• 제목/요약/키워드: Pulsed Laser Deposition

검색결과 639건 처리시간 0.039초

Pulsed Laser Deposition 방법으로 증착된 Fe3O4 나노선의 성장과 특성 (Fabrication and Properties of Fe3O4 Nanowires Using Pulsed Laser Deposition)

  • 윤종구;김진아;윤순길
    • 한국전기전자재료학회논문지
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    • 제26권1호
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    • pp.64-67
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    • 2013
  • $Fe_3O_4$(magnetite) having half metallic property attracts great attention material with high curie temperature in spintronics. $Fe_3O_4$ thin films and nanowires were grown onto c-$Al_2O_3$(0001) at various substrate temperatures. $Fe_3O_4$ films deposited from 300 to $600^{\circ}C$ are influenced by thermal stress induced from mismatch of thermal expansion coefficient between $Fe_3O_4$ and $Al_2O_3$ (0001) substrate. The $Fe_3O_4$ nanowires grown at $640^{\circ}C$ showed a diameter of 130 nm and a length of $2-10{\mu}m$. The nanowire arrays fabricated by pulsed laser deposition technique have high coercivity($H_c$) of 608 Oe and Squareness($M_r/M_s$) of 0.68 in perpendicular direction.

Ambient Oxygen Effects on the Growth of ZnO Thin Films by Pulsed Laser Deposition

  • Park, Jae-Young;Kim, Sang-Sub
    • 한국재료학회지
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    • 제17권6호
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    • pp.303-307
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    • 2007
  • ZnO thin films were prepared by pulsed laser deposition on amorphous fused silica substrates at different ambient $O_2$ pressures varying from 0.5 to 500 mTorr, to observe the effect of ambient gas on their crystalline structure, morphology and optical properties. Results of X-ray diffraction, scanning electron microscopy, atomic force microscopy and photoluminescence studies showed that crystallinity, surface features and optical properties of the films significantly depended on the oxygen background pressure during growth. A low oxygen pressure (0.5 mTorr) seems to be suitable for the growth of highly c-axis oriented and smoother films possessing a superior luminescent property. The films grown at the higher $O_2$ pressures (50-500 mTorr) were found to have many defects probably due to an excessive incorporation of oxygen into ZnO lattice. We speculate that the film crystallinity could be affected by the kinetics of atomic arrangement during deposition at the higher oxygen pressures.

레이저 빔에 의한 YBCO 표면변조 연구 (Study on YBCO Surface Modification by Laser Beam)

  • 정영식;이상렬
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1996년도 춘계학술대회 논문집
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    • pp.129-132
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    • 1996
  • Surface modification like cone formation on Pulsed laser deposition (PLD) occurs in YBCO target surface irradiated by laser beam. Cone formation results in a reduction of deposition rate, so that it is significant obstacles to an efficient deposition process. With the change of various conditions such as the number of laser shot, target density, direction of incoming laser beam, we have systematically analyzed the modification of target surface. Because cones formed by beam-target interactions grow in direction of incoming laser beam, we have used the method of rotating the target position by 180$^{\circ}$ with the same number and position of laser shot. Experimental results of losing the directionality and changing the shape of cones formed on laser irradiated YBCO target surface is obtained by the SEM image. Also, we have observed that the size of cones formed on target by pulsed laser became larger with increasing the number of laser shots.

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펄스레이저 증착법에서 기판-플룸 각 변화가 ZnO 박막의 구조 및 광학적 특성에 미치는 영향 (Structural and Optical Properties of ZnO Thin Films Grown at Various Plume-Substrate Angles by Pulsed Laser Deposition)

  • 강정석;강홍성;김재원;이상렬
    • 한국전기전자재료학회논문지
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    • 제17권3호
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    • pp.329-332
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    • 2004
  • ZnO thin films were grown with different plume-substrate angles by pulsed laser deposition (PLD) to control the amount of ablated species arriving on a substrate per laser shot. The angles between plume propagation direction and substrate plane (P-S angle) were 0$^{\circ}$, 45$^{\circ}$ and 90$^{\circ}$. The growth time was changed in order to adjust film thickness. From the XRD pattern exhibiting a dominant (002) and a minor (101) XRD peak of ZnO, all films were found to be well oriented along c-axis. From the AFM image, it was found that the grain size of ZnO thin film was increased, as P-S angle decreased. UV intensity investigated by PL (Photoluminescence) increased as P-S angle decreased.

