• Title/Summary/Keyword: Process-induced particles

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A novel surface cleaning process using laser-induced breakdown of liquid (액체의 레이저 유기 절연파괴를 이용한 신개념 표면 세정 공정)

  • Jang, Deok-Suk;Lee, Jong-Myoung;Kim, Dong-Sik
    • Laser Solutions
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    • v.12 no.4
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    • pp.17-25
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    • 2009
  • The surface cleaning method based on the laser-induced breakdown (LIB) of gas and subsequent plasma and shock wave generation can remove small particles from solid surfaces. In the laser shock cleaning (LSC) process, a high-power laser pulse induces optical breakdown of the ambient gas above the solid surface covered with contaminant particles. The subsequently created shock wave followed by a high-speed flow stream detaches the particles. In this work, a novel surface cleaning process using laser-induced breakdown of liquid is introduced and demonstrated. LIB of a micro liquid jet increases the shock wave intensity and thus removes smaller particle than the conventional LSC method. Experiments demonstrate that the cleaning force and cleaning efficiency are also increased significantly by this method.

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Development of Aerosol-LIBS (Laser Induced Breakdown Spectroscopy) for Real-time Monitoring of Process-induced Particles (공정 중 발생 오염입자 실시간 모니터링을 위한 에어로졸-레이저 유도 플라즈마 분광분석 시스템 개발)

  • Kim, Gibaek;Kim, Kyoungtae;Maeng, Hyunok;Lee, Hae Bum;Park, Kihong
    • Particle and aerosol research
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    • v.12 no.3
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    • pp.57-63
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    • 2016
  • The laser-induced breakdown spectroscopy (LIBS) has been used for rapid detection of elemental compositions of various materials in multi-media (solid, liquid, gas, and aerosols). In this study, the aerosol-LIBS has been developed for real-time monitoring of process-induced particles produced during the semiconductor manufacturing. The developed aerosol-LIBS mainly consists of laser, optics, spectrometer, and aerosol chamber. A new aerosol chamber was constructed for the aerosol-LIBS to be applied for various semiconductor manufacturing process, including exhaust tubes, and low pressure and high temperature chamber. The aerosol-LIBS was evaluated by using laboratory generated aerosols for detection of various elements. As a result, P, Fe, Mg, Cu, Co, Ni, Ca, Na, and K emission lines were successfully detected by the aerosol-LIBS. Further evaluation of the aerosol-LIBS is being conducted.

A Study on the Preparation of a Linear Low Density Polyethylene particles by Thermally Induced Phase Separation (열유도 상분리에 의한 선형 저밀도 폴리에틸렌 입자 제조에 관한 연구)

  • Park, Keun-Ho;Jang, Young-Min
    • Journal of the Korean Applied Science and Technology
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    • v.28 no.4
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    • pp.386-392
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    • 2011
  • We are crystallized to the linear low density polyethylene(LLDPE) particles by a thermally induced phase separation(TIPS). TIPS process based on the phase separation mechanism was performed for the LLDPE system which undergoes liquid-solid phase separation. The linear low density polyethylene particle formation occurred by the nucleation and growth mechanism in the metastable region. Although the growth rates depended on the experimental conditions such as the polymer concentration and temperature, the particles were larger when the polymer concentration was higher or temperature was higher. The particles were observed by SEM. The LLDPE particle size distribution became broader when the polymer concentration was higher.

A Study on the Crystallization of Low Density Polyethylene Microparticles in $n$-Dodecanol Solution ($n$-Dodecanol 용액에서 저밀도폴리에틸렌 마이크로 입자 결정화에 관한 연구)

  • Park, Keun-Ho;Jang, Young-Min
    • Journal of the Korean Applied Science and Technology
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    • v.28 no.3
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    • pp.306-312
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    • 2011
  • In this study, we are crystallized to the low density polyethylene (LDPE) micro-particles in $n$-dodecanol solution by thermally induced phase separation(TIPS) method. The Low density polyethylene micro-particles is used in a wide variety of polymer coatings and industrial application. The utility of that for a particular application depends on a number of factors such as the particle size and distribution, and chemical composition of the materials. However, there are still needs for new methods of preparation which will provide the structure with unique sizes. The widely used processes for micro-size particles are crystallization method and thermally induced phase separation. TIPS process based on the phase separation mechanism was performed for the LDPE system which undergoes liquid-solid phase separation. Effects of various operating parameters were examined on the structure variation of the particles. Professionality, take-up speed and crystallization rate depended on temperature and concentration of polymer in solution.

