• Title/Summary/Keyword: Process fault

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Feature Based Decision Tree Model for Fault Detection and Classification of Semiconductor Process (반도체 공정의 이상 탐지와 분류를 위한 특징 기반 의사결정 트리)

  • Son, Ji-Hun;Ko, Jong-Myoung;Kim, Chang-Ouk
    • IE interfaces
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    • v.22 no.2
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    • pp.126-134
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    • 2009
  • As product quality and yield are essential factors in semiconductor manufacturing, monitoring the main manufacturing steps is a critical task. For the purpose, FDC(Fault detection and classification) is used for diagnosing fault states in the processes by monitoring data stream collected by equipment sensors. This paper proposes an FDC model based on decision tree which provides if-then classification rules for causal analysis of the processing results. Unlike previous decision tree approaches, we reflect the structural aspect of the data stream to FDC. For this, we segment the data stream into multiple subregions, define structural features for each subregion, and select the features which have high relevance to results of the process and low redundancy to other features. As the result, we can construct simple, but highly accurate FDC model. Experiments using the data stream collected from etching process show that the proposed method is able to classify normal/abnormal states with high accuracy.

Run-to-Run Fault Detection of Reactive Ion Etching Using Support Vector Machine (Support Vector Machine을 이용한 Reactive ion Etching의 Run-to-Run 오류검출 및 분석)

  • Park Young-Kook;Hong Sang-Jeen;Han Seung-Soo
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.10 no.5
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    • pp.962-969
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    • 2006
  • To address the importance of the process fault detection for productivity, support vector machines (SVMs) is employed to assist the decision to determine process faults in real-time. The reactive ion etching (RIE) tool data acquired from a production line consist of 59 variables, and each of them consists of 10 data points per second. Principal component analysis (PCA) is first performed to accommodate for real-time data processing by reducing the dimensionality or the data. SVMs for eleven steps or etching m are established with data acquired from baseline runs, and they are further verified with the data from controlled (acceptable) and perturbed (unacceptable) runs. Then, each SVM is further utilized for the fault detection purpose utilizing control limits which is well understood in statistical process control chart. Utilizing SVMs, fault detection of reactive ion etching process is demonstrated with zero false alarm rate of the controlled runs on a run to run basis.

A software reliability model with a Burr Type III fault detection rate function

  • Song, Kwang Yoon;Chang, In Hong;Choi, Min Su
    • International Journal of Reliability and Applications
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    • v.17 no.2
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    • pp.149-158
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    • 2016
  • We are enjoying a very comfortable life thanks to modern civilization, however, comfort is not guaranteed to us. Development of software system is a difficult and complex process. Therefore, the main focus of software development is on improving the reliability and stability of a software system. We have become aware of the importance of developing software reliability models and have begun to develop software reliability models. NHPP software reliability models have been developed through the fault intensity rate function and the mean value functions within a controlled testing environment to estimate reliability metrics such as the number of residual faults, failure rate, and reliability of the software. In this paper, we present a new NHPP software reliability model with Burr Type III fault detection rate, and present the goodness-of-fit of the fault detection rate software reliability model and other NHPP models based on two datasets of software testing data. The results show that the proposed model fits significantly better than other NHPP software reliability models.

Fabrication and fault test of 12 kVA class BSCCO SFCL element (12 kVA급 BSCCO 한류소자 제작 및 특성 실험)

  • Oh, S.Y.;Yim, S.W.;Kim, H.R.;Hyun, O.B.;Jang, G.E.
    • Progress in Superconductivity and Cryogenics
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    • v.10 no.1
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    • pp.24-27
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    • 2008
  • For the development of superconducting fault current limiters(SFCLs) having large current capacity, we fabricated an SFCL element that consists of Bi-2212 superconductor and Cu-Ni alloy tubes. First, Ag was plated on the surface of the Bi-2212 for the enhancement of soldering process. On the Ag-plated Bi-2212 tube, a Cu-Ni alloy tube was soldered using optimized solders and soldering conditions. The BSCCO/Cu-Ni composite was processed mechanically to have a helical shape for the improvement of the SFCL characteristics. The total current path of the SFCL element was 1330 mm long with 12 turns, and had critical current of 340 A at 77 K. Finally, we carried out the fault test using the fabricated SFCL element. It showed successful current limiting performance under the fault condition of 50 $V_{rms}$ and 5.5 kA. From the results, the rated voltage of the SFCL element was decided to be 0.4 V/cm, and the power capacity was 12 kVA at 77 K. The fabrication process of the SFCL and the fault test results will be presented.

Development of Intelligent Fault Diagnosis System for CIM (CIM 구축을 위한 지능형 고장진단 시스템 개발)

  • Bae, Yong-Hwan;Oh, Sang-Yeob
    • Journal of the Korean Society of Industry Convergence
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    • v.7 no.2
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    • pp.199-205
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    • 2004
  • This paper describes the fault diagnosis method to order to construct CIM in complex system with hierarchical structure similar to human body structure. Complex system is divided into unit, item and component. For diagnosing this hierarchical complex system, it is necessary to implement a special neural network. Fault diagnosis system can forecast faults in a system and decide from the signal information of current machine state. Comparing with other diagnosis system for a single fault, the developed system deals with multiple fault diagnosis, comprising hierarchical neural network (HNN). HNN consists of four level neural network, i.e. first is fault symptom classification and second fault diagnosis for item, third is symptom classification and forth fault diagnosis for component. UNIX IPC is used for implementing HNN with multitasking and message transfer between processes in SUN workstation with X-Windows (Motif). We tested HNN at four units, seven items per unit, seven components per item in a complex system. Each one neural network represents a separate process in UNIX operating system, information exchanging and cooperating between each neural network was done by message queue.

