon films were developed. Uniform temperature and concentration profiles are requisites for the deposition of high quality large-area films. The system consists of rf matching network, deposition chamber, pumping lines for gas system. Gas mixtures with methane, and hydrogen have been used and Si (100) wafers used as a substrate. Amorphous carbon films were deposited with methane concentration of 1.5% at the process pressure of S torr~20 torr, and process temperature of about $750^{\circ}C$. The nucleation and growth of the amorphous carbon films have been characterized by several methods such as SEM and XRD.

• Journal of Power System Engineering
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• v.17 no.6
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• pp.5-10
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• 2013

Diesel engines have the advantages of good fuel efficiency and low emissions. Therefore, car makers have been developed various kinds of diesel engine management system to clean up emissions while improving fuel efficiency. One of them is the common rail system. In the common rail system, diesel fuel is injected into the combustion chamber at ultra high pressures up to 1,800 bar to ensure more complete combustion for cleaner exhaust gas, and highly precise multiple injection reduces NOx emission, combustion noise and vibration. Generally speaking, common rail system consists of booster pump, high pressure pump, common rail, injectors, control valves, and sensors. The high pressure pump receives low pressure fuel from the booster pump and supply high pressure fuel to injectors through the high pressure common injection rail. Therefore, high pressure pump has an important role in common rail system. In this paper, we have investigated the performance of high pressure pump of common rail system.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 1998.10a
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• pp.190-195
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• 1998

This paper reports on the theoretical and expetimental study of the vane and cam ring motions in a variable displacement vane pump which is already used widely in various industrial and automotive applications. Dynamic equations of vane and cam ring motion and flow continuity equations are derived and then solved simultaneously using the numerical method. Vane detachment cause the pressure tipples, noise, wear in cam ring, and decrease the volumetric efficiency. Consequently, Vane detachment occurs due to excess compression in the pumping chamber, and it can be reduced by adjustment of design parmeters.

• 한국정보디스플레이학회:학술대회논문집
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• 2005.07a
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• pp.673-675
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• 2005

Ink jet printheads are now widely used in manufacturing processes that require precise dispensing of materials. Today, Dimatix manufactures a variety of drop-on-demand ink jet printheads for the industrial printing market, but emerging opportunities present fresh challenges to our technology. In response to requirements for digitally printing on flexible substrates and dispensing novel electronic fluids, we are developing next generation jetting technology based on our three-dimensional silicon MEMS technology with a piezo-driven pumping chamber integrated into the chip structure. This presentation will address the functional and physical design features and properties of Dimatix's MEMS process, its characteristics, reliability and usability. Examples of opportunities and applications for digitally printing electronic fluids on flexible substrates with MEMS-based ink jet technology will be presented.

• Journal of the Semiconductor & Display Technology
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• v.4 no.3 s.12
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• pp.23-27
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• 2005

The effects of the base vacuum level on a plasma display panel (PDP) produced by the vacuum in-line sealing technology were investigated. The main equipment of the vacuum in-line sealing process consists of the sealing chamber, pumping systems for evacuating, mass flow controller for introducing the plasma gases, and other measuring systems. During the sealing process, the impurity gases were fully evacuated and the panel was prevented from the adsorption of impurity gases. As a result, the brightness increased as the impurity gas density decreased, so we found that the vacuum in-line sealing process was more efficient technology an the conventional sealing process.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2010.11a
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• pp.618-619
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• 2010

Thermal transpiration device(Knudsen pump) having no moving parts can self-pump the gaseous propellant by temperature gradient only (cold to hot). We designed, fabricated the Knudsen pump and analyzed pressure gradient efficiency of membrane according to Knudsen number under vacuum condition. In this paper, we measured presented pumping efficiency of Knudsen pump according to Hanji membrane.

• Journal of the Semiconductor & Display Technology
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• v.16 no.2
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• pp.75-78
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• 2017

We reports improved monitoring performance of Self plasma-optical emission spectroscopy (SP-OES) by augmenting a by-pass tube to a conventional straight (or single) tube type self plasma reactor. SP-OES has been used as a tool for the monitoring of plasma chemistry indirectly in plasma process system. The benefits of SP-OES are low cost and easy installation, but some semiconductor industries who adopted commercialized SP-OES product experiencing less sensitivity and slow sensor response. OH out-gas chemistry monitoring was performed to have a direct comparison of a conventional single type tube and a by-pass type tube, and fluid dynamic simulation on the improved hardware design was also followed. It is observed faster pumping out of OH from the chamber in the by-pass type SP-OES.

• Journal of Power System Engineering
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• v.19 no.2
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• pp.49-56
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• 2015

As an alternative fuel that can be used in SI engine, LPG is one of clean fuels with larger H/C ratio compared to gasoline, low $CO_2$ emission, and small amount of pollutants such as sulfur compounds. When LPG is used in spark ignition engine, volumetric efficiency of the engine can be improved and pumping loss can be reduced by performing direct injection into the combustion chamber instead of port fuel injection. LPG-DI engine allows for lean combustion and stratified combustion under low load. In case of stratified combustion, air fuel ratio can be greatly increased compared to theoretic mixture ratio combustion. Improved thermal efficiency of the engine and reduced pumping loss can be expected from stratified combustion. Accordingly in this study, an experimental apparatus for visualization was designed and manufactured to study the combustion process of LPG after injection and ignition, intended to examine ignition probability and combustion characteristics of spark ignition direct injection(SIDI) LPG fuel. Ambient pressure, ambient temperature and fuel injection pressure were found as important variables that affect ignition probability and flame propagation characteristics of LPG-air mixture. Also, it was verified that the injected LPG fuel can be directly ignited by spark plug under appropriate ambient conditions.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.43 no.9
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• pp.838-844
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• 2015

This paper includes summarization and analysis of previous research results on acoustic attenuation due to particles and flow turning in rocket motors among various damping parameters. Particle damping is the most effective mechanism in suppressing high-frequency combustion instabilities occurring in rocket combustion chambers, which is dependent on the size and the mass fraction of particles. Relatively weak attenuation by flow turning compared to particle damping depends on the geometry of propellant and a combustion chamber. Pumping driving effects need to be taken into account when realizing vorticity generation on the propellant surface. However, its driving effects become cancelled out by flow turning loss when the propellant geometry is cylindrical.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.37 no.8
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• pp.744-750
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• 2009

In this study, the pumping performance of a piezoelectric valveless micropump is simulated. The micropump, which was developed in the previous work, is composed of a four-layer lightweight piezocomposite actuator, a polydimethylsiloxane (PDMS) pump chamber, and two diffusers. The piezoelectric domain, the fluid domain and the structural domain are coupled in the three-dimensional simulation. We used ANSYS for the piezoelectric and structural domains and ANSYS CFX for the fluid domain. The effects of driven frequency on the flow rate have been investigated by simulating the flow characteristics for 10 Hz and 40 Hz driven frequencies. The flow rates with respect to driven frequencies up to 300 Hz have been calculated.