• 제목/요약/키워드: Pulse Repetition Rate

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Low-k 웨이퍼 레이저 인그레이빙 특성에 관한 연구 (Study on low-k wafer engraving processes by using UV pico-second laser)

  • 남기중;문성욱;홍윤석;배한성;곽노흥
    • 한국레이저가공학회:학술대회논문집
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    • 한국레이저가공학회 2006년도 추계학술발표대회 논문집
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    • pp.128-132
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    • 2006
  • Low-k wafer engraving process has been investigated by using UV pico-second laser with high repetition rate. Wavelength and repetition rate of laser used in this study are 355nm and 80MHz, respectively. Main parameters of low-k wafer engraving processes are laser power, work speed, assist gas flow rate, and protective coating to eliminate debris. Results show that engraving qualities of low-k layer by using UV pico-second pulse width and high repetition rate had better kerf edge and higher work speed, compared to one by conventional laser with nano-second pulse width and low repetition rate in the range of kHz. Assist gas and protective coating to eliminate debris gave effects on the quality of engraving edge. Total engraving width and depth are obtained less than $20{\mu}m$ and $10{\mu}m$ at more than 500mm/sec work speed, respectively. We believe that engraving method by using UV pico-second laser with high repetition rate is useful one to give high work speed of laser material process.

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Er:YAG 레이저의 상아질 삭제효과 및 이에 따른 온도변화 (ANALYSIS OF ER:YAG LASER IRRADIATION ON CUTTING EFFICACY AND TEMPERATURE CHANGES OF DENTIN)

  • 임광호;이창섭;이상호
    • 대한소아치과학회지
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    • 제28권1호
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    • pp.32-44
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    • 2001
  • Er : YAG 레이저의 상아질 삭제효과와 이에 따른 온도변화를 평가하고자 발거된 소구치와 대구치로 상아세관내 조직액과 치수내압을 유지할 수 있는 상아질 시편을 제작하고 $2.94{\mu}m$의 pulsed Er : YAG 레이저(SDL-300EN, 삼성전자, 한국)를 handpiece형의 전달계를 이용한 비접촉식 방법으로 조사세기, pulse repetition rate, 조사시간, 물 분사여부 등의 조사조건을 달리하여 상아질 면에 조사하고 이때의 삭제량과 상아질 두께에 따른 온도변화, 그리고 삭제형태를 조사, 분석하여 다음과 같은 결과를 얻었다. 1. 레이저 조사세기와 pulse repetition rate가 클수록, 그리고 조사시간이 길수록 삭제량이 증가되었다(P<0.05). 그러나 5Hz의 pulse repetition rate에서는 조사시간에 따른 삭제량의 차이가 크지 않았다. 2. 삭제된 와동은 비교적 변연부가 명확하고 깨끗하였으며 와동의 바닥은 원추형이였으며 부드러웠다. 조사세기와 pulse repetition rate가 클수록, 그리고 조사시간이 길수록 와동의 상부 직경이 넓었으며 150mJ, 5Hz, 5sec에서는 와동변연부에 약간의 crack이 관찰되었다. 3. 레이저 조사세기와 pulse repetition rate가 클수록, 그리고 조사시간이 길수록 상아질의 온도가 더 많이 상승하였으며 시편의 두께가 두꺼울수록 온도상승이 적었다(P<0.05). 4. 물을 분사하며 레이저를 조사할 경우 물을 분사하지 않은 경우에 비해 온도상승이 매우 감소되었다(P<0.05). 이상의 결과를 종합해 볼 때 Er : YAG 레이저를 상아질에 조사할 경우 와동의 형태가 명확하고 물을 분사할 경우 온도상승이 많이 유발되지 않으므로써 삭제력이 좋고 치수에 유해작용이 없는 것으로 생각된다. 향후 임상에서 치질을 제거하는데 효율적으로 이용되기 위해서는 더욱 크고 이에 따른 온도상승을 최소로 할 수 있는 조사 시스템 및 방법에 대한 연구가 계속적으로 이루어져야 할 것으로 사료된다.

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제모용 Long-Pulse Alexandrite Laser의 출력 특성 연구 (A study on the output characteristics of Long-pulse Alexandrite laser for hair removal)

  • 최진영;김상길;김태균;박종웅;송건주;정용호;홍정환;김희제
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2003년도 하계학술대회 논문집 C
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    • pp.1729-1731
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    • 2003
  • Recently many solid-state laser systems were widely used in the medical applications. So it is necessary to study various optimal laser parameters for adopting new medical treatments. Alexandrite laser using switching mode power supply has designed and experimented to adjust a pulse repetition rate by PIC one-chip microprocessor. The fundamental results have been obtained during the first financial year in 2002. We will be able to find out the optimal hair removal characteristics by the repetitive experiments of Alexandrite laser as the parameters such as pulse repetition rate, pulse width, and pulse energy etc.

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펄스형 Nd:YAG 레이저의 출력 에너지 및 펄스 반복률 제어에 관한 연구 (A Study on the control of output power and pulse repetition rate in pulsed Nd:YAG laser)

  • 박구령;김병균;문동성;홍정환;김휘영;강욱;김희제;조정수
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2000년도 영호남학술대회 논문집
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    • pp.74-77
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    • 2000
  • A pulsed Nd:YAG laser has been used in a wide variety of fields : measuring, material processing and so on. In a material processing, it is very important to control the laser energy density. A pulse repetition rate and a pulse width are regarded as the most dominant factors to control the energy density of laser beam. In this study, pulsed Nd:YAG laser system was designed and manufactured to control the laser output usefully and easily. This system adopted the sequential charge and discharge circuit is controlled by 80196 micro- processor. As a result, it is found that laser output is controlled minutely by changing laser input and pulse repetition rate, and usefully by using 80196 microprocessor.