The evolution characteristics of incipient soot particles in ethylene/air inverse diffusion flame (에틸렌/공기 역확산 화염에서의 초기 매연 입자의 성장 특성)

  • Oh, Kwang-Chul;Lee, Uen-Do;Shin, Hyun-Dong;Lee, Eui-Ju
    • Journal of the Korean Society of Combustion
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    • v.9 no.2
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    • pp.38-44
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    • 2004
  • The evolution of incipient soot particles has been examined by high resolution electron microscopy (HRTEM) and elemental analyzer in ethylene-air inverse diffusion flames. Laser Induced Incandescence(LII) and laser scattering methods were introduced for examining the soot volume fraction and morphological properties in combustion generated soot qualitatively. Soot particles, collected by thermophoretic sampling, were analyzed by using HRTEM to examine the nano structure of precursor particles. HRTEM micrographs apparently reveal a transformation of condensed phase of semitransparent tar-like material into precursor particles with relatively distinct boundary and crystalline which looks like regular layer structures. During this evolution histories, C/H analysis was also performed to estimate the chemical evolution of precursor particles. The changes of C/H ratio of soot particles with respect to residence time can be divided into two parts: one is a very slowly increasing regime where tar-like materials are transformed into precursor particles (inception process) the other is an increasing region with constant rate where surface growth affects the increase of C/H ratio dominantly (surface growth process). These results provide a clear picture of a transition to mature soot from precursor materials.

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Formation of Isotropic Carbon Matrix in Carbon/Carbon Composites Derived from Pitch

  • Ahn, Chong-Jin;Park, In-Seo;Joo, Hyeok-Jong
    • Carbon letters
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    • v.11 no.4
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    • pp.304-310
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    • 2010
  • To manufacture a carbon/carbon composite the coal tar pitch was used as the matrix precursor and the PAN (polyacrylonitrile)-based carbon fiber was used as the reinforcing material to weave 3-directional preform. For pressure carbonization HIP equipment was used to produce a maximum temperature of $1000^{\circ}C$ and a maximum pressure of 100 MPa. The carbonization was induced by altering the dwell temperature between $250^{\circ}C$ and $420^{\circ}C$, which is an ideal temperature for the moderate growth of the mesophase nucleus that forms within the molten pitch during the pressure carbonization process. The application of high pressure during the carbonization process inhibits the mesophase growth and leads to the formation of spherical carbon particles that are approximately 30 nm in size. Most particles were spherical, but some particles were irregularly shaped. The spread of the carbon particles was larger on the surface of the carbon fiber than in the interior of the matrix pocket.

Soot Primary Particle Size Measurement in a Ethylene Diffusion Flame Using Time-Resolved Laser-Induced Incandescence (2차원 시분해 레이저 유도 백열법을 이용한 에틸렌 확산 화염에서의 매연 입자 크기 측정)

  • Shon, Moo-Kang;Moon, Gun-Feel;Kim, Gyu-Bo;Lee, Jong-Ho;Jeong, Dong-Soo;Jeon, Chung-Hwan;Chang, Young-June
    • Proceedings of the KSME Conference
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    • 2004.11a
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    • pp.1140-1145
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    • 2004
  • Laser-induced incandescence (LII) is introduced as a valuable tool for the characterization of nanoparticles in flame environments. This technique is based on the heating of the particles by a short laser pulse and the subsequent detection of the thermal radiation. It has been applied successfully for the investigation of soot in different fields of application. The evaluation of the temporal decay of the laser-induced incandescence (LII) signal from soot particles is introduced as a technique to obtain two-dimensional distributions of particle sizes and is applied to a laminar diffusion flame. This novel approach to soot sizing exhibits several theoretical and technical advantages compared with the established combination of elastic scattering and LII, especially as it yields absolute sizes of primary particles without requiring calibration. With this technique a spatially resolved 2-D measurement of soot primary particle sizes is feasible in a combination process form the ratio of emission signals obtained at two delay times after a laser pulse, as the cooling behavior is characteristic of particle size.