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Advanced Algorithm for IED of Stator Winding Protection of Generator System (발전기시스템의 고정자보호 IED를 위한 개선된 알고리즘)

  • Park, Chul-Won
    • The Transactions of the Korean Institute of Electrical Engineers P
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    • v.57 no.2
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    • pp.91-95
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    • 2008
  • The large AC generator fault may lead to large impacts or perturbations in power system. The generator protection control systems in Korea have been imported and operated through a turn-key from overseas entirely. Therefore a study of the generator protection field has in urgent need for a stable operation of the imported goods. In present, the algorithm using the current ratio differential relaying based DFT for stator winding protection or a fault detection had been applied that of internal fault protection of a generator. the DFT used for the analysis of transient state signal conventionally had defects losing a time information in the course of transforming a target signal to frequency domain. In this paper, the discrete wavelet transform (DWT) was applied a fault detection of the generator being superior to a transient state signal analysis and being easy to real time realization. The fault signals after executing a terminal fault modeling collect using a MATLAB package, and calculate the wavelet coefficients through the process of a muiti-level decomposition (MLD). The proposed algorithm for a fault detection using the Daubechies WT (wavelet transform) was executed with a C language and the commend line function for the real time realization after analyzing MATLAB's graphical interface. The advanced technique had improved faster a speed of fault discrimination than a conventional DFR based on DFT.

Integrating Fuzzy based Fault diagnosis with Constrained Model Predictive Control for Industrial Applications

  • Mani, Geetha;Sivaraman, Natarajan
    • Journal of Electrical Engineering and Technology
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    • v.12 no.2
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    • pp.886-889
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    • 2017
  • An active Fault Tolerant Model Predictive Control (FTMPC) using Fuzzy scheduler is developed. Fault tolerant Control (FTC) system stages are broadly classified into two namely Fault Detection and Isolation (FDI) and fault accommodation. Basically, the faults are identified by means of state estimation techniques. Then using the decision based approach it is isolated. This is usually performed using soft computing techniques. Fuzzy Decision Making (FDM) system classifies the faults. After identification and classification of the faults, the model is selected by using the information obtained from FDI. Then this model is fed into FTC in the form of MPC scheme by Takagi-Sugeno Fuzzy scheduler. The Fault tolerance is performed by switching the appropriate model for each identified faults. Thus by incorporating the fuzzy scheduled based FTC it becomes more efficient. The system will be thereafter able to detect the faults, isolate it and also able to accommodate the faults in the sensors and actuators of the Continuous Stirred Tank Reactor (CSTR) process while the conventional MPC does not have the ability to perform it.

Fault Diagnosis for a System Using Classified Pattern and Neural Networks (분류패턴과 신경망을 이용한 시스템의 고장진단)

  • Lee, Jin-Ha;Park, Seong-Wook;Seo, Bo-Hyuk
    • The Transactions of the Korean Institute of Electrical Engineers D
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    • v.49 no.12
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    • pp.643-650
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    • 2000
  • Using neural network approach, the diagnosis of faults in industrial process that requires observing multiple data simultaneously are studied. Two-stage diagnosis is proposed to analyze system faults. By using neural network, the first stage detects the dynamic trend of each normalized date patterns by comparing a proposed pattern. Instead of using neural network, the difference between stored fault pattern and real time data is used for fault diagnosis in the second stage. This method reduces the amount of calculation and saves storing space. Also, we dealt with unknown faults by normalizing the data and calculating the difference between the value of steady state and the data in case of fault. A model of tank reactor is given to verify that the proposed method is useful and effective to noise.

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Development of a Fault-tolerant Intelligent Monitoring and Control System in Machining (절삭공정에서 Fault-tolerance 기능을 갖는 지능형 감시 및 제어시스템의 개발)

  • Choi, Gi-Heung
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.21 no.3
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    • pp.470-476
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    • 1997
  • The dynamic characteristics of industrial processes frequently cause an abnormal situation which is undesirable in terms of the productivity and the safety of workers. The goal of fault-tolerance is to continue performing certain activities even after the failure of some system cononents. A fault-tolerant intelligent monitoring and control system which is robust under disturbances is proposed in this paper. Specifically, the fault-tolerant monitoring scheme proposed consists of two process models and the inference module to preserve such a robustness. The results of turning experiments demonstrate the effectiveness of the fault-tolerant scheme in the presence of built-up edge.

Model Based Fault Detection for Advanced ESC System (지능형 ESC 시스템을 위한 모델 기반 결함검출)

  • Kim, Byeong-Woo;Hur, Jin
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.59 no.12
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    • pp.2306-2313
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    • 2010
  • This paper describes a model based fault detection algorithm for an Advanced ESC System which consists of Hydraulic Control Unit (HCU) with built-in wheel pressure sensors. Advanced ESC System can be used for various value-added functions such as Stop & Go Function and Regenerative Brake Function. Therefore, HCU must have a reliable fault detection. Due to the huge amount of sensor signals, existing specific sensor based fault detection of HCU cannot guarantee the safety of vehicle. However, proposed algorithm dose not require the sensors. When model based fault detection algorithm detects severe failures of the HCU, it warns the driver in advance to prevent accidents due to the failures. For this purpose, a mathematical model is developed and validated in comparison to actual data. Simulation results and data acquired from an actual system are compared with each other to obtain the information needed for the fault detection process.