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515nm 피코초 레이저를 이용한 구리 어블레이션 공정의 최대 가공율에 대한 이론적 분석 (Theoretical analysis on the maximum volume ablation rate for copper ablation with a 515nm picosecond laser)

  • 신동식;조용권;손현기;서정
    • 한국레이저가공학회지
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    • 제16권2호
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    • pp.1-6
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    • 2013
  • Picosecond lasers are a very effective tool for micromachining metals, especially when high accuracy, high surface roughness and no heat affected zone are required. However, low productivity has been a limit to broadening the spectrum of their industrial applications. Recently it was reported that in the micromachining of copper with a 1064nm picosecond laser, there exist the optimal pulse energy and repetition rate to achieve the maximum volume ablation rate. In this paper, we used a 515nm picosecond laser, which is more efficient for micromachining copper in terms of laser energy absorption, to obtain its optimal pulse energy and repetition rate. Theoretical analysis based on the experimental data on copper ablation showed that using a 515nm picosecond laser instead of a 1064nm picosecond laser is more favorable in that the calculated threshold fluence is 75% lower and optical penetration depth is 50% deeper.

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High Repetition Rate Optical Pulse Multiplication with Cascaded Long-period Fiber Gratings

  • Lee, Byeang-Ha;Eom, Tae-Joong;Kim, Sun-Jong;Park, Chang-Soo
    • Journal of the Optical Society of Korea
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    • 제8권1호
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    • pp.29-33
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    • 2004
  • We propose and demonstrate a novel optical pulse multiplier applicable to OTDM (Optical Time Division Multiplexing) systems using cascaded long-period fiber gratings. We have exploited the fact that each mode in a fiber has a different propagation constant to obtain time delays among optical pulses. The proposed scheme could realize high-frequency optical pulse multiplication for optical short pulse trains. We have successfully implemented two, four, and eight times multiplications with the maximum repetition rate of 416.7 ㎓. The obtained pulse delays are well matched with the simulated ones.

병렬 메쉬 및 교번 충.방전 방식에 의한 펄스형 Nd:YAG 레이저의 고반복 동작특성에 관한 연구 (The high repetition operating characteristics of pulsed Nd:YAG laser by parallel mesh and alternating charge-discharge system)

  • 박구렬;김병균;홍정환;김휘영;김희제;조정수
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1999년도 추계학술대회 논문집 학회본부 C
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    • pp.1060-1062
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    • 1999
  • Pulsed Nd:YAG laser is used widely for materials processing and instrumentation. It is very important to control the laser energy density in materials processing by a pulsed Nd:YAG laser. A pulse repetition rate and a pulse width are regarded as the most dominant factors to control the energy density of laser beam. In this study, the alternating charge-discharge system was designed to adjust a pulse repetition rate. And the parallel mesh is added to increase laser output power. This system is controlled by one chip microprocessor and allows to replace an expensive condenser for high frequency to a cheap condenser for low frequency. In addition, we have investigated the current pulse shape of flashlamp and the operating characteristics of a pulsed Nd:YAG laser. As a result, it is found that the laser output of the power supply using the parallel mesh and the alternating charge-discharge system is not less than that of typical power supply. As the pulse repetition rate rises from 10pps to 110pps by the step of 20pps at 1000V and 1200V, it is found that the laser efficiency decreases but the laser output power increases about 5W at each step.

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펄스형 Nd:YAG 레이저의 교번 충.방전 방식에 의한 고반복 동작특성 (The high repetition operating characteristics of pulsed Nd:YAG laser by alternating charge-discharge system)

  • 김휘영;박구렬;김병균;홍정환;강욱;김희제
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1999년도 하계학술대회 논문집 E
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    • pp.2204-2206
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    • 1999
  • Pulsed Nd:YAC laser is used widely for materials processing and instrumentation. It is very important to control the laser energy density in materials processing by a pulsed Nd:YAG laser. A pulse repetition rate and a pulse width are regarded as the most dominant factors to control the energy density of laser beam. In this study, the alternating charge-discharge system was designed to adjust a pulse repetition rate. This system is controlled by one chip microprocessor and allows to replace an expensive condenser for high frequency to a cheap condenser for low frequency. In addition. we have investigated the current pulse shape of flashlamp and the operating characteristics of a pulsed Nd:YAG laser. As a result, it is found that the laser output of the power supply using the alternating charge-discharge system is not less than that of typical power supply. As the pulse repetition rate rises from 30pps to 120pps by the step of 30pps at 1200V, it is found that the laser efficiency decreases but the laser output power increases about 6W at each step.

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Repetition-Rate Multiplication of a 10-GHz Mode-Locked Laser via Coding the Spectral Intensity and Phase

  • Kim, Ik Hwan;Cho, Il Hwan;Hong, Sang Jeen;Seo, Dong-Sun
    • Journal of the Optical Society of Korea
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    • 제18권5호
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    • pp.611-615
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    • 2014
  • We report high-speed pulse train generation from a relatively low-speed 10-GHz mode-locked laser by means of line-by-line spectral coding. To increase the pulse repetition rate multiplication (RRM) factor, we combine coding schemes for both spectral intensity and phase by placing a simple mask at the coder focal plane. The resulting RRM factor, determined by multiplying the RRM factors of the individual coding schemes, rises as high as 16. To verify the generated pulses, the optical spectra and autocorrelation traces are examined.