펄스 레이저 증착법에 의한 DLC 박막 제작 연구 (Study on the fabrication of DLC thin films by pulsed laser deposition)

  • 정영식;은동석;이상렬;정해석;박형호
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1997년도 추계학술대회 논문집 학회본부
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    • pp.285-287
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    • 1997
  • We have deposited hydrogen-free diamond-like carbon (DLC) films by pulsed laser deposition of graphite. Pulsed laser deposition (PLD) can be utilized to generate films with desired properties quite different from those of the starting material. Since DLC films grown by PLD using turbo pump are perpared without hydrogen, they have a higher density and a higher index of refraction than the hydrogenated DLC films. In this study, effects of the substrate temperature and laser energy density on the properties of DLC films were systematically investigated. The structure and properties of the films have been studied by scanning electron microscopy (SEM), Fourier Transform Infrared (FT-IR), X-ray diffraction (XRD), and Raman spectroscopy.

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PLT buffer층의 삽입에 따른 강유전 PZT박막의 특성 향상 (Enhancement of the ferroelectric properties of $Pb(Zr,Ti)O_3$ thin films with $Pb(La,Ti)O_3$ buffers fabricated by pulsed laser deposition)

  • 임성훈;이은선;정현우;이상렬
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.1
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    • pp.67-69
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    • 2004
  • The $Pb(Zr,Ti)O_3$ thin films were fabricated with $Pb(La,Ti)O_3$ buffers in-situ onto $Pt/Ti/SiO_2/Si$ substrates by pulsed laser deposition technique using a Nd:YAG laser with energy density of $2.5J/cm^2$, and deposited for 10 minutes at $550^{\circ}C$ of substrate temperature. And then, the films have been annealed at $550^{\circ}C$ in oxygen ambient pressure. The remanent polarization value is increased by using buffer layers but coercive field of films is slightly increased.

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펄스레이저 증착법에 의한 polyethersulfone 기판상의 ZnO박막의 특성 (The characteristics of ZnO Thin film on PES substrate by pulsed laser deposition)

  • 최영진;이천
    • 전기학회논문지
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    • 제59권1호
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    • pp.113-115
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    • 2010
  • In this study, ZnO films have been grown on PES(polyethersu]fone) substrate by PLD(pulsed laser deposition) and characterized as a change of laser density and substrate temperature. Growing conditions were changed with substrate temperatures ranging from 50 to $200^{\circ}C$ and laser densities ranging from $0.2\sim0.4 J/cm^2$. Optical and structural properties were measured by XRD, SEM, AFM, PL measurement.

PLD(Pulsed Laser Deposition)를 이용한 청색 박막 형광체의 제조 및 특성분석 (Preparation and Characterization of Blue Thin Film Phosphors by Pulsed Laser Deposition)

  • 조상호;정유선;곽종호;손기선
    • 한국세라믹학회지
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    • 제43권12호
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    • pp.852-858
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    • 2006
  • It is well known that $BaMgAl_{10}O_{17}:Eu^{2+}$ (BAM) and $CaMgSi_2O_6:Eu^{2+}$ (CMS) are a highly efficient blue phosphor. However, these phosphors in the form of thin films have not yet been realized clue to technical difficulties. We prepared thin film type BAM and CMS phosphors on quartz glass substrate using a pulsed laser deposition technique. The luminescent and structural properties of thin film phosphors were monitored as a function of key processing parameters such as oxygen partial pressure inside the deposition chamber, deposition time, laser energy density and the type of post-deposition treatments used. Even though we could not obtain single homogenous phases, thin films with large homogenous areas and a high photoluminescence could be produced by optimizing these processing parameters.

저출력 펄스형 Nd:YAG 레이저를 사용한 클래딩에서 클래딩 변수들이 용착효율에 미치는 영향 분석 및 최적화 (Analysis and Optimization of the Cladding Parameters for Improving Deposition Efficiency in Cladding using a Low Power Pulsed Nd:YAG Laser)

  • 이형근
    • Journal of Welding and Joining
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    • 제25권4호
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    • pp.49-57
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    • 2007
  • The optimization of the cladding parameters was studied to maximize the deposition efficiency in the laser cladding using a low power pulsed Nd:YAG laser. STS304 stainless steel plate and Co alloy powder were used as a substrate and powder for cladding, respectively. The six cladding parameters were selected through preliminary experiments and their effects on the deposition efficiency were analyzed statistically. Experiments were designed and carried out using the Taguchi experimental method using a L18 orthogonal array. It was found from the results of analysis of variance(ANOVA) that the powder feed position and powder feed angle had the most significant effects on the deposition efficiency, but the powder feed rate and laser focal position had nearly no effects. The deposition efficiency could be maximized at 0mm of the powder feed position and 50o of the powder feed angle in the experimental range. From this experimental analysis, a new laser cladding head with 20o of the powder feed angle was designed and manufactured. With a new laser cladding head, the highest deposition efficiency of 12.2% could be obtained.