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A Study on Laser Induced Fluorescence and Coagulation in Particle Transport Mode (입자 이동 방식에서 Laser Induced Fluorescence와 뭉침에 관한 연구)

  • Kim, Ki-Jun
    • Journal of the Korean Applied Science and Technology
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    • v.23 no.4
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    • pp.340-346
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    • 2006
  • The influences of fluorescence, scattering, and flocculation in turbid material by light scattering were interpreted for the scattered fluorescence intensity and wavelength, it has been studied the molecular properties by the spectroscopy of laser induced fluorescence (LIF). The effects of optical properties in scattering media have been found by the optical $parameters({\mu}_s,\;{\mu}_a,\;{\mu}_t)$. Flocculation is an important step in many solid-liquid separation processes and is widely used. When two particles approach each other, interactions of several colloid particles can come into play which may have major effect on the flocculation and LIF process, The value of scattering coefficient ${\mu}_s$ is large by means of the increasing particles of scatterer it has been found that the slope decays exponentially as a function of distance from laser source to detector. It may also aid in designing the best model for oil chemistry, biopharmaceutical products, laser medicine and application of medical engineering on LIF and coagulation in particle transport mode.

Numerical Investigation on Soot Primary Particle Size Using Time Resolved Laser Induced Incandescence (TIRE-LII) (TIRE-LII 기법을 이용한 매연 입자 크기에 관한 수치적 연구)

  • Kim, Jeong-Yong;Lee, Jong-Ho;Jeong, Dong-Soo;Jeon, Chung-Hwan;Chang, Young-June
    • Proceedings of the KSME Conference
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    • 2004.11a
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    • pp.1152-1157
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    • 2004
  • Temporal behavior of the laser induced incandescence (LII) signal is often used for soot particle sizing, which is possible because the cooling behavior of a laser heated particle is dependent on the particle size. In present study, LII signals of soot particles are modeled using two non-linear coupled differential equations deduced from the energy- and mass-balance of the process. The objective of this study is to see the effects of particle size, laser fluence on soot temperature characteristics and cooling behavior. Together with this, we focus on validating our simulation code by comparing with other previous results. Results of normalized LII signals obtained from various laser fluence conditions showed a good agreement with that of Dalzell and Sarofim's. It could be found that small particles cool faster at a constant laser fluence. And it also could be observed that vaporization is dominant process of heat loss during first 100ns after laser pulse, then heat conduction played most important role while thermal radiation had little influence all the time.

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Hydrophobic Surface Treatment with Anisotropic Characteristics Using Laser Selective Deposition (레이저 선택적 증착을 통한 이방특성의 소수성 표면처리)

  • Kim, Ji-Hun;Kwon, Ye-Ji;Yang, Hoon-Seok;Kim, Joohan
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.19 no.11
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    • pp.109-115
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    • 2020
  • Surfaces with various roughnesses were produced through laser processing, and the anisotropy and hydrophobicity of the surfaces were examined in the context of the microstructures. The fine particles transferred to the glass surface exhibited different sizes, and the roughness increased. Due to the change in the roughness, the liquid could not penetrate the space between the fine particles, and it was thus exposed to the air. We analyzed this phenomenon using the combined Wenzel and Cassie-Baxter models. Excessive fine particle formation on the substrate tended to increase the roughness and surface energy. The silver-glass-air contact analysis could clarify the mechanism of the reduction of the contact angle and differences in the metastable and stable states when the particles did not completely cover the glass substrate. The formation of microstructures with fine particles through the laser selective deposition led to the generation of an anisotropic surface as the water droplets diffused toward the glass substrate with a relatively high surface energy level.